TW200707726A - Semiconductor device including shallow trench isolation (STI) regions with a superlattice therebetween - Google Patents

Semiconductor device including shallow trench isolation (STI) regions with a superlattice therebetween

Info

Publication number
TW200707726A
TW200707726A TW095122066A TW95122066A TW200707726A TW 200707726 A TW200707726 A TW 200707726A TW 095122066 A TW095122066 A TW 095122066A TW 95122066 A TW95122066 A TW 95122066A TW 200707726 A TW200707726 A TW 200707726A
Authority
TW
Taiwan
Prior art keywords
regions
sti
semiconductor device
superlattice
trench isolation
Prior art date
Application number
TW095122066A
Other languages
Chinese (zh)
Other versions
TWI311374B (en
Inventor
Kalipatnam Vivek Rao
Original Assignee
Mears R J Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mears R J Llc filed Critical Mears R J Llc
Publication of TW200707726A publication Critical patent/TW200707726A/en
Application granted granted Critical
Publication of TWI311374B publication Critical patent/TWI311374B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823878—Complementary field-effect transistors, e.g. CMOS isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure

Abstract

A semiconductor device may include a semiconductor substrate and a plurality of shallow trench isolation (STI) regions in the substrate. More particularly, at least some of the STI regions may include divots therein. The semiconductor device may further include a respective superlattice between adjacent STI regions, and respective non-monocrystalline stringers in the divots.
TW95122066A 2005-06-20 2006-06-20 Semiconductor device including shallow trench isolation (sti) regions with a superlattice therebetween TWI311374B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69210105P 2005-06-20 2005-06-20

Publications (2)

Publication Number Publication Date
TW200707726A true TW200707726A (en) 2007-02-16
TWI311374B TWI311374B (en) 2009-06-21

Family

ID=37192316

Family Applications (2)

Application Number Title Priority Date Filing Date
TW95122066A TWI311374B (en) 2005-06-20 2006-06-20 Semiconductor device including shallow trench isolation (sti) regions with a superlattice therebetween
TW95122068A TWI308376B (en) 2005-06-20 2006-06-20 Method for making a semiconductor device including shallow trench isolation (sti) regions with a superlattice therebetween

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW95122068A TWI308376B (en) 2005-06-20 2006-06-20 Method for making a semiconductor device including shallow trench isolation (sti) regions with a superlattice therebetween

Country Status (7)

Country Link
EP (1) EP1900021A1 (en)
JP (1) JP2009529780A (en)
CN (1) CN101371349B (en)
AU (1) AU2006262416A1 (en)
CA (1) CA2612213A1 (en)
TW (2) TWI311374B (en)
WO (1) WO2007002043A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9899479B2 (en) 2015-05-15 2018-02-20 Atomera Incorporated Semiconductor devices with superlattice layers providing halo implant peak confinement and related methods

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7943450B2 (en) 2007-09-04 2011-05-17 Texas Instruments Incorporated Gated resonant tunneling diode
US7910918B2 (en) 2007-09-04 2011-03-22 Texas Instruments Incorporated Gated resonant tunneling diode
CN111247640B (en) * 2017-08-18 2023-11-03 阿托梅拉公司 Semiconductor device and method including non-single crystal stringers adjacent to superlattice STI interfaces

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1174522A (en) * 1996-12-19 1999-03-16 Texas Instr Inc <Ti> Method and device for forming planar field effect transistor with source and drain on insulator
CN1395316A (en) * 2001-07-04 2003-02-05 松下电器产业株式会社 Semiconductor device and its manufacturing method
US6703271B2 (en) * 2001-11-30 2004-03-09 Taiwan Semiconductor Manufacturing Company Complementary metal oxide semiconductor transistor technology using selective epitaxy of a strained silicon germanium layer
US6583000B1 (en) * 2002-02-07 2003-06-24 Sharp Laboratories Of America, Inc. Process integration of Si1-xGex CMOS with Si1-xGex relaxation after STI formation
JP4750342B2 (en) * 2002-07-03 2011-08-17 ルネサスエレクトロニクス株式会社 MOS-FET, manufacturing method thereof, and semiconductor device
JP2004047844A (en) * 2002-07-15 2004-02-12 Renesas Technology Corp Semiconductor device and its manufacturing method
US6846720B2 (en) * 2003-06-18 2005-01-25 Agency For Science, Technology And Research Method to reduce junction leakage current in strained silicon on silicon-germanium devices
WO2005018005A1 (en) * 2003-06-26 2005-02-24 Rj Mears, Llc Semiconductor device including mosfet having band-engineered superlattice
US6958486B2 (en) * 2003-06-26 2005-10-25 Rj Mears, Llc Semiconductor device including band-engineered superlattice
US20050167777A1 (en) * 2004-01-30 2005-08-04 Taiwan Semiconductor Manufacturing Company, Ltd. Microelectronic device with active layer bumper

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9899479B2 (en) 2015-05-15 2018-02-20 Atomera Incorporated Semiconductor devices with superlattice layers providing halo implant peak confinement and related methods
TWI621264B (en) * 2015-05-15 2018-04-11 安托梅拉公司 Semiconductor devices with superlattice layers providing halo implant peak confinement and related methods

Also Published As

Publication number Publication date
JP2009529780A (en) 2009-08-20
WO2007002043A9 (en) 2007-05-24
EP1900021A1 (en) 2008-03-19
TWI308376B (en) 2009-04-01
TW200717701A (en) 2007-05-01
CA2612213A1 (en) 2007-01-04
AU2006262416A1 (en) 2007-01-04
WO2007002043A1 (en) 2007-01-04
CN101371349B (en) 2011-04-13
TWI311374B (en) 2009-06-21
CN101371349A (en) 2009-02-18

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