TW200706708A - Method of patterning ultra-small structures - Google Patents

Method of patterning ultra-small structures

Info

Publication number
TW200706708A
TW200706708A TW095122488A TW95122488A TW200706708A TW 200706708 A TW200706708 A TW 200706708A TW 095122488 A TW095122488 A TW 095122488A TW 95122488 A TW95122488 A TW 95122488A TW 200706708 A TW200706708 A TW 200706708A
Authority
TW
Taiwan
Prior art keywords
small structures
ultra
structures
patterning ultra
patterning
Prior art date
Application number
TW095122488A
Other languages
Chinese (zh)
Inventor
Jonathan Gorrell
Mark Davidson
Andres Trucco
Jean Tokarz
Original Assignee
Virgin Islands Microsystems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Virgin Islands Microsystems filed Critical Virgin Islands Microsystems
Publication of TW200706708A publication Critical patent/TW200706708A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/022—Electroplating of selected surface areas using masking means
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/623—Porosity of the layers

Abstract

We describe a process to produce ultra-small structures of between ones of manometers to hundreds of micrometers in size, in which the structures are compact, nonporous and exhibit smooth vertical surfaces. Such processing is accomplished with pulsed electroplating techniques using ultra-short pulses in a controlled and predictable manner.
TW095122488A 2005-08-15 2006-06-22 Method of patterning ultra-small structures TW200706708A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/203,407 US20070034518A1 (en) 2005-08-15 2005-08-15 Method of patterning ultra-small structures

Publications (1)

Publication Number Publication Date
TW200706708A true TW200706708A (en) 2007-02-16

Family

ID=37741602

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095122488A TW200706708A (en) 2005-08-15 2006-06-22 Method of patterning ultra-small structures

Country Status (3)

Country Link
US (1) US20070034518A1 (en)
TW (1) TW200706708A (en)
WO (1) WO2007021358A1 (en)

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US20070272931A1 (en) * 2006-05-05 2007-11-29 Virgin Islands Microsystems, Inc. Methods, devices and systems producing illumination and effects
US20070258720A1 (en) * 2006-05-05 2007-11-08 Virgin Islands Microsystems, Inc. Inter-chip optical communication
US7990336B2 (en) * 2007-06-19 2011-08-02 Virgin Islands Microsystems, Inc. Microwave coupled excitation of solid state resonant arrays
WO2014098774A1 (en) * 2012-12-21 2014-06-26 Agency For Science, Technology And Research Porous metallic membrane

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Also Published As

Publication number Publication date
WO2007021358A1 (en) 2007-02-22
US20070034518A1 (en) 2007-02-15

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