TW200706271A - Supplying apparatus for treatment solution - Google Patents
Supplying apparatus for treatment solutionInfo
- Publication number
- TW200706271A TW200706271A TW095100751A TW95100751A TW200706271A TW 200706271 A TW200706271 A TW 200706271A TW 095100751 A TW095100751 A TW 095100751A TW 95100751 A TW95100751 A TW 95100751A TW 200706271 A TW200706271 A TW 200706271A
- Authority
- TW
- Taiwan
- Prior art keywords
- wing member
- base plate
- treatment solution
- supplying apparatus
- basket
- Prior art date
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Coating Apparatus (AREA)
Abstract
The present invention relates to a supplying apparatus for treatment solution, more particularly to a recycling type supplying apparatus for treatment solution in which a top and a bottom basket members are made of hydrophobic material and a width direction of a base plate and a conveying direction of the base plate are longer. The problem that the treatment solution leaks from the basket members during the base plate treatment can be effectively prevented. An outer surface of a top nozzle set (22) provided on the top basket member (20) and an outer surface of a bottom nozzle set (32) provided on the bottom basket member (30) are respectively provided with a top wing member (25) and a bottom wing member (35) that both protrude from the conveying direction of the base plate and allow the base plate to pass through, the top wing member (25) and the bottom wing member (35) are disposed with a fashion that the distance of the opposite planes of the top wing member (25) and the bottom wing member (35) is shorter than that of the top base sheet (21) and the bottom press sheet (34).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005223694A JP4359580B2 (en) | 2005-08-02 | 2005-08-02 | Treatment liquid supply device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200706271A true TW200706271A (en) | 2007-02-16 |
TWI275423B TWI275423B (en) | 2007-03-11 |
Family
ID=37698910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95100751A TWI275423B (en) | 2005-08-02 | 2006-01-09 | Supplying apparatus for treatment solution |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4359580B2 (en) |
CN (1) | CN1907582B (en) |
TW (1) | TWI275423B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101229775B1 (en) * | 2008-12-26 | 2013-02-06 | 엘지디스플레이 주식회사 | Apparatus for cleaning substrate |
TWI558467B (en) * | 2011-03-01 | 2016-11-21 | 斯克林集團公司 | Nozzle, substrate processing apparatus, and substrate processing method |
CN104991357B (en) * | 2015-06-26 | 2018-12-07 | 武汉华星光电技术有限公司 | LCD glass substrate etches bearing fixture and top-jet-type etching machine |
CN114870050A (en) * | 2022-03-14 | 2022-08-09 | 江苏环亚医用科技集团股份有限公司 | A dismantle formula intelligence disinfection and isolation mechanism soon for medical treatment delivery mechanism |
-
2005
- 2005-08-02 JP JP2005223694A patent/JP4359580B2/en not_active Expired - Fee Related
-
2006
- 2006-01-09 TW TW95100751A patent/TWI275423B/en active
- 2006-02-14 CN CN200610009216XA patent/CN1907582B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4359580B2 (en) | 2009-11-04 |
TWI275423B (en) | 2007-03-11 |
CN1907582A (en) | 2007-02-07 |
CN1907582B (en) | 2010-04-21 |
JP2007038089A (en) | 2007-02-15 |
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