TW200706271A - Supplying apparatus for treatment solution - Google Patents

Supplying apparatus for treatment solution

Info

Publication number
TW200706271A
TW200706271A TW095100751A TW95100751A TW200706271A TW 200706271 A TW200706271 A TW 200706271A TW 095100751 A TW095100751 A TW 095100751A TW 95100751 A TW95100751 A TW 95100751A TW 200706271 A TW200706271 A TW 200706271A
Authority
TW
Taiwan
Prior art keywords
wing member
base plate
treatment solution
supplying apparatus
basket
Prior art date
Application number
TW095100751A
Other languages
Chinese (zh)
Other versions
TWI275423B (en
Inventor
Yoshikuni Takeichi
Hiromi Kato
Yusuke Muraoka
Original Assignee
Future Vision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Future Vision Inc filed Critical Future Vision Inc
Publication of TW200706271A publication Critical patent/TW200706271A/en
Application granted granted Critical
Publication of TWI275423B publication Critical patent/TWI275423B/en

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Coating Apparatus (AREA)

Abstract

The present invention relates to a supplying apparatus for treatment solution, more particularly to a recycling type supplying apparatus for treatment solution in which a top and a bottom basket members are made of hydrophobic material and a width direction of a base plate and a conveying direction of the base plate are longer. The problem that the treatment solution leaks from the basket members during the base plate treatment can be effectively prevented. An outer surface of a top nozzle set (22) provided on the top basket member (20) and an outer surface of a bottom nozzle set (32) provided on the bottom basket member (30) are respectively provided with a top wing member (25) and a bottom wing member (35) that both protrude from the conveying direction of the base plate and allow the base plate to pass through, the top wing member (25) and the bottom wing member (35) are disposed with a fashion that the distance of the opposite planes of the top wing member (25) and the bottom wing member (35) is shorter than that of the top base sheet (21) and the bottom press sheet (34).
TW95100751A 2005-08-02 2006-01-09 Supplying apparatus for treatment solution TWI275423B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005223694A JP4359580B2 (en) 2005-08-02 2005-08-02 Treatment liquid supply device

Publications (2)

Publication Number Publication Date
TW200706271A true TW200706271A (en) 2007-02-16
TWI275423B TWI275423B (en) 2007-03-11

Family

ID=37698910

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95100751A TWI275423B (en) 2005-08-02 2006-01-09 Supplying apparatus for treatment solution

Country Status (3)

Country Link
JP (1) JP4359580B2 (en)
CN (1) CN1907582B (en)
TW (1) TWI275423B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101229775B1 (en) * 2008-12-26 2013-02-06 엘지디스플레이 주식회사 Apparatus for cleaning substrate
TWI558467B (en) * 2011-03-01 2016-11-21 斯克林集團公司 Nozzle, substrate processing apparatus, and substrate processing method
CN104991357B (en) * 2015-06-26 2018-12-07 武汉华星光电技术有限公司 LCD glass substrate etches bearing fixture and top-jet-type etching machine
CN114870050A (en) * 2022-03-14 2022-08-09 江苏环亚医用科技集团股份有限公司 A dismantle formula intelligence disinfection and isolation mechanism soon for medical treatment delivery mechanism

Also Published As

Publication number Publication date
JP4359580B2 (en) 2009-11-04
TWI275423B (en) 2007-03-11
CN1907582A (en) 2007-02-07
CN1907582B (en) 2010-04-21
JP2007038089A (en) 2007-02-15

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