TW200704816A - Apparatus for carbon nanotubes growth - Google Patents

Apparatus for carbon nanotubes growth

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Publication number
TW200704816A
TW200704816A TW094125754A TW94125754A TW200704816A TW 200704816 A TW200704816 A TW 200704816A TW 094125754 A TW094125754 A TW 094125754A TW 94125754 A TW94125754 A TW 94125754A TW 200704816 A TW200704816 A TW 200704816A
Authority
TW
Taiwan
Prior art keywords
electrode
carbon nanotubes
substrate
nanotubes growth
growth
Prior art date
Application number
TW094125754A
Other languages
Chinese (zh)
Other versions
TWI350859B (en
Inventor
Chi-Chuang Ho
Ching-Chou Chang
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW094125754A priority Critical patent/TWI350859B/en
Publication of TW200704816A publication Critical patent/TW200704816A/en
Application granted granted Critical
Publication of TWI350859B publication Critical patent/TWI350859B/en

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Abstract

This invention relates to an apparatus for carbon nanotubes growth, the apparatus includes a chamber, a substrate holder, a first electrode and an opposite second electrode. The substrate holder is set in the chamber, and has a substrate holding area for holding a substrate. The first electrode and the second electrode are positioned at opposite sides of the substrate holding area respectively. The first electrode is fixed. The second electrode is movable with respect to the first electrode.
TW094125754A 2005-07-29 2005-07-29 Apparatus for carbon nanotubes growth TWI350859B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094125754A TWI350859B (en) 2005-07-29 2005-07-29 Apparatus for carbon nanotubes growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094125754A TWI350859B (en) 2005-07-29 2005-07-29 Apparatus for carbon nanotubes growth

Publications (2)

Publication Number Publication Date
TW200704816A true TW200704816A (en) 2007-02-01
TWI350859B TWI350859B (en) 2011-10-21

Family

ID=55855967

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094125754A TWI350859B (en) 2005-07-29 2005-07-29 Apparatus for carbon nanotubes growth

Country Status (1)

Country Link
TW (1) TWI350859B (en)

Also Published As

Publication number Publication date
TWI350859B (en) 2011-10-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees