TW200703326A - Ultraviolet ray irradiation device - Google Patents

Ultraviolet ray irradiation device

Info

Publication number
TW200703326A
TW200703326A TW095117322A TW95117322A TW200703326A TW 200703326 A TW200703326 A TW 200703326A TW 095117322 A TW095117322 A TW 095117322A TW 95117322 A TW95117322 A TW 95117322A TW 200703326 A TW200703326 A TW 200703326A
Authority
TW
Taiwan
Prior art keywords
ultraviolet ray
supplying
irradiation
ray irradiation
ultraviolet
Prior art date
Application number
TW095117322A
Other languages
Chinese (zh)
Inventor
Masahito Namai
Shigenori Nakata
Hiroki Hayashi
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200703326A publication Critical patent/TW200703326A/en

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Led Device Packages (AREA)

Abstract

To provide an ultraviolet ray irradiation device for irradiating a rotated processed object with an ultraviolet ray which can easily control an irradiation amount by partially changing the light intensity of a light irradiation area. This device is provided with an ultraviolet ray irradiation part for supplying ultraviolet rays, a power supply part for supplying power to the ultraviolet ray irradiation part, and a control unit for supplying a control signal to the power supply part, and irradiates a rotated processed object with an ultraviolet ray. The ultraviolet ray irradiation part is provided with a plurality of linearly arrayed ultraviolet ray emission diodes. The ultraviolet ray emitted from the ultraviolet ray emission diode is formed in a thin and long light irradiation area by a lens, and the ultraviolet ray intensity of the light irradiation area is partially changed by controlling power supplied to each emission diode.
TW095117322A 2005-07-14 2006-05-16 Ultraviolet ray irradiation device TW200703326A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005205765A JP2007026517A (en) 2005-07-14 2005-07-14 Ultraviolet ray irradiation device

Publications (1)

Publication Number Publication Date
TW200703326A true TW200703326A (en) 2007-01-16

Family

ID=37609249

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095117322A TW200703326A (en) 2005-07-14 2006-05-16 Ultraviolet ray irradiation device

Country Status (4)

Country Link
JP (1) JP2007026517A (en)
KR (1) KR20070009389A (en)
CN (1) CN1896670A (en)
TW (1) TW200703326A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4193947B2 (en) * 2006-06-13 2008-12-10 京都電機器株式会社 UV irradiation equipment
WO2008029615A1 (en) 2006-09-04 2008-03-13 Origin Electric Company, Limited Method and apparatus for forming resin film
JP4554646B2 (en) * 2007-07-02 2010-09-29 オリジン電気株式会社 Resin film forming method and resin film forming apparatus
DE102007022895B9 (en) * 2007-05-14 2013-11-21 Erich Thallner Device for transferring structures provided in a mask onto a substrate
JP5386232B2 (en) * 2009-05-26 2014-01-15 日東電工株式会社 UV irradiation equipment
JP5313778B2 (en) * 2009-06-15 2013-10-09 リンテック株式会社 Light irradiation apparatus and light irradiation method
JP2012099197A (en) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp Optical imprint method
KR102475973B1 (en) * 2015-03-31 2022-12-08 도쿄엘렉트론가부시키가이샤 Homogenization of exposure dose through rotation, translation, and variable processing conditions
CN106678625A (en) * 2017-03-06 2017-05-17 成都恒坤光电科技有限公司 Ultraviolet light source assembly, ultraviolet optical system and ultraviolet printing device
JP6825956B2 (en) * 2017-03-28 2021-02-03 株式会社Ｓｃｒｅｅｎホールディングス Selection method of substrate processing equipment, substrate processing method and ultraviolet irradiation means

Also Published As

Publication number Publication date
CN1896670A (en) 2007-01-17
JP2007026517A (en) 2007-02-01
KR20070009389A (en) 2007-01-18

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