JP5313778B2 - Light irradiation apparatus and light irradiation method - Google Patents

Description

  The present invention relates to a light irradiating apparatus and a light irradiating method for irradiating an irradiated object that reacts with light.

  In a processing apparatus for a semiconductor wafer (hereinafter simply referred to as a wafer), for example, a protective tape is applied to the circuit surface of the wafer to perform back surface grinding, or a dicing tape is applied to divide into a plurality of chips. Processing is performed. The tape used for such treatment employs an ultraviolet curing type adhesive, and after the treatment as described above, the adhesive is weakened by curing the adhesive with an ultraviolet irradiation device. The wafer can be easily peeled off so as not to break (see, for example, Patent Document 1).

  The ultraviolet irradiation device of Patent Document 1 includes a plurality of types of ultraviolet light emitting diodes having different peak wavelengths. Then, the ultraviolet light emitting diode is caused to emit light, and the ultraviolet light emitting diode and the wafer are relatively moved to cure the adhesive layer of the protective sheet attached to the wafer and weaken its adhesive force. In such an ultraviolet irradiation apparatus, since the wafer moves in the light from the ultraviolet light emitting diode, the light with a predetermined illuminance is rapidly irradiated at the moment when the wafer enters the light.

JP 2008-1441038 A

  However, when using a method in which light having a predetermined illuminance is suddenly applied to the adhesive sheet (protective sheet) of the wafer, as in the ultraviolet irradiation device described in Patent Document 1, depending on the configuration of the adhesive layer of the adhesive sheet, The layer may not be cured efficiently. For this reason, development of a method for efficiently curing the adhesive layer of the adhesive sheet, that is, a method for efficiently reacting an irradiated body is desired.

  The present invention has been devised by paying attention to the inconveniences described above, and an object of the present invention is to provide a light irradiation apparatus and a light irradiation method capable of efficiently reacting an object to be irradiated that reacts with light. There is to do.

  In order to achieve the above-mentioned object, as a result of intensive research conducted by the present inventor, depending on the configuration of the adhesive layer of the adhesive sheet, to the irradiated object, the integrated light amount in one irradiation cycle becomes a predetermined amount. The amount of light energy given to the adhesive layer is adjusted by adjusting at least one of the amount of increase in light illuminance with the passage of time at the start of irradiation and the amount of decrease in light illuminance with the passage of time at the end of irradiation. It is found that the adhesive layer can be reacted efficiently by gradually increasing the illuminance of light at the start of irradiation or gradually decreasing the illuminance of light at the end of irradiation so that Was completed. That is, the light irradiation apparatus of the present invention is a light irradiation apparatus that irradiates light to an irradiated object that reacts with light, and has a plurality of light emitting sources capable of emitting light of a single wavelength and is opposed to the irradiated object. An arranged light emitting means; and a control means capable of controlling the intensity of light emitted from the light emitting means, wherein the control means is configured to integrate light quantity in one irradiation cycle according to the configuration of the irradiated object. Is configured such that at least one of an increase amount and a decrease amount with the passage of time of the illuminance of light in the irradiated object is adjustable.

In this case, in the light irradiation apparatus of the present invention, the light emitting means includes a plurality of light emitting sources capable of emitting light of different single wavelengths, and the control means includes a light emitting source that emits light of the same single wavelength. It is preferable that the light intensity can be adjusted for each unit as one unit.
The light irradiation apparatus of the present invention further includes power supply means for supplying at least one of a current and a voltage to the light emission source, and the control means is a current supplied to the light emission source by the power supply means. It is preferable that the light intensity can be adjusted by controlling the supply amount of at least one of the voltage and the voltage.
Furthermore, the light irradiation apparatus of the present invention further includes a light shielding unit capable of shielding light emitted from the light emitting source, and the control unit controls the light shielding state by the light shielding unit, thereby It is preferable that the illuminance of light is adjustable.

  On the other hand, the light irradiation method of the present invention is a light irradiation method for irradiating light to an irradiated object that reacts with light, the light emitting means having a plurality of light sources capable of emitting light of a single wavelength, and the light emitting means. The amount of increase in the illuminance of light with the passage of time at the start of irradiation of the irradiated object, so that the integrated light quantity in one irradiation cycle becomes a predetermined amount with respect to the predetermined irradiated object facing Storage means for storing light adjustment information related to control for adjusting at least one of the amount of decrease in illuminance of light with the lapse of time at the end of irradiation, and input means capable of setting and inputting specific information for specifying the irradiated object And a specific information recognition step for recognizing the specific information set and input by the input means, and a control for adjusting the illuminance of light in the irradiated object specified by the specific information based on the light adjustment information Process, It adopts a configuration that is carried out.

  In this case, in the light irradiation method of the present invention, the light emitting means includes a plurality of light emitting sources capable of emitting light of different single wavelengths, and the light adjustment information is a light emitting source of emitting light of the same single wavelength. Is a unit for controlling the intensity of light for each unit, and in the control step, it is preferable to adjust the intensity of light for each unit with respect to the irradiated object.

  According to the present invention as described above, the amount of increase in the illuminance of light and the irradiation with the passage of time at the start of irradiation according to the configuration of the irradiated object so that the integrated light amount in one irradiation cycle becomes a predetermined amount. Since at least one of the amount of decrease in illuminance of light with the passage of time at the end (hereinafter referred to as illuminance change amount if necessary) can be adjusted, the amount of light energy given to the irradiated object is set to a predetermined amount Thus, the illuminance of light in the irradiated object can be gradually increased or decreased, and the irradiated object can be reacted efficiently.

  In addition, a light source capable of emitting light of different single wavelengths is provided, and a light source that emits light of the same single wavelength is used as a unit, and the intensity of light can be adjusted for each unit. Even when the wavelength of light to which the irradiated body reacts is different, it can be reacted efficiently according to the irradiated body. Furthermore, if the intensity of light is adjusted by controlling the supply amount of at least one of the current and voltage supplied to the light emitting source, the illuminance change amount can be finely adjusted, and the irradiated object can be reacted efficiently. it can. Then, by controlling the light blocking means capable of blocking light and adjusting the illuminance of the light on the irradiated object, even when using a light source that is rapidly irradiated with light having a predetermined illuminance as in the prior art, one irradiation The amount of change in illuminance can be adjusted so that the integrated light amount in the cycle becomes a predetermined amount.

It is a figure which shows the light irradiation apparatus which concerns on 1st Embodiment of this invention, (A) is a side view, (B) is a top view. (A) is a figure which shows the 1st-4th light emission unit of 1st Embodiment, (A) is the figure seen from the bottom, (B) is a longitudinal cross-sectional view. The graph which shows the illumination intensity adjustment conditions of 1st Embodiment. The block diagram which shows the light emission control apparatus of 1st Embodiment. The block diagram which shows the light emission control apparatus of 2nd Embodiment. The elements on larger scale of the light irradiation apparatus of 3rd Embodiment.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
In FIG. 1, a light irradiation device 1 is a device that irradiates light L to an adhesive sheet S as an irradiated body attached to one surface of a wafer W, and holds a wafer W integrated with a ring frame RF. 2, a single-axis robot 3 provided below the table 2, light-emitting means 4 for irradiating the adhesive sheet S with light L, power supply means 5 for supplying power to the light-emitting means 4, and single-axis robot 3 And a light emission control device 6 for controlling the power supply means 5.
The curing initiator for the adhesive layer (not shown) of the adhesive sheet S is designed so that the reaction starts when the light L having an arbitrary wavelength is irradiated.
The table 2 includes a suction port (not shown), and is configured to be able to suck and hold the wafer W and the ring frame RF from the mounting sheet MS side. The single-axis robot 3 is configured such that the slider 31 is fixed to the lower surface of the table 2 and the table 2 is slid in the X-axis direction (left-right direction in FIG. 1A) via the slider 31. .

  The light emitting means 4 includes a holding plate 41 and a plurality of light emitting unit groups 42 held by the holding plate 41 along the X axis. The light emitting unit group 42 includes a first light emitting unit 42A, a second light emitting unit 42B, a third light emitting unit 42C, and a fourth light emitting unit 42D provided along the X axis. As shown in FIGS. 2A and 2B, the first to fourth light emitting units 42A to 42D include a rectangular box-shaped LED holding portion 43. The LED holding portion 43 has a rectangular box-like longitudinal direction substantially coincident with the Y-axis direction, and an opening 431 provided on one surface is positioned on the lower side (so that the bottom surface becomes the opening 431). ) Is provided. Further, a plurality of first LEDs (Light Emitting Diodes) 44A as light emission sources are provided along the Y axis inside the LED holding portion 43 of the first light emitting unit 42A. The LED holding portion 43 of the second light emitting unit 42B has a plurality of second LEDs 44B as a light source, the third light emitting unit 42C has a plurality of third LEDs 44C as a light source, and the fourth light emitting unit 42D has a light source. A plurality of fourth LEDs 44D are provided along the Y axis. These first, second, third, and fourth LEDs 44A, 44B, 44C, and 44D emit light L having a single wavelength with peak wavelengths of 365 nm, 325 nm, 395 nm, and 305 nm, respectively. And the light L from 1st-4th LED44A-44D is irradiated to the adhesive sheet S in the diffused state. Note that the single-wavelength light in this embodiment may include light having wavelengths slightly before and after the above-described peak wavelength.

  The power supply means 5 controls the light emission control device 6 to control at least one type of the first to fourth LEDs 44A to 44D with a predetermined amount of current adjusted under the conditions based on Table 1 below at the same timing. A voltage is supplied, and as shown in FIG. 3, the light L is emitted so that the illuminance of the light in the adhesive sheet S becomes a predetermined illuminance. Note that the integrated light amount in Table 1 is represented by a trapezoidal area surrounded by a line representing the light adjustment conditions in FIG. 3 and the horizontal axis. The increase amount at the start is an increase amount of the illuminance of light in the adhesive sheet S with the passage of time at the start of irradiation (from the illuminance to 0 to the set maximum illuminance R). Further, the decrease amount at the end is a decrease amount of the illuminance of light in the adhesive sheet S with the lapse of time at the end of irradiation (until the illuminance becomes 0 from the set maximum illuminance R). The maximum illuminance maintenance period is a maintenance period of the set maximum illuminance R.

For example, when the power supply means 5 emits light L with the first LED 44A, as shown in FIG. 3, the illumination intensity of the 365 nm light L on the adhesive sheet S at the time T0 to T1 at the start of irradiation is As per unit time. It is increased and maintained at the set maximum illuminance R at times T1 to T4, which is the maximum illuminance maintenance period, and is decreased by Ae per unit time at times T4 to T5, which is the end of irradiation. The starting increase amount As is a value when a rated current (or rated voltage) is supplied to the first LED 44A at the moment of starting irradiation.
Further, when the power supply unit 5 causes the second to fourth LEDs 44B to 44D to emit light L, the integrated light amount and the decrease amount at the end are maintained at the same amount as the first LED 44A, and the increase amount at the start and the maximum illuminance. The maintenance period is controlled so that the light L is emitted under the condition that the adhesive layer of the adhesive sheet S is cured efficiently.
The second LED 44B increases Bs per unit time at the start of irradiation and maintains the maximum illuminance maintenance period from T2 to T6. The third LED 44C increases Cs per unit time and maintains the maximum illuminance maintenance period from T3 to T8. The fourth LED 44D is set to increase by Ds per unit time and maintain the maximum illuminance maintenance period from T7 to T10.

The light emission control device 6 is configured to specify specific information for specifying the adhesive sheet S that is set and input by the user, or the first to fourth LEDs 44A to 44D in one irradiation cycle that is set and input by the user as shown in FIG. Based on the light adjustment condition, the light intensity of the first to fourth LEDs 44A to 44D is adjusted. And the light emission control apparatus 6 is provided with the input means 61, the memory | storage means 62, and the control means 63 as shown in FIG.
The input unit 61 includes a keyboard and the like operated by the user, and outputs to the control unit 63 a signal for an input operation for setting the name of the adhesive sheet S and the light adjustment conditions of the first to fourth LEDs 44A to 44D.
The storage unit 62 stores at least one light adjustment information 621 related to the light irradiation condition corresponding to the configuration of the adhesive layer of the adhesive sheet S. The light adjustment information 621 includes name information 622 related to the name of the adhesive sheet S and condition information 623 related to the light adjustment conditions of the first to fourth LEDs 44A to 44D in one irradiation cycle as shown in FIG. .
The control means 63 controls the power supply means 5 based on the light adjustment conditions recorded in the light adjustment information 621 or the light adjustment conditions set by the user, and supplies them to the first to fourth LEDs 44A to 44D. By adjusting at least one of the current and the voltage, the adhesive sheet S is irradiated with the light L while adjusting the light intensity of the first to fourth LEDs 44A to 44D.

Next, an operation when the name of the adhesive sheet S is set and input by the user as the light irradiation operation by the light irradiation device 1 will be described.
First, the control means 63 of the light irradiation device 1 outputs an operation signal as specific information indicating that the adhesive sheet S to be irradiated is, for example, “sheet A” in a state where the table 2 is not positioned below the light emitting means 4. When it is acquired from the input means 61 (specific information recognition step) and when the state in which the wafer W to which the adhesive sheet S is attached is placed on the table 2, as shown in FIG. The wafer W is sucked and held, and the table 2 is moved to a position below the light emitting means 4 to be positioned. In addition, the control unit 63 acquires the condition information 623 of the light adjustment information 621 corresponding to “Sheet A”. And based on this acquired condition information 623, 365 nm, 325 nm, 395 nm, while adjusting the illuminance of light in the adhesive sheet S of all the first to fourth LEDs 44A to 44D to be the illuminance as shown in FIG. The adhesive layer is cured by irradiating the adhesive sheet S with light L of 305 nm (control process).

Next, an operation when a predetermined light adjustment condition (start increase amount, maximum illuminance maintenance period, end decrease amount) is set and input by the user will be described. In addition, description is abbreviate | omitted suitably about the operation | movement similar to the operation | movement when the name of the adhesive sheet S mentioned above is input.
First, when the control means 63 acquires from the input means 61 an operation signal for specifying a predetermined light adjustment condition, the control means 63 positions the table 2 below the light emitting means 4. And based on the light adjustment conditions set and input by the user, the light L is applied to the adhesive sheet S while adjusting the light intensity of the LEDs that need to be irradiated among all the first to fourth LEDs 44A to 44D. Thus, the adhesive layer is cured.

The first embodiment as described above has the following effects.
That is, the increase amount at the start can be adjusted according to the configuration of the adhesive layer of the adhesive sheet S while maintaining the predetermined amount of light in one irradiation cycle. For this reason, while maintaining the light energy amount given to the adhesive layer at a predetermined amount, the illuminance of the light L irradiated according to the adhesive layer can be gradually increased, and the adhesive layer can be cured efficiently.
In addition, first to fourth light emitting units 42A to 42D each having first to fourth LEDs 44A to 44D capable of emitting light L having different single wavelengths are provided, and light is supplied to each of the first to fourth light emitting units 42A to 42D. The strength of the can be adjusted. For this reason, the adhesive layer can be efficiently cured regardless of the wavelength at which the curing initiator is cured.
Moreover, since the electric current or voltage supplied to 1st-4th LED44A-44D is controlled, the intensity | strength of light can be adjusted finely and an adhesive layer can be hardened more efficiently.

Next, 2nd Embodiment of this invention is described based on drawing. The difference between the light irradiation device of the second embodiment and the light irradiation device 1 of the first embodiment is that the light emitting unit group 42 is composed of only four first light emitting units 42A and the light emission control device 6. The light emission control device 6A shown in FIG.
In this second embodiment, the curing initiator of the adhesive layer of the adhesive sheet S to be irradiated with the light L is designed so that the reaction starts when the light L near 365 nm is irradiated.

  Under the control of the light emission control device 6A, the power supply means 5 supplies a predetermined amount of power and voltage adjusted under the conditions based on the following Table 2 to all the first LEDs 44A at the same timing, as shown in FIG. As shown, the light L is emitted so that the illuminance of the light in the adhesive sheet S becomes a predetermined illuminance.

When the first LED 44A emits 365 nm light L to the adhesive sheet S whose name is “Sheet B”, the power supply means 5 is 365 nm at the time T0 to T1, which is the start of irradiation, as shown in FIG. The illuminance of the light L on the adhesive sheet S is increased by As per unit time, maintained at the set maximum illuminance R at times T1 to T4, which is the maximum illuminance maintenance period, and Ae per unit time at times T4 to T5, which is the end of irradiation. Decrease by increments.
When the power supply means 5 emits 365 nm light L to the adhesive sheet S having the names “sheet C”, “sheet D”, and “sheet E”, the integrated light amount and the decrease amount at the end are “ While maintaining the same amount as that of the “sheet B”, the light L is set so that the adhesive amount of the adhesive sheet S is efficiently cured by the start increase amount and the maximum illuminance maintenance period.
Sheet C is increased by Bs per unit time and the maximum illuminance maintenance period is maintained from T2 to T6. Sheet D is increased by Cs per unit time and the maximum illuminance maintenance period is maintained from T3 to T8. Sheet E Is set to increase by Ds per unit time to maintain the maximum illuminance maintenance period from T7 to T10.

As shown in FIG. 5, the light emission control device 6 </ b> A stores the light adjustment information 621 </ b> A in the storage unit 62 instead of the light adjustment information 621 of the first embodiment, and includes a control unit 63 </ b> A instead of the control unit 63. It has a configuration.
The light adjustment information 621A includes name information 622 and condition information 623A regarding the light adjustment conditions of the first LED 44A in one irradiation cycle as shown in FIG.

  When the control unit 63A acquires an operation signal indicating that the name of the adhesive sheet S set and input by the user is “sheet B” from the input unit 61 (specific information recognition step), the control unit 63A reads “sheet” from the light adjustment information 621A. Condition information 623A corresponding to “B” is acquired. Then, by controlling at least one of the current and voltage supplied to the first LED 44A based on the condition information 623A, the adhesive sheet S is adjusted while adjusting the illuminance of light in the adhesive sheet S as shown in FIG. Is irradiated with light L (control step). In addition, when the control unit 63A acquires an operation signal for specifying a predetermined light adjustment condition from the input unit 61, the control unit 63A controls the first LED 44A with the light adjustment condition based on the operation signal to emit the light L to the adhesive sheet S. Irradiate.

The second embodiment as described above has the following effects.
That is, the amount of light energy applied to the adhesive layer is set to a predetermined amount because the start increase amount can be adjusted according to the configuration of the adhesive layer of the adhesive sheet S while maintaining the predetermined amount of light in one irradiation cycle. It is possible to gradually increase the illuminance of the 365 nm light L that is irradiated in accordance with the adhesive layer, and to cure the adhesive layer efficiently.

Next, 3rd Embodiment of this invention is described based on drawing.
FIG. 6 is a partially enlarged view of the light irradiation apparatus 1B according to the third embodiment.
As shown in FIG. 6, the light irradiation device 1 </ b> B newly includes a light shielding unit 7 </ b> B having a size that covers the wafer W between the table 2 and the light emitting unit 4 of the light irradiation device 1 of the first embodiment. Instead of the control device 6, a light emission control device 6B is provided.
The light blocking unit 7B blocks the light L from the light emitting unit 4 as necessary, and includes a frame-shaped main body 71B. The main body 71B is provided with a plurality of blinds 72B provided along the X axis. The blind 72B rotates about a rotation shaft 73B that extends in the Y-axis direction and covers the main body 71B just below the first to fourth light emitting units 42A to 42D. And the control means (not shown) of the light emission control device 6B is based on the condition information 623 corresponding to the predetermined adhesive sheet S as shown in FIG. 4 for at least one of the first to fourth LEDs 44A to 44D. As shown in FIG. 3, for example, by supplying a rated current at the same timing, light L having a set maximum illuminance R is emitted, and the rotation angle of the blind 72 </ b> B immediately below the LED that emits light is controlled. The illuminance of the light L in the adhesive sheet S is adjusted. In addition, the control unit emits the light L having the set maximum illuminance R based on the light adjustment conditions set and input by the user, and controls the rotation angle of the blind 72B directly below the LED to be emitted. The illuminance of the light L applied to the adhesive sheet S is adjusted.

The third embodiment as described above has the following effects.
That is, since the illuminance is adjusted by the control of the light shielding means 7B, even when an LED that is rapidly irradiated with light with a predetermined illuminance as in the prior art is used, the integrated light amount in one irradiation cycle becomes a predetermined amount. The amount of increase at the start can be adjusted, and the adhesive layer can be cured efficiently.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such is included in this invention.

That is, the light shielding unit 7B of the third embodiment may be provided in the light irradiation apparatus of the second embodiment. In the case of such a configuration, for example, a blind 72B is provided immediately below each first light emitting unit 42A, and the rotation angle of all the blinds 72B can be controlled simultaneously, so that the light intensity is the same as that of the light irradiation device. Can be adjusted. Furthermore, the amount of increase at the start and the amount of decrease at the end may be adjusted by controlling the blinking speed of the first to fourth LEDs 44A to 44D.
Moreover, in 1st-3rd embodiment, although the amount of reduction | decrease at the time of completion was set to the same quantity with each adhesive sheet S or LED of each wavelength, an adhesive layer is provided for every adhesive sheet S or LED of each wavelength. You may adjust to the conditions which harden | cure efficiently. In addition, when the decrease amount at the end is adjusted so as to be cured efficiently for each adhesive sheet S, the increase amount at the start time may be set to the same amount for each adhesive sheet S or LED of each wavelength. Furthermore, the maximum illuminance maintenance period may be eliminated, or the illuminance during the maximum illuminance maintenance period may be changed. Moreover, although the amount of change with the passage of time of the increase amount at the start or the decrease amount at the end is made constant regardless of the elapsed time (as shown by a straight line in FIG. 3), it is changed with the passage of time. (It may be expressed by a curve). Further, the illuminance of light in the adhesive sheet S may be adjusted so as to be different from the predetermined amount without maintaining the integrated light amount at the predetermined amount for each adhesive sheet S or for each LED of each wavelength.
Further, as the first to fourth LEDs 44A to 44D, those having wavelengths different from the above-described values such as infrared rays and visible light may be applied, or LEDs having different wavelengths may be provided. Further, any light source capable of emitting light of a single wavelength, such as a xenon flash, may be applied. And what kind of thing may be applied as a to-be-irradiated object, if it responds to the light of a predetermined wavelength. Further, as the light shielding means, a light shielding means may be used that shields light by mechanical, electrical or chemical reaction.

DESCRIPTION OF SYMBOLS 1,1B ... Light irradiation apparatus 4 ... Light emission means 5 ... Electric power supply means 7B ... Light-shielding means 44A, 44B, 44C, 44D ... 1st, 2nd, 3rd, 4th LED (light emission source)
61 ... Input means 62 ... Storage means 63, 63A ... Control means 621, 621A ... Light adjustment information S ... Adhesive sheet (irradiated body)

Claims (6)

A light irradiation apparatus for irradiating light to an irradiated object that reacts with light,
A light-emitting means having a plurality of light-emitting sources capable of emitting light of a single wavelength and arranged to face the irradiated body;
Control means capable of controlling the intensity of light emitted from the light emitting means,
According to the configuration of the irradiated body, the control means is configured to increase and decrease the light illuminance in the irradiated body over time so that the integrated light amount in one irradiation cycle becomes a predetermined amount. A light irradiation apparatus characterized in that at least one of them is adjustable. The light emitting means includes a plurality of light emitting sources capable of emitting light of different single wavelengths,
2. The light irradiation according to claim 1, wherein the control unit is provided so that a light emitting source that emits light of the same single wavelength is a unit, and the intensity of the light can be adjusted for each unit. apparatus. Further comprising power supply means for supplying at least one of a current and a voltage to the light emitting source,
The control means is provided such that light intensity can be adjusted by controlling a supply amount of at least one of a current and a voltage supplied to the light emitting source by the power supply means. The light irradiation apparatus of Claim 1 or Claim 2. A light shielding means capable of shielding light emitted from the light source;
The light irradiation according to claim 1, wherein the control unit is provided so as to be capable of adjusting an illuminance of light in the irradiated body by controlling a light blocking state by the light blocking unit. apparatus. A light irradiation method for irradiating light to an irradiated object that reacts with light,
A light emitting means having a plurality of light emitting sources capable of emitting light of a single wavelength;
The illuminance of light with the passage of time at the start of irradiation of the irradiated object is set so that the integrated light amount in one irradiation cycle becomes a predetermined amount with respect to the predetermined irradiated object facing the light emitting means. Storage means for storing light adjustment information related to control for adjusting at least one of the increase amount and the decrease amount of the illuminance of light with the passage of time at the end of irradiation;
Using input means capable of setting and inputting specific information for specifying the irradiated object,
A specific information recognition step for recognizing the specific information set and input by the input means;
And a control step of adjusting the illuminance of light in the irradiated object specified by the specifying information based on the light adjustment information. The light emitting means includes a plurality of light emitting sources capable of emitting light of different single wavelengths,
The light adjustment information relates to a control that adjusts the intensity of light for each unit, with a light emitting source that emits light of the same single wavelength as one unit.
The light irradiation method according to claim 5, wherein in the control step, the intensity of light is adjusted for each unit of the irradiated object.

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