TW200702945A - Thinner composition for removing photoresist - Google Patents
Thinner composition for removing photoresistInfo
- Publication number
- TW200702945A TW200702945A TW095111049A TW95111049A TW200702945A TW 200702945 A TW200702945 A TW 200702945A TW 095111049 A TW095111049 A TW 095111049A TW 95111049 A TW95111049 A TW 95111049A TW 200702945 A TW200702945 A TW 200702945A
- Authority
- TW
- Taiwan
- Prior art keywords
- thinner composition
- photoresist
- present
- removing photoresist
- composition
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
- B42D—BOOKS; BOOK COVERS; LOOSE LEAVES; PRINTED MATTER CHARACTERISED BY IDENTIFICATION OR SECURITY FEATURES; PRINTED MATTER OF SPECIAL FORMAT OR STYLE NOT OTHERWISE PROVIDED FOR; DEVICES FOR USE THEREWITH AND NOT OTHERWISE PROVIDED FOR; MOVABLE-STRIP WRITING OR READING APPARATUS
- B42D5/00—Sheets united without binding to form pads or blocks
- B42D5/04—Calendar blocks
- B42D5/043—Supports for desk-type calendars or diaries
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
- B42D—BOOKS; BOOK COVERS; LOOSE LEAVES; PRINTED MATTER CHARACTERISED BY IDENTIFICATION OR SECURITY FEATURES; PRINTED MATTER OF SPECIAL FORMAT OR STYLE NOT OTHERWISE PROVIDED FOR; DEVICES FOR USE THEREWITH AND NOT OTHERWISE PROVIDED FOR; MOVABLE-STRIP WRITING OR READING APPARATUS
- B42D5/00—Sheets united without binding to form pads or blocks
- B42D5/04—Calendar blocks
- B42D5/046—Suspension devices therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050027037A KR20060104688A (ko) | 2005-03-31 | 2005-03-31 | 포토레지스트 제거용 씬너 조성물 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200702945A true TW200702945A (en) | 2007-01-16 |
Family
ID=37053576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095111049A TW200702945A (en) | 2005-03-31 | 2006-03-29 | Thinner composition for removing photoresist |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR20060104688A (zh) |
TW (1) | TW200702945A (zh) |
WO (1) | WO2006104340A1 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101370693B1 (ko) * | 2008-05-29 | 2014-03-05 | 동우 화인켐 주식회사 | 감광성 수지 및 반사방지막 제거용 씬너 조성물 |
US8227182B2 (en) | 2008-08-11 | 2012-07-24 | Samsung Electronics Co., Ltd. | Methods of forming a photosensitive film |
US20120108067A1 (en) * | 2010-10-29 | 2012-05-03 | Neisser Mark O | Edge Bead Remover For Coatings |
KR102310637B1 (ko) | 2015-01-12 | 2021-10-08 | 삼성전자주식회사 | 씬너 조성물 및 이를 이용한 반도체 장치의 제조 방법 |
JP6899220B2 (ja) * | 2017-01-11 | 2021-07-07 | 株式会社ダイセル | レジスト除去用組成物 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6589719B1 (en) * | 2001-12-14 | 2003-07-08 | Samsung Electronics Co., Ltd. | Photoresist stripper compositions |
US6682876B2 (en) * | 2001-12-14 | 2004-01-27 | Samsung Electronics Co., Ltd. | Thinner composition and method of stripping a photoresist using the same |
KR100503967B1 (ko) * | 2002-03-29 | 2005-07-26 | 주식회사 동진쎄미켐 | 감광성 수지 제거용 씬너 조성물 |
-
2005
- 2005-03-31 KR KR1020050027037A patent/KR20060104688A/ko not_active Application Discontinuation
-
2006
- 2006-03-29 TW TW095111049A patent/TW200702945A/zh unknown
- 2006-03-29 WO PCT/KR2006/001138 patent/WO2006104340A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
KR20060104688A (ko) | 2006-10-09 |
WO2006104340A1 (en) | 2006-10-05 |
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