TW200700899A - Pellicle - Google Patents

Pellicle

Info

Publication number
TW200700899A
TW200700899A TW095115044A TW95115044A TW200700899A TW 200700899 A TW200700899 A TW 200700899A TW 095115044 A TW095115044 A TW 095115044A TW 95115044 A TW95115044 A TW 95115044A TW 200700899 A TW200700899 A TW 200700899A
Authority
TW
Taiwan
Prior art keywords
pellicle
films
loosening
humidity
percentage
Prior art date
Application number
TW095115044A
Other languages
English (en)
Inventor
Toru Shirasaki
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of TW200700899A publication Critical patent/TW200700899A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/0209—Ducting arrangements characterised by their connecting means, e.g. flanges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/0245—Manufacturing or assembly of air ducts; Methods therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
TW095115044A 2005-06-27 2006-04-27 Pellicle TW200700899A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005186785A JP2007004039A (ja) 2005-06-27 2005-06-27 ペリクル

Publications (1)

Publication Number Publication Date
TW200700899A true TW200700899A (en) 2007-01-01

Family

ID=37689701

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095115044A TW200700899A (en) 2005-06-27 2006-04-27 Pellicle

Country Status (3)

Country Link
JP (1) JP2007004039A (zh)
KR (1) KR20070000337A (zh)
TW (1) TW200700899A (zh)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838707A (ja) * 1981-08-20 1983-03-07 イ−・アイ・デユポン・デ・ニモアス・アンド・カンパニ− パ−フルオロ−２，２−ジメチル−１，３−ジオキソ−ルの無定形共重合体
JP3818344B2 (ja) * 1997-11-20 2006-09-06 旭硝子株式会社 含フッ素脂肪族環構造含有重合体の製造方法
JP2000305255A (ja) * 1999-04-23 2000-11-02 Shin Etsu Chem Co Ltd フッ素エキシマレーザーリソグラフィー用ペリクル

Also Published As

Publication number Publication date
KR20070000337A (ko) 2007-01-02
JP2007004039A (ja) 2007-01-11

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