TW200644058A - De-bubble device for etching liquid - Google Patents

De-bubble device for etching liquid

Info

Publication number
TW200644058A
TW200644058A TW094118463A TW94118463A TW200644058A TW 200644058 A TW200644058 A TW 200644058A TW 094118463 A TW094118463 A TW 094118463A TW 94118463 A TW94118463 A TW 94118463A TW 200644058 A TW200644058 A TW 200644058A
Authority
TW
Taiwan
Prior art keywords
pipe
etching liquid
sampling
inlet hole
outlet hole
Prior art date
Application number
TW094118463A
Other languages
English (en)
Chinese (zh)
Other versions
TWI292177B (enrdf_load_stackoverflow
Inventor
Jr-Shing Chen
Original Assignee
Shine World Optronics Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shine World Optronics Technology Inc filed Critical Shine World Optronics Technology Inc
Priority to TW094118463A priority Critical patent/TW200644058A/zh
Publication of TW200644058A publication Critical patent/TW200644058A/zh
Application granted granted Critical
Publication of TWI292177B publication Critical patent/TWI292177B/zh

Links

Landscapes

  • ing And Chemical Polishing (AREA)
TW094118463A 2005-06-03 2005-06-03 De-bubble device for etching liquid TW200644058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094118463A TW200644058A (en) 2005-06-03 2005-06-03 De-bubble device for etching liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094118463A TW200644058A (en) 2005-06-03 2005-06-03 De-bubble device for etching liquid

Publications (2)

Publication Number Publication Date
TW200644058A true TW200644058A (en) 2006-12-16
TWI292177B TWI292177B (enrdf_load_stackoverflow) 2008-01-01

Family

ID=45067441

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094118463A TW200644058A (en) 2005-06-03 2005-06-03 De-bubble device for etching liquid

Country Status (1)

Country Link
TW (1) TW200644058A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
TWI292177B (enrdf_load_stackoverflow) 2008-01-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees