TW200639263A - Method for sputter-coating multilayer film on sheet work-piece at low temperature - Google Patents

Method for sputter-coating multilayer film on sheet work-piece at low temperature

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Publication number
TW200639263A
TW200639263A TW094115714A TW94115714A TW200639263A TW 200639263 A TW200639263 A TW 200639263A TW 094115714 A TW094115714 A TW 094115714A TW 94115714 A TW94115714 A TW 94115714A TW 200639263 A TW200639263 A TW 200639263A
Authority
TW
Taiwan
Prior art keywords
multilayer film
production
sputter
piece
low temperature
Prior art date
Application number
TW094115714A
Other languages
Chinese (zh)
Other versions
TWI287045B (en
Inventor
zhao-jie Zhu
Xu-Fu Hong
Yi-Wen Li
Jian-Min Weng
zi-wen Zhu
Original Assignee
Applied Vacuum Coating Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Vacuum Coating Technologies Co Ltd filed Critical Applied Vacuum Coating Technologies Co Ltd
Priority to TW94115714A priority Critical patent/TWI287045B/en
Publication of TW200639263A publication Critical patent/TW200639263A/en
Application granted granted Critical
Publication of TWI287045B publication Critical patent/TWI287045B/en

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Abstract

A method for sputter-coating a multilayer film a sheet work-piece at low temperature has an advantage of easy production control when it is easy to facilitate and, during mass production, good for continuous production so can be applied in the production control and management of mass production in high-level multilayer film panel for manufacturers of photoelectric raw materials and is better than the conventional monitoring method of ITO high-level multilayer film panel. The method mainly uses the characteristic of easily location from flake work pieces in the production. In the process of arranged continuous production, the surface of plasma clean sheet combines with traditional sputtering coating machine to meet the purpose of convenience in assembly and high-level material mass production.
TW94115714A 2005-05-13 2005-05-13 Method for sputter-coating multilayer film on sheet work-piece at low temperature TWI287045B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94115714A TWI287045B (en) 2005-05-13 2005-05-13 Method for sputter-coating multilayer film on sheet work-piece at low temperature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94115714A TWI287045B (en) 2005-05-13 2005-05-13 Method for sputter-coating multilayer film on sheet work-piece at low temperature

Publications (2)

Publication Number Publication Date
TW200639263A true TW200639263A (en) 2006-11-16
TWI287045B TWI287045B (en) 2007-09-21

Family

ID=39460203

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94115714A TWI287045B (en) 2005-05-13 2005-05-13 Method for sputter-coating multilayer film on sheet work-piece at low temperature

Country Status (1)

Country Link
TW (1) TWI287045B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI409351B (en) * 2007-01-09 2013-09-21 Ulvac Inc Method and apparatus for forming multilayer film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI513840B (en) * 2014-12-25 2015-12-21 Linco Technology Co Ltd Production method of multilayer film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI409351B (en) * 2007-01-09 2013-09-21 Ulvac Inc Method and apparatus for forming multilayer film

Also Published As

Publication number Publication date
TWI287045B (en) 2007-09-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees