TW200639263A - Method for sputter-coating multilayer film on sheet work-piece at low temperature - Google Patents
Method for sputter-coating multilayer film on sheet work-piece at low temperatureInfo
- Publication number
- TW200639263A TW200639263A TW094115714A TW94115714A TW200639263A TW 200639263 A TW200639263 A TW 200639263A TW 094115714 A TW094115714 A TW 094115714A TW 94115714 A TW94115714 A TW 94115714A TW 200639263 A TW200639263 A TW 200639263A
- Authority
- TW
- Taiwan
- Prior art keywords
- multilayer film
- production
- sputter
- piece
- low temperature
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
A method for sputter-coating a multilayer film a sheet work-piece at low temperature has an advantage of easy production control when it is easy to facilitate and, during mass production, good for continuous production so can be applied in the production control and management of mass production in high-level multilayer film panel for manufacturers of photoelectric raw materials and is better than the conventional monitoring method of ITO high-level multilayer film panel. The method mainly uses the characteristic of easily location from flake work pieces in the production. In the process of arranged continuous production, the surface of plasma clean sheet combines with traditional sputtering coating machine to meet the purpose of convenience in assembly and high-level material mass production.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94115714A TWI287045B (en) | 2005-05-13 | 2005-05-13 | Method for sputter-coating multilayer film on sheet work-piece at low temperature |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94115714A TWI287045B (en) | 2005-05-13 | 2005-05-13 | Method for sputter-coating multilayer film on sheet work-piece at low temperature |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200639263A true TW200639263A (en) | 2006-11-16 |
TWI287045B TWI287045B (en) | 2007-09-21 |
Family
ID=39460203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94115714A TWI287045B (en) | 2005-05-13 | 2005-05-13 | Method for sputter-coating multilayer film on sheet work-piece at low temperature |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI287045B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI409351B (en) * | 2007-01-09 | 2013-09-21 | Ulvac Inc | Method and apparatus for forming multilayer film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI513840B (en) * | 2014-12-25 | 2015-12-21 | Linco Technology Co Ltd | Production method of multilayer film |
-
2005
- 2005-05-13 TW TW94115714A patent/TWI287045B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI409351B (en) * | 2007-01-09 | 2013-09-21 | Ulvac Inc | Method and apparatus for forming multilayer film |
Also Published As
Publication number | Publication date |
---|---|
TWI287045B (en) | 2007-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |