TW200638105A - A forming apparatus for the plasma polymer film - Google Patents

A forming apparatus for the plasma polymer film

Info

Publication number
TW200638105A
TW200638105A TW095119837A TW95119837A TW200638105A TW 200638105 A TW200638105 A TW 200638105A TW 095119837 A TW095119837 A TW 095119837A TW 95119837 A TW95119837 A TW 95119837A TW 200638105 A TW200638105 A TW 200638105A
Authority
TW
Taiwan
Prior art keywords
electrode
polymer film
plasma
gases
plasma polymer
Prior art date
Application number
TW095119837A
Other languages
Chinese (zh)
Inventor
Shigeru Tanata
Original Assignee
Mikuni Denshi Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mikuni Denshi Kk filed Critical Mikuni Denshi Kk
Priority to TW095119837A priority Critical patent/TW200638105A/en
Publication of TW200638105A publication Critical patent/TW200638105A/en

Links

Abstract

The invention relates to a forming apparatus for the plasma polymer film. Its characteristic is that the electrode with applying high-frequency voltage is allocated in the bottom of apparatus, and connected with cooling plate. The substrate is mounted above the electrode that is allocated in the top area connected with optical chopper frame to generate the closed plasma reaction casing. The gases from the side of the closed plasma reaction casing and the top plate to be heated to 200 DEG C. Even though via plasma treatment, the process does not generate plasma polymer film for the CH4 gases. The gases of VTMS, DMDES or HMDSO are reacted with the hydrocarbon gases using plasma treatment. The plasma polymer film is generated on the area of effective pixels. Moving the Rf electrode into the bottom region and splitting the optical chopper and Rf electrode. The Rf electrode is cooled down due to the connecting with the cooling plate.
TW095119837A 2006-06-05 2006-06-05 A forming apparatus for the plasma polymer film TW200638105A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095119837A TW200638105A (en) 2006-06-05 2006-06-05 A forming apparatus for the plasma polymer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095119837A TW200638105A (en) 2006-06-05 2006-06-05 A forming apparatus for the plasma polymer film

Publications (1)

Publication Number Publication Date
TW200638105A true TW200638105A (en) 2006-11-01

Family

ID=57809653

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095119837A TW200638105A (en) 2006-06-05 2006-06-05 A forming apparatus for the plasma polymer film

Country Status (1)

Country Link
TW (1) TW200638105A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI407900B (en) * 2010-06-25 2013-09-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI407900B (en) * 2010-06-25 2013-09-01

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