TW200635845A - MEMS switches with deforming membranes - Google Patents
MEMS switches with deforming membranesInfo
- Publication number
- TW200635845A TW200635845A TW094133425A TW94133425A TW200635845A TW 200635845 A TW200635845 A TW 200635845A TW 094133425 A TW094133425 A TW 094133425A TW 94133425 A TW94133425 A TW 94133425A TW 200635845 A TW200635845 A TW 200635845A
- Authority
- TW
- Taiwan
- Prior art keywords
- mems switches
- membranes
- deforming
- deforming membranes
- application
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
- G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Push-Button Switches (AREA)
- Micromachines (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61350104P | 2004-09-27 | 2004-09-27 | |
US61346504P | 2004-09-27 | 2004-09-27 | |
US11/144,546 US8008736B2 (en) | 2004-09-27 | 2005-06-03 | Analog interferometric modulator device |
US11/150,407 US7345805B2 (en) | 2004-09-27 | 2005-06-10 | Interferometric modulator array with integrated MEMS electrical switches |
US11/198,925 US7724993B2 (en) | 2004-09-27 | 2005-08-05 | MEMS switches with deforming membranes |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200635845A true TW200635845A (en) | 2006-10-16 |
Family
ID=35501242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094133425A TW200635845A (en) | 2004-09-27 | 2005-09-26 | MEMS switches with deforming membranes |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1809568A2 (ja) |
JP (1) | JP2008515150A (ja) |
MX (1) | MX2007003577A (ja) |
TW (1) | TW200635845A (ja) |
WO (1) | WO2006036560A2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1850360A1 (en) * | 2006-04-26 | 2007-10-31 | Seiko Epson Corporation | Microswitch with a first actuated portion and a second contact portion |
US7649671B2 (en) * | 2006-06-01 | 2010-01-19 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device with electrostatic actuation and release |
US7724417B2 (en) * | 2006-12-19 | 2010-05-25 | Qualcomm Mems Technologies, Inc. | MEMS switches with deforming membranes |
EP2344416B1 (en) | 2008-11-07 | 2020-08-05 | Cavendish Kinetics, Inc. | Plurality of smaller mems devices to replace a larger mems device |
US8115383B2 (en) * | 2009-10-29 | 2012-02-14 | Global Oled Technology Llc | Electroluminescent area illumination with integrated mechanical switch |
US8576029B2 (en) | 2010-06-17 | 2013-11-05 | General Electric Company | MEMS switching array having a substrate arranged to conduct switching current |
RU2532684C2 (ru) * | 2013-05-23 | 2014-11-10 | Общество с ограниченной ответственностью "СПИНТЕК" | Переключатель и коммутатор |
US11615924B2 (en) * | 2020-10-25 | 2023-03-28 | AAC Technologies Pte. Ltd. | MEMS switch |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4109992B2 (ja) * | 2001-01-30 | 2008-07-02 | 株式会社アドバンテスト | スイッチ、及び集積化回路装置 |
EP1357571A1 (de) * | 2002-04-24 | 2003-10-29 | Abb Research Ltd. | Mikro-elektromechanisches System und Verfahren zu dessen Herstellung |
-
2005
- 2005-09-14 EP EP05798437A patent/EP1809568A2/en not_active Withdrawn
- 2005-09-14 JP JP2007533542A patent/JP2008515150A/ja not_active Withdrawn
- 2005-09-14 MX MX2007003577A patent/MX2007003577A/es not_active Application Discontinuation
- 2005-09-14 WO PCT/US2005/032782 patent/WO2006036560A2/en active Application Filing
- 2005-09-26 TW TW094133425A patent/TW200635845A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2006036560A3 (en) | 2006-05-04 |
JP2008515150A (ja) | 2008-05-08 |
EP1809568A2 (en) | 2007-07-25 |
MX2007003577A (es) | 2007-05-23 |
WO2006036560A2 (en) | 2006-04-06 |
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