TW200634434A - Compressing pattern transfer process using silicification acid polymer material - Google Patents

Compressing pattern transfer process using silicification acid polymer material

Info

Publication number
TW200634434A
TW200634434A TW094107961A TW94107961A TW200634434A TW 200634434 A TW200634434 A TW 200634434A TW 094107961 A TW094107961 A TW 094107961A TW 94107961 A TW94107961 A TW 94107961A TW 200634434 A TW200634434 A TW 200634434A
Authority
TW
Taiwan
Prior art keywords
silicification
pattern transfer
transfer process
polymer
acid
Prior art date
Application number
TW094107961A
Other languages
Chinese (zh)
Other versions
TWI296355B (en
Inventor
Lian-Chong Xu
Wen-Chang Liau
Min-Shiung Hung
Jau-Nan Hung
Original Assignee
Univ Nat Cheng Kung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Cheng Kung filed Critical Univ Nat Cheng Kung
Priority to TW094107961A priority Critical patent/TW200634434A/en
Publication of TW200634434A publication Critical patent/TW200634434A/en
Application granted granted Critical
Publication of TWI296355B publication Critical patent/TWI296355B/zh

Links

Abstract

The present invention provides a compressing pattern transfer process for silicification acid polymer material, which uses a plurality of monomers including acid monomers and silicon monomers to synthesize polymer resist via a polymerization process. Since the polymer resist is an acid silicification polymer, it can be removed by using environmental protection type alkaline water solution, without applying expensive dry etching or organic solvent for removal, when the polymer resist is coated on the substrate for performing hot embossing imprint pattern transfer process, thereby speeding up the manufacturing process, reducing the consumption of machine and the material cost.
TW094107961A 2005-03-16 2005-03-16 Compressing pattern transfer process using silicification acid polymer material TW200634434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094107961A TW200634434A (en) 2005-03-16 2005-03-16 Compressing pattern transfer process using silicification acid polymer material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094107961A TW200634434A (en) 2005-03-16 2005-03-16 Compressing pattern transfer process using silicification acid polymer material

Publications (2)

Publication Number Publication Date
TW200634434A true TW200634434A (en) 2006-10-01
TWI296355B TWI296355B (en) 2008-05-01

Family

ID=45068736

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094107961A TW200634434A (en) 2005-03-16 2005-03-16 Compressing pattern transfer process using silicification acid polymer material

Country Status (1)

Country Link
TW (1) TW200634434A (en)

Also Published As

Publication number Publication date
TWI296355B (en) 2008-05-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees