TW200633079A - Deposition apparatus and method of depositing film - Google Patents

Deposition apparatus and method of depositing film

Info

Publication number
TW200633079A
TW200633079A TW094106212A TW94106212A TW200633079A TW 200633079 A TW200633079 A TW 200633079A TW 094106212 A TW094106212 A TW 094106212A TW 94106212 A TW94106212 A TW 94106212A TW 200633079 A TW200633079 A TW 200633079A
Authority
TW
Taiwan
Prior art keywords
deposition apparatus
depositing film
support table
lift pins
device support
Prior art date
Application number
TW094106212A
Other languages
Chinese (zh)
Other versions
TWI254385B (en
Inventor
Fa-Jen Tang
Yi-Chang Liao
Yuan-Chih Chuang
Original Assignee
Powerchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Semiconductor Corp filed Critical Powerchip Semiconductor Corp
Priority to TW94106212A priority Critical patent/TWI254385B/en
Application granted granted Critical
Publication of TWI254385B publication Critical patent/TWI254385B/en
Publication of TW200633079A publication Critical patent/TW200633079A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

A deposition apparatus is provided. The deposition apparatus includes a device carrier table, a device support table, and many lift pins at least. The device carrier table has many holes, while the device support table is located under the device carrier table. Also, the lift pins are fixed on the device support table, and can cross the holes.
TW94106212A 2005-03-02 2005-03-02 Deposition apparatus and method of depositing film TWI254385B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94106212A TWI254385B (en) 2005-03-02 2005-03-02 Deposition apparatus and method of depositing film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94106212A TWI254385B (en) 2005-03-02 2005-03-02 Deposition apparatus and method of depositing film

Publications (2)

Publication Number Publication Date
TWI254385B TWI254385B (en) 2006-05-01
TW200633079A true TW200633079A (en) 2006-09-16

Family

ID=37587295

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94106212A TWI254385B (en) 2005-03-02 2005-03-02 Deposition apparatus and method of depositing film

Country Status (1)

Country Link
TW (1) TWI254385B (en)

Also Published As

Publication number Publication date
TWI254385B (en) 2006-05-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees