TW200630165A - Coating apparatus - Google Patents

Coating apparatus

Info

Publication number
TW200630165A
TW200630165A TW094141923A TW94141923A TW200630165A TW 200630165 A TW200630165 A TW 200630165A TW 094141923 A TW094141923 A TW 094141923A TW 94141923 A TW94141923 A TW 94141923A TW 200630165 A TW200630165 A TW 200630165A
Authority
TW
Taiwan
Prior art keywords
rails
gate
type transfer
transfer mechanisms
coating apparatus
Prior art date
Application number
TW094141923A
Other languages
Chinese (zh)
Other versions
TWI362969B (en
Inventor
Shinji Takase
Kazunobu Yamaguchi
Atsuo Kajima
Tsuneo Tanimoto
Yuki Yamamoto
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Tazmo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd, Tazmo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200630165A publication Critical patent/TW200630165A/en
Application granted granted Critical
Publication of TWI362969B publication Critical patent/TWI362969B/en

Links

Landscapes

  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)

Abstract

To provide a coating apparatus advantageous in space which can continuously coat a glass substrate with a coating liquid. A pair of parallel rails (2, 2) are installed on a base plate (1), a substrate placing stage (3) is arranged in the center between the rails (2, 2), a first and a second gate-type transfer mechanisms (4, 5) are laid symmetrically about a center line (L) crossing the rails at a right angle in a width direction of the substrate placing stage as a reference in a plan view and independently across the rails in a freely moving way, and slit nozzles (6, 7) are held to the gate-type transfer mechanisms (4, 5) in a liftable way.
TW094141923A 2004-11-29 2005-11-29 Coating apparatus TWI362969B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004343389 2004-11-29
JP2005070521A JP3836119B2 (en) 2004-11-29 2005-03-14 Coating device

Publications (2)

Publication Number Publication Date
TW200630165A true TW200630165A (en) 2006-09-01
TWI362969B TWI362969B (en) 2012-05-01

Family

ID=36730020

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094141923A TWI362969B (en) 2004-11-29 2005-11-29 Coating apparatus

Country Status (3)

Country Link
JP (1) JP3836119B2 (en)
KR (1) KR101234830B1 (en)
TW (1) TWI362969B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111888106A (en) * 2020-08-21 2020-11-06 耿凡龙 Stretcher is transported in first aid of intracardiac branch of academic or vocational study patient

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100803147B1 (en) * 2007-04-04 2008-02-14 세메스 주식회사 Slit coater and method of coating a process solution on a substrate using the same
JP5303129B2 (en) * 2007-09-06 2013-10-02 東京応化工業株式会社 Coating apparatus and coating method
EP2248597A1 (en) 2008-02-08 2010-11-10 Central Glass Company, Limited Device and method for applying application liquid
KR101020304B1 (en) * 2009-06-10 2011-03-08 조봉철 Horizontal application tool with stop and moving device
KR101288071B1 (en) * 2012-03-30 2013-07-19 주식회사 디씨엔 Slot coater
JP6452318B2 (en) * 2014-05-20 2019-01-16 中外炉工業株式会社 Substrate coating apparatus and substrate coating method
CN105618300B (en) * 2015-12-25 2018-10-30 天津滨海光热反射技术有限公司 It is exclusively used in making the spraying equipment and its operation method of photo-thermal power generation speculum
JP2018113327A (en) * 2017-01-11 2018-07-19 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing apparatus
JP6817861B2 (en) * 2017-03-23 2021-01-20 株式会社Ｓｃｒｅｅｎホールディングス Coating device and coating method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0910653A (en) * 1995-06-30 1997-01-14 Sony Corp Coater
JP3629358B2 (en) * 1997-11-28 2005-03-16 大日本スクリーン製造株式会社 Treatment liquid application equipment
JP4419303B2 (en) * 2000-09-27 2010-02-24 東レ株式会社 Coating apparatus and coating method, and color filter manufacturing apparatus and manufacturing method
JP2003236435A (en) * 2002-02-18 2003-08-26 Hirata Corp Liquid coating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111888106A (en) * 2020-08-21 2020-11-06 耿凡龙 Stretcher is transported in first aid of intracardiac branch of academic or vocational study patient

Also Published As

Publication number Publication date
JP2006175421A (en) 2006-07-06
KR20060059836A (en) 2006-06-02
TWI362969B (en) 2012-05-01
JP3836119B2 (en) 2006-10-18
KR101234830B1 (en) 2013-02-19

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