TW200629463A - Replaceable precursor tray for use in a multi-tray solid precursor delivery system - Google Patents
Replaceable precursor tray for use in a multi-tray solid precursor delivery systemInfo
- Publication number
- TW200629463A TW200629463A TW094143637A TW94143637A TW200629463A TW 200629463 A TW200629463 A TW 200629463A TW 094143637 A TW094143637 A TW 094143637A TW 94143637 A TW94143637 A TW 94143637A TW 200629463 A TW200629463 A TW 200629463A
- Authority
- TW
- Taiwan
- Prior art keywords
- tray
- precursor
- solid
- replaceable
- film
- Prior art date
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
A replaceable precursor tray for use with a high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation system is configured to be coupled to the process chamber of a thin film deposition system, and it includes a base tray with one or more stackable upper trays. Each tray is configured to support and retain film precursor in, for example, solid powder form or solid tablet form. Additionally, each tray is configured to provide for a high conductance flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor, and vertically upward through a flow channel within the stackable trays and through an outlet in the solid precursor evaporation system.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/007,962 US7484315B2 (en) | 2004-11-29 | 2004-12-09 | Replaceable precursor tray for use in a multi-tray solid precursor delivery system |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200629463A true TW200629463A (en) | 2006-08-16 |
TWI306642B TWI306642B (en) | 2009-02-21 |
Family
ID=45071444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94143637A TWI306642B (en) | 2004-12-09 | 2005-12-09 | Replaceable precursor tray for use in a multi-tray solid precursor delivery system |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI306642B (en) |
-
2005
- 2005-12-09 TW TW94143637A patent/TWI306642B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI306642B (en) | 2009-02-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |