TW200629463A - Replaceable precursor tray for use in a multi-tray solid precursor delivery system - Google Patents

Replaceable precursor tray for use in a multi-tray solid precursor delivery system

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Publication number
TW200629463A
TW200629463A TW094143637A TW94143637A TW200629463A TW 200629463 A TW200629463 A TW 200629463A TW 094143637 A TW094143637 A TW 094143637A TW 94143637 A TW94143637 A TW 94143637A TW 200629463 A TW200629463 A TW 200629463A
Authority
TW
Taiwan
Prior art keywords
tray
precursor
solid
replaceable
film
Prior art date
Application number
TW094143637A
Other languages
Chinese (zh)
Other versions
TWI306642B (en
Inventor
Kenji Suzuki
Emmanuel P Guidotti
Gerrit J Leusink
Masamichi Hara
Daisuke Kuroiwa
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/007,962 external-priority patent/US7484315B2/en
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200629463A publication Critical patent/TW200629463A/en
Application granted granted Critical
Publication of TWI306642B publication Critical patent/TWI306642B/en

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  • Chemical Vapour Deposition (AREA)

Abstract

A replaceable precursor tray for use with a high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation system is configured to be coupled to the process chamber of a thin film deposition system, and it includes a base tray with one or more stackable upper trays. Each tray is configured to support and retain film precursor in, for example, solid powder form or solid tablet form. Additionally, each tray is configured to provide for a high conductance flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor, and vertically upward through a flow channel within the stackable trays and through an outlet in the solid precursor evaporation system.
TW94143637A 2004-12-09 2005-12-09 Replaceable precursor tray for use in a multi-tray solid precursor delivery system TWI306642B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/007,962 US7484315B2 (en) 2004-11-29 2004-12-09 Replaceable precursor tray for use in a multi-tray solid precursor delivery system

Publications (2)

Publication Number Publication Date
TW200629463A true TW200629463A (en) 2006-08-16
TWI306642B TWI306642B (en) 2009-02-21

Family

ID=45071444

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94143637A TWI306642B (en) 2004-12-09 2005-12-09 Replaceable precursor tray for use in a multi-tray solid precursor delivery system

Country Status (1)

Country Link
TW (1) TWI306642B (en)

Also Published As

Publication number Publication date
TWI306642B (en) 2009-02-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees