TW200627571A - Micro contact device and fabricating method thereof - Google Patents

Micro contact device and fabricating method thereof

Info

Publication number
TW200627571A
TW200627571A TW094102382A TW94102382A TW200627571A TW 200627571 A TW200627571 A TW 200627571A TW 094102382 A TW094102382 A TW 094102382A TW 94102382 A TW94102382 A TW 94102382A TW 200627571 A TW200627571 A TW 200627571A
Authority
TW
Taiwan
Prior art keywords
contact device
micro contact
fabricating method
conductive
masking layer
Prior art date
Application number
TW094102382A
Other languages
Chinese (zh)
Other versions
TWI261890B (en
Inventor
Chin-Chung Chen
Original Assignee
Mjc Probe Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mjc Probe Inc filed Critical Mjc Probe Inc
Priority to TW94102382A priority Critical patent/TWI261890B/en
Publication of TW200627571A publication Critical patent/TW200627571A/en
Application granted granted Critical
Publication of TWI261890B publication Critical patent/TWI261890B/en

Links

Abstract

The present invention relates to a micro contact device and fabricating method thereof. The method includes the steps of forming a conductive thin film on a substrate having a con-conductive surface; forming a masking layer with a patterned opening on the conductive thin film; depositing a conductive material in the opening of the masking layer; removing the masking layer; removing the conductive thin layer to separate a micro contact device built by a conductive material from the substrate.
TW94102382A 2005-01-26 2005-01-26 Micro contact device and fabricating method thereof TWI261890B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94102382A TWI261890B (en) 2005-01-26 2005-01-26 Micro contact device and fabricating method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94102382A TWI261890B (en) 2005-01-26 2005-01-26 Micro contact device and fabricating method thereof

Publications (2)

Publication Number Publication Date
TW200627571A true TW200627571A (en) 2006-08-01
TWI261890B TWI261890B (en) 2006-09-11

Family

ID=37987033

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94102382A TWI261890B (en) 2005-01-26 2005-01-26 Micro contact device and fabricating method thereof

Country Status (1)

Country Link
TW (1) TWI261890B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI410636B (en) * 2010-10-13 2013-10-01 Adl Engineering Inc Probe card
TWI829897B (en) * 2020-03-23 2024-01-21 旺矽科技股份有限公司 Probe manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI410636B (en) * 2010-10-13 2013-10-01 Adl Engineering Inc Probe card
TWI829897B (en) * 2020-03-23 2024-01-21 旺矽科技股份有限公司 Probe manufacturing method

Also Published As

Publication number Publication date
TWI261890B (en) 2006-09-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees