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Application filed by Mjc Probe IncfiledCriticalMjc Probe Inc
Priority to TW94102382ApriorityCriticalpatent/TWI261890B/en
Publication of TW200627571ApublicationCriticalpatent/TW200627571A/en
Application grantedgrantedCritical
Publication of TWI261890BpublicationCriticalpatent/TWI261890B/en
The present invention relates to a micro contact device and fabricating method thereof. The method includes the steps of forming a conductive thin film on a substrate having a con-conductive surface; forming a masking layer with a patterned opening on the conductive thin film; depositing a conductive material in the opening of the masking layer; removing the masking layer; removing the conductive thin layer to separate a micro contact device built by a conductive material from the substrate.
TW94102382A2005-01-262005-01-26Micro contact device and fabricating method thereof
TWI261890B
(en)