TW200626879A - System and method for calibration of a flow device - Google Patents

System and method for calibration of a flow device

Info

Publication number
TW200626879A
TW200626879A TW094127572A TW94127572A TW200626879A TW 200626879 A TW200626879 A TW 200626879A TW 094127572 A TW094127572 A TW 094127572A TW 94127572 A TW94127572 A TW 94127572A TW 200626879 A TW200626879 A TW 200626879A
Authority
TW
Taiwan
Prior art keywords
flow
calibration
flow device
curve
correction factors
Prior art date
Application number
TW094127572A
Other languages
English (en)
Chinese (zh)
Inventor
Marc Laverdiere
Robert Mcloughlin
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200626879A publication Critical patent/TW200626879A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Artificial Intelligence (AREA)
  • Health & Medical Sciences (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
TW094127572A 2004-08-13 2005-08-12 System and method for calibration of a flow device TW200626879A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60142404P 2004-08-13 2004-08-13

Publications (1)

Publication Number Publication Date
TW200626879A true TW200626879A (en) 2006-08-01

Family

ID=35907756

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094127572A TW200626879A (en) 2004-08-13 2005-08-12 System and method for calibration of a flow device

Country Status (7)

Country Link
US (1) US20080221822A1 (cg-RX-API-DMAC7.html)
EP (1) EP1779073A4 (cg-RX-API-DMAC7.html)
JP (1) JP2008510147A (cg-RX-API-DMAC7.html)
KR (1) KR20070056092A (cg-RX-API-DMAC7.html)
CN (1) CN101048645A (cg-RX-API-DMAC7.html)
TW (1) TW200626879A (cg-RX-API-DMAC7.html)
WO (1) WO2006020870A1 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
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TWI587115B (zh) * 2013-08-27 2017-06-11 盛美半導體設備（上海）有限公司 Cleaning fluid flow control system and control method

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CN106969812A (zh) * 2017-04-05 2017-07-21 深圳市美好创亿医疗科技有限公司 流量传感器校准方法及系统
US10935407B2 (en) * 2017-07-25 2021-03-02 Ecolab Usa Inc. Fluid flow meter with viscosity correction
CN110058054A (zh) * 2018-01-18 2019-07-26 张晨光 一种呼吸测量设备的校准装置和方法
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US11105512B2 (en) 2018-03-30 2021-08-31 Midea Group Co., Ltd Method and system for controlling a flow curve of an electromechanical gas valve
US10476549B1 (en) * 2018-05-04 2019-11-12 Futurewei Technologies, Inc. Transmitter linearity built-in-self-test
DE102018126230A1 (de) * 2018-10-22 2020-04-23 Truedyne Sensors AG Verfahren zum Verifizieren eines Dichte- und/oder Viskositätsmessgerätes in einer Messstelle
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CN113778141B (zh) * 2021-08-05 2023-10-13 浙江省机电设计研究院有限公司 一种分段pid控制的流体管道流量控制系统
CN114235111B (zh) * 2022-02-24 2022-07-15 青岛鼎信通讯股份有限公司 一种基于模型优化的超声波水表流量校准方法
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CN114910134A (zh) * 2022-04-19 2022-08-16 佛山市川东磁电股份有限公司 一种流量传感器及流量传感器校准方法
CN114942060B (zh) * 2022-05-26 2025-01-28 国家石油天然气管网集团有限公司 一种天然气计量标准装置在线核查的方法
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Publication number Priority date Publication date Assignee Title
TWI587115B (zh) * 2013-08-27 2017-06-11 盛美半導體設備（上海）有限公司 Cleaning fluid flow control system and control method

Also Published As

Publication number Publication date
KR20070056092A (ko) 2007-05-31
CN101048645A (zh) 2007-10-03
US20080221822A1 (en) 2008-09-11
WO2006020870A1 (en) 2006-02-23
JP2008510147A (ja) 2008-04-03
EP1779073A1 (en) 2007-05-02
EP1779073A4 (en) 2008-05-07

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