TW200621595A - A wafer storage box and plate-like material retrieving system - Google Patents

A wafer storage box and plate-like material retrieving system

Info

Publication number
TW200621595A
TW200621595A TW094126594A TW94126594A TW200621595A TW 200621595 A TW200621595 A TW 200621595A TW 094126594 A TW094126594 A TW 094126594A TW 94126594 A TW94126594 A TW 94126594A TW 200621595 A TW200621595 A TW 200621595A
Authority
TW
Taiwan
Prior art keywords
plate
storage box
wafer storage
retrieving system
retrieving
Prior art date
Application number
TW094126594A
Other languages
Chinese (zh)
Inventor
Katsumi Matsuba
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of TW200621595A publication Critical patent/TW200621595A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

The problem to be solved is to provide a retrieving system for plate-like material from wafer storage box that has a narrow interlayer space for high-density storage. The solution means of this invention: A plate-like material retrieving system comprises a wafer storage box (10) that containing a plural number plate-like materials (G), and retrieving system that retrieves the plate-like material one by one from the wafer storage box. There are air blow openings (12,22) for blowing air to elevate the plate-like material (G) on the carrying device (11,25) of the storage box (10) and the retrieve device (20), and a retrieving means for holding the edge of the floated materials (G) to be extracted.
TW094126594A 2004-12-24 2005-08-04 A wafer storage box and plate-like material retrieving system TW200621595A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004373823A JP2006176190A (en) 2004-12-24 2004-12-24 Cassette and sheet material extraction system

Publications (1)

Publication Number Publication Date
TW200621595A true TW200621595A (en) 2006-07-01

Family

ID=36730674

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094126594A TW200621595A (en) 2004-12-24 2005-08-04 A wafer storage box and plate-like material retrieving system

Country Status (3)

Country Link
JP (1) JP2006176190A (en)
KR (1) KR100894655B1 (en)
TW (1) TW200621595A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006176190A (en) 2004-12-24 2006-07-06 Murata Mach Ltd Cassette and sheet material extraction system
CN112239084B (en) * 2020-10-12 2022-06-28 临沂众旭机械有限公司 Suspension reversing type high-precision glass panel conveying manipulator
CN112239083B (en) * 2020-10-12 2022-05-06 桑宏昌 Air hole reversing type suspension high-precision glass panel conveying robot complete machine

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4274601B2 (en) 1998-07-08 2009-06-10 昌之 都田 Substrate transfer device and operation method thereof
JP2000174088A (en) 1998-12-04 2000-06-23 Super Silicon Kenkyusho:Kk Wafer loader
JP4246507B2 (en) * 2002-05-07 2009-04-02 コーニングジャパン株式会社 Large sheet container and large sheet feeder
JP2006176190A (en) 2004-12-24 2006-07-06 Murata Mach Ltd Cassette and sheet material extraction system

Also Published As

Publication number Publication date
JP2006176190A (en) 2006-07-06
KR20060073430A (en) 2006-06-28
KR100894655B1 (en) 2009-04-24

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