TW200619869A - Light-source unit for scanning exposure - Google Patents

Light-source unit for scanning exposure

Info

Publication number
TW200619869A
TW200619869A TW094139129A TW94139129A TW200619869A TW 200619869 A TW200619869 A TW 200619869A TW 094139129 A TW094139129 A TW 094139129A TW 94139129 A TW94139129 A TW 94139129A TW 200619869 A TW200619869 A TW 200619869A
Authority
TW
Taiwan
Prior art keywords
light
source unit
exposure
scanning exposure
relative displacement
Prior art date
Application number
TW094139129A
Other languages
Chinese (zh)
Inventor
Eiichi Miyake
Original Assignee
Sanei Giken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanei Giken Co Ltd filed Critical Sanei Giken Co Ltd
Publication of TW200619869A publication Critical patent/TW200619869A/en

Links

Abstract

The invention provides a small, light-weighted, and highly reliable light-source unit for scanning exposure. the light-source unit for scanning exposure irradiates an exposure surface with light while making parallel relative displacement with respect to the exposure surface arranged on a substrate. The light-source unit comprises a plurality of light sources arranged along the direction transverse to that of the relative displacement. Each light sources comprises a light-emitting unit 1, which at least has one semiconductor surface-emitting element 5. Assembling a plurality of semiconductor surface-emitting elements 5 in a hexagonal configuration to enter emitted light into optical hexagonal column 6 yields the hexagonally illuminated area of a uniform illumination on the exposure surface
TW094139129A 2004-11-26 2005-11-08 Light-source unit for scanning exposure TW200619869A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004342491 2004-11-26
JP2004348674 2004-12-01
JP2005180316A JP2006186302A (en) 2004-11-26 2005-06-21 Light-source unit for scanning exposure

Publications (1)

Publication Number Publication Date
TW200619869A true TW200619869A (en) 2006-06-16

Family

ID=36739155

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094139129A TW200619869A (en) 2004-11-26 2005-11-08 Light-source unit for scanning exposure

Country Status (3)

Country Link
JP (1) JP2006186302A (en)
KR (1) KR20060059181A (en)
TW (1) TW200619869A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI464339B (en) * 2012-03-03 2014-12-11 Lextar Electronics Corp Light emitting diode bar and light emitting diode module using the same

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5095176B2 (en) * 2006-11-02 2012-12-12 大日本スクリーン製造株式会社 Pattern drawing device
TWI457516B (en) * 2012-02-21 2014-10-21 Lextar Electronics Corp Light-bar assembly
JP2015144179A (en) * 2014-01-31 2015-08-06 東京エレクトロン株式会社 Substrate processing system, substrate processing method, and computer storage medium
CN106707691B (en) * 2015-07-15 2018-10-16 上海微电子装备（集团）股份有限公司 Exposure device and method
CN108535970A (en) * 2018-06-06 2018-09-14 广州嘉禾盛信息科技有限公司 A kind of scan-type UV exposure light source systems of dynamic calibration
JPWO2021193494A1 (en) * 2020-03-23 2021-09-30

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2769751B2 (en) * 1991-08-19 1998-06-25 株式会社オーク製作所 Exposure equipment for image formation
CN1109917C (en) * 1997-04-14 2003-05-28 迪科公司 An apparatus and a method for illuminating a light-sensitive medium
JP4581262B2 (en) * 2000-02-18 2010-11-17 株式会社ニコン Exposure apparatus and exposure method
JP2001350270A (en) * 2000-06-05 2001-12-21 Nikon Corp Aligner
JP4233196B2 (en) * 2000-06-14 2009-03-04 富士フイルム株式会社 Exposure equipment
JP2002072491A (en) * 2000-09-01 2002-03-12 Airex Inc Printed circuit board manufacturing apparatus
JP2004046051A (en) * 2002-05-23 2004-02-12 Sanee Giken Kk Scanning exposure method and scanning exposure device
JP2004009595A (en) * 2002-06-07 2004-01-15 Fuji Photo Film Co Ltd Exposure head and exposure device
JP2004228548A (en) * 2002-11-29 2004-08-12 Nikon Corp Lighting device, exposure device, and exposure method
JP2004207343A (en) * 2002-12-24 2004-07-22 Nikon Corp Illumination light source, illumination apparatus, aligner, and exposing method
JP4315694B2 (en) * 2003-01-31 2009-08-19 富士フイルム株式会社 Drawing head unit, drawing apparatus and drawing method
JP2004325872A (en) * 2003-04-25 2004-11-18 Fuji Photo Film Co Ltd Exposure apparatus and exposure method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI464339B (en) * 2012-03-03 2014-12-11 Lextar Electronics Corp Light emitting diode bar and light emitting diode module using the same

Also Published As

Publication number Publication date
KR20060059181A (en) 2006-06-01
JP2006186302A (en) 2006-07-13

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