TW200618932A - XYθz self-propelled micro/nano precision platform - Google Patents

XYθz self-propelled micro/nano precision platform

Info

Publication number
TW200618932A
TW200618932A TW093137707A TW93137707A TW200618932A TW 200618932 A TW200618932 A TW 200618932A TW 093137707 A TW093137707 A TW 093137707A TW 93137707 A TW93137707 A TW 93137707A TW 200618932 A TW200618932 A TW 200618932A
Authority
TW
Taiwan
Prior art keywords
self
xyθz
platform
nano precision
piezoelectric ceramic
Prior art date
Application number
TW093137707A
Other languages
Chinese (zh)
Inventor
Rong-Fong Fung
Yue-Ying Tsai
Sheng-Chuen Hu
Original Assignee
Rong-Fong Fung
Yue-Ying Tsai
Sheng-Chuen Hu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rong-Fong Fung, Yue-Ying Tsai, Sheng-Chuen Hu filed Critical Rong-Fong Fung
Priority to TW093137707A priority Critical patent/TW200618932A/en
Publication of TW200618932A publication Critical patent/TW200618932A/en

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  • Manipulator (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

The present invention relates to an XY θz self-propelled micro/nano precision platform, comprising: a octangle external platform, a displacement actuating platform, three sets of flexible hinge, three piezoelectric ceramic actuator fixing slot, and three sheeted bow springs; by the use of a linear cutting process, the above-mentioned components are formed in one piece. The three piezoelectric ceramic actuators are driven by a transient impulse voltage signal, and the transient impulse is passed to the sheeted bow springs so as to move the XYθz self-propelled micro/nano precision platform. If transient impulse voltage signal is input into the piezoelectric ceramic actuator continuously, the displacement scope of the XYθz self-propelled micro/nano precision platform can be extended as well; furthermore, by the use of three different voltage impulse signals to actuate the three piezoelectric ceramic actuators, the XYθz self-propelled micro/nano precision platform can be provided with the displacement on three degrees of freedom on X, Y and θz axes.
TW093137707A 2004-12-07 2004-12-07 XYθz self-propelled micro/nano precision platform TW200618932A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW093137707A TW200618932A (en) 2004-12-07 2004-12-07 XYθz self-propelled micro/nano precision platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093137707A TW200618932A (en) 2004-12-07 2004-12-07 XYθz self-propelled micro/nano precision platform

Publications (1)

Publication Number Publication Date
TW200618932A true TW200618932A (en) 2006-06-16

Family

ID=57808241

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093137707A TW200618932A (en) 2004-12-07 2004-12-07 XYθz self-propelled micro/nano precision platform

Country Status (1)

Country Link
TW (1) TW200618932A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103084299A (en) * 2013-02-22 2013-05-08 厦门大学 Piezoelectric on-off valve type jetting dispensing head
CN103318839A (en) * 2013-03-01 2013-09-25 广东工业大学 Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method
CN109079552A (en) * 2018-08-15 2018-12-25 广东工业大学 A kind of three axis cutter servo devices based on compliant parallel mechanism

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103084299A (en) * 2013-02-22 2013-05-08 厦门大学 Piezoelectric on-off valve type jetting dispensing head
CN103084299B (en) * 2013-02-22 2015-02-04 厦门大学 Piezoelectric on-off valve type jetting dispensing head
CN103318839A (en) * 2013-03-01 2013-09-25 广东工业大学 Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method
CN103318839B (en) * 2013-03-01 2015-12-16 广东工业大学 The grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics and changing method
CN109079552A (en) * 2018-08-15 2018-12-25 广东工业大学 A kind of three axis cutter servo devices based on compliant parallel mechanism

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