TW200618932A - XYθz self-propelled micro/nano precision platform - Google Patents
XYθz self-propelled micro/nano precision platformInfo
- Publication number
- TW200618932A TW200618932A TW093137707A TW93137707A TW200618932A TW 200618932 A TW200618932 A TW 200618932A TW 093137707 A TW093137707 A TW 093137707A TW 93137707 A TW93137707 A TW 93137707A TW 200618932 A TW200618932 A TW 200618932A
- Authority
- TW
- Taiwan
- Prior art keywords
- self
- xyθz
- platform
- nano precision
- piezoelectric ceramic
- Prior art date
Links
Abstract
The present invention relates to an XY θz self-propelled micro/nano precision platform, comprising: a octangle external platform, a displacement actuating platform, three sets of flexible hinge, three piezoelectric ceramic actuator fixing slot, and three sheeted bow springs; by the use of a linear cutting process, the above-mentioned components are formed in one piece. The three piezoelectric ceramic actuators are driven by a transient impulse voltage signal, and the transient impulse is passed to the sheeted bow springs so as to move the XYθz self-propelled micro/nano precision platform. If transient impulse voltage signal is input into the piezoelectric ceramic actuator continuously, the displacement scope of the XYθz self-propelled micro/nano precision platform can be extended as well; furthermore, by the use of three different voltage impulse signals to actuate the three piezoelectric ceramic actuators, the XYθz self-propelled micro/nano precision platform can be provided with the displacement on three degrees of freedom on X, Y and θz axes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093137707A TW200618932A (en) | 2004-12-07 | 2004-12-07 | XYθz self-propelled micro/nano precision platform |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093137707A TW200618932A (en) | 2004-12-07 | 2004-12-07 | XYθz self-propelled micro/nano precision platform |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200618932A true TW200618932A (en) | 2006-06-16 |
Family
ID=57808241
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093137707A TW200618932A (en) | 2004-12-07 | 2004-12-07 | XYθz self-propelled micro/nano precision platform |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200618932A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103084299A (en) * | 2013-02-22 | 2013-05-08 | 厦门大学 | Piezoelectric on-off valve type jetting dispensing head |
CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
CN109079552A (en) * | 2018-08-15 | 2018-12-25 | 广东工业大学 | A kind of three axis cutter servo devices based on compliant parallel mechanism |
-
2004
- 2004-12-07 TW TW093137707A patent/TW200618932A/en unknown
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103084299A (en) * | 2013-02-22 | 2013-05-08 | 厦门大学 | Piezoelectric on-off valve type jetting dispensing head |
CN103084299B (en) * | 2013-02-22 | 2015-02-04 | 厦门大学 | Piezoelectric on-off valve type jetting dispensing head |
CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
CN103318839B (en) * | 2013-03-01 | 2015-12-16 | 广东工业大学 | The grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics and changing method |
CN109079552A (en) * | 2018-08-15 | 2018-12-25 | 广东工业大学 | A kind of three axis cutter servo devices based on compliant parallel mechanism |
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