TW200618255A - Phase change device and the method of forming the same and phase change memory cell - Google Patents

Phase change device and the method of forming the same and phase change memory cell

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Publication number
TW200618255A
TW200618255A TW093135397A TW93135397A TW200618255A TW 200618255 A TW200618255 A TW 200618255A TW 093135397 A TW093135397 A TW 093135397A TW 93135397 A TW93135397 A TW 93135397A TW 200618255 A TW200618255 A TW 200618255A
Authority
TW
Taiwan
Prior art keywords
phase change
forming
memory cell
same
change device
Prior art date
Application number
TW093135397A
Other languages
Chinese (zh)
Other versions
TWI292950B (en
Inventor
Ming-Hsiu Lee
Yi-Chou Chen
Original Assignee
Macronix Int Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macronix Int Co Ltd filed Critical Macronix Int Co Ltd
Priority to TW93135397A priority Critical patent/TWI292950B/en
Publication of TW200618255A publication Critical patent/TW200618255A/en
Application granted granted Critical
Publication of TWI292950B publication Critical patent/TWI292950B/en

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Abstract

A phase change device includes a first contact electrode structure a phase change material and a first insulating material between the phase change material and the first contact electrode structure and a second contact electrode in contact with the phase change material. A contact structure formed in the first insulating material between the first contact electrode structure and the phase change material is also included. The contact structure is formed by an insulating material breakdown process. A method of forming a phase change device is also described.
TW93135397A 2004-11-18 2004-11-18 Phase change device and the method of forming the same and phase change memory cell TWI292950B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93135397A TWI292950B (en) 2004-11-18 2004-11-18 Phase change device and the method of forming the same and phase change memory cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93135397A TWI292950B (en) 2004-11-18 2004-11-18 Phase change device and the method of forming the same and phase change memory cell

Publications (2)

Publication Number Publication Date
TW200618255A true TW200618255A (en) 2006-06-01
TWI292950B TWI292950B (en) 2008-01-21

Family

ID=45067677

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93135397A TWI292950B (en) 2004-11-18 2004-11-18 Phase change device and the method of forming the same and phase change memory cell

Country Status (1)

Country Link
TW (1) TWI292950B (en)

Also Published As

Publication number Publication date
TWI292950B (en) 2008-01-21

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