TW200613888A - A micromirror array device and a method for making the same - Google Patents

A micromirror array device and a method for making the same

Info

Publication number
TW200613888A
TW200613888A TW094135385A TW94135385A TW200613888A TW 200613888 A TW200613888 A TW 200613888A TW 094135385 A TW094135385 A TW 094135385A TW 94135385 A TW94135385 A TW 94135385A TW 200613888 A TW200613888 A TW 200613888A
Authority
TW
Taiwan
Prior art keywords
micromirror array
making
same
array device
micromirrors
Prior art date
Application number
TW094135385A
Other languages
English (en)
Other versions
TWI421617B (zh
Inventor
Peter Heureux
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of TW200613888A publication Critical patent/TW200613888A/zh
Application granted granted Critical
Publication of TWI421617B publication Critical patent/TWI421617B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
TW094135385A 2004-10-19 2005-10-11 空間光調節器及製造該空間光調節器之方法與使用該空間光調節器之投影/顯示系統 TWI421617B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/969,251 US7092143B2 (en) 2004-10-19 2004-10-19 Micromirror array device and a method for making the same

Publications (2)

Publication Number Publication Date
TW200613888A true TW200613888A (en) 2006-05-01
TWI421617B TWI421617B (zh) 2014-01-01

Family

ID=36180445

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135385A TWI421617B (zh) 2004-10-19 2005-10-11 空間光調節器及製造該空間光調節器之方法與使用該空間光調節器之投影/顯示系統

Country Status (5)

Country Link
US (2) US7092143B2 (zh)
EP (1) EP1805545B1 (zh)
CN (1) CN101213481B (zh)
TW (1) TWI421617B (zh)
WO (1) WO2006044238A2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI639257B (zh) 2016-12-13 2018-10-21 光寶電子（廣州）有限公司 發光裝置
US10120109B2 (en) 2016-12-13 2018-11-06 Lite-On Electronics (Guangzhou) Limited Light emitting device capable of reducing reflected light and changing a focused position of incident light

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US10094530B2 (en) * 2015-06-25 2018-10-09 Texas Instruments Incorporated Apparatus for spatially and spectrally adaptable dichromatic white light source using spatial light modulator

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI639257B (zh) 2016-12-13 2018-10-21 光寶電子（廣州）有限公司 發光裝置
US10120109B2 (en) 2016-12-13 2018-11-06 Lite-On Electronics (Guangzhou) Limited Light emitting device capable of reducing reflected light and changing a focused position of incident light

Also Published As

Publication number Publication date
WO2006044238A3 (en) 2006-08-31
WO2006044238A2 (en) 2006-04-27
US7151628B2 (en) 2006-12-19
US20060082861A1 (en) 2006-04-20
CN101213481B (zh) 2010-12-08
EP1805545A4 (en) 2010-06-30
TWI421617B (zh) 2014-01-01
US7092143B2 (en) 2006-08-15
EP1805545A2 (en) 2007-07-11
US20060082858A1 (en) 2006-04-20
CN101213481A (zh) 2008-07-02
EP1805545B1 (en) 2011-12-28

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