TW200612565A - Method for forming the multi layer electrode capacitor - Google Patents

Method for forming the multi layer electrode capacitor

Info

Publication number
TW200612565A
TW200612565A TW093131065A TW93131065A TW200612565A TW 200612565 A TW200612565 A TW 200612565A TW 093131065 A TW093131065 A TW 093131065A TW 93131065 A TW93131065 A TW 93131065A TW 200612565 A TW200612565 A TW 200612565A
Authority
TW
Taiwan
Prior art keywords
conductive layers
layer electrode
forming
multi layer
electrode capacitor
Prior art date
Application number
TW093131065A
Other languages
Chinese (zh)
Other versions
TWI242292B (en
Inventor
Hsiao-Che Wu
Original Assignee
Promos Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Promos Technologies Inc filed Critical Promos Technologies Inc
Priority to TW093131065A priority Critical patent/TWI242292B/en
Application granted granted Critical
Publication of TWI242292B publication Critical patent/TWI242292B/en
Publication of TW200612565A publication Critical patent/TW200612565A/en

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  • Semiconductor Integrated Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

A method of forming the multi layer electrode capacitor is disclosed. There is a trench formed in a substrate or in an insulator layer. Two sets of conductive layers are deposited on the inner surface of the trench. The first set of conductive layers is electrically connected to each other, and so do the second set of conductive layers. Each of the second set of conductive layers is inserted between two first conductive layers, and dielectric layers are interposed between two conductive layers to form a multi layer electrode capacitor.
TW093131065A 2004-10-13 2004-10-13 Method for forming the multi layer electrode capacitor TWI242292B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW093131065A TWI242292B (en) 2004-10-13 2004-10-13 Method for forming the multi layer electrode capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093131065A TWI242292B (en) 2004-10-13 2004-10-13 Method for forming the multi layer electrode capacitor

Publications (2)

Publication Number Publication Date
TWI242292B TWI242292B (en) 2005-10-21
TW200612565A true TW200612565A (en) 2006-04-16

Family

ID=37021525

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093131065A TWI242292B (en) 2004-10-13 2004-10-13 Method for forming the multi layer electrode capacitor

Country Status (1)

Country Link
TW (1) TWI242292B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113130444B (en) * 2019-12-30 2022-08-26 中芯国际集成电路制造(北京)有限公司 Semiconductor structure and forming method thereof

Also Published As

Publication number Publication date
TWI242292B (en) 2005-10-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees