TW200611173A - Method for aligning an inspection window - Google Patents

Method for aligning an inspection window

Info

Publication number
TW200611173A
TW200611173A TW093129307A TW93129307A TW200611173A TW 200611173 A TW200611173 A TW 200611173A TW 093129307 A TW093129307 A TW 093129307A TW 93129307 A TW93129307 A TW 93129307A TW 200611173 A TW200611173 A TW 200611173A
Authority
TW
Taiwan
Prior art keywords
inspection window
aligning
recipe
setting
whole image
Prior art date
Application number
TW093129307A
Other languages
Chinese (zh)
Other versions
TWI273461B (en
Inventor
Tetsuo Kubo
Original Assignee
Kubotek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kubotek Corp filed Critical Kubotek Corp
Priority to TW93129307A priority Critical patent/TWI273461B/en
Publication of TW200611173A publication Critical patent/TW200611173A/en
Application granted granted Critical
Publication of TWI273461B publication Critical patent/TWI273461B/en

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
  • Image Processing (AREA)

Abstract

This invention provides a method for aligning an inspection window. Said inspection window is adapted for setting a recipe. And according to the recipe, a digital signal process for detecting a defect on an object is processed. The method of the invention comprises the steps of scanning the object for obtaining a whole image of the object; making an inspection window within the whole image; marking at least an alignment marks; setting at least an alignment windows surrounding the alignment marks respectively; and aligning an attribute to align the inspection window automatically.
TW93129307A 2004-09-27 2004-09-27 Method for aligning an inspection window TWI273461B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93129307A TWI273461B (en) 2004-09-27 2004-09-27 Method for aligning an inspection window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93129307A TWI273461B (en) 2004-09-27 2004-09-27 Method for aligning an inspection window

Publications (2)

Publication Number Publication Date
TW200611173A true TW200611173A (en) 2006-04-01
TWI273461B TWI273461B (en) 2007-02-11

Family

ID=38621539

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93129307A TWI273461B (en) 2004-09-27 2004-09-27 Method for aligning an inspection window

Country Status (1)

Country Link
TW (1) TWI273461B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI501049B (en) * 2008-12-03 2015-09-21 Zeiss Carl Sms Gmbh Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section
TWI682318B (en) * 2018-12-05 2020-01-11 英業達股份有限公司 Monitor system for determining monitored location according to characteristic location and method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI501049B (en) * 2008-12-03 2015-09-21 Zeiss Carl Sms Gmbh Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section
TWI682318B (en) * 2018-12-05 2020-01-11 英業達股份有限公司 Monitor system for determining monitored location according to characteristic location and method thereof

Also Published As

Publication number Publication date
TWI273461B (en) 2007-02-11

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