TW200611173A - Method for aligning an inspection window - Google Patents
Method for aligning an inspection windowInfo
- Publication number
- TW200611173A TW200611173A TW093129307A TW93129307A TW200611173A TW 200611173 A TW200611173 A TW 200611173A TW 093129307 A TW093129307 A TW 093129307A TW 93129307 A TW93129307 A TW 93129307A TW 200611173 A TW200611173 A TW 200611173A
- Authority
- TW
- Taiwan
- Prior art keywords
- inspection window
- aligning
- recipe
- setting
- whole image
- Prior art date
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Analysis (AREA)
- Image Processing (AREA)
Abstract
This invention provides a method for aligning an inspection window. Said inspection window is adapted for setting a recipe. And according to the recipe, a digital signal process for detecting a defect on an object is processed. The method of the invention comprises the steps of scanning the object for obtaining a whole image of the object; making an inspection window within the whole image; marking at least an alignment marks; setting at least an alignment windows surrounding the alignment marks respectively; and aligning an attribute to align the inspection window automatically.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93129307A TWI273461B (en) | 2004-09-27 | 2004-09-27 | Method for aligning an inspection window |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93129307A TWI273461B (en) | 2004-09-27 | 2004-09-27 | Method for aligning an inspection window |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200611173A true TW200611173A (en) | 2006-04-01 |
TWI273461B TWI273461B (en) | 2007-02-11 |
Family
ID=38621539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93129307A TWI273461B (en) | 2004-09-27 | 2004-09-27 | Method for aligning an inspection window |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI273461B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI501049B (en) * | 2008-12-03 | 2015-09-21 | Zeiss Carl Sms Gmbh | Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section |
TWI682318B (en) * | 2018-12-05 | 2020-01-11 | 英業達股份有限公司 | Monitor system for determining monitored location according to characteristic location and method thereof |
-
2004
- 2004-09-27 TW TW93129307A patent/TWI273461B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI501049B (en) * | 2008-12-03 | 2015-09-21 | Zeiss Carl Sms Gmbh | Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section |
TWI682318B (en) * | 2018-12-05 | 2020-01-11 | 英業達股份有限公司 | Monitor system for determining monitored location according to characteristic location and method thereof |
Also Published As
Publication number | Publication date |
---|---|
TWI273461B (en) | 2007-02-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2008051937A3 (en) | Method for creating s/tem sample and sample structure | |
WO2007026350A3 (en) | An inspection system and a method for detecting defects based upon a reference frame | |
CN109752392B (en) | PCB defect type detection system and method | |
TW200617376A (en) | Methods of and apparatus for inspecting substrate | |
SG161312A1 (en) | Automated inspection of colored contact lenses | |
WO2008003084A3 (en) | Computer-implemented methods and systems for determining different process windows for a wafer printing process for different reticle designs | |
IL193736A (en) | Method for determining the surface quality of a substrate and associated machine for converting the substrate | |
WO2010058335A3 (en) | Assembly method for a tiled radiation detector | |
WO2006115627A3 (en) | Defect pixel correction in an image sensor | |
WO2003046531A3 (en) | Method for detecting defects in substrates | |
WO2012051245A3 (en) | Focus offset contamination inspection | |
TW200731440A (en) | Flip chip mounting shift inspection method and mounting apparatus | |
EP1311110A3 (en) | Method of making correction for color sensor output values in color image forming apparatus | |
WO2006028571A3 (en) | Method for visual inspection of printed matter on moving lids | |
WO2008007281A3 (en) | A method, an apparatus, a system and a computer program for transferring scan geometry between subsequent scans | |
TW200611173A (en) | Method for aligning an inspection window | |
WO2008086632A8 (en) | Method and apparatus for detecting and registering properties of samples | |
DE50015267D1 (en) | Method for interference-free image acquisition by means of an electronic sensor | |
TW200506347A (en) | Defect repair device and method of repairing defect | |
WO2006031687A3 (en) | Automatic blocking and lens blank measuring apparatus and method | |
WO2006124829A3 (en) | Method of, and apparatus for, measuring the quality of a printed image | |
GB0504913D0 (en) | Method and apparatus for digital processing of images | |
TW200610959A (en) | Method for setting an inspection recipe | |
TW200515837A (en) | Correcting potential defects in an OLED device | |
WO2008065520A3 (en) | Method and apparatus for recognizing text in a digital image |