TW200610090A - Supporting bar for substrate cassette - Google Patents

Supporting bar for substrate cassette

Info

Publication number
TW200610090A
TW200610090A TW094117259A TW94117259A TW200610090A TW 200610090 A TW200610090 A TW 200610090A TW 094117259 A TW094117259 A TW 094117259A TW 94117259 A TW94117259 A TW 94117259A TW 200610090 A TW200610090 A TW 200610090A
Authority
TW
Taiwan
Prior art keywords
substrate
substrates
support bars
cassette
vertical direction
Prior art date
Application number
TW094117259A
Other languages
Chinese (zh)
Inventor
Daisuke Uchida
Shinichi Takemura
Kenichi Aoyagi
Yi-Kuang Chen
Toshiyuki Takahashi
Original Assignee
Nippon Oil Corp
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Oil Corp, Du Pont filed Critical Nippon Oil Corp
Publication of TW200610090A publication Critical patent/TW200610090A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H01L21/67343—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates characterized by a material, a roughness, a coating or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

The goal of this invention is to suppress the increase in weight of a large-scale substrate cassette. It reduces the vibration of substrate during the shifting time, and improves the convenience of operation. The substrate cassette comprises end supporters, support bars, and multiple substrates. The end supporters support the ends of the substrates or plates stored on both the right and left side of the substrate opening. The support bars are fixed at the opposite side of the substrate opening. They have free ends on the substrate loading opening side. It allocates in one line or multiple lines in the vertical direction, it supports the substrates to be stored between the aforementioned end supporters of the cassette. It stores multiple substrates horizontally in multiple levels in the vertical direction, the aforementioned support bars are formed by the carbon-fiber reinforced composite material containing 30% or more of highly elastic carbon-fibers with a tensile modulus of 490 to 950 Gpa. It is formed preferably into the shape of a hollow pipe, or more preferably into the conical shape that the tip part side becomes narrower.
TW094117259A 2004-05-26 2005-05-26 Supporting bar for substrate cassette TW200610090A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004156755A JP2005340480A (en) 2004-05-26 2004-05-26 Support bar for substrate cassettes

Publications (1)

Publication Number Publication Date
TW200610090A true TW200610090A (en) 2006-03-16

Family

ID=35451148

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094117259A TW200610090A (en) 2004-05-26 2005-05-26 Supporting bar for substrate cassette

Country Status (4)

Country Link
US (1) US20060011507A1 (en)
JP (1) JP2005340480A (en)
TW (1) TW200610090A (en)
WO (1) WO2005117100A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI498260B (en) * 2009-11-20 2015-09-01 Jx Nippon Oil & Energy Corp Support rod and substrate storage case
TWI571420B (en) * 2016-06-29 2017-02-21 The modified cassette support bar restructuring
CN111602234A (en) * 2018-01-12 2020-08-28 信越聚合物股份有限公司 Panel storage container

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KR101010481B1 (en) * 2003-12-13 2011-01-21 엘지디스플레이 주식회사 Structure for racking substrate
JP4029104B2 (en) 2006-01-30 2008-01-09 新日本石油株式会社 Elliptical support member
KR100804313B1 (en) * 2006-02-23 2008-02-18 (주)넥스컴스 Cassette Support Bar for Loading LCD board
JP4571089B2 (en) * 2006-03-28 2010-10-27 株式会社フューチャービジョン Substrate support member, substrate baking furnace, substrate transfer apparatus, and substrate processing method
JP2007281251A (en) * 2006-04-07 2007-10-25 E I Du Pont De Nemours & Co Support bar and substrate cassette
JP2007281252A (en) * 2006-04-07 2007-10-25 E I Du Pont De Nemours & Co Substrate cassette
US20070274809A1 (en) * 2006-05-26 2007-11-29 Hsien-Chang Kao Substrate cassette and transport system thereof
GB0613424D0 (en) * 2006-07-06 2006-08-16 Underwood Christopher J Fishing rod
US20080247857A1 (en) * 2007-04-05 2008-10-09 Ichiro Yuasa End effector and robot for transporting substrate
KR101479302B1 (en) * 2008-07-02 2015-01-05 삼성디스플레이 주식회사 Substrate firing device
US8387799B2 (en) * 2008-08-27 2013-03-05 Gudeng Precision Industrial Co, Ltd. Wafer container with purgeable supporting module
TWI371076B (en) * 2008-08-27 2012-08-21 Gudeng Prec Industral Co Ltd A wafer container with at least one supporting module having a long slot
JP2011211160A (en) * 2010-03-11 2011-10-20 Index:Kk Beam member, structural member, glass substrate supporting beam and substrate cassette
KR101212889B1 (en) * 2010-10-01 2012-12-14 하이디스 테크놀로지 주식회사 Cassette for loading Glasses
JP5701002B2 (en) * 2010-10-08 2015-04-15 光洋サーモシステム株式会社 Substrate support member and heat treatment apparatus
JP5277338B2 (en) * 2011-05-31 2013-08-28 ミズノ テクニクス株式会社 Manufacturing method of fiber reinforced resin support bar for substrate storage cassette
TWM419217U (en) * 2011-06-08 2011-12-21 Chipbond Technology Corp Electronic component carrier Cleaning rack
CN102658920B (en) * 2012-04-27 2014-04-09 深圳市华星光电技术有限公司 Packaging device and supporting device of liquid crystal display module
KR101380763B1 (en) * 2012-07-27 2014-04-10 주식회사 테라세미콘 Substrate supporting unit and substrate processing apparatus using the same
JP5180403B1 (en) * 2012-10-02 2013-04-10 中外炉工業株式会社 Panel mounting rack
KR101252034B1 (en) * 2012-11-05 2013-04-10 (주)상아프론테크 A cassette for loading to glass substrate
KR101515005B1 (en) * 2014-02-27 2015-07-02 (주)상아프론테크 A support bar for the substrate-loading cassette and the manufacturing method thereof
CN104743341A (en) * 2015-01-20 2015-07-01 京东方科技集团股份有限公司 Stopping block and base plate cartridge component
KR101790584B1 (en) 2016-09-19 2017-11-20 (주)라컴텍 High damping Robot hand and control method of the same
JP6881716B2 (en) * 2017-08-07 2021-06-02 信越ポリマー株式会社 Panel storage container
JP6668304B2 (en) * 2017-10-04 2020-03-18 Ｊｘｔｇエネルギー株式会社 Support member
KR101859153B1 (en) * 2017-10-11 2018-05-16 주식회사 넥스컴스 Vibration damping device for cantilever support bar in cantilever form
US10811291B2 (en) * 2017-11-08 2020-10-20 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer container and method for holding wafer
WO2019239700A1 (en) * 2018-06-15 2019-12-19 日鉄テックスエンジ株式会社 Workpiece transportation member, workpiece transportation device, and heat treatment device
KR102192668B1 (en) * 2019-04-11 2020-12-17 한국과학기술원 Acoustic black hole beam structure with converging width and thickness
CN112786500A (en) * 2019-11-11 2021-05-11 夏泰鑫半导体(青岛)有限公司 Wafer rack and vertical wafer boat with same
TWI751814B (en) * 2020-09-22 2022-01-01 家登精密工業股份有限公司 Central support device for supporting sheets and storage equipment for storing sheets
CN112309928A (en) * 2020-09-27 2021-02-02 江苏润阳悦达光伏科技有限公司 Novel silicon chip bearing flower basket

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TW553195U (en) * 2002-10-09 2003-09-11 Foxsemicon Integrated Tech Inc Substrate supporting slot plate and substrate cassette using the same
JP2004146578A (en) * 2002-10-24 2004-05-20 Yodogawa Hu-Tech Kk Substrate support member in cassette, and cassette for substrate
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JP2004273686A (en) * 2003-03-07 2004-09-30 Yodogawa Hu-Tech Kk Cassette for large-sized substrate
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KR101010481B1 (en) * 2003-12-13 2011-01-21 엘지디스플레이 주식회사 Structure for racking substrate
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI498260B (en) * 2009-11-20 2015-09-01 Jx Nippon Oil & Energy Corp Support rod and substrate storage case
TWI571420B (en) * 2016-06-29 2017-02-21 The modified cassette support bar restructuring
CN111602234A (en) * 2018-01-12 2020-08-28 信越聚合物股份有限公司 Panel storage container
TWI776011B (en) * 2018-01-12 2022-09-01 日商信越聚合物股份有限公司 panel storage container
CN111602234B (en) * 2018-01-12 2024-05-24 信越聚合物股份有限公司 Panel container

Also Published As

Publication number Publication date
JP2005340480A (en) 2005-12-08
US20060011507A1 (en) 2006-01-19
WO2005117100A1 (en) 2005-12-08

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