TW200602775A - Method for manufacturing thin film transistors array panel - Google Patents

Method for manufacturing thin film transistors array panel

Info

Publication number
TW200602775A
TW200602775A TW093120318A TW93120318A TW200602775A TW 200602775 A TW200602775 A TW 200602775A TW 093120318 A TW093120318 A TW 093120318A TW 93120318 A TW93120318 A TW 93120318A TW 200602775 A TW200602775 A TW 200602775A
Authority
TW
Taiwan
Prior art keywords
layer
film transistors
metal
thin film
array panel
Prior art date
Application number
TW093120318A
Other languages
Chinese (zh)
Other versions
TWI261718B (en
Inventor
Yeh-Chen Chang
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW93120318A priority Critical patent/TWI261718B/en
Publication of TW200602775A publication Critical patent/TW200602775A/en
Application granted granted Critical
Publication of TWI261718B publication Critical patent/TWI261718B/en

Links

Abstract

A method for manufacturing an array of thin-film transistors having double metal structure is disclosed. First, a substrate is provided, and then a first metal layer having a first pattern is formed on the substrate. Afterwards, an insulating layer, a semiconductor layer, an ohmic contact layer, and a second metal layer are sequentially deposited on the substrate. Then, a second pattern is formed in the semiconductor layer, the ohmic contact layer, and the second metal layer. Next, a first passivation layer having a third pattern is formed on the second metal layer, wherein the insulating layer on the first metal layer is removed simultaneously and a plurality of the first contacts are formed. Finally, a conductive layer connecting the first and the second metal layers is formed on the first contacts.
TW93120318A 2004-07-07 2004-07-07 Method for manufacturing thin film transistors array panel TWI261718B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93120318A TWI261718B (en) 2004-07-07 2004-07-07 Method for manufacturing thin film transistors array panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93120318A TWI261718B (en) 2004-07-07 2004-07-07 Method for manufacturing thin film transistors array panel

Publications (2)

Publication Number Publication Date
TW200602775A true TW200602775A (en) 2006-01-16
TWI261718B TWI261718B (en) 2006-09-11

Family

ID=37986987

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93120318A TWI261718B (en) 2004-07-07 2004-07-07 Method for manufacturing thin film transistors array panel

Country Status (1)

Country Link
TW (1) TWI261718B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103902082A (en) * 2012-12-27 2014-07-02 宸鸿光电科技股份有限公司 Touch panel and manufacture method thereof
US9239653B2 (en) 2012-03-28 2016-01-19 Au Optronics Corporation Touch panel and method of fabricating the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9239653B2 (en) 2012-03-28 2016-01-19 Au Optronics Corporation Touch panel and method of fabricating the same
TWI588718B (en) * 2012-03-28 2017-06-21 友達光電股份有限公司 Touch panel and method of fabricating the same
CN103902082A (en) * 2012-12-27 2014-07-02 宸鸿光电科技股份有限公司 Touch panel and manufacture method thereof
TWI626567B (en) * 2012-12-27 2018-06-11 宸鴻光電科技股份有限公司 Touch panel and manufacturing method thereof
CN103902082B (en) * 2012-12-27 2019-03-15 宸鸿光电科技股份有限公司 Touch panel and its manufacturing method

Also Published As

Publication number Publication date
TWI261718B (en) 2006-09-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees