TW200602775A - Method for manufacturing thin film transistors array panel - Google Patents
Method for manufacturing thin film transistors array panelInfo
- Publication number
- TW200602775A TW200602775A TW093120318A TW93120318A TW200602775A TW 200602775 A TW200602775 A TW 200602775A TW 093120318 A TW093120318 A TW 093120318A TW 93120318 A TW93120318 A TW 93120318A TW 200602775 A TW200602775 A TW 200602775A
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- film transistors
- metal
- thin film
- array panel
- Prior art date
Links
Abstract
A method for manufacturing an array of thin-film transistors having double metal structure is disclosed. First, a substrate is provided, and then a first metal layer having a first pattern is formed on the substrate. Afterwards, an insulating layer, a semiconductor layer, an ohmic contact layer, and a second metal layer are sequentially deposited on the substrate. Then, a second pattern is formed in the semiconductor layer, the ohmic contact layer, and the second metal layer. Next, a first passivation layer having a third pattern is formed on the second metal layer, wherein the insulating layer on the first metal layer is removed simultaneously and a plurality of the first contacts are formed. Finally, a conductive layer connecting the first and the second metal layers is formed on the first contacts.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93120318A TWI261718B (en) | 2004-07-07 | 2004-07-07 | Method for manufacturing thin film transistors array panel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93120318A TWI261718B (en) | 2004-07-07 | 2004-07-07 | Method for manufacturing thin film transistors array panel |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200602775A true TW200602775A (en) | 2006-01-16 |
TWI261718B TWI261718B (en) | 2006-09-11 |
Family
ID=37986987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93120318A TWI261718B (en) | 2004-07-07 | 2004-07-07 | Method for manufacturing thin film transistors array panel |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI261718B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103902082A (en) * | 2012-12-27 | 2014-07-02 | 宸鸿光电科技股份有限公司 | Touch panel and manufacture method thereof |
US9239653B2 (en) | 2012-03-28 | 2016-01-19 | Au Optronics Corporation | Touch panel and method of fabricating the same |
-
2004
- 2004-07-07 TW TW93120318A patent/TWI261718B/en not_active IP Right Cessation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9239653B2 (en) | 2012-03-28 | 2016-01-19 | Au Optronics Corporation | Touch panel and method of fabricating the same |
TWI588718B (en) * | 2012-03-28 | 2017-06-21 | 友達光電股份有限公司 | Touch panel and method of fabricating the same |
CN103902082A (en) * | 2012-12-27 | 2014-07-02 | 宸鸿光电科技股份有限公司 | Touch panel and manufacture method thereof |
TWI626567B (en) * | 2012-12-27 | 2018-06-11 | 宸鴻光電科技股份有限公司 | Touch panel and manufacturing method thereof |
CN103902082B (en) * | 2012-12-27 | 2019-03-15 | 宸鸿光电科技股份有限公司 | Touch panel and its manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
TWI261718B (en) | 2006-09-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |