TW200601267A - Surface measurement device, surface measurement method, surface measurement computer program, and computer-readable storage medium containing surface measurement computer program - Google Patents

Surface measurement device, surface measurement method, surface measurement computer program, and computer-readable storage medium containing surface measurement computer program

Info

Publication number
TW200601267A
TW200601267A TW094116341A TW94116341A TW200601267A TW 200601267 A TW200601267 A TW 200601267A TW 094116341 A TW094116341 A TW 094116341A TW 94116341 A TW94116341 A TW 94116341A TW 200601267 A TW200601267 A TW 200601267A
Authority
TW
Taiwan
Prior art keywords
surface measurement
computer program
computer
light
point
Prior art date
Application number
TW094116341A
Other languages
Chinese (zh)
Inventor
Masahiro Ueda
Original Assignee
Univ Fukui
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Fukui filed Critical Univ Fukui
Publication of TW200601267A publication Critical patent/TW200601267A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Abstract

A surface measurement device applies light from a laser light source (21) to a measurement plane (17) while moving the measurement plane (17) in the x direction or in the y direction and irradiates the reflected light to a light receiving plane (31) of the light reception unit. The coordinates of the point Q (X, Y) as an irradiation point are measured. From this, the angle of the x direction and the y direction at the respective points on the measurement plane (17) are calculated to obtain a small height by using the width data of the x direction and the y direction. The small heights are added up to a target point and the height (concave/convex) at the point is obtained. Thus, it is possible to realize a surface measurement device and a surface measurement method capable of measuring a surface concave/convex with a high resolution without requiring an element for collecting the scattered light.
TW094116341A 2004-05-21 2005-05-19 Surface measurement device, surface measurement method, surface measurement computer program, and computer-readable storage medium containing surface measurement computer program TW200601267A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004152360 2004-05-21
JP2004210659 2004-07-16
JP2004329799 2004-11-12
JP2005126938A JP2006162586A (en) 2004-05-21 2005-04-25 Surface measuring instrument, surface measuring method, surface measuring program, and computer-readable recording medium storing surface measuring program

Publications (1)

Publication Number Publication Date
TW200601267A true TW200601267A (en) 2006-01-01

Family

ID=35428475

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116341A TW200601267A (en) 2004-05-21 2005-05-19 Surface measurement device, surface measurement method, surface measurement computer program, and computer-readable storage medium containing surface measurement computer program

Country Status (3)

Country Link
JP (1) JP2006162586A (en)
TW (1) TW200601267A (en)
WO (1) WO2005114102A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032669A (en) * 2006-07-27 2008-02-14 Oputouea Kk Optical scanning type planal visual inspecting apparatus
JP2008046037A (en) * 2006-08-18 2008-02-28 Osaka Prefecture Optical method and device for measuring angle/displacement
JP2008215886A (en) * 2007-02-28 2008-09-18 Univ Of Fukui System and method for measuring surface displacement
CN107014323B (en) * 2017-06-06 2023-02-03 富加宜连接器（东莞）有限公司 Point laser coplanarity testing device and method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51122462A (en) * 1975-03-31 1976-10-26 Canon Kk Measuring apparatus
JPH02140608A (en) * 1988-11-21 1990-05-30 Fujitsu Ltd Measuring instrument for surface shape
JP3192461B2 (en) * 1992-02-26 2001-07-30 豊田工機株式会社 Optical measuring device
JPH07128025A (en) * 1993-11-08 1995-05-19 Omron Corp Laser-scanning height measuring apparatus

Also Published As

Publication number Publication date
WO2005114102A1 (en) 2005-12-01
JP2006162586A (en) 2006-06-22

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