TW200600604A - Mobile PVD/CVD coating center - Google Patents

Mobile PVD/CVD coating center

Info

Publication number
TW200600604A
TW200600604A TW094114523A TW94114523A TW200600604A TW 200600604 A TW200600604 A TW 200600604A TW 094114523 A TW094114523 A TW 094114523A TW 94114523 A TW94114523 A TW 94114523A TW 200600604 A TW200600604 A TW 200600604A
Authority
TW
Taiwan
Prior art keywords
pvd
mobile
coating center
cvd coating
cvd
Prior art date
Application number
TW094114523A
Other languages
English (en)
Other versions
TWI397602B (zh
Inventor
David Franz
Udo Rauch
Hans Eggenberger
Christoph Bischof
Franco Chiani
Hans Schulz
Valentin Buehler
Original Assignee
Unaxis Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers Ag filed Critical Unaxis Balzers Ag
Publication of TW200600604A publication Critical patent/TW200600604A/zh
Application granted granted Critical
Publication of TWI397602B publication Critical patent/TWI397602B/zh

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/348—Structures composed of units comprising at least considerable parts of two sides of a room, e.g. box-like or cell-like units closed or in skeleton form
    • E04B1/34815—Elements not integrated in a skeleton
    • E04B1/3483—Elements not integrated in a skeleton the supporting structure consisting of metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • E04H5/02—Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories
TW94114523A 2004-05-07 2005-05-05 氣相沉積塗層中心 TWI397602B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04010880 2004-05-07

Publications (2)

Publication Number Publication Date
TW200600604A true TW200600604A (en) 2006-01-01
TWI397602B TWI397602B (zh) 2013-06-01

Family

ID=35320909

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94114523A TWI397602B (zh) 2004-05-07 2005-05-05 氣相沉積塗層中心

Country Status (4)

Country Link
CN (1) CN201080493Y (zh)
DE (1) DE212005000023U1 (zh)
TW (1) TWI397602B (zh)
WO (1) WO2005109472A2 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE532261C2 (sv) * 2007-04-12 2009-11-24 Bau How As Transporterande arrangemang
WO2010075389A2 (en) 2008-12-23 2010-07-01 Xoma Technology, Ltd. Flexible manufacturing system
CN102287061B (zh) * 2011-06-21 2014-12-24 赣州澳克泰工具技术有限公司 硬质合金厂的总平面布置
FR2992011B1 (fr) * 2012-06-15 2015-01-23 Jean Louis Baal Assemblage des lots techniques et architecturaux
DE102017120649A1 (de) * 2017-09-07 2019-03-07 Khs Corpoplast Gmbh Vorrichtung zum Beschichten von Behältern
FI20175979A1 (en) * 2017-11-03 2019-05-04 Metsi Oy Technology unit and method for providing a building
WO2019110142A1 (de) 2017-12-05 2019-06-13 Sew-Eurodrive Gmbh & Co. Kg Anlage, aufweisend ein gebäude mit hallenboden
CN113174581B (zh) * 2021-04-15 2022-11-18 散裂中子源科学中心 真空管道用的磁场移动式镀膜设备及方法
EP4136296B1 (en) * 2021-05-20 2023-10-25 Sano Development Limited Hybrid building system, building and method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2638196B1 (fr) * 1988-10-26 1991-01-25 Roche Jean Procede et dispositif de construction modulaire d'edifices industriels
IT1258959B (it) * 1992-06-09 1996-03-11 Impianto a moduli mobili per lo sviluppo e la produzione di prodotti biotecnologici su scala pilota
US6312525B1 (en) * 1997-07-11 2001-11-06 Applied Materials, Inc. Modular architecture for semiconductor wafer fabrication equipment
US6503379B1 (en) * 2000-05-22 2003-01-07 Basic Research, Inc. Mobile plating system and method

Also Published As

Publication number Publication date
WO2005109472A2 (en) 2005-11-17
WO2005109472A3 (en) 2006-04-27
TWI397602B (zh) 2013-06-01
CN201080493Y (zh) 2008-07-02
DE212005000023U1 (de) 2007-01-04

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees