200532165 m 九、發明說明： 【發明所屬之技術領域】 本發明係有關曲面形狀檢查方法、光纖組件、及曲面形狀 檢查裝置。 【先前技術】 在自動車中所使用之等速萬向接頭（constant velocity universal joint )的溝形狀之測定係例如照以下那樣來進 行。首先，把混合有微粉末和液體之混合物塗布於要測定之 • 測定面。接著，將規格尺寸之球體抵於測定面，利用游標卡 尺等物來測定依此所產生於接觸部分的線。然而，此種方法 在作業上繁雜且溝形狀之測定精度不高。 針對此，在文獻1(日本實公昭6 1 - 1 73 65號公報）及文獻 2(特開平8 -2 8 5 5 06號公報）中，係揭示有用以測定曲面形狀 之裝置。以下針對文獻1及文獻2所記載之裝置的曲面形狀 之測定方法作說明。 在文獻1所記載之測定裝置中，首先，使具有與在球體轉 • 動溝轉動之球體同一直徑且形成在主軸的球狀部係合於球 體轉動溝。其次，使主軸旋轉於主軸的軸線周圍。在此際， 測定從球狀部突出且與球體轉動溝接觸之接觸部的活動。依 此，而測定球體轉動溝之形狀。 在文獻2所記載之測定裝置中，於要測定之工件的曲面 和拘束構件之水平拘束面及垂直拘束面之間拘束基準球。在 其狀態下測定從工彳ί之基準位置到水平拘束面之距離。對具 有不同直徑的3個基準球進行此測定。然後，利用其等之測 200532165 定値而算出在幾何學上工件之曲面的曲率半徑與曲率中心 之位置。 【發明內容】 然而，以文獻1所記載之測定裝置而言，裝置係複雜且因 爲是精密測定，所以裝置的使用場所受到限制。又，爲了正 確地測定曲面形狀係必需有多的測定點。文獻2所記載之測 定裝置中，因爲必需使用複數個基準球，所以有必要依基準 球而測定從工件之基準位置到水平拘束面之距離。如此一 Φ 來，依文獻1及文獻2記載之測定裝置所作之測定中，測定 作業係繁雜。 本發明之目的在於提供一種可簡易地檢查曲面形狀之曲 面形狀檢查方法、在其檢查方法中所使用的光纖組件、及適 用其光纖組件之曲面形狀檢查裝置。 爲解決上述課題，本發明相關的曲面形狀檢查方法爲，於 把複數條由纖芯區域及包圍前述纖芯區域的包覆區域所成 的光纖予以紮束而一體成形的光纖組件中，使由各光纖的一 • 端所構成且至少一部份爲彎曲的輸入端面與受測定對象中 之具有曲面形狀的測定面相互抵住，其特徵爲，使用由位在 輸入端面相反側之光纖組件的輸出端面所輸出，依輸入端面 與測定面接觸所形成的光學像以檢查受測定對象之曲面形 狀。 於上述方法中，使由複數條光纖所構成之光纖組件的輸入 端面與具有受測定對象的曲面形狀之測定面相互抵住。接 著，使用由光纖組件之輸出端面所輸出依輸入端面與測定面 200532165 接觸所形成的光學像以檢查受測定對象之曲面形狀。 光學像是依輸入端面與測定面接觸所形成之像，係對應於 輸入端面與測定面之接觸型樣（p a 11 e r η )。因此，可經由檢 查光學像而檢查受測定對象之曲面形狀。 在此場合，若將光纖組件按於受測定對象，則因爲可檢查 受測定對象之曲面形狀，所以檢查容易。又，因爲未使用微 粉末、所以可使作業性提升。 又，本發明相關的光纖組件係適用在受測定對象之曲面形 # 狀的檢查，且爲紮束複數條由纖芯區域及包圍纖芯區域之包 覆區域所成的光纖而一體成形，該光纖組件之特徵爲具備： 由各光纖之一端所構成且至少一部份爲彎曲的輸入端面；以 及位在輸入端面相反側，用以輸出依入射到輸入端面的光所 形成的光學像之輸出端面。 以上述構成而言，於光纖組件中，從至少一部份爲彎曲的 輸入端面入射到各光纖的光係依各光纖而被導光。然後，依 在各光纖傳播而來的光所形成之光學像係從輸出端面被輸 #出。 於受測定對象之曲面形狀的檢查中，輸入端面被抵住於受 測定對象中之具有曲面形狀的測定面而實施檢查。在此場 合，上述光學像係對應於輸入端面與測定面之接觸型樣。因 此，經由檢查光學像而可檢查受測定對象之曲面形狀。在 此，檢查爲，例如，藉由將實際上從輸出端面輸出的光學像 和在受測定對象具有期望的曲面形狀之場合所形成之光學 像作比較而被實施。 200532165 在運用上述構成之光纖組件的曲面形狀之檢查中，若壓住 受測定對象就可檢查受測定對象之曲面形狀，所以檢查容 易。又，因爲未使用微粉末，所以可使作業性提升。 又，本發明相關的曲面形狀檢查裝置爲用以檢查受測定對 象之曲面形狀的曲面形狀檢查裝置，其特徵爲具備有上述 的光纖組件、以及以面對光纖組件的輸出端面而設置，用以 攝像由輸出端面所輸出的光學像之攝像裝置。 上述構成中，從本發明相關的光纖組件之輸出端面所輸出 # 之光學像係被攝像裝置所攝像。 在受測定對象之曲面形狀的檢查中，於具有曲面形狀之受 測定對象的測定面和輸入端面相互抵住時所形成的光學像 係對應於測定面與輸入端面之接觸型樣。因此，使用光學像 可檢查受測定對象之曲面形狀。且，在上述構成之曲面形狀 檢查裝置中，因爲從輸出端面所輸出之光學像係被攝像裝置 所攝像，所以可使用在監視器等所映出之光學像來進行檢 查。因此檢查容易，同時檢查可自動化。 鲁【實施方式】 以下，連同圖面及本發明之較佳實施形態作詳細說明。此 外’圖面之說明中的同一要素係賦予同一符號並將重複的說 明作省略。 (第1實施形態） 第1圖係第1實施形態相關的曲面形狀檢查方法之說明 圖。 在本實施形態之曲面形狀檢查方法中，如第1圖所示、使 200532165 光纖組件1 〇接觸於受測定對象20之具有曲面形狀的測定面 2 1而進行檢查。 第1圖所示的光纖組件1 0，係紮束複數條光纖1 1而一體 成形者。複數條光纖1 1係以其光軸爲大致平行般地被紮束。 光纖1 1係例如爲多模態光纖。各光纖1 1係由纖芯區域1 2 及包圍纖芯區域12的包覆區域13所成。此外，爲了方便說 明，係將第1圖中所示的光纖組件1 0之內部構造加以放大 顯示。又，細鏈線係顯示光纖1 1之境界。 ® 光纖組件1〇具有半球狀部10Α以及與半球狀部10Α鄰接 的主體部10Β。半球狀部10Α係在主體部10Β的相反具有輸 入端面14。輸入端面14係由各光纖11之一端所構成，其形 狀爲半球狀。輸入端面1 4之曲率係設定爲作爲檢查基準的 曲率。 又，主體部1 0Β係呈略圓柱狀，而在與半球狀部1 〇Α相反 側，換言之，在光纖1 1之光軸方向於輸入端面1 4相反側具 有輸出端面15。輸出端面15係與各光纖11之光軸大致正 Φ 交，用以輸出由入射至輸入端面14之光所形成的光學像。 如此，於光纖組件1 〇，由輸入端面1 4所輸入的光係被各 光纖1 1所傳播而自輸出端面1 5被輸出。因此，係從輸出端 面1 5輸出具有與輸入到輸入端面1 4之光的型樣所對應的型 樣之光學像。 上述光纖組件10，爲例如將複數條光纖11先紮束成略圓 柱狀而一體成形’而將一方的端部硏磨成半球狀而被製造。 茲針對使用光纖組件10而作適當檢查之受測定對象20作 200532165 說明。第2圖係受測定對象2 0之一例的上視圖。第2圖之 受測定對象20係在自動車中所使用之等速萬向接頭的內輪。 受測定對象20係如第2圖所示，係在周向具有用以使轉 矩傳達球體22轉動的複數個球體轉動溝23。球體轉動溝23 係在受測定對象20之軸線方向（與紙面大致垂直的方向）延 伸。等速萬向接頭係挾著轉矩傳達球體22而使內輪和外輪 (未圖示）結合所構成。等速萬向接頭中，當內輪以軸線爲中 心旋轉之際，係經由轉矩傳達球體22而傳達到外輪。於本 • 實施形態，係要檢查此球體轉動溝23之內面的曲面形狀。 亦即，球體轉動溝23之內面爲相當於測定面2 1。 參照第1圖來針對受測定對象20之曲面形狀的檢查方法 作說明。在檢查時，係將光纖組件1 0之輸入端面1 4與受測 定對象20之具有曲面形狀的測定面2 1相互抵住。也可以將 輸入端面1 4抵住於測定面2 1，將受測定對象20抵住於輸入 端面1 4亦可。如此一來，在抵住輸入端面1 4與測定面2 1 之際，係以光纖組件1 0之中心軸線α會與球體轉動溝23之 # 最深部附近交差般地將光纖組件1 〇和受測定對象20相互抵 住。 當輸入端面1 4與測定面2 1相抵時，由於輸入端面1 4爲 半球狀，所以測定面2 1與輸入端面14係在2處相接。相反 的，以測定面2 1和輸入端面1 4會在2處相接般地事前設定 輸入端面14之曲率。在此，如第1圖所示，將輸入端面14 和測定面2 1相接的區域設定爲接觸部3 0、3 1。 因應於接觸部3 0、3 1之形成，從輸出端面1 5輸出之光學 -10- 200532165 像係會變化。更具體言之，對應於輸入端面1 4與測定面2 1 之接觸型樣的光學像係從輸出端面1 5被輸出。 第3圖係檢查實施時的輸出端面1 5之前視圖。 第3圖所示的光學像32係同上所述、爲依輸入端面！ 4和 測定面2 1接觸所形成的像，且和輸入端面1 4與測定面2 1 之接觸型樣對應。換言之，光學像3 2係包含有對應於輸入 端面14與測定面21間之2個接觸部30、31的接觸部像33、 34而構成。 • 因爲輸入端面1 4之形狀爲既知，所以在測定面2 1 (亦即， 第2圖之球體轉動溝23的內面）爲期望的曲面形狀之場合中 的2個接觸部像間的距離係可預測的。依此，可把在測定面 21爲期望曲面形狀之場合中的2個接觸部像33、34之距離 當作基準値來設定。因此，經由把實際上輸入端面1 4和測 定面2 1接觸所形成之接觸部像3 3、3 4間的距離D 1的測定 値與基準値作比較、係可檢查測定面21之曲面形狀是否成 爲期望的曲面形狀。接觸部像33、34間之距離測定爲，例 φ 如使用第3圖所示之游標卡尺40來測定即可。 又，如本實施形態，在受測定對象2 0爲等速萬向接頭的 內輪之場合，經由在球體轉動溝23延伸的方向使光纖組件 1 〇及受測定對象20之至少一方移動，以調查其接觸部像 3 3、3 4間的距離D 1之變化而可檢查球體轉動溝2 3在延伸 方向之曲面形狀的均一性。 再者，藉由使用光纖組件1 0來對複數個球體轉動溝2 3進 行曲面形狀之檢查，係可檢查各個球體轉動溝23間之曲面 -11- 200532165 形狀的均一性。 如同上述那樣，半球狀之輸入端面1 4係由光纖1 1之一端 所構成。因此，構成輸入端面1 4的光纖1 1之端面係傾斜成 所謂的傾斜（slant )形狀。一方面，輸出端面15係與光纖 1 1的光軸大致正交的平面。因此，上述接觸型樣係被縮小而 自輸出端面1 5被輸出。因此，藉由使用光纖組件1 0來作 檢查，係使得檢查精準度提升。 接觸部像3 3、3 4間之距離D 1也能如同上述那樣使用游標 • 卡尺40來作測定，而在輸出端面1 5使用檢查型樣4 1者係 較佳。 第4圖係形成有檢查型樣4 1之輸出端面1 5的前視圖。 檢查型樣41爲例如第4圖型樣例（a)所示之複數個同心圓 之型樣。且如型樣例（b)所示，也可使用附有刻度的刻度型 樣。檢查型樣4 1係在輸出端面1 5利用蒸鍍·蝕刻等所形成。 又，以貼附薄的薄片來形成也可以。 如此，經由將檢查型樣41設置在輸出端面1 5上，係可使 # 檢查型樣41與接觸部像33、34(亦即，光學像32)以1對1 作對應檢查。因爲就算未以游標卡尺等來重新測定距離也沒 關係，所以係使檢查變得容易。 但是，依測定面2 1與輸入端面1 4之匹配方式，接觸部像 3 3、34間的距離係會變化。第5圖係光纖組件1 0及受測定 對象20之位置關係的說明圖。如第5圖所示，在光纖組件 1 〇之中心軸線α不通過球體轉動溝2 3之最深部附近的場 合，輸出端面1 5所顯現之接觸部像3 3 i，3 4!間的距離D2 200532165 係變得比第3圖所示的接觸部像3 3、3 4間的距離D 1還短， 而在檢查上係產生誤差。 在光纖組件1 〇被正確地設定在測定面2 1 (亦即，中心軸 線α爲通過球體轉動溝23之最深附近般地）之場合，接觸部 像3 3、3 4係如第3圖所示，顯示出與輸出端面15之中心〇 大致爲等距離。因此，把考慮過光纖組件1 0與受測定對象 20之位置關係的誤差及考慮過檢查規格之由2個同心圓所 成的位置調整型樣42設置在輸出端面1 5者係較佳。 § 第6圖係形成有位置調整型樣42的輸出端面1 5之前視 圖。位置調整型樣42也可以是由蒸鍍·蝕刻所形成，也可以 是在輸出端面1 5貼附薄片。第6圖中，附上斜線以明白示 出位置調整型樣42。 在此場合，藉由第3圖所示之接觸部像3 3、34是否位在 位置調整型樣42內，而可判斷光纖組件1 0對測定面2 1之 設定位置之確認及檢查合格與否。反之，以接觸部像3 3、3 4 會位在位置調整型樣42內般地調整光纖組件1 〇之位置或受 # 測定對象20的位置就可以。如此，可經由調整光纖組件1 〇 或受測定對象20之位置而將各檢查之測定誤差的不均抑制 在所期望的範圍內。 此外，在第4圖所示之檢查型樣4 1設置在輸出端面1 5之 場合，也可將檢查型樣4 1作爲位置調整型樣42來使用。換 言之，檢查型樣4 1也可作爲位置調整型樣42來作用。 在使用上述本實施形態相關的光纖組件1 0之曲面形狀檢 查方法中，將輸入端面1 4和測定面2 1相互抵住，經由測定 -13- 200532165 被輸出於輸出端面1 5之2個接觸部像3 3、3 4間的距離D 1 以檢查受測定對象20之曲面形狀。因此，檢查係容易。又， 因爲不像以往那樣要使用微粉末，所以沒有造成環境損害的 問題而可使作業性提升。且，輸入端面1 4側之光纖1 1的端 面係成爲傾斜（slant )形狀，所以接觸型樣係在輸出端面 1 5被縮小而輸出。因此，檢查精準度係提升。 (第2實施形態） 第7圖（a)係第2實施形態相關的曲面形狀檢查方法之說明 # 圖。第7圖（b)係接觸部31之放大圖。 在第1實施形態的檢查方法中，係使測定面2 1與輸入端 面14直接接觸，但是在本實施形態之檢查方法中，如第7(a) 圖所示，係挾著具有透光性的膜50而使輸入端面1 4與測定 面2 1相互抵住，且使用從輸出端面1 5所輸出的光學像而與 第1實施形態同樣地檢查受測定對象20之曲面形狀。此外， 在第7圖（a)中係在膜5 0上劃斜線以明確顯示出膜5 0。 以膜5 0而言，例如係爲由透明樹脂所構成的薄片。膜5 0 • 可以是在輸入端面1 4利用蒸鍍所製作的有機膜，也可以是 被薄薄地塗布之液狀的膜。此外，在本說明書中所謂的輸入 端面1 4及測定面2 1之接觸係意味著也包含如此在測定面2 1 與輸入端面1 4之間挾住膜5 0之場合。 在此場合，藉由在受測定對象20之測定面2 1與輸入端面 14之間將膜50挾住，如第7(b)圖所示，測定面21與輸入 端面1 4之接觸部3 1的面積係變大。有關接觸部3 0也是同 樣。 -14- 200532165 第8圖係本實施形態在檢查時之光學像3 2 2的模式圖。如 同上述般，因爲接觸部30、31的面積變大，所以被輸出至 輸出端面1 5之2個接觸部像3 3 2、3 42的面積也變大。第8 圖中，虛線所示的像係在未使用膜5 0的場合時之接觸部像 3 3、3 4，而爲了作比較係簡單地作表示者。由於接觸部像 3 3 2，3 4 2的面積變大，所以依測定面2 1與輸入端面1 4之接 觸所形成的光學像3 2 2之確認係變容易。且，光纖組件1 〇 的輸入端面1 4係由膜5 0所保護。 Φ (第3實施形態） 第9圖係第3實施形態相關的曲面形狀檢查方法之說明 圖。在本實施形態之曲面形狀檢查方法中，在利用發出光的 發光性液體5 1這點上係與第1實施形態之檢查方法不同。 在第9圖中，爲明確表示發光性液體5 1，係對發光性液體 5 1賦予斜線。 茲針對檢查方法作說明。首先，對測定面2 1塗布發光性 液體5 1。以發光性液體5 1而言，係例如爲化學燈。且，與 • 第1實施形態的場合同樣地使輸入端面1 4接觸於塗布有發 光性液體5 1的測定面2 1，且使用被輸出至輸出端面1 5之光 學像32(參照第3圖）而執行與第1實施形態同樣的檢查。 在此場合，如第9圖所示，在輸入端面1 4與測定面2 1接 觸的區域，亦即，於接觸部3 0、3 1，被塗布於測定面2 1之 發光性液體5 1係被推出於接觸部3 0、3 1的周圍。在此，發 光性液體5 1係發出光，該光係從輸入端面1 4對光纖組件1 〇 入射而自輸出端面15被輸出。在接觸部30、31中，在輸入 -15- 200532165 端面1 4與測定面2 1之間幾乎未存在有發光性液體5 i。 因此，於輸出端面15，接觸部像33、34(參照第3圖）之周 圍，與沒有發光性液體5 1的場合相較之下係變得明亮。依 此，接觸部像33、34的對比係提升，所以檢查變容易。且， 因爲發光性液體5 1會發出光，所以即使不照明測定面2 1也 可以。 (第4實施形態） 第1 〇圖係第4實施形態相關的曲面形狀檢查方法之說明 φ 圖。本實施形態之曲面形狀檢查方法中，有關取代第3實施 形態中之發光性液體5 1而改採以使用分散有將光散亂的散 亂體之散亂性液體5 2這點上係與第3實施形態之檢查方法 不同。此外，在第1 〇圖中也爲了可明確顯示散亂性液體5 2， 而在散亂性液體52上賦予斜線。 茲針對檢查方法作說明。首先在測定面21塗布散亂性液 體52。以散亂性液體52而言，例如爲乳白色之懸濁液。且， 與第3實施形態的場合同樣地使輸入端面1 4接觸於塗布著 Φ 散亂性液體52的測定面21。在此際，如第10圖所示，使用 燈之類的照明裝置60而從光纖組件1 0的側方對被塗布於測 定面2 1的散亂性液體52作照明。接著，使用被輸出於輸出 端面15之光學像32(參照第3圖）以執行與第1實施形態相 同的檢查。 在此場合，如第1 0圖所示，輸入端面14與測定面2 1接 觸的區域’亦即，在應成爲接觸部3 0、3 1之測定面2 1的區 域所塗布之散亂性液體5 2被推出於接觸部3 0、3 1的周圍。 -16- 200532165 如同上述，於散亂性液體52，因爲用以使光散亂的散亂體被 分散，所以當被照明裝置6 0所照明時會使照明光散亂。因 此，輸入端面1 4與測定面2 1相接的區域周圍係與第3實施 形態之場合同樣地變明亮，所以輸出端面1 5中之接觸部像 3 3、3 4的對比係提升。所以檢查變容易。 (第5實施形態） 第1 1圖係顯示本實施形態相關的曲面形狀檢查裝置（以 下，簡單稱爲「檢查裝置））之構成的模式圖。 • 本實施形態相關的檢查裝置7 0係包含有光纖組件1 0、攝 像裝置71、透鏡系72、以及照明裝置60所構成。 攝像裝置7 1係，例如爲CCD相機，且與監視器等作電氣 連接。透鏡系72係位在輸出端面1 5與攝像裝置7 1之間， 且被配置成使輸出端面1 5所輸出的光學像對攝像裝置7 1入 射。第1 1圖中係顯示1片透鏡，但是也可以使用複數片透 鏡。照明裝置60係在光纖組件1 0的側方且以面臨輸入端面 1 4般地作設置，而形成可對輸入端面1 4照明。照明裝置60 爲’例如是燈。 在使用本實施形態的檢查裝置70之檢查方法中，係與第1 實施形態同樣地使輸入端面1 4和測定面2 1 (參照第1圖）接 觸。接著，在測定面2 1與輸入端面1 4相接之際，將輸出端 面15所輸出的光學像32(參照第3圖）經由透鏡系72而利用 攝像裝置7 1來攝像。在實施檢查之際，利用照明裝置60對 輸入端面1 4照明。在檢查時因爲輸入端面1 4和測定面2 1 相接’所以藉由輸入端面1 4被照明，測定面2 1係被照明。 200532165 在本實施形態之場合，包含有2個接觸部像33、34(參照 第3圖）而構成的光學像32係會被攝像裝置71所攝像。接 著，測定在監視器等所映出的接觸部像3 3、3 4間之距離。 如此，因爲係依據監視器等所映出的接觸部像3 3、3 4來檢 查曲面形狀，所以檢查變容易且可使檢查自動化。且，可依 據利用攝像裝置7 1而變換成電氣信號之光學像32的資料來 實施檢查。依此，可使檢查精準度提升。 又，如同上述般，在檢查實施時，在照明裝置6 0，當輸入 Φ 端面1 4 一被照明時，受測定對象20之測定面2 1也會被照 明。因此，可使輸出端面1 5所輸出的接觸部像33、34更加 鮮明。又，從輸出端面1 5所輸出的接觸部像3 3、34係依透 鏡系72而被輸入到攝像裝置7 1。因此，可將接觸部像3 3、 3 4利用透鏡系72例如作放大而對攝像裝置7 1輸入，且因爲 可在較大的光學像3 2實施檢查，所以檢查變容易。 (第6實施形態） 第1 2圖係顯示本實施形態相關的檢查裝置8 〇之構成的模 # 式圖。檢查裝置8 0係包含有光纖組件1 〇和攝像裝置8 1而 構成。檢查裝置80與第5實施形態的檢查裝置70不同點在 於、攝像裝置8 1係安裝在輸出端面1 5。攝像裝置8 1係例如 爲CCD攝像元件。 使用了檢查裝置8 0之受測定對象2 0的曲面形狀的檢查方 法除了使輸出端面I5所輸出的光學像32(參照第3圖）不經 由透鏡系72而直接以攝像裝置7 i來攝像這點以外，其他是 與第5實施形態相同。此外，檢查裝置8 0雖然沒有檢查裝 -18- 200532165 置7 0所具備的照明裝置6 0，但是在檢查時，係 1 〇的側方經由光纖組件1 0的側面而以燈等 60(第1 1圖參照）來照明測定面21和輸入端面1 在本實施形態的場合，攝像裝置8 1係直接安 件1 0，所以可將檢查裝置8 0小型化，且容易攜 例如在製造受測定對象20的場合，係可即時（ 簡易地實施檢查。然後，以攝像裝置81來攝像 1 5輸出的光學像32，所以爲第5實施形態同樣 # 在監視器等所映出的光學像3 2來進行檢查。且 用攝像裝置81而變換成電氣信號之光學像32的 檢查。依此，更可使檢查精準度提升。 (第7實施形態） 第1 3圖係顯示本實施形態相關的檢查裝置90 式圖。第1 3圖之檢查裝置90與第5實施形態之 不同點在於，使用了在包含有輸出端面1 5的指 置著用以吸收光的光吸收體之光纖組件9 1。光| Φ 第1實施形態同樣，爲紮束複數條光纖9 2而一 具有半球狀部91 Α和主體部包含有（輸出端面1 域）9 1 B。 其中，各光纖92當中，半球狀部91A之區域έ 構成與主體部91Β之區域的光纖92之構成係不 施形態中，在說明光纖9 2當中之位在半球狀部 之光纖9 2之際，例如光纖9 2 Α係賦予符號Α。 明構成主體部9 1B之區域的光纖92之際，如光 由光纖組件 之照明裝置 4 〇 裝在光纖組 行。因此， real time ) 從輸出端面 地，可依據 ，可依據利 資料來實施 之構成的模 檢查裝置8 0 定的區域設 载組件9 1與 體成形，且 5的指定區 勺光纖92之 同。在本實 9 1 A的區域 此外，在說 纖92B係賦 200532165 予符號B。且與第1實施形態的場合同樣，有關第9圖中所 示之光纖組件91的內部構造，爲了方便說明係加以放大表 示。且，細鏈線係表示光纖92的境界。 如第13圖所示，構成半球狀部91 A之各光纖92A係由纖 芯區域93A、以及包圍纖芯區域93A般而設置的包覆區域 94A所構成。200532165 m IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a curved surface shape inspection method, an optical fiber component, and a curved surface shape inspection device. [Prior Art] The measurement of the groove shape of a constant velocity universal joint used in an automobile is performed as follows, for example. First, apply the mixture of fine powder and liquid to the measurement surface to be measured. Next, a sphere with a standard size is placed on the measurement surface, and a vernier caliper or the like is used to measure the line generated at the contact portion. However, this method is complicated in operation and the measurement accuracy of the groove shape is not high. In response, Document 1 (Japanese Utility Model Publication No. 6 1-1 73 65) and Document 2 (Japanese Patent Application Laid-Open No. 8-2 8 5 5 06) disclose devices for measuring the shape of a curved surface. The method of measuring the curved surface shape of the devices described in Documents 1 and 2 will be described below. In the measuring device described in Document 1, first, a spherical portion having the same diameter as the sphere rotating in the sphere rotating groove and formed on the main shaft is coupled to the sphere rotating groove. Second, the main shaft is rotated around the axis of the main shaft. At this time, the movement of the contact portion protruding from the spherical portion and coming into contact with the spheroidal groove was measured. Accordingly, the shape of the turning groove of the sphere is measured. In the measuring device described in Document 2, a reference ball is restrained between a curved surface of a workpiece to be measured and a horizontal restraint surface and a vertical restraint surface of a restraint member. In this state, measure the distance from the reference position of the worker to the horizontal restraint surface. This measurement was performed on 3 reference balls having different diameters. Then, using the measurement of 200532165 to determine the position of the curvature radius and the center of curvature of the curved surface of the workpiece geometrically. [Disclosure of the Invention] However, with the measuring device described in Document 1, the device is complicated and precise measurement, so the use place of the device is limited. In addition, in order to accurately measure the shape of the curved surface, a large number of measurement points are necessary. In the measuring device described in Reference 2, it is necessary to use a plurality of reference balls, so it is necessary to measure the distance from the reference position of the workpiece to the horizontal restraint surface according to the reference balls. In this way, in the measurement performed by the measuring devices described in Documents 1 and 2, the measurement operation is complicated. An object of the present invention is to provide a curved surface shape inspection method capable of easily inspecting a curved surface shape, an optical fiber module used in the inspection method, and a curved surface shape inspection device using the optical fiber module. In order to solve the above-mentioned problem, a curved shape inspection method according to the present invention is to bundle a plurality of optical fibers formed from a core region and a cladding region surrounding the core region to form an integrated optical fiber module. The input end surface formed by one end of each optical fiber and at least a part of which is curved and the measurement surface having a curved shape in the measured object abut each other. It is characterized by the use of an optical fiber module located on the opposite side of the input end The output of the output end surface is used to check the curved shape of the object to be measured according to the optical image formed by the input end surface contacting the measurement surface. In the above method, the input end surface of the optical fiber module composed of a plurality of optical fibers and the measurement surface having a curved surface shape of the measurement target are made to abut each other. Next, use the optical image formed by the output end face of the optical fiber unit to contact the input end face with the measurement surface 200532165 to check the curved shape of the measurement target. The optical image is an image formed by the contact between the input end surface and the measurement surface, and corresponds to the contact pattern between the input end surface and the measurement surface (p a 11 e r η). Therefore, the shape of the curved surface of the measurement target can be checked by checking the optical image. In this case, if the optical fiber module is pressed against the object to be measured, the shape of the curved surface of the object to be measured can be inspected, so that the inspection is easy. In addition, since fine powder is not used, workability can be improved. In addition, the optical fiber module related to the present invention is suitable for the inspection of the curved shape of the object to be measured, and is integrally formed to bundle a plurality of optical fibers formed from the core region and the cladding region surrounding the core region. An optical fiber module is characterized by having: an input end surface composed of one end of each optical fiber and at least a portion of which is curved; and an output located on the opposite side of the input end surface to output an optical image formed by light incident on the input end surface End face. With the above-mentioned configuration, in the optical fiber module, the optical system that enters each optical fiber from at least a part of the input end surface that is curved is guided by each optical fiber. Then, an optical image formed by the light propagating from each optical fiber is outputted from the output end surface. In the inspection of the curved shape of the measurement target, the input end face is abutted against the measurement surface having a curved shape in the measurement target, and the inspection is performed. In this case, the optical image corresponds to the contact pattern between the input end surface and the measurement surface. Therefore, the shape of the curved surface of the object to be measured can be inspected by inspecting the optical image. Here, the inspection is performed, for example, by comparing an optical image actually output from the output end surface with an optical image formed when the object to be measured has a desired curved shape. 200532165 In the inspection of the curved shape of the optical fiber module configured as described above, if the measured object is pressed, the curved shape of the measured object can be checked, so the inspection is easy. Moreover, since fine powder is not used, workability can be improved. In addition, the curved shape inspection device related to the present invention is a curved shape inspection device for inspecting the curved shape of a measurement object, and is characterized by being provided with the above-mentioned optical fiber module and provided to face an output end face of the optical fiber module, and is used for An imaging device for imaging an optical image output from an output end surface. In the above configuration, the optical image of # output from the output end face of the optical fiber module according to the present invention is captured by the imaging device. In the inspection of the shape of the curved surface of the measurement object, the optical image formed when the measurement surface and the input end surface of the measurement object having a curved shape abut against each other corresponds to the contact pattern between the measurement surface and the input end surface. Therefore, the optical image can be used to check the shape of the curved surface of the object to be measured. Furthermore, in the curved shape inspection device configured as described above, since the optical image output from the output end surface is captured by the imaging device, the inspection can be performed using an optical image projected on a monitor or the like. As a result, inspections are easy and inspections can be automated. [Embodiment] Hereinafter, the drawings and the preferred embodiments of the present invention will be described in detail. In addition, the same elements in the description of the drawings are given the same symbols, and repeated explanations are omitted. (First Embodiment) Fig. 1 is a diagram for explaining a method of inspecting a curved surface shape according to the first embodiment. In the curved surface shape inspection method of this embodiment, as shown in FIG. 1, the 200532165 optical fiber module 10 is brought into contact with a measurement surface 21 having a curved surface shape to be measured 20 to perform an inspection. The optical fiber module 10 shown in Fig. 1 is a bundle of a plurality of optical fibers 11 and is integrally formed. The plurality of optical fibers 11 are bundled such that their optical axes are approximately parallel. The optical fiber 11 is a multi-mode optical fiber, for example. Each optical fiber 11 is formed of a core region 12 and a cladding region 13 surrounding the core region 12. In addition, for convenience of explanation, the internal structure of the optical fiber module 10 shown in FIG. 1 is enlarged. The thin chain lines show the realm of the optical fiber 11. ® The optical fiber module 10 includes a hemispherical portion 10A and a main body portion 10B adjacent to the hemispherical portion 10A. The hemispherical portion 10A has an input end surface 14 opposite to the main body portion 10B. The input end surface 14 is composed of one end of each optical fiber 11 and has a hemispherical shape. The curvature of the input end face 14 is set to the curvature used as a reference for inspection. The main body portion 10B has a substantially cylindrical shape, and has an output end surface 15 on the side opposite to the hemispherical portion 10A, in other words, on the side of the optical axis of the optical fiber 11 opposite to the input end surface 14. The output end surface 15 intersects the optical axis of each optical fiber 11 approximately Φ, and is used to output an optical image formed by the light incident on the input end surface 14. As described above, in the optical fiber module 10, the optical system input through the input end face 14 is transmitted by each optical fiber 11 and is output from the output end face 15. Therefore, an optical image having a pattern corresponding to a pattern of light input to the input end surface 14 is output from the output end surface 15. The optical fiber module 10 is manufactured, for example, by first bundling a plurality of optical fibers 11 into a substantially cylindrical shape and integrally molding them, and honing one end portion into a hemispherical shape. 200532165 will be described for the subject 20 to be properly inspected using the optical fiber module 10. Fig. 2 is a top view of an example of a measurement target 20; The measurement target 20 in FIG. 2 is an inner wheel of a constant velocity universal joint used in an automobile. As shown in Fig. 2, the subject 20 is provided with a plurality of sphere turning grooves 23 for rotating the torque transmission sphere 22 in the circumferential direction. The sphere turning groove 23 extends in the axial direction of the object to be measured 20 (direction substantially perpendicular to the paper surface). The constant velocity universal joint is constituted by coupling a torque transmitting sphere 22 with an inner wheel and an outer wheel (not shown). In the constant velocity universal joint, when the inner wheel rotates around the axis, it is transmitted to the outer wheel via the torque transmitting sphere 22. In this embodiment, the shape of the curved surface of the inner surface of the sphere turning groove 23 is checked. That is, the inner surface of the sphere turning groove 23 is equivalent to the measurement surface 21. A method for inspecting the curved shape of the object 20 to be measured will be described with reference to FIG. 1. During the inspection, the input end face 14 of the optical fiber module 10 and the measurement surface 21 having a curved shape of the measurement target 20 abut against each other. The input end surface 14 may be pressed against the measurement surface 21, and the measurement target 20 may be pressed against the input end surface 14. In this way, when the input end surface 14 and the measurement surface 2 1 are abutted, the optical fiber assembly 1 0 and the optical fiber assembly 10 are intersected so that the central axis α of the optical fiber assembly 10 and the deepest part of the sphere rotation groove 23 # intersect with each other. The measurement objects 20 abut against each other. When the input end surface 14 is in contact with the measurement surface 21, the input end surface 14 is hemispherical, so the measurement surface 21 and the input end surface 14 are connected at two places. In contrast, the curvature of the input end surface 14 is set in advance so that the measurement surface 21 and the input end surface 14 are connected at two places. Here, as shown in FIG. 1, the areas where the input end surface 14 and the measurement surface 21 are in contact are set as the contact portions 30 and 31. According to the formation of the contact portions 30 and 31, the optical system output from the output end surface 15 -10- 200532165 will change. More specifically, an optical image corresponding to the contact pattern of the input end surface 14 and the measurement surface 2 1 is output from the output end surface 15. Figure 3 is a front view of the output end face 15 during the inspection. The optical image 32 shown in Fig. 3 is the same as described above, and is based on the input end surface! 4 The image formed by contacting the measurement surface 21 with the input surface 14 corresponds to the contact pattern of the measurement surface 21 with the input surface. In other words, the optical image 32 is composed of the contact portion images 33 and 34 corresponding to the two contact portions 30 and 31 between the input end surface 14 and the measurement surface 21. • Since the shape of the input end face 14 is known, the distance between the two contact part images when the measurement surface 2 1 (that is, the inner surface of the sphere turning groove 23 in FIG. 2) is a desired curved shape Is predictable. Accordingly, the distance between the two contact portion images 33 and 34 in the case where the measurement surface 21 has a desired curved surface shape can be set as the reference frame. Therefore, by comparing the measurement of the distance D1 between the contact portion image 3 3, 3, 4 formed by actually contacting the input end surface 14 and the measurement surface 21 with the reference surface, the curved surface shape of the measurement surface 21 can be checked. Whether it has a desired curved shape. The distance between the contact part images 33 and 34 is measured. For example, φ may be measured using a vernier caliper 40 shown in FIG. 3. Further, as in this embodiment, when the object to be measured 20 is an inner wheel of a constant velocity universal joint, at least one of the optical fiber module 10 and the object to be measured 20 is moved in a direction in which the sphere rotation groove 23 extends, so that Investigate the change in the distance D 1 between the contact parts 3, 3, and 4 to check the uniformity of the curved shape of the sphere turning groove 23 in the extending direction. Furthermore, by using the optical fiber module 10 to inspect the curved shape of the plurality of sphere turning grooves 23, it is possible to check the uniformity of the shape of the curved surface between the sphere turning grooves 23-11-200532165. As described above, the hemispherical input end face 14 is constituted by one end of the optical fiber 11. Therefore, the end face of the optical fiber 11 constituting the input end face 14 is inclined in a so-called slant shape. On the one hand, the output end surface 15 is a plane substantially orthogonal to the optical axis of the optical fiber 11. Therefore, the above-mentioned contact type system is reduced and output from the output end surface 15. Therefore, by using the optical fiber module 10 for inspection, the inspection accuracy is improved. The distance D 1 between the contact parts 3, 3, and 4 can also be measured with a vernier as described above. • Calibrator 40 is used for measurement. It is better to use inspection pattern 41 for the output end surface 15. FIG. 4 is a front view of the output end surface 15 where the inspection pattern 41 is formed. The inspection pattern 41 is, for example, a pattern of a plurality of concentric circles as shown in the pattern example (a) in FIG. 4. Also, as shown in model example (b), a scale model with a scale can also be used. The inspection pattern 41 is formed on the output end surface 15 by evaporation, etching, or the like. It may be formed by attaching a thin sheet. In this way, by setting the inspection pattern 41 on the output end surface 15, the # inspection pattern 41 and the contact portion images 33 and 34 (ie, the optical image 32) can be inspected in a one-to-one correspondence. Since it does not matter if the distance is not re-measured with a vernier caliper, etc., inspection is facilitated. However, depending on how the measuring surface 21 and the input end surface 14 are matched, the distance between the contact portions 3 and 34 varies. Fig. 5 is an explanatory diagram of the positional relationship between the optical fiber module 10 and the object 20 to be measured. As shown in FIG. 5, when the central axis α of the optical fiber module 10 does not pass through the vicinity of the deepest part of the sphere turning groove 23, the contact portion appearing on the output end surface 15 is a distance between 3 3 i, 3 4! D2 200532165 becomes shorter than the distance D 1 between the contact parts 3, 3, and 4 shown in Fig. 3, and an error occurs in the inspection. When the optical fiber module 10 is correctly set on the measurement surface 2 1 (that is, the central axis α is the deepest vicinity passing through the sphere rotation groove 23), the contact portions are like 3 3, 3 4 as shown in FIG. 3. It is shown that the distance from the center 0 of the output end surface 15 is approximately equal. Therefore, it is preferable to set the position adjustment pattern 42 made of two concentric circles in consideration of the error in the positional relationship between the optical fiber module 10 and the measurement target 20 and the inspection specifications in consideration of the output end surface 15. § Figure 6 is a front view of the output end face 15 with the position adjustment pattern 42 formed. The position adjustment pattern 42 may be formed by vapor deposition or etching, or a sheet may be attached to the output end surface 15. In Fig. 6, a diagonal line is attached to clearly show the position adjustment pattern 42. In this case, by confirming whether the contact portion images 3 3 and 34 shown in FIG. 3 are located in the position adjustment pattern 42, the confirmation and inspection of the setting position of the optical fiber module 10 on the measurement surface 21 and the inspection are qualified. no. On the other hand, it is sufficient to adjust the position of the optical fiber assembly 10 or the position of the measurement target 20 so that the contact portion 3, 3, 4 is positioned in the position adjustment pattern 42. In this way, by adjusting the position of the optical fiber module 10 or the measurement target 20, it is possible to suppress variations in measurement errors in each inspection to a desired range. In addition, when the inspection pattern 41 shown in FIG. 4 is provided on the output end surface 15, the inspection pattern 41 can also be used as a position adjustment pattern 42. In other words, the inspection pattern 41 can also function as the position adjustment pattern 42. In the method for inspecting the curved shape of the optical fiber module 10 according to the embodiment described above, the input end surface 14 and the measurement surface 21 are abutted against each other, and are output to the output end surface 15 to 2 through measurement-13-200532165. The distance D 1 between the parts 3, 3, 3 and 4 is used to check the shape of the curved surface of the object 20 to be measured. Therefore, the inspection system is easy. Moreover, since fine powder is not used as in the past, there is no problem of causing environmental damage and workability can be improved. In addition, since the end face of the optical fiber 11 on the input end face 14 side has a slant shape, the contact type system is reduced and output on the output end face 15. Therefore, the inspection accuracy is improved. (Second Embodiment) Fig. 7 (a) is an explanatory diagram # of a curved surface shape inspection method according to the second embodiment. FIG. 7B is an enlarged view of the contact portion 31. In the inspection method of the first embodiment, the measurement surface 21 is brought into direct contact with the input end surface 14, but in the inspection method of this embodiment, as shown in FIG. 7 (a), it is transparent. The film 50 has the input end surface 14 and the measurement surface 21 abutting each other, and uses the optical image output from the output end surface 15 to inspect the curved surface shape of the measurement target 20 in the same manner as in the first embodiment. In addition, in FIG. 7 (a), the film 50 is underlined to clearly show the film 50. The film 50 is, for example, a sheet made of a transparent resin. Film 5 0 • It may be an organic film produced by vapor deposition on the input end surface 14 or a liquid film that is thinly coated. The contact system between the input end surface 14 and the measurement surface 21 in this specification means that the case where the film 50 is held between the measurement surface 2 1 and the input end surface 14 in this manner is also included. In this case, by holding the film 50 between the measurement surface 21 and the input end surface 14 of the measurement target 20, as shown in FIG. 7 (b), the contact portion 3 between the measurement surface 21 and the input end surface 14 The area of 1 becomes larger. The same applies to the contact portion 30. -14- 200532165 FIG. 8 is a schematic diagram of the optical image 3 2 2 during inspection in this embodiment. As described above, since the areas of the contact portions 30 and 31 become larger, the areas of the two contact portions like 3 3 and 3 42 which are output to the output end surface 15 also become larger. In FIG. 8, the image shown by the dotted line is a contact portion image 3 3, 3 4 when the film 50 is not used, and it is simply shown for comparison. Since the areas of the contact image 3 3 2 and 3 4 2 become larger, it is easy to confirm the optical image 3 2 2 formed by the contact between the measurement surface 21 and the input end surface 14. In addition, the input end face 14 of the optical fiber assembly 10 is protected by a film 50. Φ (Third Embodiment) Fig. 9 is an explanatory diagram of a method for inspecting a curved surface shape according to the third embodiment. The curved surface shape inspection method of this embodiment is different from the inspection method of the first embodiment in that a light-emitting luminescent liquid 51 is used. In FIG. 9, in order to clearly show the luminescent liquid 51, a slash is given to the luminescent liquid 51. The inspection method is explained below. First, the measurement surface 21 is coated with a luminescent liquid 51. The luminescent liquid 51 is, for example, a chemical lamp. Furthermore, as in the case of the first embodiment, the input end surface 14 is brought into contact with the measurement surface 21 coated with the luminescent liquid 51, and an optical image 32 (see FIG. 3) output to the output end surface 15 is used. ) The same inspection as in the first embodiment is performed. In this case, as shown in FIG. 9, in a region where the input end surface 14 and the measurement surface 21 are in contact, that is, the contact portions 30 and 31 are coated with the luminescent liquid 5 1 on the measurement surface 21. The system is pushed out around the contact portions 30 and 31. Here, the luminescent liquid 51 emits light. The light is incident on the optical fiber module 10 from the input end face 14 and is output from the output end face 15. In the contact portions 30 and 31, there is almost no luminescent liquid 5 i between the input -15- 200532165 end surface 14 and the measurement surface 21. Therefore, the area around the contact end images 33 and 34 (see Fig. 3) at the output end surface 15 becomes brighter than when the luminescent liquid 51 is not present. As a result, the contrast of the contact portions 33 and 34 is improved, so that the inspection becomes easy. In addition, since the luminescent liquid 51 emits light, the measurement surface 21 can be used without lighting. (Fourth Embodiment) FIG. 10 is a φ diagram illustrating a method for inspecting a curved surface shape according to the fourth embodiment. In the method for inspecting the shape of a curved surface according to the present embodiment, the point is that instead of the luminescent liquid 51 in the third embodiment, a scattered liquid 5 2 in which a scattered body that scatters light is used is used. The inspection method of the third embodiment is different. In addition, in FIG. 10, the scattered liquid 52 is provided with a diagonal line so that the scattered liquid 52 can be clearly displayed. The inspection method is explained below. First, the measurement surface 21 is coated with a scatter liquid 52. The scattered liquid 52 is, for example, a milky white suspension. Further, as in the case of the third embodiment, the input end surface 14 is brought into contact with the measurement surface 21 coated with the Φ scatter liquid 52. At this time, as shown in Fig. 10, the scattered liquid 52 applied to the measurement surface 21 is illuminated from the side of the optical fiber module 10 using a lighting device 60 such as a lamp. Next, the optical image 32 (see Fig. 3) outputted to the output end surface 15 is used to perform the same inspection as in the first embodiment. In this case, as shown in FIG. 10, the area where the input end surface 14 is in contact with the measurement surface 21, that is, the scattering property applied to the area where the measurement surface 21 is to be the contact portion 30, 31. The liquid 5 2 is pushed out around the contact portions 30 and 31. -16- 200532165 As described above, in the scattered liquid 52, the scattered body used to disperse the light is dispersed, so the illumination light is scattered when illuminated by the lighting device 60. Therefore, the area surrounding the area where the input end surface 14 and the measurement surface 21 are in contact is brightened as in the case of the third embodiment. Therefore, the contrast of the contact portions 3, 3 and 4 in the output end surface 15 is improved. So inspection becomes easier. (Fifth Embodiment) FIG. 11 is a schematic diagram showing the configuration of a curved shape inspection device (hereinafter, simply referred to as an “inspection device”) related to this embodiment. • The inspection device 70 according to this embodiment includes The optical fiber module 10, the imaging device 71, the lens system 72, and the lighting device 60. The imaging device 71 is a CCD camera, for example, and is electrically connected to a monitor. The lens system 72 is located on the output end surface 1. 5 and the imaging device 71 are arranged so that the optical image output from the output end surface 15 enters the imaging device 71. In the first figure, one lens is shown, but a plurality of lenses may be used. Illumination The device 60 is provided on the side of the optical fiber module 10 and faces the input end surface 14 so as to illuminate the input end surface 14. The lighting device 60 is, for example, a lamp. The inspection device of this embodiment is used. In the inspection method of 70, the input end surface 14 and the measurement surface 2 1 (refer to FIG. 1) are brought into contact in the same manner as in the first embodiment. Next, when the measurement surface 21 is in contact with the input end surface 14, Output end face 15 The optical image 32 (see FIG. 3) is imaged by the imaging device 71 through the lens system 72. During the inspection, the input end surface 14 is illuminated by the lighting device 60. During the inspection, the input end surface 14 and the measurement surface are illuminated. 2 1 is connected. Therefore, the input end surface 14 is illuminated, and the measurement surface 2 1 is illuminated. 200532165 In the case of this embodiment, it is composed of two contact portions 33 and 34 (refer to FIG. 3). The optical image 32 is captured by the imaging device 71. Next, the distance between the contact part images 3, 3, and 3 projected on the monitor or the like is measured. This is because the contact part images projected on the monitor or the like are used. 3, 3, and 4 are used to check the shape of the curved surface, so that the inspection becomes easy and inspection can be automated. Moreover, inspection can be performed based on the data of the optical image 32 converted into electrical signals by the imaging device 71. According to this, inspection can be performed The accuracy is improved. As described above, when the inspection is performed, when the input Φ end surface 1 4 is illuminated in the lighting device 60, the measurement surface 21 of the measurement target 20 is also illuminated. Contact output by output end 1 5 The part images 33 and 34 are more distinctive. Furthermore, the contact part images 3 3 and 34 output from the output end surface 15 are input to the imaging device 7 1 according to the lens system 72. Therefore, the contact part images 3 3 and 3 can be input. 4 For example, the lens system 72 is used to magnify and input to the imaging device 71, and inspection can be performed easily because a larger optical image 32 can be inspected. (Sixth Embodiment) Fig. 12 shows the present embodiment. Schematic diagram of the structure of the related inspection device 80. The inspection device 80 is composed of an optical fiber module 10 and an imaging device 81. The inspection device 80 differs from the inspection device 70 of the fifth embodiment in that the imaging The device 8 1 is installed on the output end surface 15. The imaging device 81 is, for example, a CCD imaging element. In addition to the method of inspecting the curved shape of the measurement target 20 using the inspection device 80, the optical image 32 (see FIG. 3) output from the output end surface I5 is directly imaged by the imaging device 7i without passing through the lens system 72. Other points are the same as those of the fifth embodiment. In addition, although the inspection device 80 does not include the illumination device 60 included in the inspection device -18- 200532165 and 70, at the time of inspection, the side of the system 10 passes through the side of the optical fiber module 10 to a lamp or the like 60 (No. (Refer to Fig. 11 for reference) to illuminate the measurement surface 21 and the input end surface 1. In the case of this embodiment, the imaging device 8 1 is directly attached to the device 10. Therefore, the inspection device 80 can be miniaturized, and it is easy to carry, for example, the device to be measured. In the case of the subject 20, the inspection can be performed immediately and easily. Then, the optical image 32 output by the camera 15 is taken by the imaging device 81, so it is the same as the fifth embodiment. # The optical image projected on a monitor or the like 3 2 The inspection is performed. The inspection is performed by using the imaging device 81 to convert the optical image 32 into an electrical signal. According to this, the inspection accuracy can be improved. (Seventh Embodiment) Fig. 13 shows the inspection related to this embodiment. Type diagram of device 90. The inspection device 90 shown in Figs. 13 and 5 is different from the fifth embodiment in that an optical fiber module 91 is used which includes a light absorber for absorbing light on a finger including an output end face 15. Light | Φ Similarly to the first embodiment, A plurality of optical fibers 92 are provided, and one has a hemispherical portion 91 A and the main body portion includes (output end face 1 domain) 9 1 B. Among the optical fibers 92, an area of the hemispherical portion 91A constitutes an area of the main body portion 91B. In the configuration of the optical fiber 92, the optical fiber 92 in the hemispherical portion among the optical fibers 92 will be described. For example, the optical fiber 9 2 A is assigned the symbol A. The optical fiber constituting the area of the main body 9 1B At the time of 92, if the light is installed by the optical fiber assembly lighting device 40 in the optical fiber group. Therefore, the real time) from the output end surface, can be based on, and can be implemented based on profitable data. It is assumed that the load-carrying module 91 and the body are shaped, and the designated area 5 of the scoop fiber 92 is the same. In the region of 9 1 A, the fiber 92B is assigned the symbol 200532165. Also, as in the case of the first embodiment, the internal structure of the optical fiber module 91 shown in Fig. 9 is shown enlarged for convenience of explanation. It should be noted that the thin chain line indicates the state of the optical fiber 92. As shown in Fig. 13, each optical fiber 92A constituting the hemispherical portion 91A is composed of a core region 93A and a cladding region 94A provided so as to surround the core region 93A.
且，構成主體部91B之各光纖92B係由纖芯區域93B、和 包圍纖芯區域93B的包覆區域94B、以及將其包覆區域94B # 再包圍般設置且用以吸收光的光吸收體9 5 B所構成。 主體部91B中之纖芯區域93B與包覆區域9 4B之折射率 差係成爲比半球狀部91 A中之纖芯區域93 A與包覆區域94 A 之折射率差還小。換言之，主體部91B之各光纖92B的N.A. 係較半球狀部91 A之各光纖92A的N.A.還小。 上述光纖組件91若按照例如以下那樣製造就可以。首先 把複數條光纖92A紮束以形成一體，而形成半球狀的光纖組 件以作成半球狀部9 1 A。且將與構成半球狀部9丨a之複數條 • 光纖92A相同數目的光纖92B紮束成形爲一體而形成略圓柱 狀的光纖組件以作爲主體部9 1 B。 接著’將半球狀部9 1 A與主體部9 1 B成一體化而作爲光纖 組件9 1。在接合之際，於半球狀部9 1 A及主體部9 1 B，使 對應的光纖92A、92B彼此的光軸成爲一致般地接合成一體 化。以光纖組件91而言，因爲光纖92A及光纖92B係成爲 一體，所以係作爲1條光纖來作用。 使用了上述檢查裝置9 0的受測定對象2 〇之曲面形狀的檢 -20 - 200532165 查方法係與第5實施形態同樣。 如同上述，在半球狀部9 1 A未設置用以吸收光的光吸收 體。因此，使用燈等而可經由半球狀部9 1 A以對受測定對象 2 0之測定面2 1 (參照第1圖）照明。依此，可使由接觸部像 33、34所成的光學像32(參照第3圖）更加鮮明。 一方面，在主體部91B設置有光吸收體95B，所以未在主 體部91B之纖芯區域93B傳播的光係在光吸收體95B被吸 收。因此，彼此相鄰的光纖92B當中，從一方之光纖92B φ 的纖芯區域93B漏洩的光對另一方之光纖92B的纖芯區域 93B入射之串音（cross talk)係受抑制。且，除輸入端面 1 4以外，例如從光纖組件9 1之側方入射的光也在光吸收體 9 5 B被吸收。 依此，在各光纖92A、92B之纖芯區域93A、93B中傳播 的光，換言之，光學像3 2係藉由把輸入端面1 4與測定面2 1 之接觸型樣加以反映的光而形成，所以光學像3 2之S/N比 係提升。 φ 又，如同上述，主體部91B中之纖芯區域93B與包覆區域 94B之折射率差係較半球狀部91 A(更具體言之係輸入端面 14)中之纖芯區域93A與包覆區域94A之折射率差還小。因 此，以主體部91B而言，光係難以被關入纖芯區域93B。 依此，高次模態的光係容易從纖芯區域93B漏洩。高次模 態的光係有時會有未反映接觸型樣的場合，且，容易從輸出 端面1 5以各種角度被輸出，而有使光學像之S/N比減低的 場合。那樣的光係從纖芯區域93B被除去。然後，由纖芯區 -21 - 200532165 域9 3B所漏洩的光係如同上述般，爲在光吸收體95B被吸 收。因此，光學像3 2之S /N比係有更獲改善的傾向。 因此，在使用本實施形態相關的檢查裝置9 0之場合，係 可作高精度的檢查。此外，在本實施形態中，纖芯區域93 B 與包覆區域94B之折射率差雖然設成比纖芯區域93A與包覆 區域94A之折射率差還小，但是其等之折射率差也可以爲相 同。其中，在主體部9 1 B側，之所以小的那方爲較佳的理由 係如上述。 • 又，在本實施形態中，係將包含輸出端面1 5的指定的區 域作爲主體部9 1 B，而也能以可將輸入端面1 4或測定面2 1 照明般地配置光吸收體95B。因此，未在光纖92B之光軸方 向整體設置有光吸收體95B也可以。且光吸收體95B也可設 置於半球狀部9 1 A之主體部9 1 B側的一部份。 以上係依據本發明的最佳實施形態作說明，但是本發明當 然不受上述第1〜第7實施形態所限定。 第1 4圖係光纖組件1 0之變形例的側面圖。如同第1 4圖 φ 之構成例（a)所示的光纖組件100，係僅由半球狀部所構成， 換言之，也可以使用半球狀的光纖組件來檢查受測定對象20 之曲面形狀。又，如構成例（b)所示之光纖組件101，與輸出 端面1 5相反側的輸入端面1 02也可以不是半球狀，只要使 應與測定面2 1接觸的區域（形成接觸部3 0、3 1的區域）爲彎 曲就可以。 再者，也可以使用構成例（Ο所示的光纖組件1 03。光纖組 件1 03，爲以在中心軸線α附近形成空洞1 〇4般地使複數條 -22- 200532165 光纖11被紮束成中空體狀。且，在其空洞104塡入不使光 傳播的虛設構件10 5。如此，在複數條光纖n被紮束成中空 體狀的場合，與紮束成實心的場合相較下，係可減少光纖1 i 之使用條數。此外’以未將虛設構件1 05塡入空洞1 〇4之下 設爲中空的場合也可以進行檢查。 再者，又，如同第1 5圖所示之光纖組件1 〇6，也考慮到輸 入端面1 4側爲圓柱狀的場合。在此場合，例如，也能以1 次的測定來檢查球體轉動溝2 3之延伸方向的曲面形狀。又， φ 也可把第7實施形態所作說明之光纖組件9 1適用在第1〜第 6實施形態之曲面形狀檢查方法。再者，在使用檢查裝置7 0、 80、90來檢查受測定對象20的曲面形狀之際，也可以使用 在第2〜第4實施形態所示的方法。 再者，在第1〜第7實施形態中雖然受測定對象20係等速 萬向接頭之內輪’但是受測定對象並不受此限。以受測定對 象而言，若具有曲面形狀就可以，檢查方法並不受限爲2個 接觸部像3 3、3 4間之距離測定。 φ 例如，把輸入端面1 4之曲率設爲應檢查之測定面之期望 的曲率。在測定面爲具有所期望的曲率之場合，輸入端面1 4 的大致全面係與測定面相接，而反映其之光學像係從輸出端 面15被輸出。因此，藉由觀察依輸入端面與測定面接觸 所產生的光學像之型樣’係可檢查測定面是否具有所期望的 形狀。 本發明相關的曲面形狀檢查方法’通常爲’於把複數條由 纖芯區域及包圍纖芯區域的包覆區域所成的光纖紮束而一 -23- 200532165 體成形的光纖組件中，把由各光纖的一端所構成且至少一部 份爲彎曲的輸入端面與受測定對象之具有曲面形狀的測定 面相互抵住，並使用由位在輸入端面相反側之光纖組件的輸 出端面所輸出，依輸入端面和測定面接觸所形成的光學像來 檢查受測定對象之曲面形狀者較佳。 於上述方法，係使複數條光纖所構成的光纖組件之輸入端 面與受測定對象之具有曲面形狀的測定面相互抵住。接著， 使用從光纖組件之輸出端面被輸出且依輸入端面與測定面 φ 接觸所形成的光學像以檢查受測定對象之曲面形狀。 光學像係依輸入端面與測定面接觸所形成的像，係對應於 輸入端面和測定面之接觸型樣。因此，經由檢查光學像係可 檢查受測定對象之曲面形狀。在此場合，若將光纖組件抵住 於受測定對象即可檢查受測定對象之曲面形狀，所以檢查容 易。又，因爲未使用微粉末、所以可使作業性提升。 又，於曲面形狀檢查方法中，上述測定面係爲受測定對象 所具有的溝之內面，上述光學像係包含有對應於輸入端面與 • 測定面之2個接觸部的2個接觸部像所構成，經由測定2個 接觸部像間之距離以檢查受測定對象之曲面形狀者較佳。 在此場合，以使溝的內面與輸入端面相互地抵住的狀態 下，測定從輸出端面輸出之2個接觸部像間的距離以檢查受 測定對象之曲面形狀。輸入端面之形狀因爲係既知，所以在 溝的內面爲期望之曲面形狀的場合中，2個接觸部像間的距 離係預知。依此，溝的內面爲期望的曲面形狀之場合中，可 將2個接觸部像間的距離設定作爲基準値。因此，經由把實 -24- 200532165 際上輸入端面與溝的內面接觸所形成之2個接觸部像間之距 離的測定値與基準値作比較，係可檢查溝的曲面形狀是否成 爲期望之曲面形狀。 且，於曲面形狀檢查方法中，使用攝像裝置來將上述光學 像攝像係較佳。在此場合，因爲光學像係被攝像裝置攝像， 所以若使用在監視器等所映出的光學像來檢查曲面形狀的 話就可以。依此，檢查變容易且可使檢查自動化。 又，於曲面形狀檢查方法中，把包含有輸出端面之指定的 • 區域且爲以包圍各光纖的包覆區域般地設置著用以吸收光 的光吸收體之區域係爲上述光纖組件所具有者較佳。在此場 合，在包含有輸出端面之指定的區域，未在光纖之纖芯區域 傳播的光係被光吸收體所吸收。因此，從輸入端面以外入射 到光纖組件的光及容易從光纖的纖芯區域漏洩的光等等係 被光吸收體所吸收。因此，光學像之S/N比係獲改善。 此外，在利用了包含光吸收體的光纖組件之曲面形狀檢查 方法中，有關各光纖之纖芯區域與包覆區域之折射率差，與 # 輸入端面相較下、在上述指定的區域變小係較佳。在此場 合，於指定的區域，成爲光難以被關入纖芯區域。因此，高 次模態的光易從纖芯區域漏出。且從纖芯區域漏出的光係由 光吸收體所吸收。因此，光學像之S/N比係更獲得改善。 再者，於曲面形狀檢查方法中，係以挾住具有透光性的膜 而使輸入端面與測定面相互抵住，且使用從輸出端面輸出之 光學像以檢查受測定對象之曲面形狀者較佳。在此場合，藉 由在受測定對象之測定面與輸入端面之間將膜挾住，使得測 -25- 200532165 定面與輸入端面之接觸部分的面積變大。因此，係成爲容易 確認依測定面與輸入端面之接觸所形成的光學像。且，光纖 組件之輸入端面係被膜所保護。此外，所謂的膜係意味著包 含薄片及液膜。 又，於曲面形狀檢查方法中，係以將輸出端面所設置的檢 查型樣與光學像作比較以檢查受測定對象之曲面形狀者較 佳。在此場合，因爲係將輸出端面所設置的檢查型樣與光學 像直接比較，所以檢查變容易。此外，在檢查型樣方面，例 # 如爲刻度型樣等。 此外，在曲面形狀檢查方法中，把用以發光之發光性液體 塗布在測定面，再將塗布有發光性液體之測定面與輸入端面 相互抵住，再使用從輸出端面輸出之光學像以檢查受測定對 象之曲面形狀是最好的。在此場合，當受測定對象之測定面 與輸入端面相互抵住時，輸入端面與測定面相接之區域的發 光性液體係被推開。因此，輸入端面與測定面相接之區域周 圍的區域係變得比沒有發光性液體的場合還明亮。因此，光 # 學像之對比係有所提升，檢查係變容易。 再者，於曲面形狀檢查方法中，把含有散亂體之散亂性 液體塗布在測定面，使塗布著散亂性液體的測定面與輸入端 面相互抵住，而使用從輸出端面輸出之光學像來檢查受測定 對象之曲面形狀者較佳。在此場合，當受測定對象之測定面 與輸入端面相互被抵住時，輸入端面與測定面所相接之區域 的散亂性液體係被推開。因此，輸入端面與測定面相接之區 域周圍的區域係比沒有散亂性液體的場合還明亮。 -26 - 200532165 又，於曲面形狀檢查方法中，係以調整光纖組件及受測定 對象當中至少一方的位置、使得光學像會位於輸出端面上所 設置之位置調整型樣的指定範圍內者係較佳。在此場合，光 纖組件及受測定對象之至少一方的位置係被調整，使得光學 像係位在調整型樣之指定範圍內。因此，可將各檢查之測定 誤差的不均抑制在期望之範圍內。 又，本發明之光纖組件通常被適用在受測定對象之曲面形 狀的檢查，且由纖芯區域及包圍纖芯區域的包覆區域所構成 Φ 之光纖係複數條被紮束成形爲一體，且以具備有由各光纖的 一端所構成且至少一部份爲彎曲的輸入端面、以及位在與輸 入端面相反側，用以把由入射至輸入端面的光所形成之光學 像予以輸出的輸出端面者爲較佳。 在上述構成中，於光纖組件，由至少一部份爲彎曲的輸入 端面所入射到各光纖之光係被各光纖所導光。然後，藉由在 各光纖傳播來的光所形成之光學像係從輸出端面被輸出。 於受測定對象之曲面形狀的檢查中，在受測定對象中之具 φ 有曲面形狀的測定面，輸入端面係被抵住而實施檢查。在此 場合，上述光學像係對應於輸入端面與測定面之接觸型樣。 因此，經由檢查光學像而可檢查受測定對象之曲面形狀。 在此，檢查乃係藉由例如把實際上從輸出端面所輸出的光 學像與在受測定對象爲具有期望的曲面形狀之場合所應形 成的光學像作比較而被實施。以使用上述構成之光纖組件的 曲面形狀之檢查而言，因爲若對受測定對象抵住的話即可檢 查受測定對象之曲面形狀，所以檢查容易。又，因爲未使用 -27 - 200532165 微粉末、所以可使作業性提升。 此外，於光纖組件中，輸入端面之形狀爲半球狀者較佳。 在此場合，最適於具有球狀溝等之受測定對象的檢查。 此外在光纖組件中，具備包含有輸出端面之指定的區域且 爲以包圍各光纖之包覆區域般地設置有用以吸收光的光吸 收體之區域者係較佳。在此場合，於包含有輸出端面之指定 的區域，未在纖芯區域傳播之光係被光吸收體吸收。因此， 可改善光學像之S/Ν比。 φ 又，在具有光吸收體之光纖組件中，有關各光纖之纖芯區 域與包覆區域之折射率差，與輸入端面相較下、在上述指定 的區域變小係較佳。在此場合，於指定的區域中，因爲光難 以被關入纖芯區域，所以高次模態的光係容易從纖芯區域漏 洩。然後，從纖芯區域漏洩的光係在光吸收體被吸收。依此， 光學像之S/Ν比係更獲改善。 再者，於光纖組件中，在輸出端面上設置著用以檢查受測 定對象之曲面形狀的檢查型樣是最好的。在此構成中，光學 • 像係出現於檢查型樣上。如同上述，在受測定對象之曲面形 狀的檢查中，光學像係對應於測定面與輸入端面之接觸型 樣。因此，經由將檢查型樣與光學像作比較而可檢查受測定 對象之曲面形狀。 再者，在光纖組件中，在輸出端面上設置有用以調整相對 於受測定對象之位置用的位置調整型樣者係較佳。在此場 合，係以光學像被包含於位置調整型樣的指定範圍內般地將 光纖組件抵住於受測定對象而作檢查。依此，可將各檢查之 -28- 200532165 測定誤差的不均抑制在期望的範圍。 又，於光纖組件中，複數條光纖係以紮束成中空體狀者較 佳。在此場合，複數條光纖因爲紮束成中空體狀，所以與紮 束成實心的場合相較之下係可減少光纖的使用條數。 又，曲面形狀檢查裝置，係一般爲用以檢查受測定對象之 曲面形狀的曲面形狀檢查裝置，且以具備具有上述構成的光 纖組件、以及面臨光纖組件之輸出端面般地設置且用以攝像 從輸出端面輸出之光學像的攝像裝置者爲較佳。 • 上述構成中，本發明相關的光纖組件之從輸出端面輸出之 光學像係被攝像裝置所攝像。在受測定對象之曲面形狀的檢 查中，在將具有曲面形狀之受測定對象的測定面與輸入端面 相互地抵住的場合所形成之光學像係對應於測定面與輸入 端面之接觸型樣。因此，可使用光學像來檢查受測定對象之 曲面形狀。且，在上述構成之曲面形狀檢查裝置中，從輸出 端面所輸出之光學像因爲在攝像裝置被攝像，所以可使用在 監視器等處所映出的光學像來進行檢查。因此，所以檢查容 # 易，同時檢查可自動化。 再者，曲面形狀檢查裝置，係具備有以面臨輸入端面般設 置且用以照明輸入端面之照明裝置者爲較佳。在此場合，因 爲照明裝置係面臨輸入端面般被設置，所以在受測定對象之 曲面形狀的檢查中，在將入射端面抵住於受測定對象時’當 以照明裝置照明輸入端面時，受測定對象之測定面也被照 明。因此，可使得從輸出端面輸出之光學像更加鮮明。 又，曲面形狀檢查裝置係以具備有配置在輸出端面與攝像 -29- 200532165 裝置之間且用以將光學像對攝像裝置輸入的透鏡系者爲最 佳。在此場合，光學像係依透鏡系而被輸入至攝像裝置。因 此’光學像係例如可被透鏡系放大而對攝像裝置輸入。 依本發明係可提供一種可簡易地檢查曲面形狀之曲面 形狀檢查方法、可在其曲面形狀檢查方法中使用的光纖組 件、及使用有其先纖組件之曲面形狀檢查裝置。 【圖式簡單說明】 第1圖係第1實施形態相關之曲面形狀檢查方法的說明 # 圖。 第2圖係顯示受測定對象2 0之一例構成的上視圖。 第3圖係檢查實施時之輸出端面1 5的前視圖。 第4(a)、（b)圖係形成有檢查型樣41之輸出端面15的前視 圖。 第5圖係光纖組件1 0和受測定對象2 0之位置關係的說明 圖。 第6圖係形成有位置調整型樣42的輸出端面1 5之前視圖。 • 第7(a)、（b)圖係第2實施形態相關之曲面形狀檢查方法的 說明圖。 第8圖係第2實施形態在檢查時之光學像3 22的模式圖。 第9圖係第3實施形態相關之曲面形狀檢查方法的說明 圖。 第1 0圖係第4實施形態相關之曲面形狀檢查方法的說明 圖。 第1 1圖係顯示第5實施形態相關之曲面形狀檢查裝置的 -30- 200532165 構成之模式圖。 第1 2圖係顯示第6實施形態相關之曲面形狀檢查裝置的 構成之模式圖。 第1 3圖係顯示第7實施形態相關之曲面形狀檢查裝置的 構成之模式圖。 第14(a)〜（c)圖係光纖組件的變形例之側面圖。 第1 5圖係光纖組件之再其他例之斜視圖。 【主要元件符號】 • 10...光纖組件 IOA. ..半球狀部 IOB. ..主體部 1 1 ...光纖 12…纖芯區域 13.. .包覆區域 1 4 ...輸入端面 1 5 ...輸出端面 • 20…受測定對象 2 1 ...測定面 22.. .轉矩傳達球體 23.. .球體轉動溝 30、31...接觸部 32.. .光學像 3 2 2...光學像 3 3...接觸部像 -31 - 200532165 33!...接觸部像 34!...接觸部像 3 3 2...接觸部像 3 4 2 ...接觸部像 3 4...接觸部像 41 ...檢查型樣 42.. .位置調整型樣 50."膜 φ 5 1…發光性液體 52.. .散亂性液體 60.. .照明裝置 70.. .檢查裝置 80.. .檢查裝置 8 1 ...攝像裝置 90.. .檢查裝置 9 1 ...光纖組件 籲 92.··光纖 9 1 A…半球狀部 9 1B...主體部 92A...光纖 92B ...光纖 93 A…纖芯區域 94A…包覆區域 95.. .光吸收體 -32In addition, each optical fiber 92B constituting the main body portion 91B is a light absorbing body that is disposed so as to surround the core region 93B, a cladding region 94B surrounding the core region 93B, and a cladding region 94B. 9 5 B. The refractive index difference between the core region 93B and the cladding region 94B in the main body portion 91B is smaller than the refractive index difference between the core region 93A and the cladding region 94A in the hemispherical portion 91A. In other words, the N.A. of each optical fiber 92B of the main body portion 91B is smaller than the N.A. of each optical fiber 92A of the hemispherical portion 91 A. The optical fiber module 91 may be manufactured as follows, for example. First, a plurality of optical fibers 92A are bundled to form a whole, and a hemispherical optical fiber component is formed to form a hemispherical portion 9 1 A. The same number of optical fibers 92B as those constituting the hemisphere 9a are bundled and formed into a single body to form a substantially cylindrical optical fiber assembly as the main body 9 1 B. Next, 'the hemispherical portion 9 1 A and the main body portion 9 1 B are integrated to form an optical fiber module 91. During the splicing, the optical fibers 92A and 92B of the corresponding hemispherical portion 9 1 A and the main body portion 9 1 B are connected to each other and integrated. As for the optical fiber module 91, since the optical fiber 92A and the optical fiber 92B are integrated, they function as one optical fiber. The inspection method of the curved shape of the measurement target object 20 using the inspection device 90 described above is the same as in the fifth embodiment. As described above, the hemispherical portion 9 1 A is not provided with a light absorber for absorbing light. Therefore, it is possible to illuminate the measurement surface 2 1 (see FIG. 1) of the measurement target 20 through the hemispherical portion 9 1 A using a lamp or the like. As a result, the optical image 32 (see FIG. 3) formed by the contact portion images 33 and 34 can be made more distinct. On the other hand, since the light absorber 95B is provided in the main body portion 91B, light that does not propagate in the core region 93B of the main body portion 91B is absorbed in the light absorber 95B. Therefore, among the optical fibers 92B adjacent to each other, light leaked from the core region 93B of one optical fiber 92B φ to suppress the cross talk incident on the core region 93B of the other optical fiber 92B. In addition to the input end surface 1 4, for example, light incident from the side of the optical fiber module 91 is also absorbed by the light absorber 9 5 B. Accordingly, the light propagating through the core regions 93A and 93B of each of the optical fibers 92A and 92B, in other words, the optical image 3 2 is formed by reflecting the light contact pattern between the input end surface 14 and the measurement surface 2 1. Therefore, the S / N ratio of the optical image 32 is improved. φ As described above, the refractive index difference between the core region 93B and the cladding region 94B in the main body portion 91B is smaller than the core region 93A and the cladding in the hemispherical portion 91 A (more specifically, the input end surface 14). The refractive index difference in the region 94A is still small. Therefore, for the main body portion 91B, it is difficult for the optical system to be confined into the core region 93B. Accordingly, the optical system in the higher-order mode is liable to leak from the core region 93B. The optical system of higher order mode may not reflect the contact pattern, and may be easily output from the output end surface 15 at various angles, and may reduce the S / N ratio of the optical image. Such an optical system is removed from the core region 93B. Then, the light leaked from the core region -21-200532165 domain 9 3B is absorbed by the light absorber 95B as described above. Therefore, the S / N ratio of the optical image 3 2 tends to be more improved. Therefore, when an inspection device 90 according to this embodiment is used, a highly accurate inspection can be performed. In this embodiment, although the refractive index difference between the core region 93 B and the cladding region 94B is set to be smaller than the refractive index difference between the core region 93A and the cladding region 94A, the refractive index difference between them is also small. Can be the same. Among them, the reason why the smaller side is preferable on the side of the main body portion 9 1 B is as described above. • In this embodiment, a designated area including the output end surface 15 is used as the main body portion 9 1 B, and the light absorber 95B can be arranged so that the input end surface 1 4 or the measurement surface 2 1 can be illuminated. . Therefore, the optical absorber 95B may not be provided in the entire optical axis direction of the optical fiber 92B. The light absorbing body 95B may be provided on a part of the main body portion 9 1 B of the hemispherical portion 9 1 A. The above description is based on the best embodiment of the present invention, but the present invention is not limited to the first to seventh embodiments. Fig. 14 is a side view of a modification of the optical fiber module 10; The optical fiber module 100 shown in the configuration example (a) of φ in FIG. 14 is composed of only a hemispherical portion. In other words, the curved shape of the measurement target 20 may be inspected using a hemispherical optical fiber module. In addition, as in the optical fiber module 101 shown in the configuration example (b), the input end surface 102 on the side opposite to the output end surface 15 may not be a hemispherical shape, as long as the area to be in contact with the measurement surface 21 is formed (the contact portion 30 is formed). , 3 1 area) can be curved. In addition, the optical fiber assembly 103 shown in the configuration example (0) may be used. The optical fiber assembly 103 is configured to form a plurality of -22-200532165 optical fibers 11 to form a cavity 100 near the central axis α. A hollow body shape is inserted into the cavity 104 with a dummy member 105 that does not allow light to propagate. Thus, when a plurality of optical fibers n are bundled into a hollow body shape, compared with a case where the bundled fibers are solid, The number of optical fibers 1 i can be reduced. In addition, the inspection can be performed even when the dummy member 1 05 is not inserted into the hollow 1 0 4 and is hollow. Furthermore, as shown in FIG. 15 In the case of the optical fiber module 1 06, it is also considered that the input end surface 14 side is cylindrical. In this case, for example, the curved shape of the extending direction of the sphere turning groove 23 can also be checked by one measurement. φ The optical fiber module 91 described in the seventh embodiment can also be applied to the curved shape inspection method of the first to sixth embodiments. In addition, the inspection devices 70, 80, and 90 are used to inspect the In the case of a curved shape, the second to fourth embodiments can also be used. In addition, in the first to seventh embodiments, although the subject to be measured 20 is the inner wheel of the constant velocity universal joint, the subject to be measured is not limited to this. For the subject to be measured, if It is sufficient to have a curved shape, and the inspection method is not limited to measuring the distance between two contact parts like 3, 3, and 3. φ For example, let the curvature of the input end surface 14 be the desired curvature of the measurement surface to be inspected. When the measurement surface has a desired curvature, the input end surface 1 4 is almost completely connected to the measurement surface, and the optical image reflecting it is output from the output end surface 15. Therefore, the input end surface and the measurement are determined by observation. The pattern of the optical image generated by the surface contact can be used to check whether the measurement surface has a desired shape. The method for inspecting the shape of a curved surface related to the present invention is usually a method of forming a plurality of strips from a core region and a package surrounding the core region. The optical fiber formed by the covering area is bundled and a 23-200532165 optical fiber module is formed by including one end of each optical fiber and at least a part of the curved input end face and a curved shape of the measured object. It is preferable that the measurement surfaces are against each other, and the shape of the curved surface of the object to be measured is checked by using the optical image formed by the input end surface and the measurement surface being output from the output end surface of the optical fiber module located on the opposite side of the input end surface. The method is to make the input end face of the optical fiber component composed of a plurality of optical fibers and the measurement surface having a curved shape of the object to be measured abut. Then, the output end face of the optical fiber component is used to output and contact the measurement surface φ according to the input end face. The formed optical image is used to check the shape of the curved surface of the object to be measured. The optical image is an image formed by the input end surface in contact with the measurement surface, which corresponds to the contact pattern between the input end surface and the measurement surface. Therefore, the optical image system can be inspected by Check the shape of the curved surface of the measured object. In this case, the shape of the curved surface of the measurement target can be checked by holding the optical fiber module against the measurement target, so the inspection is easy. Moreover, since fine powder is not used, workability can be improved. In the curved shape inspection method, the measurement surface is an inner surface of a groove included in the measurement target, and the optical image system includes two contact portion images corresponding to two contact portions of the input end surface and the measurement surface. It is preferable to check the shape of the curved surface of the object to be measured by measuring the distance between the two contact part images. In this case, the distance between the two contact part images outputted from the output end face is measured with the inner surface of the groove and the input end face abutting each other to check the curved shape of the measurement target. Since the shape of the input end surface is known, when the inner surface of the groove is a desired curved shape, the distance between the two contact part images is predicted. Accordingly, when the inner surface of the groove has a desired curved shape, the distance between the two contact portion images can be set as the reference value. Therefore, by comparing the measurement of the distance between the two contact part images formed by the actual input end surface and the inner surface of the groove with the actual-24-200532165, and comparing with the reference, it is possible to check whether the curved surface shape of the groove becomes the desired one. Surface shape. Furthermore, in the curved shape inspection method, it is preferable to use an imaging device to image the above-mentioned optical image. In this case, since the optical image is captured by the imaging device, it is sufficient to check the shape of the curved surface using the optical image projected on a monitor or the like. According to this, inspection becomes easy and inspection can be automated. In the curved shape inspection method, the above-mentioned optical fiber module includes a region including a specified • region of an output end face and a light absorber for absorbing light, such as a cladding region surrounding each optical fiber. Those are better. In this case, in the designated area including the output end face, light that does not propagate in the core area of the optical fiber is absorbed by the light absorber. Therefore, light that enters the optical fiber module from outside the input end face, and light that easily leaks from the core region of the optical fiber is absorbed by the light absorber. Therefore, the S / N ratio of the optical image is improved. In addition, in the method for inspecting the shape of a curved surface using an optical fiber assembly including a light absorber, the refractive index difference between the core region and the cladding region of each optical fiber is smaller than the # input end face and smaller in the above-specified region. Department is better. In this case, in the designated area, it becomes difficult for light to be trapped in the core area. Therefore, light of higher-order modes easily leaks out of the core region. The light leaking from the core region is absorbed by the light absorber. Therefore, the S / N ratio of the optical image is further improved. Furthermore, in the method for inspecting the shape of a curved surface, it is better to check the shape of the curved surface of the measurement target by using an optical image output from the output end surface by holding the translucent film against the input end surface and the measurement surface. good. In this case, by holding the film between the measurement surface of the object to be measured and the input end surface, the area of the contact portion between the measurement surface and the input end surface becomes larger. Therefore, it is easy to confirm the optical image formed by the contact between the measurement surface and the input end surface. In addition, the input end face of the optical fiber module is protected by a film. The term "membrane system" means a thin film and a liquid film. In the curved surface shape inspection method, it is preferable to compare the inspection pattern provided on the output end surface with an optical image to check the curved surface shape of the object to be measured. In this case, since the inspection pattern provided on the output end face is directly compared with the optical image, inspection becomes easy. In addition, in terms of checking patterns, for example # such as scale patterns. In addition, in the curved shape inspection method, a luminescent liquid for emitting light is coated on the measurement surface, and then the measurement surface coated with the luminescent liquid and the input end surface abut against each other, and an optical image output from the output end surface is used for inspection. The curved shape of the object to be measured is the best. In this case, when the measurement surface of the object to be measured and the input end surface abut against each other, the luminescent liquid system in the area where the input end surface and the measurement surface are in contact is pushed away. Therefore, the area around the area where the input end face is in contact with the measurement surface becomes brighter than when there is no luminescent liquid. Therefore, the contrast system of the light # learning image has been improved, and the inspection system has become easier. Furthermore, in the method for inspecting the shape of a curved surface, a scattered liquid containing a scattered body is applied to a measurement surface, the measurement surface coated with the scattered liquid and an input end surface abut each other, and an optical output from an output end surface is used. It is preferable to use an image to check the shape of the curved surface of the measurement target. In this case, when the measurement surface of the object to be measured and the input end surface abut against each other, the scattered liquid system in the area where the input end surface and the measurement surface meet is pushed away. Therefore, the area around the area where the input end face is in contact with the measurement surface is brighter than when there is no scattered liquid. -26-200532165 Also, in the method for inspecting the shape of a curved surface, it is necessary to adjust the position of at least one of the optical fiber component and the object to be measured so that the optical image is located within the specified range of the position adjustment pattern set on the output end face good. In this case, the position of at least one of the optical fiber module and the object to be measured is adjusted so that the optical image is within the designated range of the adjustment pattern. Therefore, it is possible to suppress variations in measurement errors in each inspection to a desired range. In addition, the optical fiber module of the present invention is generally applied to the inspection of the curved shape of the object to be measured, and a plurality of optical fiber systems composed of a core region and a cladding region surrounding the core region are bundled and formed into a body, It has an input end surface which is composed of one end of each optical fiber and has at least a part bent, and an output end surface which is located on the side opposite to the input end surface and outputs an optical image formed by light incident on the input end surface. Which is better. In the above configuration, in the optical fiber module, the light incident on each optical fiber through at least a part of the input end which is curved is guided by each optical fiber. Then, an optical image formed by the light propagating through each optical fiber is output from the output end surface. In the inspection of the shape of the curved surface of the object to be measured, the input end surface is abutted against the measuring surface having a curved surface shape in the object to be measured, and the inspection is performed. In this case, the optical image corresponds to the contact pattern between the input end surface and the measurement surface. Therefore, the shape of the curved surface of the object to be measured can be inspected by inspecting the optical image. Here, the inspection is performed by comparing, for example, an optical image actually output from the output end surface with an optical image to be formed when the object to be measured has a desired curved shape. In the case of the inspection of the curved shape of the optical fiber module configured as described above, since the curved shape of the measurement target can be checked if it is abutted against the measurement target, the inspection is easy. In addition, -27-200532165 fine powder is not used, which improves workability. In addition, in the optical fiber module, the shape of the input end surface is preferably a hemisphere. In this case, it is most suitable for inspection of a measurement target having a spherical groove or the like. In addition, it is preferable that the optical fiber module includes a designated region including an output end surface and a region where a light absorber for absorbing light is provided as a coating region surrounding each optical fiber. In this case, in a designated area including the output end face, light that does not propagate in the core area is absorbed by the light absorber. Therefore, the S / N ratio of the optical image can be improved. φ In the optical fiber module having a light absorber, it is preferable that the refractive index difference between the core region and the cladding region of each optical fiber is smaller in the above-specified region than the input end surface. In this case, since light is difficult to be trapped in the core region in the designated region, the optical system of the higher-order mode easily leaks from the core region. Then, the light leaking from the core region is absorbed by the light absorber. Accordingly, the S / N ratio of the optical image is further improved. Furthermore, in the optical fiber module, it is best to provide an inspection pattern on the output end surface for inspecting the curved shape of the object to be measured. In this configuration, the optical image appears on the inspection pattern. As described above, in the inspection of the curved shape of the measurement target, the optical image corresponds to the contact pattern between the measurement surface and the input end surface. Therefore, the shape of the curved surface of the object to be measured can be checked by comparing the inspection pattern with the optical image. Furthermore, in the optical fiber module, it is preferable to provide a position adjustment pattern on the output end surface for adjusting the position relative to the measurement target. In this case, the optical fiber module is held against the object to be measured so that the optical image is included in the designated range of the position adjustment pattern for inspection. In this way, it is possible to suppress the variation in the measurement error of each inspection to the desired range. In the optical fiber module, it is preferable that a plurality of optical fibers are bundled into a hollow body. In this case, since the plurality of optical fibers are bundled into a hollow body, the number of optical fibers used can be reduced compared to the case where the bundles are solid. In addition, the curved shape inspection device is generally a curved shape inspection device for inspecting the curved shape of a measurement target, and is provided as an optical fiber module having the above-mentioned structure and facing the output end face of the optical fiber module, and is used for imaging. An imaging device that outputs an optical image output from an end surface is preferred. • In the above configuration, the optical image output from the output end face of the optical fiber module according to the present invention is captured by an imaging device. In the inspection of the shape of the curved surface of the measurement target, the optical image formed when the measurement surface of the measurement target having the curved shape and the input end surface abut against each other corresponds to the contact pattern between the measurement surface and the input end surface. Therefore, an optical image can be used to check the shape of the curved surface of the object to be measured. Furthermore, in the curved shape inspection device configured as described above, since the optical image output from the output end surface is captured by the imaging device, the inspection can be performed using an optical image projected on a monitor or the like. Therefore, it is easy to check the content, and the inspection can be automated. Furthermore, it is preferable that the curved shape inspection device is provided with an illuminating device which is arranged to face the input end surface and is used to illuminate the input end surface. In this case, since the illuminating device is installed so as to face the input end surface, in the inspection of the curved shape of the object to be measured, when the incident end surface is pressed against the object to be measured, 'when the input end surface is illuminated by the lighting device, The measurement surface of the object is also illuminated. Therefore, the optical image output from the output end surface can be made more vivid. Further, it is preferable that the curved surface shape inspection device includes a lens system which is disposed between the output end face and the imaging device and is used to input an optical image to the imaging device. In this case, the optical image system is input to the imaging device depending on the lens system. Therefore, the 'optical image system' can be input to an imaging device by being enlarged by a lens system, for example. According to the present invention, it is possible to provide a curved surface shape inspection method capable of easily inspecting a curved surface shape, an optical fiber component which can be used in the curved surface shape inspection method, and a curved surface shape inspection device using the precursor fiber component. [Brief description of the drawings] Fig. 1 is an explanation of the method for inspecting the shape of a curved surface according to the first embodiment. # Drawing. Fig. 2 is a top view showing an example of the structure of 20 objects to be measured. Fig. 3 is a front view of the output end face 15 during inspection. Figures 4 (a) and (b) are front views of the output end face 15 with the inspection pattern 41 formed. Fig. 5 is an explanatory diagram of the positional relationship between the optical fiber module 10 and the measurement target 20. FIG. 6 is a front view of the output end surface 15 where the position adjustment pattern 42 is formed. • Figures 7 (a) and (b) are explanatory diagrams of the method for inspecting the shape of a curved surface according to the second embodiment. Fig. 8 is a schematic diagram of the optical image 322 during inspection in the second embodiment. Fig. 9 is an explanatory diagram of a method for inspecting a curved surface shape according to the third embodiment. Fig. 10 is an explanatory diagram of a method for inspecting a curved surface shape according to the fourth embodiment. Fig. 11 is a schematic diagram showing the structure of -30-200532165 of the curved shape inspection device related to the fifth embodiment. Fig. 12 is a schematic diagram showing the configuration of a curved shape inspection device according to the sixth embodiment. Fig. 13 is a schematic diagram showing the configuration of a curved shape inspection device according to the seventh embodiment. Figures 14 (a) to (c) are side views of a modification of the optical fiber module. Fig. 15 is a perspective view showing still another example of the optical fiber module. [Symbols of main components] • 10 ... optical fiber assembly IOA ... hemispherical part IOB ... body part 1 1 ... optical fiber 12 ... core area 13 .... cladding area 1 4 ... input end face 1 5 ... output end surface • 20 ... measurement target 2 1 ... measurement surface 22... Torque transmission sphere 23... Sphere rotation groove 30, 31 ... contact portion 32... Optical image 3 2 2 ... optical image 3 3 ... contact part image -31-200532165 33! ... contact part image 34! ... contact part image 3 3 2 ... contact part image 3 4 2 ... The contact part looks like 3 4 ... The contact part looks like 41 ... Check pattern 42 .. Position adjustment pattern 50. " Film φ 5 1 ... Luminous liquid 52 .. Dispersive liquid 60 ... Lighting device 70 .. Inspection device 80 .. Inspection device 8 1 ... Camera 90. Inspection device 9 1 ... Optical fiber unit 92 .... Optical fiber 9 1 A ... Hemispherical portion 9 1B. .. Main body part 92A ... Optical fiber 92B ... Optical fiber 93 A ... Core area 94A ... Covering area 95 .. Light absorber-32