TW200531753A - Adjustable exhaust flow for thermal uniformity - Google Patents

Adjustable exhaust flow for thermal uniformity

Info

Publication number
TW200531753A
TW200531753A TW094109465A TW94109465A TW200531753A TW 200531753 A TW200531753 A TW 200531753A TW 094109465 A TW094109465 A TW 094109465A TW 94109465 A TW94109465 A TW 94109465A TW 200531753 A TW200531753 A TW 200531753A
Authority
TW
Taiwan
Prior art keywords
exhaust flow
thermal uniformity
adjustable exhaust
exhaust
input signal
Prior art date
Application number
TW094109465A
Other languages
English (en)
Other versions
TWI252785B (en
Inventor
Ya-Hwan Kao
Jia-Sheng Lee
De-Yuan Lu
Ming-Fa Chen
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Publication of TW200531753A publication Critical patent/TW200531753A/zh
Application granted granted Critical
Publication of TWI252785B publication Critical patent/TWI252785B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Especially adapted for treating semiconductor wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lift Valve (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
TW094109465A 2004-03-26 2005-03-25 Adjustable exhaust flow for thermal uniformity TWI252785B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/810,978 US7026580B2 (en) 2004-03-26 2004-03-26 Adjustable exhaust flow for thermal uniformity

Publications (2)

Publication Number Publication Date
TW200531753A true TW200531753A (en) 2005-10-01
TWI252785B TWI252785B (en) 2006-04-11

Family

ID=34988551

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094109465A TWI252785B (en) 2004-03-26 2005-03-25 Adjustable exhaust flow for thermal uniformity

Country Status (2)

Country Link
US (1) US7026580B2 (zh)
TW (1) TWI252785B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI252137B (en) * 2004-06-04 2006-04-01 Au Optronics Corp A dust cleaner applied to a process chamber
US9892982B2 (en) * 2014-01-03 2018-02-13 Taiwan Semiconductor Manufacturing Co., Ltd Method for controlling exhaust flow in wafer processing module

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0797241A3 (en) * 1996-03-08 2002-05-15 Kokusai Electric Co., Ltd. Substrate processing apparatus
US6291800B1 (en) * 1998-02-20 2001-09-18 Tokyo Electron Limited Heat treatment apparatus and substrate processing system
US6358673B1 (en) * 1998-09-09 2002-03-19 Nippon Telegraph And Telephone Corporation Pattern formation method and apparatus
JP4365017B2 (ja) * 2000-08-23 2009-11-18 東京エレクトロン株式会社 熱処理装置の降温レート制御方法および熱処理装置

Also Published As

Publication number Publication date
US7026580B2 (en) 2006-04-11
US20050211695A1 (en) 2005-09-29
TWI252785B (en) 2006-04-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees