200528389 玖、發明說明： 【發明所屬之技術領域】 本發明是有關於一種生物晶片，特別是指一種具有複 數微流道之微晶片的製造方法、產品，及應用此產品的檢 5 測方法。 【先前技術】 微晶片的應用相當的廣；乏，像是分析系统、生物元件 、化學與生物化學的研究工具、基礎的研究料。同時參 閱圖1、2, -般適用於進行檢測，例如尿液等待檢測試劑 10 的微晶片1包含—基板11、—形成在該基板11上之電極單 元12 ,及一連結於該基板u上的覆板13。 该基板11 一般是玻璃板、壓克力板或是PC板等。 該電極單元12具有複數電極121，在此以七電極為例 說明，是以預定金屬例如銅、銀當靶材，以濺鍍方式將其 15 鍍膜於基板11之一上表面上形成，每一電極121具有一接 觸部122與一相反於該接觸部122之控制部123。 該覆板13 —般是選用聚合材料，如聚二甲基矽氧烷（ PDMS polydimethyl siloxane)製成，具有一與基板 u 之上 表面連結之下表面131、一槽孔單元丨32，及一與槽孔單元 !〇 132連通之槽道單元133。該槽孔單元132具有複數自該下 表面131向上凹陷形成的槽孔134，在此以四槽孔134為例 說明，該四槽孔134與該基板U之上表面共同形成第一、 一、二、四貯液槽141、142、143、144。該槽道單元133 具有複數自該下表面131向上凹陷形成的槽道135，在此以 200528389 二槽道135為例說明，該二槽道135成十字形交錯分佈， 且每一槽道135的二端分別連通二相反設置的槽孔丨34，同 時該二槽道13 5分別與該基板11之上表面共同形成第一、 二微流道151、152。 該電極單元12其中之三電極121，是分別以其接觸部 122設置於成三角分佈之第一、二、三貯液槽i41、j42、 143中，另四電極121則是分別以接觸部122間隔地設置於 該第二微流道152中，且相對靠近該第四貯液槽144，而使 ίο 15 得當第二微流道152中有液體通過時可以依序接觸到該複 數電極121之接觸部122。 當實際使用此毛細微晶片1進行檢測樣品時，是在第 二、三、四、貯液槽142、143、144中滴置緩衝溶液，並 利用毛細現象使第一、二微流道丨5丨、！ 52填滿緩衝溶液， 再將待檢測樣品，例如尿液滴置於第一貯液槽141中，接 著再於複數電極以預定模式施加分別施加電壓而形成電場 ，藉以驅動待檢測樣品分段間隔地流入第二微流道152中 ，待其依序經過設置於第二微流道152中的複數電極i2i 的接觸部122之後，即可紀錄該些電極122的變化，進而 依據此些變化分析檢測該待檢測樣品所含的不同物質。 ^ >閱圖3上述省知的毛細微晶片1，是先以步驟3 1， 選用例如石英板或矽晶片以蝕刻方法來製作母帛2 i，使其 表面211具有複數對應該槽孔單元132與槽道單元133之凸 塊 212。 接著進行步驟 32，選用液態的聚二甲基矽氧烷為覆材 20 5 10 15 200528389 ，壓模於母膜21之具有凸塊212的表面211。 再以步驟33靜置一段時間，待聚二甲基矽氧烷硬化後 與母模21分離，即完成上述具有槽孔單元132及槽道單元 U3之覆板13的製備。 在進行上述步驟31至步驟33製備覆板13的同時進行 步驟34，選用一玻璃或是壓克力基板u，並以預定金屬例 如銅、銀當靶材，以濺鍍方式將其鍍膜於基板u之上表面 上形成該電極單元12。 最後進行步驟35，分別以電漿處理鍍附有電極單元12 之基板11以及覆板13，並將其貼合成一體，即完成上述微 晶片1之製備。 ，以上的方法雖然可以製造目前所使用的微晶片1，且同 時製備完成的微晶片丨亦可用於分析系統、生物元件、化 學與生物化學的研究等等領域，但是上述的微晶片1及其 製造方法仍然有以下的缺點： ^成本高昂—由於使用於基板Π之石英或矽晶片，具 -定程度的高價位；同時，母模21本身也是消耗品，因 此造成微晶片i的製作成本居高不下。 2·製程複雜-由於上述製程中必須同時應用到製模、壓 複雜餘刻以及電料等不同領域的製程，因此製作上極為 的高昂也因此需要較長的製造時間，4因此造成製作成本 於電=測誤綠大—以上述製程完成的毛細微晶片1，由 早疋12本身具有1(^m左右的厚度，所以覆板13 20 200528389 在與基板11貼合時，鄰近電極單元12的周圍會出現空隙 16，而使得密合度較差，因而造成待檢測溶液或是緩衝液 會滲進入該些空隙16中，使得檢測時通過電極121的樣本 體積不一’因而造成檢測的誤差。 4·無法進行光學檢測一目前毛細微晶片1的覆板13通 常是以聚二曱基矽氧烧（PDMS)為材質製成，但此材質在 固化的過程中一直進行聚合反應，也就是說其材質在硬化 成型之後仍然不斷地在改變，因而不具有穩定的光學性質 ，因此並不適用於光學檢測。 ίο 15 因此，如何以較低的製作成本，簡易的製作過程，製 造出可以精確檢測出待檢測樣品的微晶片丨，是學界、業界 不斷努力的目標。 【發明内容】 因此，本發明之目的，是在提供一種簡易、低成本的 製造方法，以製造出微晶片。 此外，本發明之另-目的，是在提供一種以簡易、低 成本的製造方法製造出可進行精確檢測的微晶片。 於是，本發明-種微晶片之製造方法，是製造且有一 可貯放-液體的貯液槽單元、—與該貯液槽單以目連通的 微流道單疋，及一對應該貯液槽單元、微流道單元設置之 電極單^微電用生物晶片，該電極單元之部分電極可分 =被施加電壓而形成使該貯液槽單元内貯放之液體在該微 流道單元中沿預定方向移動的電場。 該製造方法包含以下步驟： 20 200528389 (a) 在一基板上形成該電極單元。 (b) 在該基板上形成一光阻層。 (c) 以微影製程在該光阻層上向該基板方向凹陷形成 一槽孔單元，及一與該槽孔單元相連通之槽道單元。 ⑷將-面板貼合於該光阻層上，使該面板表面與該 光阻層凹陷形成之該槽孔單元及該槽道單元共同形成該貯 液槽單元與該微流道單元。 ，，v个贫听一裡以上述製造方法所製成的微晶片，包 含一基板、一光阻層、一電極單元，及一面板。 ίο 15 该光阻層自該基板之表面向上形成，包括一槽孔單元 ，及一槽道單元，該槽孔單元具有複數自該光阻層表面向 基板方向形成之槽孔，該槽道單元具有複數自該光阻層表 :向f板方向形成之槽道，每-槽道是可選擇地與其他槽 道相連通，且每一槽道之相反兩端分別與二槽孔相連通。 單元包括複數電極，每—電極具有—形成在該 =: 間的接觸部，及一自該接觸部向基板周 裸露出該光阻層外的控制部，該部分電極之接觸 二：=應地稞露於該一槽道中’該其餘電極的接觸部 20 被施加-電壓㈣ΓΓ 之控制部可分別地 場。 壓而开作用於該槽孔單元與槽道單元的電 該 形成一 形成一 一槽孔 一槽道 面板貼合於該光阻層上，與該槽孔單元之每 可谷置液體的貯液槽，並與該槽道單元之每 可供液體移動之微流道。 9 200528389 當該一預定電極被施加一電壓而形成一電場時，該一 對應於該電極之貯液槽中的液體可被該電場作用經由該— 對應之微流道移動至另一預定的目宁 郢为預疋的射，夜槽中，且當液體在該 5 10 15 20 微流道中移動時是可接觸該對應於該微流道之電極 部。 製程方式來製作毛細 微晶片具有高靈敏度 ，以及高協調性的偵 本發明之功效在於利用低成本的 微晶片，且依此製造方法製成的毛細 、選擇比、微小化、低成本、低功率 測特點。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一較佳實施例的詳細說明中，將可清 楚的明白。 β 參閱圖4,本發明一種微晶片之製造方法4的一較佳實 施例’是可製造如圖5所示之微晶片5。該微晶片5包含一 基板51、一光阻層52、一電極單元53,及一面板54。200528389 (1) Description of the invention: [Technical field to which the invention belongs] The present invention relates to a biochip, and more particularly to a method and product for manufacturing a microchip having a plurality of microfluidic channels, and a method for detecting and applying the product. [Previous technology] The application of microchips is quite wide; they are lacking, such as analytical systems, biological elements, chemical and biochemical research tools, and basic research materials. Refer to FIGS. 1 and 2 at the same time, which is generally suitable for detection. For example, the microchip 1 of the urine waiting detection reagent 10 includes a substrate 11, an electrode unit 12 formed on the substrate 11, and a substrate u connected to the substrate u.的 盖板 13。 The cover plate 13. The substrate 11 is generally a glass plate, an acrylic plate, or a PC plate. The electrode unit 12 has a plurality of electrodes 121. Here, seven electrodes are taken as an example. A predetermined metal such as copper or silver is used as a target, and 15 of them are formed on one of the upper surfaces of the substrate 11 by sputtering. The electrode 121 has a contact portion 122 and a control portion 123 opposite to the contact portion 122. The cover plate 13 is generally made of a polymer material, such as PDMS polydimethyl siloxane, and has a lower surface 131 connected to the upper surface of the substrate u, a slot unit 32, and a A channel unit 133 which communicates with the slot unit 〇132. The slot unit 132 has a plurality of slot holes 134 formed by being recessed upward from the lower surface 131. Here, four slot holes 134 are taken as an example for illustration. The four slot holes 134 and the upper surface of the substrate U together form a first, first, Two or four liquid storage tanks 141, 142, 143, 144. The channel unit 133 has a plurality of channels 135 formed by being recessed upward from the lower surface 131. Here, the two channels 135 of 200528389 are taken as an example. The two channels 135 are staggered in a cross shape. The two ends communicate with two oppositely disposed slot holes 34, respectively. At the same time, the two slot channels 135 and the upper surface of the substrate 11 jointly form first and second microchannels 151 and 152, respectively. Three of the electrodes 121 of the electrode unit 12 are respectively arranged in the first, second, and third storage tanks i41, j42, and 143 with their contact portions 122 in a triangular distribution, and the other four electrodes 121 are respectively provided with the contact portions 122. The second microfluidic channel 152 is arranged at intervals, and is relatively close to the fourth liquid storage tank 144, so that when the liquid passes through the second microfluidic channel 152, it can sequentially contact the plurality of electrodes 121. Contact portion 122. When the capillary microchip 1 is actually used for the detection sample, the buffer solution is dripped in the second, third, fourth, and liquid storage tanks 142, 143, and 144, and the first and second microchannels are made using the capillary phenomenon. 5丨,! 52 is filled with a buffer solution, and then a sample to be tested, such as urine drops, is placed in the first liquid storage tank 141, and then an electric field is formed by applying a voltage to each electrode in a predetermined pattern to drive the segmented interval of the sample to be tested The ground flows into the second microfluidic channel 152, and after it sequentially passes through the contact portion 122 of the plurality of electrodes i2i provided in the second microfluidic channel 152, the changes of the electrodes 122 can be recorded, and then analyzed based on these changes The different substances contained in the sample to be tested are detected. ^ > As shown in FIG. 3, the above-mentioned known capillary chip 1 is firstly made in step 31 by using a quartz plate or a silicon wafer for etching to form a female cymbal 2 i, so that the surface 211 has a plurality of corresponding slot units. 132 and the bump 212 of the channel unit 133. Then, step 32 is performed, and liquid polydimethylsiloxane is used as the covering material 20 5 10 15 200528389, and the surface 211 of the mother film 21 having the bumps 212 is compression-molded. Then, it is left to stand for a period of time in step 33. After the polydimethylsiloxane is hardened and separated from the master 21, the above-mentioned preparation of the cover plate 13 with the slot unit 132 and the channel unit U3 is completed. While performing the above steps 31 to 33 while preparing the cover plate 13, step 34 is performed. A glass or acrylic substrate u is selected, and a predetermined metal such as copper or silver is used as a target material, and it is plated on the substrate by sputtering. The electrode unit 12 is formed on the upper surface of u. Finally, step 35 is performed, and the substrate 11 and the cover plate 13 on which the electrode unit 12 is plated are respectively treated with a plasma, and are bonded together to complete the above-mentioned preparation of the microchip 1. Although the above methods can be used to manufacture the microchips 1 currently used, and the prepared microchips can also be used in the fields of analysis systems, biological elements, chemical and biochemical research, etc., the above microchips 1 and their The manufacturing method still has the following disadvantages: ^ High cost-due to the high price of quartz or silicon wafers used for the substrate Π; at the same time, the master mold 21 itself is also a consumable, so the microchip i manufacturing cost is High. 2 · Complicated manufacturing process—Because the above processes must be applied to different fields such as molding, complex embossing, and electrical materials, the production is extremely expensive and therefore requires a long manufacturing time. Electricity = Measurement error green—The capillary chip 1 completed by the above process has a thickness of about 1 μm from the pre-roller 12 itself, so the cover plate 13 20 200528389 is adjacent to the electrode unit 12 when it is bonded to the substrate 11 There will be gaps 16 around, which will cause poor adhesion, which will cause the solution to be tested or the buffer solution to penetrate into the gaps 16 and make the volume of the sample passing through the electrode 121 different when testing, thereby causing detection errors. Optical inspection is not possible. Currently, the cover plate 13 of the capillary microchip 1 is usually made of polydimethysilane (PDMS), but this material undergoes polymerization during the curing process, that is, its material. It is constantly changing after hardening, so it does not have stable optical properties, so it is not suitable for optical inspection. Ίο 15 Therefore, how to reduce the production cost The simple manufacturing process to produce microchips that can accurately detect the sample to be detected 丨 is the goal of continuous efforts of the academic community and the industry. [Summary of the Invention] Therefore, the object of the present invention is to provide a simple and low-cost manufacturing method In addition, another object of the present invention is to provide a simple and low-cost manufacturing method for manufacturing microchips that can be accurately detected. Therefore, the present invention-a method for manufacturing microchips, It is manufactured and has a liquid storage tank unit capable of storing-liquid, a micro-flow channel sheet connected to the liquid-storage sheet, and a pair of electrode sheets corresponding to the liquid tank unit and the micro-flow channel unit. For a biochip for microelectronics, a part of the electrodes of the electrode unit can be divided into = an applied voltage to form an electric field that moves the liquid stored in the liquid storage tank unit in a predetermined direction in the microchannel unit. The manufacturing method includes the following Steps: 20 200528389 (a) forming the electrode unit on a substrate. (B) forming a photoresist layer on the substrate. (C) lithographic process on the photoresist layer toward the substrate The recess forms a slot unit and a channel unit that communicates with the slot unit. ⑷The panel is attached to the photoresist layer, and the slot unit formed by the panel surface and the photoresist layer is recessed. And the channel unit together form the liquid storage tank unit and the micro-fluid channel unit. The v chip microchips manufactured by the above manufacturing method include a substrate, a photoresist layer, and an electrode unit And a panel. Ίο 15 The photoresist layer is formed upward from the surface of the substrate, and includes a slot unit and a channel unit. The slot unit has a plurality of slot holes formed from the surface of the photoresist layer toward the substrate. The channel unit has a plurality of channels formed from the photoresist layer surface: each channel is selectively connected to other channels, and the opposite ends of each channel are respectively connected with two channels. The slots are connected. The unit includes a plurality of electrodes, each of which has a contact portion formed between the =: and a control portion that exposes the photoresist layer to the periphery of the substrate from the contact portion. The contact portions 20 of the remaining electrodes exposed in the one channel are respectively controlled by a control portion to which a voltage of ㈣ΓΓ is applied. The electric pressure acting on the slot unit and the slot unit should be formed to form a slot and a slot panel to be attached to the photoresist layer and to each liquid storage liquid of the slot unit. The grooves are associated with each microfluidic channel of the channel unit for liquid movement. 9 200528389 When a voltage is applied to the predetermined electrode to form an electric field, the liquid in the liquid storage tank corresponding to the electrode can be moved by the electric field via the corresponding microchannel to another predetermined target. Ning Yan is a pre-shoot, in a night trough, and when the liquid moves in the 5 10 15 20 microchannel, it is possible to contact the electrode portion corresponding to the microchannel. Capillary microchips are manufactured by a process method with high sensitivity and high coordination. The function of the present invention lies in the use of low-cost microchips and the capillary, selection ratio, miniaturization, low cost, and low power produced by this manufacturing method. Test characteristics. [Embodiment] The foregoing and other technical contents, features, and effects of the present invention will be clearly understood in the following detailed description of a preferred embodiment with reference to the accompanying drawings. β Referring to FIG. 4, a preferred embodiment of a method 4 for manufacturing a microchip according to the present invention is to manufacture a microchip 5 as shown in FIG. The microchip 5 includes a substrate 51, a photoresist layer 52, an electrode unit 53, and a panel 54.
該基板51是一壓克力板（PMMA)，而其他高分子材料 ，例如pc、pc之衍生物、PVC、PVC之衍生物、pE pE 之衍生物、ABS、ABS t衍生物等，或是例如矽晶圓、玻 璃等均可以當作基板使用。 同時參閱圖6,該光阻層52自基板51之表面向上形成 ’包括一槽孔單元521，及一槽道單元522，該槽孔單元 52i具有複數自光阻層52表面向基板51方向形成之槽孔 523，在此以四槽孔523為例說明，該槽道單元522具有複 10 200528389 數自光阻層52表面向基板51方向形成之槽道524，每一槽 道524疋可選擇地與其他槽道524相連通，且每一槽道 之相反兩端分別與二槽孔523相連通，同時，每一槽道 $ 的的寬度範圍是介於0·1〜1〇〇〇μηι，深度範圍是介於 5 5〜ΙΟΟΟμιη，而以10〜200μηι為較佳寬度範圍，⑺〜丨⑼叫^為 較佳深度範圍，·在此，則以每一槽道524之寬度為 20〜50μιη ,深度20〜75μηι，且二槽道524成十字形交錯分佈 ，並與e亥四槽孔523相連通為例說明。 該電極單元53包括複數電極531，在此以七電極531 1〇 A例說明，且為使以下說明清楚起見，分別依順時針方向 以第-至第七電極531命名順序說明。每一㈣531是以 含有碳、銀、銅、金、鉑、鈀可導電之元素，或化合物、 合金’或是例如導電高分子材料、導t氧化物材料、導電 氮化物材料、矽金屬化合物等等材料形成。具有一形成在 15 基板51與光阻層52之間的接觸部532,及-自接觸部532 向基板51周緣延伸而裸露出光阻層52外的控制部。第 —、二、三電極531的接觸部532是分別對應設置於其中 三呈三角分佈之槽孔523中，第四、五、六、七電極531 之接觸部532是分別間隔地設置於該一第二槽道中， 2〇 並相對靠近該另一個槽孔523,使得當有液體通過時可以依 序接觸到該四電極531之接觸部532。該每—電極531之控 制部533可分別地被施加—電壓而形成一作用於槽孔單元 521與槽道單元522的電場。 «亥面板54疋-壓克力板（pMMA )，當然，其他高分子 200528389 材料’例如PMMA、PMMA之衍生物、pc、pThe substrate 51 is an acrylic board (PMMA), and other polymer materials, such as pc, pc derivatives, PVC, PVC derivatives, pE pE derivatives, ABS, ABS t derivatives, etc., or For example, silicon wafers, glass, etc. can be used as substrates. At the same time, referring to FIG. 6, the photoresist layer 52 is formed upward from the surface of the substrate 51, and includes a slot unit 521 and a channel unit 522. The slot unit 52i has a plurality of slots formed from the surface of the photoresist layer 52 toward the substrate 51. Slot holes 523. Here, four slot holes 523 are used as an example. The slot unit 522 has a plurality of slots 524 formed from the surface of the photoresist layer 52 toward the substrate 51. Each slot 524 is optional. The ground is in communication with other channels 524, and the opposite ends of each channel are respectively connected with two slot holes 523. At the same time, the width of each channel $ ranges from 0.1 to 100 μm The depth range is between 5 5 ~ ΙΟΟΟμιη, and 10 ~ 200μηι is the preferred width range, and ⑺ ～ 丨 ⑼ ^ is the preferred depth range. Here, the width of each channel 524 is 20 ~ 50 μιη, a depth of 20 to 75 μηι, and the two channels 524 are staggered in a cross shape, and are connected to the four slots 523 of eHai as an example. The electrode unit 53 includes a plurality of electrodes 531, and a seven-electrode 531 10A is used as an example for explanation. For the sake of clarity of the following description, the first to seventh electrodes 531 are named in the clockwise direction. Each 531 is a conductive element, compound, or alloy containing carbon, silver, copper, gold, platinum, and palladium, or a conductive polymer material, a conductive oxide material, a conductive nitride material, a silicon metal compound, etc. And other materials. It has a contact portion 532 formed between the substrate 51 and the photoresist layer 52, and a control portion extending from the contact portion 532 toward the periphery of the substrate 51 to expose the outside of the photoresist layer 52. The contact portions 532 of the first, second, and third electrodes 531 are respectively provided in the slot holes 523 in which three of them are distributed in a triangle, and the contact portions 532 of the fourth, fifth, sixth, and seventh electrodes 531 are separately provided in the one. In the second channel, 20 is relatively close to the other slot hole 523, so that when a liquid passes through, the contact portion 532 of the four electrodes 531 can be sequentially contacted. The control unit 533 of each of the electrodes 531 may be applied with a voltage to form an electric field acting on the slot cell 521 and the channel cell 522, respectively. «Hai panel 54 疋-acrylic board (pMMA), of course, other polymers 200528389 materials such as PMMA, PMMA derivatives, pc, p
PVC'PVC 之衍生物、pE、pE 々 <何生物、ABS、ABS之衍 ίο 15 20 生物等，或是例如梦晶圓、麵等也均可以當作面板使用 ，以熱壓貼合方式與光阻層53冑結，而與槽孔單元521之 四槽孔523形成四可分別容置液體的第一、二、三、四貯 液槽61、62、63、64’該第-、二、三貯液槽61、62、63 並分別對應設置有該第一、三電極531，同時，面板 5/並與槽道早疋522之二槽道524形成二可供液體移動之 第一、二微流道65、66，第四、五、六、七電極別之接 觸部533則間隔地設置於第二微流道66巾，且由於槽道 524之寬度為2〇〜5〇μιη，深度20〜75μιη，因此，第一、二微 流道65、66是分別形成縱深〆寬度為2〇_〜75陶X 20μιη〜50μηι的長條形通道態樣。 由於上述毛細微晶片5各構造的詳細說明，必須同時 配合實際檢測樣品時一併解釋方可清楚的明白，故請容後 再詳述。 配合參閱圖四，以本發明一種微晶片之製造方法4的 較佳實施例製造如圖5所示之微晶片5時，是先進行步驟 41 ’先以酒精擦拭以壓克力（ΡΜΜΑ)為材質的基板51， 使其表面無雜物附著。 接著以步驟42將導電膠以對應該些電極之形狀、位置 印刷至基板51表面，然後進行烘烤，即在基板51上形成 該電極單元53。在本實施例中，是將碳膠加上稀釋劑均句 混合成液態後，利用網版印刷將此液態混合物以對應該七 12 200528389 電極5 3 1之形你 ，即在基板51切成/卩雷刷至基板51表面，錢進行洪烤 他例如銀膠、銅膠等:::單元:3。當然，也可以選用其 一 ^ 電膠取代碳膠而應用於形成電極單 兀 53。此夕卜，丄1 丁 理炉膜、务風 I選用其他如上述可導電之材質，以物 又\ 或混用此些方式形成該電極單元53， 由Γ此等$成方式並非本發明重點所在，故在此不多加- 一詳述〇 ίο 15 20 接著進仃步驟43，在印刷有電極單元η之基板表 面上㈣Γ光阻材料’並使該光阻材料均句覆遮基板51表 面及電極早元53，並使光阻材料之-相反於基板51的-表 面成一水平面’經過軟烤後即形成-光阻層7。 再進行步驟44,應用預先製備之具有對應於槽孔單元 槽道單it 522之圖像的光罩，對光阻層7進行例如曝 一" 餘刻、清洗荨過程的微影製程，而在光阻層7 i 上向基板51方向凹陷形成槽孔單元521及與槽孔單元521 相連通之槽道單元522，即完成微晶片5上 的光阻層52。 最後進行步驟45，以熱壓貼合方式，直接利用光阻本 身的特性，將面板54、光阻層52、基板51連結成—體， 即完成如圖4、圖5所示之微晶片5。 配合參閱圖4，以上述本發明一種微晶片之製造方法4 所製成之微晶片5實際進行電化學檢測，例如分離檢測尿 液時’是先用純水與磷酸緩衝液清洗微晶片5十分鐘。然 後將混合尿酸和維他命c的標準試劑滴入第二貯液槽62中 ，純水和緩衝液滴入第三、四貯液槽63、64中，同時將待 13 200528389 入第一貯液槽61中， 一微流道6 5、6 6填滿 測的尿液樣品滴製 毛細現象把第一、 同時，使緩衝液因 5 10 15 2〇 ,先對第-電極施加⑽v/em高電壓，第三電極接地， 使形成之電場可將待檢測之尿液樣品由第-貯液槽61經由 忒第一微流道65流至第三貯液槽63中。PVC'PVC derivatives, pE, pE 何 & creatures, ABS, ABS derivatives ο 15 20 creatures, etc., or for example, dream wafers, noodles, etc. can also be used as panels, using hot-press bonding method It is connected with the photoresist layer 53 and forms four first, second, third, and fourth liquid storage tanks 61, 62, 63, and 64 respectively with the four slot holes 523 of the slot hole unit 521. The second and third liquid storage tanks 61, 62, and 63 are respectively provided with the first and third electrodes 531. At the same time, the panel 5 / and the second channel 524 of the channel channel 524 form two first channels for liquid movement. The second micro-flow channel 65, 66, the fourth, fifth, sixth, and seventh electrode contact portions 533 are arranged at intervals on the second micro-flow channel 66, and because the width of the channel 524 is 20-50 μm The depth is 20 to 75 μm. Therefore, the first and second micro-flow channels 65 and 66 are respectively formed into a long channel shape with a depth of 20 to 75 cm X 20 μm to 50 μm. Since the detailed description of each structure of the capillary microchip 5 described above must be explained together with the actual test sample, it will be clearly understood, so please elaborate later. With reference to FIG. 4, when a microchip 5 shown in FIG. 5 is manufactured according to a preferred embodiment of a microchip manufacturing method 4 according to the present invention, step 41 is performed first. 'First wipe with alcohol and acrylic (PMM) to The substrate 51 is made of a material so that no foreign matter adheres to the surface. Then, in step 42, the conductive paste is printed on the surface of the substrate 51 in the shape and position corresponding to the electrodes, and then baked, that is, the electrode unit 53 is formed on the substrate 51. In this embodiment, after the carbon paste and the diluent are mixed into a liquid state, the liquid mixture is screen-printed to correspond to the shape of the electrode 5 3 1 at 7 12 200528389. That is, the substrate 51 is cut into / Xun Lei was brushed to the surface of the substrate 51, and money was baked, such as silver glue, copper glue, etc. ::: Unit: 3. Of course, it is also possible to use one of them to replace the carbon glue and apply it to the electrode unit 53. In addition, 丄 1 uses a furnace furnace film and Wufeng I to select other conductive materials as described above to form the electrode unit 53 in a material or mixed manner. The formation method of Γ is not the focus of the present invention, so I wo n’t add more details here. A detailed description. 15 20 Then proceed to step 43 to apply a photoresist material on the surface of the substrate on which the electrode unit η is printed, and cover the surface of the substrate 51 and the electrode early with the photoresist material. 53, and the surface of the photoresist material-opposite to the surface of the substrate 51-is formed into a horizontal plane, and the photoresist layer 7 is formed after soft baking. Then, step 44 is performed, using a photomask prepared in advance with an image corresponding to the slot unit slot single it 522, and performing, for example, a photolithography process for exposing the photoresist layer 7 and cleaning it, and The photoresist layer 7 i is recessed in the direction of the substrate 51 to form a slot unit 521 and a channel unit 522 communicating with the slot unit 521 to complete the photoresist layer 52 on the microchip 5. Finally, step 45 is performed, in which the panel 54, the photoresist layer 52, and the substrate 51 are connected into a single body by using the characteristics of the photoresist in a thermocompression bonding method, and the microchip 5 shown in FIG. 4 and FIG. 5 is completed. . With reference to FIG. 4, the microchip 5 produced by the above-mentioned microchip manufacturing method 4 of the present invention is actually subjected to electrochemical detection. For example, when separating and detecting urine, “the microchip is first cleaned with pure water and phosphate buffer solution. minute. Then, the standard reagent mixed with uric acid and vitamin c is dropped into the second storage tank 62, and pure water and buffer are dropped into the third and fourth storage tanks 63 and 64, and at the same time, 13 200528389 is put into the first storage tank In 61, a microfluidic channel 6 5 and 6 6 fills the measured urine sample with capillary drip phenomenon. At the same time, the buffer solution is caused to apply a high voltage of ⑽v / em to the-electrode by 5 10 15 2 0. The third electrode is grounded, so that the formed electric field can flow the urine sample to be detected from the first liquid storage tank 61 to the third liquid storage tank 63 through the first microfluidic channel 65.
再將第一、二電極之電位移除，將第七電極通入〇.7V 之工作電壓，以第五電極接收回授訊號，第六電極通入 的參考電位。 、、:後對第一電極依序間隔地施加50、1 〇〇、2〇〇 V/cm的 回電壓，第四電極接地，即可驅動待檢測樣品分段間隔地 流入第二微流道66中，待其依序經過設置於第二微流道66 中之第五、/、、七專三電極後，即可紀錄該三電極的變化 ，進而依據此些變化分析檢測該待檢測樣品所含的不同物 質，該第四貯液槽64可容存檢測過或多餘的待測樣品。上 述說明是將本發明微晶片5應用於電化學檢驗中，其他例 如光學檢測、電學檢測，或其他光電檢測等等，當然也都 可以適用，因其屬於應用方法之區域，並非本發明重點所 在’在此不再多加贅述。 參閱圖7，由掃描式電子顯微鏡所拍攝的照片，可以看 出’以本發明一種微晶片之製造方法4所製造的微晶片5， 其微流道65、66具有相當的垂直性、平整性，同時，由於 光阻層52與基板51及電極單元53間的密合度極高，而使 得溶液在微流道65、66中移動時不會產生滲漏的問題，因 此’可以極為精確地驅動待檢測樣品分段間隔地流入微流 14 200528389 道65 、 66中 而得到如圖 8所不之更精準的檢測分離結果 10 15 20 、綜所上述，本發明微晶片之製造方法4，主要是利用低 成本的製程方式，以網版印刷方式形成電極單& Μ，再藉 由光阻利用微影製程精確加工成型的特性，來製作成型： 細微晶片5中，必須具備極高的平整性與垂直性的微流道 65、“，最後再簡易的以熱壓合方式連結壓充力面板μ與 光阻層52，而完成毛細微晶片5 ;同時，所製備完& μ 細微晶片5，由於基板51、光阻層52、面板Μ間可緊密結 合而無間隙產生’因此，使得溶液在微流道65、66中移動 ^不會產生滲漏的問題，而可以更為精確地驅動待檢測樣 口 口分段間隔地流入微流道中，而得到較習知之微電用生物 曰曰片1更精準的電化學偵測檢測結果，此外，由於面板54 與光阻層52間的結合方式是採用熱貼壓合，藉由光阻層52 本身的特性來連結面板54，因此面板54除了可採用適合光 學檢測的壓克力材質之外，亦可以簡單轉換為玻璃、矽晶 圓或其他高分子材料等材質，而符合其他各項分析檢測的 需求，而仍舊保有高靈敏度和選擇比、微小化、低成本、 低功率、高協調性的檢測特性，確實達到本發明之創作目 的。 惟以上所述者’僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明書内容所作之簡單的等效變化與修飾，皆 應仍屬本發明專利涵蓋之範圍内。 15 200528389 【圖式簡單說明】 圖1是一上視不意圖，說明習知之微晶片的構造； 圖2是一側視不意圖，輔助說明圖1之微晶片的構造 5 目3是-流程圖’說明圖1之微晶片的一製程； 圖4疋"IL私圖，說明本發明一種微晶片之製造方法 的一較佳實施例； 圖5是一上視不意圖，說明以圖4之製造方法所製造 的微晶片； 10 ® 6是一側視示意圖，辅助說明圖5之微晶片的構造 f 圖7是SEM相片，說明以圖4之製造方法所製造的 微晶片’其_微流道具有相當高的平整性與垂直性；及 圖8是一檢測結果，說明以圖4之製造方法所製造的 15 微晶片在不同電壓下檢測尿液的結果。 16 200528389 【圓式之主要元件代表符號說明】 1 微晶片 32 步驟 11 基板 33 步驟 12 電極單元 34 步驟 121 電極 35 步驟 122 接觸部 4 製造方法 123 控制部 41 步驟 13 覆板 42 步驟 131 下表面 43 步驟 132 槽孔單元 44 步驟 133 槽道單元 45 步驟 134 槽孔 5 微晶片 135 槽道 51 基板 141 第一貯液槽 52 光阻層 142 第二貯液槽 521 槽孔單元 143 第三貯液槽 522 槽道單元 144 第四貯液槽 523 槽孔 151 第一微流道 524 槽道 152 第二微流道 53 電極單元 16 空隙 531 電極 21 母模 532 接觸部 211 表面 533 控制部 212 凸塊 54 面板 31 步驟 61 第一貯液槽 17 200528389 62 第二貯液槽 66 第二微流道 63 第三貯液槽 7 光阻層 64 第四貯液槽 65 第一微流道 18Then the potentials of the first and second electrodes are removed, the seventh electrode is connected to a working voltage of 0.7V, the fifth electrode receives the feedback signal, and the reference potential connected to the sixth electrode. , :: Then apply 50, 100, 2000V / cm return voltage to the first electrode in sequence at intervals. The fourth electrode is grounded to drive the sample to be tested into the second microchannel at intervals. In 66, after it sequentially passes through the fifth, three, and seven electrodes provided in the second microfluidic channel 66, the changes of the three electrodes can be recorded, and the sample to be tested can be analyzed and detected according to these changes. The fourth liquid storage tank 64 can store tested or redundant samples to be tested for different substances. The above description is the application of the microchip 5 of the present invention to electrochemical inspection. Others, such as optical inspection, electrical inspection, or other photoelectric inspection, etc., of course, can also be applied because it belongs to the area of application methods and is not the focus of the present invention. 'No more details here. Referring to FIG. 7, a photograph taken by a scanning electron microscope can be seen that 'the microchip 5 manufactured by the microchip manufacturing method 4 of the present invention has microchannels 65 and 66 having considerable verticality and flatness. At the same time, because the adhesion between the photoresist layer 52 and the substrate 51 and the electrode unit 53 is extremely high, so that the solution does not cause leakage when it moves in the microchannels 65 and 66, so it can be driven extremely accurately The sample to be tested flows into the microflow 14 200528389 in channels 65 and 66 at intervals to obtain a more accurate detection and separation result as shown in FIG. 10 10 15 20. As described above, the method 4 for manufacturing a microchip of the present invention is mainly Use low-cost manufacturing methods to form electrode sheets & M by screen printing, and then use photoresist to accurately mold and shape using photolithography process to make molding: Microchip 5 must have extremely high flatness Finally, the micro-fluidic channel 65 and the vertical micro-channels are simply connected to the pressure-charging panel μ and the photoresist layer 52 by thermocompression bonding to complete the capillary microchip 5; meanwhile, the prepared & μ microchip 5 is completed. , The substrate 51, the photoresist layer 52, and the panel M can be tightly bonded without gaps. Therefore, the solution can be moved in the micro-channels 65 and 66. The problem of leakage does not occur, and the The detection sample orifice flows into the micro-channel at intervals, and obtains a more accurate electrochemical detection test result than the conventional micro-electron biofilm 1; in addition, due to the combination of the panel 54 and the photoresist layer 52 The panel 54 is connected by heat bonding and compression by the characteristics of the photoresist layer 52. Therefore, in addition to the acrylic material suitable for optical detection, the panel 54 can also be simply converted into glass, silicon wafer or other Materials such as polymer materials, while meeting the needs of other analytical tests, while still maintaining the detection characteristics of high sensitivity and selection ratio, miniaturization, low cost, low power, and high coordination, have indeed achieved the creative purpose of the present invention. The above mentioned are only the preferred embodiments of the present invention. When the scope of implementation of the present invention cannot be limited by this, that is, what is generally made according to the scope of the patent application and the contents of the invention specification Simple equivalent changes and modifications should still fall within the scope of the patent of the present invention. 15 200528389 [Brief Description of the Drawings] Figure 1 is a top-view illustration, illustrating the structure of a conventional microchip; Figure 2 is a side If not intended, it will help to explain the structure of the microchip of FIG. 1. Head 3 is a flow chart to explain a process of the microchip of FIG. 1; FIG. 4 疋 " IL private diagram, illustrates the method of manufacturing a microchip of the present invention A preferred embodiment; FIG. 5 is a top view, illustrating a microchip manufactured by the manufacturing method of FIG. 4; 10 ® 6 is a schematic side view, to help explain the structure of the microchip of FIG. SEM photograph illustrating the microchip manufactured by the manufacturing method of FIG. 4 and its microchannel has relatively high flatness and verticality; and FIG. 8 is a test result illustrating the 15 manufactured by the manufacturing method of FIG. 4 Results of microchip detection of urine at different voltages. 16 200528389 [Description of the main components of the round type] 1 Microchip 32 Step 11 Substrate 33 Step 12 Electrode unit 34 Step 121 Electrode 35 Step 122 Contact 4 Manufacturing method 123 Control 41 Step 13 Cover 42 Step 131 Lower surface 43 Step 132 slot unit 44 step 133 channel unit 45 step 134 slot 5 microchip 135 slot 51 substrate 141 first reservoir 52 photoresist layer 142 second reservoir 521 slot unit 143 third reservoir 522 channel unit 144 fourth liquid storage tank 523 slot 151 first microchannel 524 channel 152 second microchannel 53 electrode unit 16 gap 531 electrode 21 female mold 532 contact portion 211 surface 533 control portion 212 bump 54 Panel 31 Step 61 First liquid reservoir 17 200528389 62 Second liquid reservoir 66 Second microchannel 63 Third liquid reservoir 7 Photoresist layer 64 Fourth liquid reservoir 65 First microchannel 18