200525085 九、發明說明： 【發明所屬之技術領域】 ^毛月係，關於在南速旋轉區域亦不會發生振動地平衡 之旋轉轉子，特別是將該旋轉轉子應用於螺旋旋轉轉子而 於高速旋轉區域亦不會發生振動之螺旋式真空泵。 【先前技術】 般於具有泵（真空泵等）或壓縮機等之旋轉轉子之 錢械之中，有使用旋轉轉子之軸直角剖面形狀之重量重 ⑽不人疑轉轴-致之旋轉轉子者。例如，擁有複數螺紋之 單數螺旋旋轉轉子或相互同步咬合之2支螺旋旋轉轉子，係 於各螺旋旋轉轉子之軸直角剖面形狀旋轉軸沒有與重量重 —致。該螺旋旋轉轉子-般收置於密閉之框體内，於形 成在螺旋旋轉轉子之齒與框體間之㈣隨著螺旋旋轉轉子 之旋轉將氣體或液體等物質由形成於框體之吸入口側向排 出口側移达。於如此之螺旋式型旋轉式機械（螺旋式真空果 等）’ 一般認為浪漏量與旋轉數無關而為固定，故排氣量為 固定的話，越高速旋轉越可小型化，提高容積效率。但是， 由於該螺旋之軸直角剖面形狀對於轉子旋轉轴通常係不均 等故不僅旋轉軸與重心不一致，且若將該重心於旋轉抽方 向連續地連接則會以旋轉軸為中心成為旋轉形狀。因此， 由於提高旋轉數則會產生激烈的振動，故不可能以高旋轉 數運轉。如此，只能使用低速區域之旋轉數，則為增加排 出，流量機械須大型化，且吸入口側與排出口側之壓力差 上升則漏量也隨之變大而導致效率降低之問題。 96994.doc 200525085 為解決此，使螺旋旋轉轉子之螺子部之螺子導程數為偶 數取得靜態平衡，對於動態平衡，有於螺旋旋轉轉子之兩 端的螺紋部分設空洞，或者，於設空洞的部分鑄入輕量的 材質，藉此輕量化，取得平衡之方法 此外，亦有使螺旋旋轉轉子之螺子部之導=為（整數 进5)，藉此使螺旋旋轉轉子之不平衡力矩變小者 獻2)。 又 [專利文獻1]特公平2-17716號公報 [專利文獻2]特開平11_27〇479號公報 【發明内容】 但是，如專利文獻丨於螺旋旋轉轉子之軸部之外面與螺子 部之螺底之間之端面以鑽孔機設置有底之平衡洞之情形， 螺旋旋轉轉子固定部變成較長時，該鑽孔需要該部分^長 度，使機械加工困難。再者’為提升容積效率使齒底徑變 小，則齒底徑會接近軸承所支持之轴頸轴徑，而使設置平 衡洞之空間消失’即使將製作鑄物時之空洞部分省略，若 非大型及大導程，則有製作上難以省略空洞部分之問題。 又於實際的半導體製程上’運轉泉時，於空洞部容易堆積 生絲。而有當該生成物因振動等剝落則卡入螺旋使泵過 負荷而停止之問題。 又，如專利文獻2,使螺旋旋轉轉子之螺子部之螺子導程 數為（整數+0.5)之情形，伸長之導程數〇5部分作為真空= 或壓縮機之功能係不必要’有為該部分旋轉式機械之軸方 向長度伸長之問題。 96994.doc 200525085 本案發明係有馨於上述問題，根據請求項】之發明 旋轉子，其旋轉軸直角剖面形狀之重量重心不 -致’設置為使旋轉子之不平衡力矩〜 4 I機1構。作A嫵 構可配置於轉子之任何位置。例如亦可於轉子之轴= 纖部分没置不平衡力矩消除機構。 σ 根據請求項2之發明，將為減小上 ::i:rr +會相對凝轉的方式固箬古 j力式U者之方法或，以接著劑固 之:鳴求項3之發明，將上述平衡配重，固著於旋轉轉子 /由方，兩^部。該平衡配重係選擇可使旋轉轉子之 衡力矩最小之最佳厚度及形狀。 根據請求項4之發明，上诚承 係，以由旋轉軸至;二： 軸直角剖面之肉部 疋轉轉子之最外周之距離為半徑，以旌 轉軸為中心mgji 根據請求項5之發明，上 係，對於特定之軸直角法_:重二=:形狀 述不平衡力矩之方向一致。 錄直角法線係與上 矩=Γ項6之發明，將為減小上述旋轉轉子之不平衡力 之：構，將旋轉轉子之旋轉轴方向端部， 二:::長部分之肉部消去特定量。延長部係與延長部 之t狀相同，即可連續地延伸，而亦可以相異 之形狀’例如凸緣形狀。 根據請求項7之發明，將上述延長部分，形成於旋轉轉子 96994.doc 200525085 之軸方向兩端部。該延長部係選擇可使旋轉轉子… 力矩最小之最佳厚度及形狀。 疋轉轉子之不平衡 =d項8之發明，上述延長部之軸直角剖面之 糸，以由旋轉軸至旋轉轉 " 轉軸為中心之圓之半圓内。取。之距離為半徑，以旋 根據請求項9之發明， 係，對於特定之軸直角μ 重之轴直角剖面形狀 疋之釉直角法線呈對稱。 吸：!::項10之發明，一種螺旋式真空系，其係於具有 人排出口之框體内，收 轉轉子，以特定手段使上、父合之螺旋旋 設有藉由密封上述框體使上心=旋旋轉轉子同步旋轉， 對螺旌…*體使上述吸入口及排出口以外密封一 通之心：納室與一對螺旋旋轉轉子收納室外之連 至二手:子：上迷-對螺《轉轉子使用請求項丨 、、不乂鱼11之發明’於其旋轉軸直角剖面形狀之重量重 不：力:心一致之旋轉轉子’藉由設置為使旋轉子之 小之機構’加卫可容易地使不平衡力矩變小。 衝二月长項2之發明，藉由將為減小上述旋轉轉子之不平 矩树，疋轉軸方向端部’藉由使旋轉子之不平衡力 =小’可將製作容易別零件之平衡配重簡單地固定於旋 ‘軸，可不用對旋轉軸作耗力的加工。 :據請求項3之發明，藉由將上述平衡配重，固著於旋轉 之軸方向兩端部，可更容易取得平衡。又’由於沒有 96994.doc 200525085 合易使半$體製程產生的生成物堆積的空洞部，不會將生 成物卡入而使泵停止。 曰 根據請求項4之發明，藉由使上述平衡配重之軸直肖剖面 之肉部，以由旋轉軸至旋轉轉子之最外周之距離為半徑， 以旋轉軸為中心之圓之半圓内，可以少的材料取得平衡。 根據》月求項5之發明，藉由使上述平衡配重之 ㈣，對於特定之轴直角法線呈對稱，使平衡配重之製作 谷易。 根據請求項6之發明，藉由將為減小上述旋轉轉子之不平 衡力矩之機構，延具你φ 择料 轉轉子之旋轉轴方向端部為特定長 又以延長部分之肉部消去特定量，可以簡單的構造， 容易地消去對旋轉轉子耗力的加工。 m 根據請求項7之發明，由於葬 旋轉轉子之轴方s由將上述延長部分，形成於 °兩端部’而可對稱配置，故更容易取得 I不合將生:使半導體製程產生的生成物堆積的空洞部 -’不會將生成物卡入而使泵停止。 根據請求項8之發明，M & & 明，糟由使上述延長部 肉部，以由旋轉軸至施輔絲2 幻之軸直角j面之 疋轉釉至旋轉轉子之最外周之距離 旋轉軸為中心之圓之车n " ㈣”百〇 可以少的零件點數取得平衡。 根據二求項9之發明，藉由使上述平衡配重之軸直 形狀，對於特定之軸直角法 平衡之旋轉轉子。 饵了谷易地製作取得 根據請求項10之發明， 體内，收容-對非接觸上人有吸入口與排出口之框 非接觸叹合之螺旋旋轉轉子，以特定手段 96994.doc 200525085 使上述-對螺旋旋轉轉子同步旋轉，設有藉由 體使上述吸入口及排出口以外密 … 宕盥一斜破# 對螺凝旋轉轉子收納 式直=累凝旋轉轉子收納室外之連通之密封手段之螺旋 於各個上述一對螺旋旋轉轉子使用請求項1至9 之誕轉轉子之構成，可使螺旋、 丨^ ^ 得粉于之不平衡力矩變 小二可抑制螺旋旋轉轉子於高速旋轉時之振動。又，由於 無須设置平衡洞，可使齒底徑提升容積效率。 【實施方式】 =圖2及圖3表示安裝本案發明之平衡配重之螺旋旋 轉之第1貫施例。圖W螺旋旋轉轉子之軸方向剖面 圖、圖:係圖1之A_A剖面圖、圖3係圖1之B-B剖面圖。 1〇1係螺旋旋轉轉子。平衡配重1〇3及1()5㈣中心開有可 插入螺旋旋轉轉子之旋轉軸之孔。平衡配重之安裝方法 係’於該孔插入螺旋旋轉轉子之旋轉軸，藉由預先安裝於 螺敎疑轉轉子之定位構件（栓、銷、螺絲等⑽7及⑽將平衡 配重1〇3及1〇5之孔部之槽口⑴及⑴-並插入，將平衡配 ，103及1〇5對螺旋旋轉轉子ι〇ι不相對旋轉的方式定位固 疋再者’藉由安裝螺絲u5及117，使平衡配重1〇3及1〇5 ;轴方向不動’疋全固定於螺旋旋轉轉子101。150係平衡 配重之軸直角剖面形狀成對稱之軸直角法線，151係旋轉中 心 〇 平衡配重之卓由亩备立,丨I π 角面之表外周部以旋轉軸為中心，由 方疋轉轉子之取外周至旋轉轴之長度為半徑之半圓狀（123， 125 4刀）作為全體為扇形，選擇不會發生因不平衡力矩之 96994.doc 10 200525085 ，動的方式選擇最佳的配置、形狀及軸方向之厚度。作為 最佳的配置’例如連接由旋轉軸至不平衡力矩之重量重心 幸直角去線與包含該軸直角法線之軸直角剖面上之不平衡 主為略致的方式配置。組合複數螺旋旋轉轉子使用之 情形，例如將2個螺旋旋轉轉子互相咬合使用之螺旋式真空 泵相互之平衡配重不會干涉的方式於端部119、121設有 槽口。 本案發明之平衡配重，使用凸緣狀之肉厚相等者，惟亦 可因應而要變化肉厚。例如可使之為螺旋形狀，切削螺旋 齒所需要部分之平衡配重。 其次，於圖4表示本案發明之螺旋旋轉轉子用於真空泵之 情形之實施例。 真空泵200，包含2個螺旋旋轉轉子2〇2及2〇4。螺旋旋轉 轉子202及204係，收納於框體21〇之内部。詳述則，螺旋旋 轉轉子202係以軸承231及233可旋轉地支持於框體21〇，螺 方疋旋轉轉子204係藉由軸承234及236可旋轉地支持於框體 210。又，如圖所示配置正時齒輪251及253、馬達24ι、及 軸封237、23 8、239及240。於此，軸封23 7及23 8將軸承231 及23 3與旋轉轉子收納室2i〇b隔離，防止軸承23丨及23 3之潤 滑油洩漏到螺旋旋轉轉子收納室21〇b的同時，防止異物由 螺旋旋轉轉子收納室21 〇b侵入軸承23 1及233。同樣地，軸 封239及240將軸承234及236與旋轉轉子收納室21 Ob隔離， 防止軸承234及236之潤滑油洩漏到螺旋旋轉轉子收納室 21 Ob的同時，防止異物由螺旋旋轉轉子收納室21 〇b侵入車由 96994.doc -11 - 200525085 承234及236。作為軸封有迷宮轴封、接觸式軸封、磁性流 體軸封等。 又’於螺旋旋轉轉子204之-端部，伴隨著螺旋旋轉轉子 2〇4之旋轉使螺旋旋轉轉子撕旋轉之正時齒輪⑸及⑸， 刀別互相叹合的方式固^。再者，於螺旋旋轉轉子剔之一 端部’-體連接有馬達241之輸出袖。於螺旋旋轉轉子搬 之兩端部安裝有不平衡力矩255及257，螺旋旋轉轉子2〇4 之兩端部安裝有不平衡力矩259及26卜藉由如此之構成， 即使高速旋轉仍可使之幾乎沒有不平衡力矩，可防止因螺 旋旋轉轉子之振動，使螺旋旋轉轉子干涉而使真空果緊急 停止，最糟係壞掉’且因可高速旋轉運轉，可小型化又提 升性能。 又，螺旋紅轉轉子收納室21〇b係，以形成於框體21〇之内 部，由框體210之外部向框體21〇之内部將壓縮性流體吸入 之吸入口（無圖示）與框體21〇之外部連通。又，螺旋旋轉轉 子收納室210b係，由框體21〇之内部向框體21〇之外部排出 壓鈿性流體之排出口（無圖示）與框體21〇之外部連通連通。 於此，吸入口連通於未示於圖之被真空容器，排出口連通 於未示於圖之排氣處理裝置。 再者’框體210係包含第1框體構件211、第2框體構件 212、第3框體構件213、第4框體構件214、及第5框體構件 215。第1框體構件211係收容正時齒輪251及253，第2框體 構件212收容軸承及軸封，第3框體構件213收容螺旋旋轉轉 子’第4框體構件214收容軸承及軸封，第5框體構件215具 96994.doc •12- 200525085 備馬達241。於此，第1框體構件211構成排出側凸緣，第2 框體構件212、第3框體構件2 13及第4框體構件214構成框體 本體’第5框體構件215構成吸入側凸緣。 其次，說明關於本實施型態之真空泵200之作用。 首先，當馬達241旋轉螺旋旋轉轉子204則，螺旋旋轉轉 子204及螺旋旋轉轉子202之一端部，有正時齒輪253及251 分別相互咬合的方式固定，故伴隨著螺旋旋轉轉子204旋轉 螺旋旋轉轉子202。藉由螺旋旋轉轉子202與螺旋旋轉轉子 204之旋轉’導入螺旋旋轉轉子收納室21 〇b内之塵縮性流體 係由吸入口侧移送至由框體21 〇與螺旋旋轉轉子2〇2與螺旋 旋轉轉子204所成移送室210c側，經由移送室21〇c排出則。 又’螺旋旋轉轉子收納室21 Ob内之壓縮性流體，經由移送 室2 10c排出螺旋旋轉轉子收納室2丨〇b外則，於螺旋旋轉轉 子收納室210b，經由吸入口由被真空容器吸入新的壓縮性 流體。 再者，於本實施型態，說明容積移送型之螺旋式真空泵， 惟將本發明使用於爪式泵或渦卷泵等之旋轉軸對軸直角剖 面形狀之重心與旋轉中心不一致之泵亦可得到同樣的效 果。又，作為半導體製造裝置之真空泵，使用該當構造之 旋轉式真空泵之情形，為使平衡配重不會因生熱之熱膨脹 而撞到框體，且不被腐蝕性氣體污染，平衡配重使用與旋 轉轉子相同材質為佳。 其次，表示關於本發明之螺旋旋轉轉子之第2實施例。 圖5係由旋轉軸垂直方向所視關於第2實施例之螺旋旋轉 96994.doc 200525085 轉子之圖’圖6係該螺旋旋轉轉子之c方向箭頭所視之圖， 圖7係該螺旋旋轉轉子之D方向箭頭所視之圖。 於此螺旋部311係與第1實施例相同，說明形成於軸方向 兩端之平衡部。平衡部3()1係以與作排氣作用之整數播 螺旋部311以同形狀之螺旋形狀將同一構件延長加工為特 定長度。即，螺旋之捲數呈整數切。作為α即使最大亦以夂 兩端面呈1以下。即，圖5之X長為間隔長以下。 使平衡力矩至旋轉軸上的方式切削該平衡部3qi之螺旋 齒部303。作為整數捲之情形之螺旋齒部3〇3之切削方法 係，於平衡部301，於與螺旋部311之接合面上對由齒尖部 與軸方向所視之旋轉軸將相反側之螺旋齒部3〇ι沿著齒尖 部切削為扇狀。再者，由該切削部3㈣由軸方向所視^ 轉軸為相反側之螺旋齒部3〇1亦切削之，取得靜態平衡的同 時，使平衡力矩來到旋轉軸上。因此，本案之情形，對於 旋轉轴以大致對稱的配置包含扇型之切削部分305與轴方 向齒尖、先端部之槽口切削部分遍。若只是要取得平衡力 矩則:可只削除扇型之切銷部分3〇5，惟由於軸方向齒尖先 k部薄而不穩定’故齒先先端部分3〇6亦一併保持平 削除為‘。稭由使之為如此之構成’無須為取得衡 另外安裝構件，可削減工數及成本。 对力矩 —圖8係使於實施例1之螺旋轉子與平衡配重為-體之第3 貝％例。精由如此之構成’無須將平衡部4〇1切 狀可肖m成本。又，無須為取得平衡力矩另外安裝構^ 可削減工數及成本。 96994.doc 200525085 [產業利用的可能性] 可使用於旋轉轴軸直角剖面形狀之重心與旋轉中心不一 致之栗式真空泵或壓縮機。χ，亦可使用於如半導體製造 裝置，將極稀薄的反應氣體流放排氣之真空泵.。 【圖式簡單說明】 圖1係本案發明之第i實施例之螺旋旋轉轉子之旋轉軸直 角方向剖面圖。 圖2係圖1之A-A剖面圖。 圖3係圖1之B_B剖面圖。 圖4係使用本案發明之螺 乂 累疑方疋轉轉子之真空泵之剖面圖。 圖5係本案發明之箆9誊 貫知例之螺旋旋轉轉子之旋轉軸直 角方向剖面圖。 圖6係圖1之C箭頭方向所視圖。 圖7係圖1之D箭頭方向所視圖。 圖8係本案發明之第3實施例 角方向剖面圖。 之螺旋旋轉轉子之旋轉軸直 【主要元件符號說明】 101 、 202 、 204 103 、 105 107 、 109 111 、 113 115 、 117 119、121 200 螺旋旋轉轉子 平衡配重 定位構件 槽口部 螺絲 槽口 真空泵 96994.doc 200525085 210 框體 231、233、234、236 軸承 251、253 正時齒輪 241 馬達 237、238、239、240 軸封200525085 IX. Description of the invention: [Technical field to which the invention belongs] ^ Maoyue is a rotating rotor that is balanced without vibration in the area of south speed rotation, especially the rotation rotor is applied to a spiral rotation rotor and rotates at high speed. Screw-type vacuum pump without vibration in the area. [Prior technology] Among the money machines with rotating rotors such as pumps (vacuum pumps) and compressors, there are heavy weights that use the right-angled cross-sectional shape of the shaft of the rotating rotor. For example, a singular helical rotating rotor with multiple threads or two helical rotating rotors that are engaged with each other simultaneously, the right-angled cross-section shape of the shaft of each helical rotating rotor does not match the weight. The helical rotating rotor is generally housed in a closed frame, and between the teeth of the helical rotating rotor and the frame, the gas or liquid is drawn from the suction port formed in the frame with the rotation of the helical rotating rotor. Move to the side of the discharge port. In such a spiral type rotary machine (spiral vacuum fruit, etc.) ', it is generally considered that the wave leakage amount is fixed regardless of the number of rotations. Therefore, if the exhaust volume is fixed, the higher the speed, the smaller the size and the volume efficiency. However, since the right-angled cross-sectional shape of the axis of the spiral is generally unequal to the rotor rotation axis, not only the rotation axis does not coincide with the center of gravity, but also if the center of gravity is continuously connected in the rotation extraction direction, the rotation shape is formed around the rotation axis. Therefore, it is impossible to operate at a high number of rotations because an intense vibration is generated by increasing the number of rotations. In this way, only the number of rotations in the low-speed area can be used. In order to increase the discharge, the flow machine must be enlarged, and the increase in the pressure difference between the suction port side and the discharge port side will increase the leakage and reduce the efficiency. 96994.doc 200525085 In order to solve this problem, the static number of the spiral lead of the spiral part of the spiral rotor is even to achieve static balance. For dynamic balance, there are holes in the threaded parts of the two ends of the spiral rotor, or in the hollow part. A lightweight material is cast to reduce weight and achieve balance. In addition, there is also a method in which the guide of the spiral part of the spiral rotating rotor is equal to (integer number 5), thereby reducing the unbalance torque of the spiral rotating rotor. Offering 2). [Patent Document 1] Japanese Patent Publication No. 2-17716 [Patent Document 2] Japanese Patent Application Laid-Open No. 11_27〇479 [Summary of the Invention] However, for example, Patent Document 丨 is applied to the outer surface of the shaft portion of the helical rotating rotor and the screw base of the screw portion In the case where the end face in between is provided with a bottomed balance hole by the drilling machine, when the fixed part of the helical rotary rotor becomes longer, the drilling requires that part ^ length, making machining difficult. Furthermore, 'to increase the volume efficiency and make the tooth bottom diameter smaller, the tooth bottom diameter will approach the journal shaft diameter supported by the bearing, and the space for setting the balance hole will disappear'. Even if the hollow part is omitted when making the casting, if it is not For large and large leads, there is a problem that it is difficult to omit the hollow part in production. When the spring is operated on an actual semiconductor process, raw silk is easily deposited in the cavity. Another problem is that when the product is peeled off due to vibration or the like, the screw is caught in the screw, which causes the pump to stop due to overload. In addition, as in Patent Document 2, when the number of spiral leads of the spiral portion of the helical rotating rotor is (integer + 0.5), the elongation of the number of leads is 0.5. As a vacuum = or the function of the compressor is not necessary. This part of the rotary machine has a problem of length extension in the axial direction. 96994.doc 200525085 The invention of this case is based on the above-mentioned problem. According to the invention of the invention, the rotor of the invention, the weight center of gravity of the right-angled cross-sectional shape of the rotation axis is not set to make the unbalance moment of the rotor ~ 4 I machine 1 structure . A structure can be arranged at any position of the rotor. For example, an unbalanced torque eliminating mechanism may not be provided on the rotor's shaft = fiber part. σ According to the invention of claim 2, it will be a method to reduce the above :: i: rr + to fix the ancient j-force formula U in a relatively condensed manner or to fix it: the invention of item 3, The above-mentioned balance weight is fixed to two parts of the rotating rotor / Yufang. The balance weight is selected to have an optimal thickness and shape that minimizes the balancing moment of the rotating rotor. According to the invention of claim 4, Shang Cheng is based on the distance from the rotating shaft to the second: the distance between the outermost circumference of the rotary part of the rotor at the right angle section of the shaft and the center of the axis of rotation. Mgji According to the invention of claim 5 For the particular axis, the right angle method _: Zhong Er =: The directions of the unbalanced moments in the shape are the same. The invention of recording the right angle normal system and the upper moment = Γ term 6 will reduce the unbalanced force of the above-mentioned rotating rotor. The structure will eliminate the end of the rotating axis of the rotating rotor. A specific amount. The extension portion is the same as the t-shape of the extension portion, and can be continuously extended, but may have a different shape, such as a flange shape. According to the invention of claim 7, the above-mentioned extensions are formed at both ends in the axial direction of the rotating rotor 96994.doc 200525085. The extension is chosen to optimize the thickness and shape of the rotating rotor to minimize the torque ... The imbalance of the rotator = the invention of item d, the 糸 of the right-angled section of the shaft of the extension is within a semicircle of a circle centered on the rotation axis from the rotation axis to the rotation axis. take. According to the invention of claim 9, the distance is a radius, and the axial right-angled cross-sectional shape of the 直 -glazed right-angle normal to a specific axial right angle μ is symmetrical. Suction:! :: The invention of item 10, a spiral vacuum system, which is enclosed in a frame with a human discharge port, revolves the rotor, and makes the spiral screw of the upper and the parent closed by a specific means by sealing the above The frame makes the upper center = the rotating rotor rotates synchronously, and the screw ring ... * The body seals the outside of the above suction and discharge ports: the chamber and a pair of spiral rotating rotors. -To the screw "Rotary rotor use request item 丨, the invention of 乂 乂 11 'in the right-angled cross-sectional shape of its rotating axis is not heavy: Force: Rotating rotor with the same heart' By setting the rotor to be smaller The mechanism 'guarding' can easily reduce the unbalanced moment. The invention of the long item 2 in February is to reduce the uneven moment tree of the rotating rotor described above. The end of the rotation axis direction 'by making the unbalanced force of the rotor = small' can be balanced and easily manufactured. The weight is simply fixed to the rotating shaft, so that it is not necessary to perform laborious processing on the rotating shaft. : According to the invention of claim 3, the balance weight can be more easily obtained by fixing the above-mentioned balance weight to both ends of the axis of rotation. Also, because there is no cavity where 96994.doc 200525085 Heyi makes the products generated in the half dollar system accumulate, the products will not be caught and the pump will stop. According to the invention of claim 4, by making the meat portion of the above-mentioned balance weight's axis a straight section, the radius from the rotation axis to the outermost circumference of the rotating rotor is the radius, and the semicircle of the circle is the center of the rotation axis. Balance with less material. According to the invention of "Monthly Item 5", by making the 之 of the above-mentioned balance weight symmetrical with respect to the specific axis right-angle normal, Gu Yi is made. According to the invention of claim 6, by means of a mechanism for reducing the unbalanced moment of the rotating rotor described above, the end of the rotation axis direction of the φ rotor is selected to have a specific length and the specific portion of the extended portion is eliminated. The amount can be simply constructed, and the laborious processing of the rotating rotor can be easily eliminated. m According to the invention of claim 7, since the axis s of the rotary rotor is symmetrically arranged by forming the above-mentioned extensions at both ends of the °, it is easier to obtain a product that is incompatible: the product produced by the semiconductor process Accumulated voids-'Do not jam the product and stop the pump. According to the invention of claim 8, M & & It is clear that the above-mentioned extension portion is rotated from the rotation axis to the angle of the axis of the magical axis 2 of the magic axis to the glaze to the outermost circumference of the rotating rotor. The car with the center circle n " ㈣ "can balance with a small number of parts. According to the invention of the second finding item 9, by making the axis of the above balance weight straight, the right angle method for a specific axis is balanced. Rotating rotor. The invention was made according to claim 10 in vivo and contained in the body. Contained in the body-a non-contact helical rotating rotor with a suction port and a discharge port for the non-contact person, by specific means96994.doc 200525085 The above-mentioned helical rotating rotor is synchronously rotated, and the suction port and the exhaust port are closed by a body ... The spiral of the sealing means is used in each of the above-mentioned pair of helical rotating rotors. The rotation rotors of claim 1 to 9 can be used to reduce the unbalanced torque of the helical and helical rotating rotors. Second, it can suppress the helical rotating rotors to a high level. Vibration during rotation. In addition, the need to provide a balance hole can increase the bottom diameter of the volume efficiency. [Embodiment] = Figures 2 and 3 show the first embodiment of the spiral rotation of the balance weight of the invention. Fig. W Axial sectional view of the helical rotating rotor, Fig .: A_A sectional view of Fig. 1, and BB sectional view of Fig. 1. 〇1 helical rotating rotor. Balance weights 103 and 1 () 5㈣ A hole is inserted in the center to insert the rotating shaft of the helical rotating rotor. The installation method of the counterweight is to insert the rotating shaft of the helical rotating rotor into the hole, and the positioning member (pin, Pins, screws, etc. ⑽7 and 槽 will insert the notches ⑴ and 孔 of the holes of the balance weights 103 and 105, and insert the balance weights, 103 and 105 pairs of helical rotating rotors. Orientation of the fixed position, and then 'the balance weights 103 and 105 are fixed by the mounting screws u5 and 117; the axial direction does not move' are fully fixed to the spiral rotating rotor 101. The right-angled section of the axis of the 150 series balance weight The shape is symmetrical to the right axis normal axis, and 151 is the center of rotation. Mu Beili, the outer periphery of the I π angle surface is centered on the rotation axis, and the semicircle shape (123, 125 4 knives) with the radius from the outer periphery of the square rotor to the rotation axis is fan-shaped as a whole, Selection of the unbalanced moment due to the unbalanced moments 96994.doc 10 200525085, choose the best configuration, shape and thickness in the axial direction. As the best configuration 'for example, connect the weight from the rotating shaft to the unbalanced moment. The unbalance on the right-angled line and the right-angled section of the axis containing the right-angle normal to the axis are mainly arranged in a slight way. In the case of using a plurality of helical rotating rotors, for example, a spiral vacuum pump that uses two helical rotating rotors to engage each other A notch is provided in the end portions 119 and 121 in such a way that the balance weight does not interfere. The balance weight of the present invention uses a flange-shaped meat with the same thickness, but the thickness can be changed according to the requirements. For example, it can be made into a spiral shape, and a balance weight for cutting the helical teeth is required. Next, Fig. 4 shows an embodiment in which the spiral rotary rotor of the present invention is applied to a vacuum pump. The vacuum pump 200 includes two spirally rotating rotors 202 and 204. The spirally rotating rotors 202 and 204 are housed inside the housing 21o. In detail, the helical rotary rotor 202 is rotatably supported by the frame body 21 with bearings 231 and 233, and the helical rotary rotor 204 is rotatably supported by the frame body 210 with bearings 234 and 236. Further, timing gears 251 and 253, a motor 24m, and shaft seals 237, 23 8, 239, and 240 are arranged as shown in the figure. Here, the shaft seals 23 7 and 23 8 isolate the bearings 231 and 23 3 from the rotating rotor storage chamber 2i0b, prevent the lubricant of the bearings 23 丨 and 23 3 from leaking into the spiral rotating rotor storage chamber 21ob, and prevent The foreign matter penetrates into the bearings 23 1 and 233 from the helical rotating rotor storage chamber 2 0b. Similarly, the shaft seals 239 and 240 isolate the bearings 234 and 236 from the rotating rotor storage chamber 21 Ob, prevent the lubricant of the bearings 234 and 236 from leaking to the spiral rotating rotor storage chamber 21 Ob, and prevent foreign objects from being stored in the spiral rotating rotor storage chamber. 21 〇b invasion vehicles from 96994.doc -11-200525085 to 234 and 236. Examples of the shaft seal include a labyrinth shaft seal, a contact shaft seal, and a magnetic fluid shaft seal. At the -end of the helical rotating rotor 204, the helical rotating rotor tears the rotating timing gears 旋转 and ⑸ along with the rotation of the helical rotating rotor 204, and the blades are fixed in such a manner that they sigh. Furthermore, an output sleeve of the motor 241 is connected to one end portion 'of the helical rotary rotor. Unbalanced moments 255 and 257 are installed at both ends of the helical rotating rotor, and unbalanced moments 259 and 26 are installed at both ends of the helical rotating rotor 204. With this structure, it can be made even at high speed. There is almost no unbalanced torque, which can prevent the vacuum fruit from stopping immediately due to the vibration of the helical rotating rotor, and the worst case is broken because of the vibration of the helical rotating rotor, and it can be miniaturized and improve performance due to high-speed rotation. In addition, the spiral red-rotating rotor storage chamber 21ob is an inlet (not shown) formed in the housing 21o to suck a compressive fluid from the outside of the housing 210 to the inside of the housing 21o. It communicates with the outside of the frame 21o. In addition, the spiral rotation rotor storage chamber 210b is connected to the outside of the frame body 21 through a discharge port (not shown) for discharging a pressurized fluid from the inside of the frame body 20 to the outside of the frame body 21o. Here, the suction port is connected to a vacuum container (not shown), and the discharge port is connected to an exhaust treatment device (not shown). The 'frame 210' includes a first frame member 211, a second frame member 212, a third frame member 213, a fourth frame member 214, and a fifth frame member 215. The first frame member 211 contains timing gears 251 and 253, the second frame member 212 contains bearings and shaft seals, the third frame member 213 contains spiral rotors, and the fourth frame member 214 contains bearings and shaft seals. The fifth frame member 215 has 96994.doc • 12- 200525085 and has a motor 241. Here, the first frame member 211 constitutes a discharge-side flange, and the second frame member 212, the third frame member 21, and the fourth frame member 214 constitute the frame body. The fifth frame member 215 constitutes the suction side. Flange. Next, the operation of the vacuum pump 200 according to this embodiment will be described. First, when the motor 241 rotates the helical rotation rotor 204, one end of the helical rotation rotor 204 and the helical rotation rotor 202 is fixed with the timing gears 253 and 251 engaged with each other. Therefore, the helical rotation rotor is rotated along with the helical rotation rotor 204 202. The dust-condensing flow system in the helical rotation rotor storage chamber 21 〇b is transferred from the suction port side to the frame 21 〇 and the helical rotation rotor 202 and the spiral by the rotation of the helical rotation rotor 202 and the helical rotation rotor 204. The side of the transfer chamber 210c formed by the rotating rotor 204 is discharged through the transfer chamber 21oc. The compressive fluid in the spiral rotor storage chamber 21 Ob is discharged out of the spiral rotor storage chamber 2b through the transfer chamber 2 10c. Then, the spiral rotor storage chamber 210b is sucked in by the vacuum container through the suction port through the suction port. Compressive fluid. Furthermore, in this embodiment mode, a volume transfer type spiral vacuum pump will be described. However, the present invention is also applicable to a pump in which the center of gravity of the cross-sectional shape of the rotation axis to the shaft of the claw pump or scroll pump does not coincide with the rotation center. Get the same effect. In addition, as a vacuum pump for a semiconductor manufacturing device, when a rotary vacuum pump having a proper structure is used, in order to prevent the balance weight from hitting the frame body due to the thermal expansion of heat, and not to be contaminated by corrosive gases, use of the balance weight and The rotating rotor is preferably of the same material. Next, a second embodiment of the helical rotary rotor according to the present invention will be described. Fig. 5 is a view of the helical rotation of the second embodiment as viewed from the vertical direction of the rotation axis. 96994.doc 200525085 Rotor 'Fig. 6 is a view of the helical rotation rotor viewed from the direction c arrow, and Fig. 7 is a view of the helical rotation rotor Figure viewed by D arrow. Here, the spiral portion 311 is the same as the first embodiment, and the balance portions formed at both ends in the axial direction will be described. The balance portion 3 () 1 is formed by extending the same member to a specific length in a spiral shape having the same shape as the spiral portion 311 for exhausting. That is, the number of turns of the spiral is cut integrally. Even if α is the largest, 夂 is equal to or less than 1 on both end surfaces. That is, the X length in FIG. 5 is equal to or less than the interval length. The spiral tooth portion 303 of the balance portion 3qi is cut so that the balance torque is applied to the rotation shaft. The cutting method of the helical tooth portion 303 in the case of an integer roll is that the helical teeth on the opposite side of the rotation axis viewed from the tooth tip portion and the axial direction on the joint surface with the helical portion 311 at the balance portion 301 The portion 30m is cut into a fan shape along the tip of the tooth. In addition, the cutting portion 3㈣ is viewed from the axial direction, and the spiral tooth portion 301 whose rotation axis is on the opposite side is also cut, and at the same time the static balance is obtained, the balance torque is brought to the rotating shaft. Therefore, in the case of the present case, the rotation shaft includes the cutting portion 305 of the fan shape and the notch cutting portion of the tooth tip and the tip in the axial direction in a substantially symmetrical arrangement. If you only want to achieve a balance moment: you can only cut the fan-shaped pin part 305, but because the k-axis tooth tip is thin and unstable, the tooth tip portion 306 also keeps flat cutting. '. It is not necessary to install additional components in order to obtain the balance, so that the number of labor and cost can be reduced. Pairing torque-Fig. 8 is a third example of the case where the spiral rotor and the counterweight in Example 1 are -body. The fine structure is not necessary to cut the balance portion 401 to reduce the cost. In addition, it is not necessary to install a separate structure to obtain a balanced torque, which can reduce the number of labor and costs. 96994.doc 200525085 [Possibility of industrial use] A chestnut-type vacuum pump or compressor that can be used to make the center of gravity of the right-angled cross-sectional shape of the rotating shaft and the rotating center inconsistent. χ can also be used in, for example, semiconductor manufacturing equipment, vacuum pumps that vent extremely thin reaction gases. [Brief Description of the Drawings] Fig. 1 is a right-angle cross-sectional view of a rotation axis of a helical rotating rotor according to an i-th embodiment of the present invention. Fig. 2 is a sectional view taken along the line A-A of Fig. 1. FIG. 3 is a sectional view taken along the line B_B in FIG. 1. FIG. 4 is a cross-sectional view of a vacuum pump using a screw-rotary screw rotor of the present invention. Fig. 5 is a cross-sectional view in a right-angle direction of a rotation axis of a helical rotating rotor according to the conventional example (9) of the present invention. FIG. 6 is a view in the direction of arrow C of FIG. 1. FIG. 7 is a view in the direction of arrow D of FIG. 1. Fig. 8 is an angular sectional view of a third embodiment of the present invention. The rotation axis of the spiral rotating rotor is straight [Description of the main component symbols] 101, 202, 204, 103, 105, 107, 109, 111, 113, 115, 117, 119, 121 200 Spiral rotating rotor balance weight positioning member slot notch screw slot vacuum pump 96994.doc 200525085 210 Frame 231, 233, 234, 236 Bearing 251, 253 Timing gear 241 Motor 237, 238, 239, 240 Shaft seal
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