TW200521050A - Work transferring and transporting apparatus and work transferring and transporting method - Google Patents

Abstract

A work transferring and transporting apparatus has a plurality of transportation tables. A plurality of work holders for holding works are formed on the respective peripheral edge portions of the transportation tables. Each work is transferred between each pair of adjacent transportation tables and transported. A work transfer section is provided between the adjacent transportation tables. The adjacent transportation tables continuously rotate in synchronism with each other. In the work transfer section, the work having so far been held in one of the work holders of the one transportation table is transferred to one of the work holders of the other transportation table.

Description

V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a kind of electronic component which is decorated with eternal, earth, and 4 + = wafer type).苴 At the same time; 隹 γ ρ 1U ^:, classification, etc.); and more special = 2 ^^ transport and handling methods, which have the tendency to be transported at multiple transport speeds and can be properly handled, and are suitable for For inspecting the external appearance of the workpiece. [Prior art] Wear expansion: transportation of wafer-type electronic components or the like. Patent Application Publication No. (_. Pat. 范 F 置 以 以 _ / U ^^ 1Catl0n N〇 ·) 10-74673. This preamble technique is constructed in f way. This workpiece is conveyed and transported Ϊί = ΠΪ transporting table 21 and second transporting table 22, and its rotation axis is set to 彼 Qiu f.纟 The outer sides of each of the transfer tables 21 and 22

A plurality of workpiece storage grooves 23 and 24 are formed and arranged at regular intervals in the circumferential direction. U = the off-set workpiece supply device 25 is set close to the workpieces h provided by the first device 25 and is captured here: the workpiece storage groove 23 of the first rotating table 21 that is rotated in a sexual manner. When the stage 21 is rotated intermittently at the section 2? Γ, they will be inspected or measured at the first treatment Λ and σ 外 outside. Then, those artifacts that are inferred to be or are not standard "are ejected in the first processor 26. 'Those artifacts inferred to be non-defective in the first processor 26 may be transmitted by the artifact 200521050

Article 『No. 2 =: = 22's workpiece storage recess. Respective workpiece storage grooves 23 of the first pair are: two places: turn, and each other, w is moved by the second rotating table 22 that rotates intermittently: when: inspection is performed in some gamma processors 28 and the like . ^ Zi Zai's work piece ψ can be ^: Chu _ 2 6 t ^ ^ S ^ ^ 7 Vf ^ ^ ^ 41 Detect the defect that the work together " check the score 29 in the processing state 28 . Inferred to be non-defective Γ1; this is transported to the discharge section by the brother / conveyor 22

The segment is inferred to be defective at the same time ^ = will be transported to the next stage and discharged. Or those inaccurate will be conveyed and conveyed in a conveying and conveying device 20 constructed in this manner in the discharge section 29. The conveying table 21g will rest and rotate to convey the workpiece in the manner described above. Therefore, in some examples, the malfunction may be caused by the vibration when the pallets 2 i and 22 are intermittently rotated. Furthermore, these workpieces w may be difficult to transfer properly because they are blocked in the workpiece transfer 1 device 27 =; or the device may transfer speeds limited by the workpiece transfer I 2 7 or restricted rotation due to intermittent rotation Speed and cannot be processed with a higher processing speed. Therefore, in order to solve this intermittent rotation problem, a wafer member transfer device of a continuous rotary transfer table is described in Japanese Patent Application Laid-Open Publication No. 1 1-2 6 8 8 2 4. This preamble art device is constructed in a manner shown in Figs. 6 and 7. Fig. 6 is a plan view of the transfer device. In this conveyor, the feed tray 30 and the conveyance tray 32 are arranged side by side. A cavity 31 is formed in the feed tray 30. The peripheral edge portion of the transfer tray 32 is formed to store these

Page 6 200521050 V. Description of the invention (3) Cavities of wafer components and other workpieces 33. The workpieces W (such as wafer parts) are individually cavities 31. When the feeding tray 30 rotates, they will be conveyed by the carrier 330 to the cavity 3 of the carrying tray 32 adjacent to the feeding tray 30; when the individual trays 32 are rotated, the workers will be carried again and Chuan, y moxibustion, when = Yunzhi cavity 36. Figure 7A, 7B, and 7C, which have been transported to Zaigong 35, successively show the method of transferring the workpiece * 30 to the transfer tray 32. As shown in the heart chart: the feeding tray The workpiece w is held on the outer circumference of the feeding tray—an empty U'l air gripper W will protrude from the outer circumference of the feeding tray 30. Be a mason. When one cavity 33 of Haigong is facing each other, the feeding tray 3 will be stopped. Tian ° Suction: When the cavity 33 of "2" receives inhalation, =. On the same day: when moving 32.丄 仵 丨 丨 Transfer to the transfer tray According to the technique described earlier, the trays 30 and 32 are further advanced ::; = ir Continuously facing the transfer ==: turn r 转 This technique has the following problems. The feeding tray 30 and the carrying tray 32 need to be synchronized with high accuracy. If there is a deviation, the workpieces protruding from the cavity 31 are difficult to switch appropriately, and the workpiece evaluations are smoothly transmitted in a certain example. :: is shown in Fig. 7B '. For example, the workpieces w may stop at an intermediate position between the flat conveying trays 32. When details 0 and 32 rotate continuously in the front direction of FIG. 7B, the workpieces will be page 7. V. Description of the invention (4) A bending force is applied between 3 1 and 33 cavities. In this example, the work piece W or the cavities 31 and 33 may be broken. ^ One (2) right will enlarge the gap between the cavities 3 丨 and 33 and the workpiece w. In the case of the problem of item ，, the workpieces are stable and the suction of the transfer tray 32 will suffer. To an increased leak, W's suction is lower. τ (3) When the jade w is being transported, the property measurement of the workpiece w or the external ρ can be performed. If the position between the workpiece w and the cavities 31 and 33 is too large, the measurement or inspection is liable to fail.

The workpiece W is generally 30 when the Λ material tray 30 and the transfer tray 32 rotate continuously (32 disks; 32 i disease and two diseases, it is difficult to use an induction stomach. Furthermore, because r turns from i Λ, If there is a failure, they cannot be stored at that time. On the other hand, the moving tables 21 and 22 shown in Figure 5 will intermittently turn around. Therefore, the work in progress or 22 can be stopped there: Nakazaki can Wrong by the sensor to prepare for the test 'Falling Ϊ ΐ = The conventional intermittent rotation system (Figure 5) described above, although the ΪΪ (II; its processing speed is low. On the other hand, continuous rotation [invention i] ran high The processing speed is fast, but it lacks trustworthiness. And a ^ ming Ming goal is to provide a workpiece conveying and conveying device security method, which can safely convey and move workers *, J = mouth conveying and conveying loading platform, eight in The peripheral edge part has 200521050 V. Description of the invention (5)-plural workpiece supports for accommodating workpieces, and the two units are arranged next to each other and are substantially flush with each other, and they can carry the workpieces from the first The table is transferred to the second transfer station and the workpieces are transferred by the second transfer station. The piece conveying and conveying device includes a workpiece conveying section located between a first and a second conveying table. The first and second conveying tables rotate synchronously and continuously with each other. A workpiece support in the table) is transferred to a workpiece support in the workpiece conveying section to the second conveying table and then conveyed by the second conveying table. It will rotate continuously and the workpiece has reached the working table. The workpiece supports the external appearance of the workpiece and the moment and operation of the first move. Because it is transmitted to the second upward rotation. The speed processing will support the work supports of these workpiece handling tables. Supporting the rotating support When the object is used in this platform, the handling platform is therefore inclined. From the opposite position, the workpiece is transferred to the workpiece support center. According to this configuration, the first and second handling platforms are the workpieces held on the first handling platform. When the parts in the support are transferred, the workpiece will be transferred to the second moving object. For example, the workpiece can be inspected or its electrical properties can be measured during the transportation of the workpiece. Turning direction is the same direction (for example, counterclockwise). Centrifugal force " In the special section of the workers: workers :: when the first handling platform is opened, it quickly moves: workers: support, in the aforementioned moment side ^ 传送 ι conveyed in a safe way, with the first and second conveying tables facing the higher processing yield, the first and second conveying tables are acceptable; ίΛ the conveying direction of the workpieces)-the direction of the workpiece on the second conveying table of the flow side ϋ Ground spine spinner 'the first and second handling platform turn red, so that each piece of the handling platform

200521050 V. Description of the invention (6) In the sending part, the groove form is better, the workpiece support is on the workpiece, and the tangent line of the angle at this angle is preferably the shape of the groove. The workpiece moves in the same direction as the tangent of the orbit of the corner table. , Each workpiece support of the first handling platform has an ancient place—, μ two one L shape, thirty-eight, there is a surface for each workpiece, and there are two mouths adjacent to the inside of the handling platform. / 、 了 以4 文 惶 Η 口 丨 M is an oblique king at an angle Shuangjiao # ίΐ 二 For the front side h in the direction of rotation and the handling: greater than 0 and less than 45. . , = Each workpiece support of the second handling platform is a [shape, eight has a surface that can accommodate each workpiece, 苴 可以 = the inside of the handling platform is inclined at an angle ^ The accommodation is also relative to the direction of rotation On the rear side, it is greater than 0 with the handling line. And less than 45. . It is preferable that the respective workpiece supports of the first and second transfer tables are symmetrically arranged with respect to one point in the workpiece transfer section. Preferably, a suction port connected to a source of negative pressure is formed in a corner portion of the L-shaped groove of each workpiece support of the first transfer table. In comparison, a suction port connected to a source of negative pressure is formed in a corner portion of the L-shaped groove of each workpiece support of the brother-one handling table. Preferably, a line connecting the rotation center of the first transfer table with the corner portion of the L-shaped groove of the workpiece support of the first transfer table, and connecting the rotation center of the second transfer table with the The lines connecting the corner portions of the L-shaped grooves of the workpiece holder are spaced apart from each other and extend parallel to each other in the workpiece conveying portion. Preferably, the respective workpiece supports of the first and second conveying tables form separate suction tanks, and the suction pumps and

Page 10 200521050 V. Description of the invention (7) The negative pressure source is connected and can be switched by a switching device capable of switching the pressure. An example of this switching device is a partition valve which can change the pressure between atmospheric pressure and negative pressure below atmospheric pressure. Another example of a switching device is a separating valve that can change the pressure between a negative pressure below atmospheric pressure and a positive pressure above atmospheric pressure. According to another aspect of the present invention, a work piece conveying and conveying method has been provided, which includes drawing a work piece to a work piece holder on a peripheral edge portion of the rotating first conveyance table under a negative pressure lower than atmospheric pressure. And a step of transferring the workpiece from the workpiece support of the first transfer station to the workpiece support of the second transfer station. The workpiece conveying and conveying method includes a step of eliminating negative pressure on the workpiece support of the first conveying table, so that the workpiece can be conveyed between the first and second conveying tables, and partly conveyed from the first conveying table. The workpiece support of the table is loosened; and the step of attracting the workpiece released from the first conveying table to the workpiece support of the second conveying table under the negative pressure of low pressure, so that the workpiece can be released The second transfer table is used to transfer the workpiece. J Jia: Yes, eliminate the negative pressure rotation in the workpiece support of the first conveying table;: Ϊ :: the workpiece support is loosened, and it is removed by the centrifugal force generated when the second conveying table rotates ^ It is preferable that the workpiece support to be transferred to the second transfer table is that when the workpiece is carried from the workpiece of the workpiece transfer table, the workpiece is opened on the 7th day. Pressure. Now, this figure will be described with reference to FIG. 4C.

IMS Page 11 200521050 V. Description of the invention (8) The transport platforms 2 and 3 are located on the upper and lower sides respectively, and they can be transported relative to the transport direction. The transfer tables 2 and 3 are arranged substantially horizontally on the same plane. In addition to the first and second transfer tables ^ and 3, the workpiece transfer and transfer device may have another transfer table (for example, a third or fourth transfer table). The f-handling stage 2 is in the form of a disk 'which can be continuously rotated about the rotation center C1 in the direction indicated by the arrow Ri. A plurality of workpiece supports 4 are arranged in the direction of the circumference of the luxury circle. Regular intervals are arranged on the outer periphery of the first handling platform 2. The outer handling platform 3 is in the form of a disk. The stage 2 has a diameter of the outer 4 and can be wound in the direction indicated by the arrow "'in the opposite direction to the rotation direction of the -conveying stage 2: ::: to rotate continuously. A plurality of workpiece supports 5 is also on the circumference; the distance is arranged on the outer peripheral edge of the second handling platform 3. Yun Er u: a two-sided, or rectangular parallelepiped electronic component wafer) is carried by the workpiece support of 2 and 3 Hold 4 and 5. The workpiece transfer is provided between the transfer tables 2 and 3, which are located closest to each other i., In the workpiece transfer section 6, the 'transport buildings 2 and 3 are adjacent to each other on the same plane so that they Lower each workpiece w from one point 6 so that the workpiece w can be conveyed by the sliding member in the horizontal direction. "As shown in Fig. 2, the workpiece support 4 is an L · form with a long side 4b. The two sides are square at right angles to each other. The side 4b in the first handling platform 2 is relative to the > and the tangent of the track—the inclination angle 7 . 疋 It turns to other directions: =: r 'It has-short side 5a and-long side 5bg form, and its two sides also support other things: two sets. Page 12

I 200521050 V. The method of invention description (9) is extended. The long side 5b is at an inclined angle θ with the tangent line T 2 of the core: 3 on the rear side with respect to the direction of rotation in the second transfer table 3. The horn production is wider than 0 ° and less than 45 ° (0 ° < 0 < 45 °). ^ Also in the workpiece conveying section 6, the respective short sides 4a and 5a of the workpiece holders 4 and 5 extend parallel to each other. The long side flap and 5b also extend parallel to each other. Corner portions 4c and 4c in the grooves of the workpiece supports 4 and 5, respectively. Suction ports 7 and 8 openings are formed separately.璋 7 and 8 are connected to the negative pressure source P (illustratively shown in Fig. 3) through the suction holes 9 and 10, respectively. The solenoid separating valve V as a switching device is located between the negative pressure source P and the holes 9 and 10. Provide a valve to switch the pressure in holes 9 and 10 between negative pressure source P, atmospheric pressure, and (if necessary) a pressure higher than atmospheric pressure. As shown in FIG. 2, the line connecting the center C1 of the rotary joint 2 and the center of the first conveying table 2 of the suction port 7 in the workpiece conveying section 6 is shown by a φι rod. In addition, a line connecting the center C2 of the rotary table 3 and the second conveying edge 3 :: j of the suction port 8 is indicated by φ2. In the second figure, the center line φ2 of the first transfer platform 3 on the rotating rear side of the platform 3 will be offset from the first transfer building 2 by a distance indicated by &. $ Some centerlines and custom extensions. Don't pay Ξΐΐ In the workpiece conveying section 6, each of the workpiece supports 4 and 5 J t ί 4 is offset and is not opposed to each other. Therefore, the brackets 4 and 5 are symmetrically ζ with respect to the points in the workpiece conveying portion 6. The offset of% \ 10 should be at least equal to the size 2 shown in Figure 3. The size Z is from the four parts U, L2, and ⑷, and these are slaves.

200521050 V. Description of the Invention (ίο) The corners of the long sides of the pieces W each extend in the horizontal direction, and set the distance between the two internal parts L1 of the straight line (tilt-angle θ). , ^ Are shown in Figure 2. In the workpiece conveying section 6, the distance X between the conveying tables 2 and 3 should preferably be equal to or slightly shorter than each short side of the workpiece (the dimension W in the width direction). The cosine (hc0s.) Of the first and second handling tables 2 and the partition X in the workpiece conveying section 6 also depends on the depth of the workpiece supports 4 and 5. In short, those who call for a piece of care In other supports, all that is required is to prevent the interference of one of the supports: 4 and 5. The workpiece is in the workpiece conveying section 6, each of the first and second transfer tables 2 and 3 The workpiece supports 4 and 5 move in the same direction. More specifically, here, a rotation direction of a conveying table 2 rotating about the center C1 and a rotating direction of the second conveying table 3 rotating about the center C2. R2 is opposite to each other. For example, the short side of each workpiece support 4 of the first-handing table 2 is located on the front side which is related to the rotation direction, and the short section of each workpiece support 5 of the second-handing table 3 is On the rear side. The separated workpiece supply device is provided outside the first handling table 2 on the periphery, a part of the edge so as to be along the table 2 The tangent line extends. The first tiger blade 12 is located at the separated workpiece with respect to the rotation direction of the handling table 2 = supply, set at the front end 11. It can be used to check the external appearance of the workpiece w or to measure its electrical properties As shown in FIG. 3, the first processor i 2 provides a plurality of cameras 13 that can be used to externally inspect the two or four sides of the workpiece ¥. The second processor 14 is provided around the outer periphery of the second handling platform 3. On the edge part. The workpiece transfer part 5 used to transfer the workpiece W5 is relative to the handling on page 14 200521050 V. Description of the invention (11) Γ: ΐ is located in front of the second processor 14. The second process: ; Processor 12) Provide a plurality of cameras that can be used by external inspectors Φ \ four I or one side) on other surfaces. The second processor == the first processor 12 can inspect the complementary work surface: row drawing, workpiece transfer and handling device 1 operation. Middle) households; ^ ΛΛτ Ports 2 and 3 are moved by arrows ri and coffee respectively in Figure 1. Do not inhale 0 瑝 7 Μ continuously from upward rotation. At each of the workpiece supports 4 and 5, the DlV is sucked / pressed under the negative pressure generated by the negative pressure source P

The area Γ whispered inhale. In the workpiece holders 4 and 5 without holding the workpiece W (two or two to prevent the Λ · piece transfer portion 15), a switching mechanism can be used to prevent inhalation in the suction port 7 and "inhalation". atmosphere. The work piece to be moved: ;; :: 4 The supplied piece of work piece supply device " feeds to the suction of the first-inlet 7; it will be held by the suction of the workpiece support 4, The short side of the workpiece support 4 of the workpiece "rotates in the direction of two to allow the workpiece W to be inspected or measured straightly; it is possible that the external appearance of the workpiece 13 can be trapped or not by mistake: L The first processor 12 is inferred to have a defect—the processing will be discharged by the processor 12. Only those workpieces that are moved by the "time-conveying-rotating" workpiece support 4 are transferred to the second conveying table 3_ Individual work page 15 200521050 Swallowing, description of the invention (12) ti S Α ^ ^ # wf, J 14 # ^ ^ ^ 6 (Dried in Danggang, the state of sadness, the suction hole 9 and the source of negative pressure ρ Depress this ”: i through so that the area close to the suction cock 7 is kept at a negative value. The workpiece w is supported by the workpiece support 4. When the separation valve V is switched, the worker support: negative, source P Blocked and exposed in the workpiece conveying part 6 until the negative pressure in the support and inlet port 7 suddenly approaches atmospheric pressure ', so the workpiece support method, & Ϊ 2 only exposes the suction hole 9 to atmospheric pressure Sometimes the workpiece stagnates. In this example, the workpiece retention can be clearly eliminated by σ, a positive pressure slightly below atmospheric pressure to the suction hole 9. Section 4R ΪThe workpiece support When the workpiece retention of 4 is eliminated, Shikou shows that the centrifugal force F at the work L has now acted on F with the rotation of the -conveying table 2, which will cause the workpiece W to leave the support 4. The centrifugal force F can go to: Provide 'where B is the mass of the workpiece 1, [is the distance from the center of the platform 2' and ω is the rotational angular velocity of the building 2. With the rod? Kai / Hei first platform 2 workpiece support The workpiece w of the pallet 4 will be transferred to Fig. 5. The workpiece pallet 5 of the second rotary table 3 rotated in steps, as shown in the illustration, shows that the first pallet 2 will be continuously in the direction of the arrow. Rotation, d 5 is the centrifugal force F acting on the workpiece W, the force distance in the counterclockwise direction is acting on the workpiece W due to the second force, as shown in Figure 4B. This can be implemented, · ,,, = workpiece w will Rotates on its own axis and around the first conveying table 2. Therefore, when the workpiece w leaves the table 2, it is transferred to the second conveying table 3

200521050 V. Description of the invention (13) The workpiece support 5 is at the same time; 5 # I A i h direction). ’Rotate in the reverse 4-needle direction (the square of the moment is consumed when this element is near, close to the suction port 8 (1 a

The corner part of the workpiece support 5 is under the L of the H platform 3, because the suction hole 连接 will be connected to Y minus two]; or because it is maintained at a negative pressure in Figure 4C, the It has been transferred to the factory. If it shows that υΆ i4l ^ ^ 卞 and kiss b, the workpiece W is sucked and held by the support 5 and carried in the direction of the previous number. Part 5 of this fork support Wa is inserted into the ancient port 4 ′ / * ,,, μ of the suction port 8. The workpiece W is transmitted to the workpiece support 5 by its angle, ^ 4Α, β port 8. . Therefore, the workpiece W can be safely transferred. When the second transport platform 3 is continuously rotated, the workers who have been transferred to the platform 3 will be transported to the second processor 14. In the second process i, 仞 ^ 仃 is complementary to the inspection in the first processor 12 and the external appearance view table j sees the two side surfaces 2 of the support 4 are defective or incomplete! Ministry of Foreign Affairs. These are inferred by the second processor 14 as having: a standard work μ will be discharged by the processor 14. Only those workpieces W that are pushed to be defect-free are carried to the workpiece transfer section 15. In the combined transfer part 15, the suction holes 10 of the workpiece support 5 are blocked, and the source P is interrupted and exposed to atmospheric pressure. Therefore, in the suction port 8, the ice ^ # is substantially equal to the atmospheric pressure, so that the workpiece of the workpiece holder 5:, 'L will be eliminated. If necessary, ′ can be applied to the inside of the suction hole 10, a positive pressure at atmospheric pressure. If the workpiece retaining workpiece i ΐ / Shaw of the holder 5 is removed, the workpiece 1 will be loosened from the workpiece holder 5 and transferred to the next P white section. When this method rotates continuously, the workpiece on page 17 200521050, the description of the invention (14) _ the workpiece in the workpiece support 4 of the brother-one handling table 2 is prepared, part 6. When the workpiece W reaches the conveying section 6, its combined workpiece conveys the workpiece support 5 of the second conveyance table 3 and is conveyed by the table 3. When the second is conveyed to the first type conveyance, it is possible to inspect its external appearance or measure the workpiece W in addition, because the first conveyance table 2 continuously rotates the quality.

The force F acts on the workpiece w of the workpiece conveying section 6. When the corner part Wa and the centrifugal part leave the stage 2, when the pot is closed, when the workpiece W 8, at the same time will be in the direction of the force; From this, the first, tenth, and above electronic components with a rectangular planar shape Θ sheet can be described as a workpiece related to the specific embodiment described above. Japanese and Japanese films are used as electronic components made before, this Recognize Ding and Bei Huanren. The workpiece is not limited to metal components. Furthermore, 0 is, for example, a resin or a holder having a square planar shape, and the workpiece is attracted to the holder by a force under a negative pressure. 5 ^ Mechanical clamping force to hold the workpiece on the workpiece support

Page 18, 200521050, a brief description of the formula. Figure 1 is a plan view of a specific embodiment of the present invention. Section A of the special k and handling device. Figure 2 is an enlarged plan view of the workpiece transfer and handling device shown in Figure 丨. Fig. 3 is a plan view of a workpiece, which is held in a workpiece support shown in the first conveying table of the conveying device shown in Fig. 丨. The pieces are conveyed and Figures 4A to 4C are the first! The parts of the workpiece and the conveying device shown in the figure do not show the method of conveying the workpiece by the device. Fig. 5 is an external perspective view of a conventional conveying and conveying device. FIG. 6 is a plan view of another conventional transfer and handling device. 7A to 7C are respective plan views of the operation process of the conveying and carrying device of Fig. 6. Explanation of component symbols 2, 21 First pallet 4 Work support 4b, 5b Long side 6 Work conveying section 8 Suction port 10 Suction port 1 2, 2 6 First processor 1 5 Work conveying section 23 '24 Work storage Groove

1,20 Workpiece conveying and conveying device 3,22 Second conveying table 4a, 5a Short side 5 Workpiece support 7 Suction port 9 Suction port 11 '25 Separate workpiece supply device 1 4, 2 8 Second processor 13 camera

Page 19 200521050 Brief description of the drawings 27 Workpiece conveying device 2 9 Discharge section 30 Feed tray 31, 33, 36 Cavity 32 Carry tray 35 Carrier belt Part A Cl; C2 Rotation center Rl, R2 Arrow W Workpiece F Centrifugal force LI , L2, L3, and L4 parts h Dimensions in the width direction Η Vertical line P Negative pressure source ΤΙ, Τ2 Tangent line V Separation valve Wa Corner part Wm Force distance y Offset Z Dimension θ Inclination angle Φ 1 Connected to the center of rotary table 2 Cl is connected to the line Φ2 in the first conveying table 2 of the suction port 7 and the line C2 between the center C2 of the rotary table 3 and the second conveying table 3 in the suction port 8

Page 20

Claims (1)

200521050 VI. Scope of patent application 1 · A workpiece conveying a first conveying table, a workpiece supporting a workpiece supporting a second conveying table, and a peripheral edge portion thereof and a workpiece conveying portion of the first conveying table are conveyed by the second of the first conveying table _ 2 of the handling platform · If the first and second patent applications are applied, the second handling platform located on the upstream side is moved. 3 · If the first and second patent applications are applied, the transportation should be in the same direction. Carrying a transport platform with respect to 0 ° and > 5 · Each movement of the transport platform. Please tilt each of the accommodating platforms of the patent platform to rotate in the direction of J, at 450. A patent application and a conveying device comprising: it has a plurality of accommodating objects in its peripheral edge portion and rotates continuously; it is adjacent to the first conveying table and is substantially flush with it, and has a plurality of accommodating objects in it The workpiece support is rotated continuously and synchronously; and it is located between the first and the second conveying table, wherein the workpiece supported by each of the workpiece supports is transferred to the workpiece support and the first Two handling platforms for transportation. The workpiece conveying and conveying device surrounding item 1, wherein the table can convey the workpieces from the workpiece support of the conveying table with respect to the workpiece conveying direction to the article support on the downstream side. The workpiece conveying and conveying device around item 1, in 1 the table will be rotated in the opposite direction around its center of rotation / with other workpiece supports will be conveyed and conveyed in the workpiece conveying section with the workpiece surrounding item 1. Device, wherein the workpiece support is in the form of an L-shaped groove with a surface of the workpiece, and the workpiece support can accommodate the workpiece in a manner of f degrees, the angle is on the front side The tangent to the handling table of the handling platform is the workpiece conveying and handling device of Dawei Item 1, where the No. 21 Stomach 200521050 VI. Scope of Patent Application Each workpiece support of the second handling platform is an L-shape with a surface capable of accommodating each workpiece, which can be: = type, the inside of the handling platform is inclined at an angle To accommodate the work: support on the back side with respect to the direction of rotation, and the handling has: the angle j is greater than 0. And less than 45. . ~ The tangent line of the rail force is arranged symmetrically with respect to one point in the workpiece conveyance and handling as described in the scope of the patent application. ζ The workpiece conveying part t asks for the conveyance and transportation of the workpiece in the fourth item of the patent scope: the L-shaped groove angle of each workpiece support of the first-handling table; ::: a suction port connected to a negative pressure source is formed at . ㈢, Jiao Luo Deng is 8. If the device of the patent application scope No. 5 "receiving and receiving" device: the second shape of the L-shaped groove of each workpiece support of the second carrier to form a connection with the source of negative pressure The cockroach is sucked in. Luokou ί 3 knives 92. Each workpiece support of the workpiece transfer and conveying device of the application scope of the patent application scope is-L-shaped groove opened, = has a capacity to accommodate each workpiece. The surface of the 1 ^ J platform is tilted to accommodate it at an angle; the workpiece, on the front side with respect to the direction of rotation, is in line with the handling platform = greater than 0. and less than 45, where the second handling platform Each of the groove-like forms of 'which can be the workpiece support on the rear side of the object, the direction of rotation' and the handling of the handling platform 7 is less than 45 .; and the- The rotation center is connected with the L-shaped groove of the workpiece support in 2005 and 2005. 6. The patent application scope. The L-shaped groove of the workpiece support, the line connecting the rotation center of the handling platform and the Luo, and the corner of the first groove. : The L-shaped parts of the workpiece support of the transport platform extend parallel to each other &Quot; s1 is separated, and it is in the workpiece conveying section 10, such as the respective first and second conveying tables of the first and second conveying tables of the workers. The port, the suction The port and a joint support can form separate suction connections, which can be switched by a negative pressure source that can be I = atmospheric negative pressure, and the force can be changed by a knife. 11 · For example, the scope of patent application is the first 0 项 之 工 # ^ 皇 、、、、. The switching device is a kind of separating valve, which can be transferred to a piece of equipment and a carrying device, in which the pressure is changed between negative pressure., 1 at and below atmospheric pressure 1 2 · 如The switching device of the scope of application for patent No. 20 The switching device is a kind of separation valve, which can be installed during the transfer of the second transfer, in which the pressure is changed between the positive pressure of the atmospheric pressure and the negative pressure of the milk pressure and the high 1 3 · — A work piece conveying and conveying method, comprising: a first moving step of turning a work piece on a peripheral edge portion of a work platform under a negative pressure lower than atmospheric pressure to a red turn; The step of the workpiece eliminates the burden on the workpiece support of the first-handling platform. Can be located at the first and second transport edges of the King V, because the workpiece support of the second-platform is loosened; & Niu Chuanting section 7 at a negative pressure below atmospheric pressure to remove the slave The first step of conveying the workpiece support leading to the second conveying table is because the workpieces are sucked to the second conveying building, and the conveying parts from the second conveying table can be transmitted on page 23, 200521050. -——------- 1 4 · If you apply for a patent ^ Γ, you can eliminate the workpiece conveyance and conveying method in item _ ^ and j3, in which the workpiece support _ 1 and the workpiece support The negative pressure in the material allows the centrifugal force of the raw material to be transmitted to Xiyi. § Produced by the first conveying table when it rotates. 15. The workpiece support of the second conveying table as in the scope of the patent application When the work piece is conveyed and transported from the work piece holder, the support piece exerts a positive pressure π higher than the atmospheric weight when the work piece is released, and the positive pressure of the work piece "1" can be applied to the work piece.