TW200514299A - MEMS type oscillator, process for fabricating the same, filter, and communication unit - Google Patents

MEMS type oscillator, process for fabricating the same, filter, and communication unit

Info

Publication number
TW200514299A
TW200514299A TW093120088A TW93120088A TW200514299A TW 200514299 A TW200514299 A TW 200514299A TW 093120088 A TW093120088 A TW 093120088A TW 93120088 A TW93120088 A TW 93120088A TW 200514299 A TW200514299 A TW 200514299A
Authority
TW
Taiwan
Prior art keywords
filter
present
type oscillator
mems type
communication unit
Prior art date
Application number
TW093120088A
Other languages
English (en)
Other versions
TWI255580B (en
Inventor
Masahiro Tada
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of TW200514299A publication Critical patent/TW200514299A/zh
Application granted granted Critical
Publication of TWI255580B publication Critical patent/TWI255580B/zh

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H03H3/0077—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2457—Clamped-free beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
TW093120088A 2003-07-02 2004-07-02 MEMS type oscillator, process for fabricating the same, filter, and communication unit TWI255580B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003190642 2003-07-02

Publications (2)

Publication Number Publication Date
TW200514299A true TW200514299A (en) 2005-04-16
TWI255580B TWI255580B (en) 2006-05-21

Family

ID=33562338

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093120088A TWI255580B (en) 2003-07-02 2004-07-02 MEMS type oscillator, process for fabricating the same, filter, and communication unit

Country Status (7)

Country Link
US (1) US7504909B2 (zh)
EP (1) EP1650868A1 (zh)
JP (1) JP4501860B2 (zh)
KR (1) KR20060026905A (zh)
CN (1) CN1836371A (zh)
TW (1) TWI255580B (zh)
WO (1) WO2005004326A1 (zh)

Families Citing this family (88)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7713297B2 (en) 1998-04-11 2010-05-11 Boston Scientific Scimed, Inc. Drug-releasing stent with ceramic-containing layer
US7727221B2 (en) 2001-06-27 2010-06-01 Cardiac Pacemakers Inc. Method and device for electrochemical formation of therapeutic species in vivo
US8063535B2 (en) * 2005-01-07 2011-11-22 Trustees Of Boston University Nanomechanical oscillator
JP4617904B2 (ja) * 2005-02-01 2011-01-26 ソニー株式会社 微小振動子、半導体装置及び通信装置
CA2595473A1 (en) * 2005-02-03 2006-08-10 University Of Manitoba Micro heat engine and method of manufacturing
JP2006222562A (ja) * 2005-02-08 2006-08-24 Sony Corp 微小共振器、バンドパスフィルタ、半導体装置、及び通信装置
US8840660B2 (en) 2006-01-05 2014-09-23 Boston Scientific Scimed, Inc. Bioerodible endoprostheses and methods of making the same
US8089029B2 (en) 2006-02-01 2012-01-03 Boston Scientific Scimed, Inc. Bioabsorbable metal medical device and method of manufacture
US20070224235A1 (en) 2006-03-24 2007-09-27 Barron Tenney Medical devices having nanoporous coatings for controlled therapeutic agent delivery
US8187620B2 (en) 2006-03-27 2012-05-29 Boston Scientific Scimed, Inc. Medical devices comprising a porous metal oxide or metal material and a polymer coating for delivering therapeutic agents
US8048150B2 (en) 2006-04-12 2011-11-01 Boston Scientific Scimed, Inc. Endoprosthesis having a fiber meshwork disposed thereon
US8815275B2 (en) 2006-06-28 2014-08-26 Boston Scientific Scimed, Inc. Coatings for medical devices comprising a therapeutic agent and a metallic material
JP2009542359A (ja) 2006-06-29 2009-12-03 ボストン サイエンティフィック リミテッド 選択的被覆部を備えた医療装置
EP2054537A2 (en) 2006-08-02 2009-05-06 Boston Scientific Scimed, Inc. Endoprosthesis with three-dimensional disintegration control
EP2068757B1 (en) 2006-09-14 2011-05-11 Boston Scientific Limited Medical devices with drug-eluting coating
EP2068782B1 (en) 2006-09-15 2011-07-27 Boston Scientific Limited Bioerodible endoprostheses
EP2399616A1 (en) 2006-09-15 2011-12-28 Boston Scientific Scimed, Inc. Bioerodible endoprosthesis with biostable inorganic layers
CA2663220A1 (en) 2006-09-15 2008-03-20 Boston Scientific Limited Medical devices and methods of making the same
JP2010503489A (ja) 2006-09-15 2010-02-04 ボストン サイエンティフィック リミテッド 生体内分解性内部人工器官およびその製造方法
JP2010503482A (ja) 2006-09-18 2010-02-04 ボストン サイエンティフィック リミテッド 内部人工器官
US8487715B2 (en) * 2006-09-20 2013-07-16 Trustees Of Boston University Nano electromechanical integrated-circuit bank and switch
WO2008036830A2 (en) * 2006-09-20 2008-03-27 Trustees Of Boston University Nano electromechanical integrated-circuit filter
US7981150B2 (en) 2006-11-09 2011-07-19 Boston Scientific Scimed, Inc. Endoprosthesis with coatings
EP2277563B1 (en) 2006-12-28 2014-06-25 Boston Scientific Limited Bioerodible endoprostheses and method of making the same
US8431149B2 (en) 2007-03-01 2013-04-30 Boston Scientific Scimed, Inc. Coated medical devices for abluminal drug delivery
US8070797B2 (en) 2007-03-01 2011-12-06 Boston Scientific Scimed, Inc. Medical device with a porous surface for delivery of a therapeutic agent
US8067054B2 (en) 2007-04-05 2011-11-29 Boston Scientific Scimed, Inc. Stents with ceramic drug reservoir layer and methods of making and using the same
US7976915B2 (en) 2007-05-23 2011-07-12 Boston Scientific Scimed, Inc. Endoprosthesis with select ceramic morphology
US7942926B2 (en) 2007-07-11 2011-05-17 Boston Scientific Scimed, Inc. Endoprosthesis coating
US8002823B2 (en) 2007-07-11 2011-08-23 Boston Scientific Scimed, Inc. Endoprosthesis coating
EP2187988B1 (en) 2007-07-19 2013-08-21 Boston Scientific Limited Endoprosthesis having a non-fouling surface
US7931683B2 (en) 2007-07-27 2011-04-26 Boston Scientific Scimed, Inc. Articles having ceramic coated surfaces
US8815273B2 (en) 2007-07-27 2014-08-26 Boston Scientific Scimed, Inc. Drug eluting medical devices having porous layers
WO2009018340A2 (en) 2007-07-31 2009-02-05 Boston Scientific Scimed, Inc. Medical device coating by laser cladding
EP2185103B1 (en) 2007-08-03 2014-02-12 Boston Scientific Scimed, Inc. Coating for medical device having increased surface area
US8052745B2 (en) 2007-09-13 2011-11-08 Boston Scientific Scimed, Inc. Endoprosthesis
WO2009048468A1 (en) 2007-10-11 2009-04-16 Sand 9, Inc. Signal amplification by hierarchal resonating structures
US7938855B2 (en) 2007-11-02 2011-05-10 Boston Scientific Scimed, Inc. Deformable underlayer for stent
US8029554B2 (en) 2007-11-02 2011-10-04 Boston Scientific Scimed, Inc. Stent with embedded material
US8216632B2 (en) 2007-11-02 2012-07-10 Boston Scientific Scimed, Inc. Endoprosthesis coating
US7990229B2 (en) 2008-04-01 2011-08-02 Sand9, Inc. Methods and devices for compensating a signal using resonators
JP5581311B2 (ja) 2008-04-22 2014-08-27 ボストン サイエンティフィック サイムド，インコーポレイテッド 無機材料のコーティングを有する医療デバイス及びその製造方法
WO2009132176A2 (en) 2008-04-24 2009-10-29 Boston Scientific Scimed, Inc. Medical devices having inorganic particle layers
US8044736B2 (en) * 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8044737B2 (en) * 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8410868B2 (en) * 2009-06-04 2013-04-02 Sand 9, Inc. Methods and apparatus for temperature control of devices and mechanical resonating structures
US8766512B2 (en) * 2009-03-31 2014-07-01 Sand 9, Inc. Integration of piezoelectric materials with substrates
US8476809B2 (en) 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
US7998192B2 (en) 2008-05-09 2011-08-16 Boston Scientific Scimed, Inc. Endoprostheses
US8236046B2 (en) 2008-06-10 2012-08-07 Boston Scientific Scimed, Inc. Bioerodible endoprosthesis
JP5505596B2 (ja) * 2008-06-18 2014-05-28 セイコーエプソン株式会社 共振回路、発振回路、フィルタ回路及び電子装置
US8449603B2 (en) 2008-06-18 2013-05-28 Boston Scientific Scimed, Inc. Endoprosthesis coating
US8111108B2 (en) * 2008-07-29 2012-02-07 Sand9, Inc. Micromechanical resonating devices and related methods
US7985252B2 (en) 2008-07-30 2011-07-26 Boston Scientific Scimed, Inc. Bioerodible endoprosthesis
US8382824B2 (en) 2008-10-03 2013-02-26 Boston Scientific Scimed, Inc. Medical implant having NANO-crystal grains with barrier layers of metal nitrides or fluorides
US20100155883A1 (en) * 2008-10-31 2010-06-24 Trustees Of Boston University Integrated mems and ic systems and related methods
US8231980B2 (en) 2008-12-03 2012-07-31 Boston Scientific Scimed, Inc. Medical implants including iridium oxide
WO2010077311A1 (en) * 2008-12-17 2010-07-08 Sand9, Inc. Multi-port mechanical resonating devices and related methods
JP5848131B2 (ja) * 2008-12-17 2016-01-27 アナログ デバイシス， インコーポレイテッド 機械共振構造体を備える機器
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
JP4947065B2 (ja) * 2009-01-09 2012-06-06 セイコーエプソン株式会社 Ｍｅｍｓレゾネータの製造方法
US8395456B2 (en) * 2009-02-04 2013-03-12 Sand 9, Inc. Variable phase amplifier circuit and method of use
US8456250B2 (en) * 2009-02-04 2013-06-04 Sand 9, Inc. Methods and apparatus for tuning devices having resonators
WO2010090731A2 (en) * 2009-02-04 2010-08-12 Sand9, Inc. Methods and apparatus for tuning devices having mechanical resonators
US8267992B2 (en) 2009-03-02 2012-09-18 Boston Scientific Scimed, Inc. Self-buffering medical implants
US8071156B2 (en) 2009-03-04 2011-12-06 Boston Scientific Scimed, Inc. Endoprostheses
US8446078B2 (en) 2009-03-26 2013-05-21 Sand 9, Inc. Mechanical resonating structures and methods
US9048811B2 (en) 2009-03-31 2015-06-02 Sand 9, Inc. Integration of piezoelectric materials with substrates
US8287937B2 (en) 2009-04-24 2012-10-16 Boston Scientific Scimed, Inc. Endoprosthese
US8174170B1 (en) 2009-05-13 2012-05-08 Sand 9, Inc. Methods and apparatus for mechanical resonating structures
US8664836B1 (en) 2009-09-18 2014-03-04 Sand 9, Inc. Passivated micromechanical resonators and related methods
US8704604B2 (en) 2009-12-23 2014-04-22 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8604888B2 (en) 2009-12-23 2013-12-10 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8228127B2 (en) * 2009-12-23 2012-07-24 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
WO2011109382A1 (en) 2010-03-01 2011-09-09 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
US8668732B2 (en) 2010-03-23 2014-03-11 Boston Scientific Scimed, Inc. Surface treated bioerodible metal endoprostheses
KR101117279B1 (ko) * 2010-04-12 2012-03-20 연세대학교 산학협력단 나노공진기
US8833161B2 (en) 2010-04-20 2014-09-16 Sand 9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
US9075077B2 (en) 2010-09-20 2015-07-07 Analog Devices, Inc. Resonant sensing using extensional modes of a plate
US9383208B2 (en) 2011-10-13 2016-07-05 Analog Devices, Inc. Electromechanical magnetometer and applications thereof
US9299910B1 (en) 2012-05-17 2016-03-29 Analog Devices, Inc. Resonator anchors and related apparatus and methods
US9954513B1 (en) 2012-12-21 2018-04-24 Analog Devices, Inc. Methods and apparatus for anchoring resonators
JP2014170997A (ja) * 2013-03-01 2014-09-18 Seiko Epson Corp Ｍｅｍｓ振動子、ｍｅｍｓ振動子の製造方法、電子機器、及び移動体
US9634227B1 (en) 2013-03-06 2017-04-25 Analog Devices, Inc. Suppression of spurious modes of vibration for resonators and related apparatus and methods
US9209778B2 (en) 2013-03-15 2015-12-08 Infineon Technologies Dresden Gmbh Microelectromechanical resonators
US9786994B1 (en) * 2014-03-20 2017-10-10 Amazon Technologies, Inc. Co-located, multi-element antenna structure
US10800649B2 (en) 2016-11-28 2020-10-13 Analog Devices International Unlimited Company Planar processing of suspended microelectromechanical systems (MEMS) devices
US10843920B2 (en) 2019-03-08 2020-11-24 Analog Devices International Unlimited Company Suspended microelectromechanical system (MEMS) devices

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634787A (en) * 1968-01-23 1972-01-11 Westinghouse Electric Corp Electromechanical tuning apparatus particularly for microelectronic components
JPS6468114A (en) 1987-09-09 1989-03-14 Hiroshi Shimizu Structure for idt exciting type piezoelectric resonator
US6249073B1 (en) * 1999-01-14 2001-06-19 The Regents Of The University Of Michigan Device including a micromechanical resonator having an operating frequency and method of extending same
US6275122B1 (en) * 1999-08-17 2001-08-14 International Business Machines Corporation Encapsulated MEMS band-pass filter for integrated circuits
DE10013424A1 (de) 2000-03-17 2001-09-20 Bosch Gmbh Robert Filter für elektrische Signale

Also Published As

Publication number Publication date
CN1836371A (zh) 2006-09-20
EP1650868A1 (en) 2006-04-26
US7504909B2 (en) 2009-03-17
US20070052497A1 (en) 2007-03-08
JPWO2005004326A1 (ja) 2006-08-17
KR20060026905A (ko) 2006-03-24
JP4501860B2 (ja) 2010-07-14
WO2005004326A1 (ja) 2005-01-13
TWI255580B (en) 2006-05-21

Similar Documents

Publication Publication Date Title
TW200514299A (en) MEMS type oscillator, process for fabricating the same, filter, and communication unit
TW200633375A (en) Micro-resonator, frequency filter and communication apparatus
ATE268519T1 (de) Multi-band sendeempfänger der einen direktmisch- empfänger benutzt, und der direktmisch-empfänger dazu
TW200610221A (en) Dual-band bandpass filter
TW200746628A (en) Coupled resonator for regulating system
WO2009038736A3 (en) Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof
EA200500920A1 (ru) Стабильный пенистый крем
WO2005104473A8 (fr) Procede pour inverser temporellement une onde.
TW200721687A (en) Apparatus and method for tuning center frequency of a filter
DE60135084D1 (de) Sender mit niedriger zwischenfrequenz und mit geschalteter seitenbandfrequenz
DK1327378T3 (da) Höreapparat med en höjfrekvensmodtager
SG135941A1 (en) Method for implementing a resonator under electrostatic forces
WO2005043745A3 (en) Fast-hopping frequency synthesizer
ATE431653T1 (de) Ultrabreitband-hochfrequenzsender und - impulsgenerator
EP1739846A3 (en) Signal generating apparatus, IC chip, GPS receiver, and cellular phone
EP1223668A3 (en) Synchronous signal generator
EP1282279A3 (en) Compensation of frequency offset in quadrature demodulators
WO2004059844A3 (en) Pahse locked loop comprising a variable delay and a discrete delay
WO1999046061A8 (de) Verfahren zum anregen eines siebrahmens mit ultraschall
DK1327377T3 (da) Höreapparat med en höjfrekvensmodtager
DE602004031027D1 (zh)
TW200700958A (en) Low frequency clock generation
EP1244205A3 (en) High-frequency oscillator
DE60303450D1 (de) Empfänger mit signalweg
MXPA05002917A (es) Dispositivo de emision que se pretende sea acoplado con un dispositivo de recepcion.

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees