TW200512872A - Dielectric barrier layer films - Google Patents

Dielectric barrier layer films

Info

Publication number
TW200512872A
TW200512872A TW093114493A TW93114493A TW200512872A TW 200512872 A TW200512872 A TW 200512872A TW 093114493 A TW093114493 A TW 093114493A TW 93114493 A TW93114493 A TW 93114493A TW 200512872 A TW200512872 A TW 200512872A
Authority
TW
Taiwan
Prior art keywords
barrier layer
substrate
layers
densified
dielectric
Prior art date
Application number
TW093114493A
Other languages
Chinese (zh)
Other versions
TWI334194B (en
Inventor
Mukundan Narasimhan
Peter Brooks
Richard E Demaray
Original Assignee
Symmorphix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Symmorphix Inc filed Critical Symmorphix Inc
Publication of TW200512872A publication Critical patent/TW200512872A/en
Application granted granted Critical
Publication of TWI334194B publication Critical patent/TWI334194B/en

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Landscapes

  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)

Abstract

In accordance with the present invention, a dielectric barrier layer is presented. A barrier layer according to the present invention includes a densified amorphous dielectric layer deposited on a substrate by pulsed-DC, substrate biased physical vapor deposition, wherein the densified amorphous dielectric layer is a barrier layer. A method of forming a barrier layer according to the present inventions includes providing a substrate and depositing a highly densified, amorphous, dielectric material over the substrate in a pulsed-dc, biased, wide target physical vapor deposition process. Further, the process can include performing a soft-metal breath treatment on the substrate. Such barrier layers can be utilized as electrical layers, optical layers, immunological layers, or tribological layers.
TW93114493A 2003-09-25 2004-05-21 Dielectric barrier layer films TWI334194B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US50612803P 2003-09-25 2003-09-25

Publications (2)

Publication Number Publication Date
TW200512872A true TW200512872A (en) 2005-04-01
TWI334194B TWI334194B (en) 2010-12-01

Family

ID=44209816

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93114493A TWI334194B (en) 2003-09-25 2004-05-21 Dielectric barrier layer films

Country Status (1)

Country Link
TW (1) TWI334194B (en)

Also Published As

Publication number Publication date
TWI334194B (en) 2010-12-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees