TW200510108A - Stage equipment for precision processing - Google Patents
Stage equipment for precision processingInfo
- Publication number
- TW200510108A TW200510108A TW092124873A TW92124873A TW200510108A TW 200510108 A TW200510108 A TW 200510108A TW 092124873 A TW092124873 A TW 092124873A TW 92124873 A TW92124873 A TW 92124873A TW 200510108 A TW200510108 A TW 200510108A
- Authority
- TW
- Taiwan
- Prior art keywords
- braking
- movable table
- magnet
- magnetic
- electromagnetic
- Prior art date
Links
Landscapes
- Machine Tool Units (AREA)
- Non-Mechanical Conveyors (AREA)
Abstract
A movable table, which supports the processed articles, allows the movement towards any direction in a plane caused by a table-holding mechanism. In addition, said movable table offers a transport in said plane by means of an electromagnetic driving means. In addition, said movable table is stopped at any position in said plane by means of an electromagnetic braking mechanism. In said electromagnetic driving means, the transport of said movable table is occurred by means of a mutually magnetic interaction between the driven magnet and the driving coil. Said electromagnetic braking mechanism includes a braking magnet and a non-magnetic, conductive braking plate. In the combination of said braking magnet and said braking plate, the braking force is occurred based on the magnetic action between the magnetic force of said braking magnet and the magnetic force caused by the eddy current occurred in the braking plate accompanied with the movement of the movable table.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002065069A JP4139608B2 (en) | 2002-03-11 | 2002-03-11 | Precision machining stage equipment |
JP2002071994A JP4139612B2 (en) | 2002-03-15 | 2002-03-15 | Precision machining stage equipment |
JP2002221545 | 2002-07-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI220875B TWI220875B (en) | 2004-09-11 |
TW200510108A true TW200510108A (en) | 2005-03-16 |
Family
ID=34139353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92124873A TWI220875B (en) | 2002-03-11 | 2003-09-09 | Stage equipment for precision processing |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI220875B (en) |
-
2003
- 2003-09-09 TW TW92124873A patent/TWI220875B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI220875B (en) | 2004-09-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |