TW200505064A - Laminated piezoelectric actuator and its manufacturing method - Google Patents

Laminated piezoelectric actuator and its manufacturing method

Info

Publication number
TW200505064A
TW200505064A TW092120641A TW92120641A TW200505064A TW 200505064 A TW200505064 A TW 200505064A TW 092120641 A TW092120641 A TW 092120641A TW 92120641 A TW92120641 A TW 92120641A TW 200505064 A TW200505064 A TW 200505064A
Authority
TW
Taiwan
Prior art keywords
piezoelectric
manufacturing
substrate
electrode layer
layer
Prior art date
Application number
TW092120641A
Other languages
Chinese (zh)
Other versions
TWI225316B (en
Inventor
Sheng-Li Tu
Chih-Ming Chen
Original Assignee
Nanodynamics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanodynamics Inc filed Critical Nanodynamics Inc
Priority to TW092120641A priority Critical patent/TWI225316B/en
Application granted granted Critical
Publication of TWI225316B publication Critical patent/TWI225316B/en
Publication of TW200505064A publication Critical patent/TW200505064A/en

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

A laminated piezoelectric actuator and its manufacturing method are disclosed in the present invention. By using the halftone printing method and the vibration plate as the substrate, the electrode layer and the piezoelectric layer are halftone printed repeatedly on the substrate surface to form the laminated structure having the required number of layers. Then, an upper electrode layer is printed on the surface of the most top piezoelectric layer through a halftone printing-manner. After that, the electrode layer, the piezoelectric layer and the substrate are sintered together. By using the halftone printing technique, the laminated piezoelectric structure with various combinations and shapes can be manufactured. In addition, the piezoelectric layer is made to have a sufficient thickness to lower its driving voltage and increase the amount of actuating movement.
TW092120641A 2003-07-29 2003-07-29 Laminated piezoelectric actuator and its manufacturing method TWI225316B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW092120641A TWI225316B (en) 2003-07-29 2003-07-29 Laminated piezoelectric actuator and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW092120641A TWI225316B (en) 2003-07-29 2003-07-29 Laminated piezoelectric actuator and its manufacturing method

Publications (2)

Publication Number Publication Date
TWI225316B TWI225316B (en) 2004-12-11
TW200505064A true TW200505064A (en) 2005-02-01

Family

ID=34568445

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092120641A TWI225316B (en) 2003-07-29 2003-07-29 Laminated piezoelectric actuator and its manufacturing method

Country Status (1)

Country Link
TW (1) TWI225316B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI450426B (en) * 2010-09-09 2014-08-21 Microjet Technology Co Ltd Manufacturing method of piezoelectric actuator moduleand piezoelectric inkjet print head using the same
TWI477387B (en) * 2010-12-15 2015-03-21 Univ Nat Cheng Kung Composite film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10119932B2 (en) * 2014-05-28 2018-11-06 Honeywell International Inc. Electrochemical gas sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI450426B (en) * 2010-09-09 2014-08-21 Microjet Technology Co Ltd Manufacturing method of piezoelectric actuator moduleand piezoelectric inkjet print head using the same
TWI477387B (en) * 2010-12-15 2015-03-21 Univ Nat Cheng Kung Composite film

Also Published As

Publication number Publication date
TWI225316B (en) 2004-12-11

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MM4A Annulment or lapse of patent due to non-payment of fees