TW200504854A - Retaining ring for wafer polishing - Google Patents
Retaining ring for wafer polishingInfo
- Publication number
- TW200504854A TW200504854A TW092120835A TW92120835A TW200504854A TW 200504854 A TW200504854 A TW 200504854A TW 092120835 A TW092120835 A TW 092120835A TW 92120835 A TW92120835 A TW 92120835A TW 200504854 A TW200504854 A TW 200504854A
- Authority
- TW
- Taiwan
- Prior art keywords
- polishing
- ring
- plural
- base ring
- retaining ring
- Prior art date
Links
Abstract
The retaining ring of this invention for wafer polishing consists of a polishing ring and a base ring. The polishing ring is composed by plural polishing slices that are arranged to be a ring shape with equal angle. Through designing, a trench can be formed between two neighbored polishing slices to quickly drain the polishing slurry. According to the rotation orientation of the polishing head and polishing pad, the trenches can be clockwise inclined from the inside to the outside to follow the flow direction of the polishing slurry. The base ring is fixed on the polishing ring. There are plural screw holes on the base ring to fix the polishing head. In the radial direction of the base ring, plural through holes can be installed for water or gas draining.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW092120835A TW200504854A (en) | 2003-07-30 | 2003-07-30 | Retaining ring for wafer polishing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW092120835A TW200504854A (en) | 2003-07-30 | 2003-07-30 | Retaining ring for wafer polishing |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200504854A true TW200504854A (en) | 2005-02-01 |
Family
ID=57798213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092120835A TW200504854A (en) | 2003-07-30 | 2003-07-30 | Retaining ring for wafer polishing |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200504854A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103659548A (en) * | 2013-12-06 | 2014-03-26 | 清华大学 | Polishing head |
-
2003
- 2003-07-30 TW TW092120835A patent/TW200504854A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103659548A (en) * | 2013-12-06 | 2014-03-26 | 清华大学 | Polishing head |
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