200425602 玖、發明說明： 【發明所屬之技術領域】 本發明係有關雷射光合波裝置，詳言之，係有關把由複數 個半導體雷射射出的各雷射光束所構成之全體光束作收斂 以入射到光纖之雷射光合波裝置。 【先前技術】 自以往就知悉，使被排列於1方向之複數個半導體雷射所 射出的雷射光之各光束透過準直透鏡而成爲具有排列於1方 向之相互平行的光軸之平行光束，使如此排列的各光束全體 Φ 集光而入射至1條光纖且使能量密度高的雷射光在光纖中傳 播之手法（例如，專利文獻1)。 在上述手法中，把複數個半導體雷射所射出之雷射的各光 束合波於1條光纖中之際的效率（結合效率）係例如爲90%的 高，入射至光纖之光束的入射角係受此光纖的數値孔徑 (numerical aperture)(例如數値孔徑N A = 0.2)所限制，所以 可合波之光束的數量係受限制。亦即，合波於光纖中之雷射 光的屈光力（power)爲受上述數値孔徑所限制。 春 又，在產生具有相互平行的光軸之複數雷射光之手法方面 ，可知係有使用被排列在同一基板上的1方向之複數個半導 體雷射之手法，如此配置之各半導體雷射係活性層排列在同 一平面上，所以由上述複數個半導體雷射所射出之各光束係 成爲在同一平面上具有相互平行的遲軸（X軸）者。有時將如 此構成之複數個半導體雷射稱爲雷射長條（LASER BARS)。 此外，與上述遲軸的方向成正交之上述活性層的厚度方向係 200425602 成爲上述光束之速軸（Y軸）的方向。 在由上述光纖的數値孔徑所決定之入射角的範圍內使更 多的雷射光束集光以合波至此光纖中之方式而言，可知有如 下之合波方式。第20(a )圖係由上方看雷射光合波裝置之平 面圖，第20(b )圖係由光束的光軸方向看雷射光合波裝置之 左側面圖，第21圖係說明收斂角之圖，第2 1 ( a )圖係表示 由各光束所構成之全體光束要收斂之樣態圖，第2 1 ( b )圖係 表示全體光束之遲軸方向的光強度分布圖。 上述合波方式係，使排列於圖中箭頭Y方向之由複數的半 導體雷射1 A，1 B，1 C，…所成之雷射長條1所射出之與 上述Y方向正交之Z方向的各光束La、Lb、Lc…所成 的全體光束，令其通過後述的圓柱形透鏡2之後，通過收斂 光學系6而使遲軸方向（圖中箭頭S所示方向，在此與Y方 向一致）之寬度變狹窄般地使上述全體光束以收斂角oc91作 收斂，使此全體光束於位在重定向系統7上之Y Z平面，收 斂爲成爲1點的集光位置P j ，亦即，在屬於重定向系統7 上之圖中箭頭X方向（速軸方向，圖中箭頭F所示）延伸之線 狀領域之上述集光位置P j中之互異的位置，使構成此全體 光束之各光束作收斂。接著，依此重定向系統7使各光束的 光軸之方向成爲相互平行，同時使從速軸方向（圖中箭頭F所 示方向，在此與X方向一致）看時之各光束La 、Lb 、 L c…的光軸成爲一致，使上述各光束自此重定向系統7射 出。其後，使上述各光束所成的全體光束通過集光光學系3 而將此全體光束以收斂角α92(在此，α92<α91)作收斂而入 200425602 射至光纖4的芯部5之方式。如此，使更多的光束合波於1 條光纖中之手法（例如，專利文獻2)係爲已知。 此外，上述收斂角係如下所說明者。 亦即’如第2 1 ( a )，（ b )圖所示，特定的位置，在此以第 21(a)圖中的位置（Y p，Z p)爲基準，求取正收斂之全體 光束的遲軸方向（Y方向）之光強度分布（參照第21(b)圖）。 在此光強度分布中求取在此光強度分布之成爲光強度之最 大値Pm a X的0.1%之強度的位置，其中，決定此全體光 束之遲軸方向（Y方向）的成爲最外側之兩端的位置y 1，y 2 。然後求位置y 1與位置y 2之間隔φ。 又，求取位置（Υ ρ，Ζ ρ)到上述全體光束之集光位置ρ j爲止之光軸方向（Ζ方向）的距離L。 在此，收斂角α可由如下決定， t a η(α/2)=(φ/2)/ί=φ/2ί 上述重定向系統7，例如，可於圖中箭頭χ方向（速軸方向 )中使厚度薄的複數個鏡在速軸方向疊層形成，使由上述收 斂光學系6所收斂之在上述χ方向中相互位置不同的各光束 L a、L b、L c…各自入射至上述疊層的鏡當中之指定的 1個鏡，係在各鏡使各光束的光軸於上述速軸方向看呈一致 者。以後，由速軸方向觀察係稱之爲速軸方向看，由遲軸方 向觀察則稱之爲遲軸方向看。 更具體言之，於雷射長條1中，由形成於同一平面上之複 數之活性層8 A、8 B、8 C、…各自所射出於同一方向之、 在同一平面上具有相互平行的遲軸之各雷射光束L a 、L b 200425602 、L c…係通過相對於上述遲軸傾斜配置有圓柱形軸（於圓柱 形透鏡延伸之方向所決定的軸）的圓柱形透鏡2，在各光束 L a、L b、L c…之遲軸爲保持著相互平行的狀態，使各 光束於速軸方向偏移於互異的位置，將此既偏移的各光束通 過收斂光學系6而入射於重定向系統7。亦即，使得在速軸 方向被圓柱形透鏡2偏移在互異的位置之各光束L a、L b 、L c…所成的全體光束，通過收斂光學系6而使遲軸方向 的寬度變狹窄般地收斂，同時使各光束La、Lb、Lc... 收斂於遲軸方向及速軸方向，而於速軸方向互異的位置，朝 上述重定向系統7入射。此外，雷射長條1係配置在塊部9 上。 在此，各光束L a、L b、L c…係利用收斂光學系6， 從速軸方向看（亦即，於圖中Y Z平面），各光束的光軸係相互 在集光位置P j交叉般，且各光束爲在上述集光位置P j集 光般地被收斂。 以下，詳細說明各光束L a、L b、L c…通過重定向系 統7而入射至光纖4之樣態。 第22圖係表示把重定向系統近傍之光束的光軸及輪廓予 以放大之平面圖，第23圖係表示由第20圖或第22圖中之 箭頭G方向看到的重定向系統近傍之光束的光軸及輪廓之 放大圖，第24圖係沿著光束之傳播方向來看配置在指定位 置之後述的重定向系統所射出的各光束及入射於光纖之各 光束的狀態圖，第24( a )圖係表示由重定向系統所射出之各 光束的狀態圖，第24(b )圖係表示入射至光纖之各光束的狀 200425602 態圖’第2 5圖係沿著光束之傳播方向來看上述重定向系統 配置在離開指定的位置的場合時之光束的狀態圖，第25 ( a ) 圖係表示由重定向系統所射出之光束的狀態圖，第25( b ) 圖係表示入射於光纖之光束的狀態圖。另外，在第22圖及 第23圖中僅表示光束La及光束Lc，其他的光束Lb、 光束Ld、及光束Le的圖示係省略。 如第22，23圖所示，上述全體光束係，上述集光位置 P j位在重定向系統7上，各光束的收束腰（BEAM WAIST) B .w之位置也位在重定向系統7上般地被收斂。然後，重定 向系統7係，從速軸方向看，爲使各光束的光軸一致般地改 變各光束之光軸的方向，同時各光束之光軸的方向係成相互 平行，由此重定向系統7射出各光束。其後，由重定向系統 7所射出之各光束係會一邊發散一邊傳播，但是利用集光光 學系3再度被集光而入射至光纖4的芯部5。 此外，如上述般，當重定向系統7配置在指定位置之場合 ，在速軸方向看，此重定向系統7所射出之各光束的光軸係 一致，如第24( a )圖所示，各光束在速軸方向作直線狀排列 ，入射至光纖4之各光束也在如第24(b)圖所示速軸方向之 直線上排列。 相對地，當重定向系統7爲自指定位置往Z方向偏離配置 之場合，如第25( a )圖所示，從速軸方向看，由重定向系統 7所射出之各光束的光軸係偏離，各光束並未在速軸方向作 直線狀排列，入射於光纖4之各光束也如第25 ( b )圖所示， 因爲未在速軸方向直線狀排列之下造成偏離，所以如上述， 200425602 與各光束爲在速軸方向作直線狀排列的場合相較之下，在較 之於光纖4的端面還大徑的範圍，亦即會入射於偏離芯徑外 的範圍。因此，全體光束對上述光纖4之結合效率降低。因 此，爲抑制此結合效率的降低，係要求使重定向系統7正確 地配置在Z方向中之指定位置。 如同上述般，有必要使重定向系統自體在複數個收束腰匯 集之非常小的領域上高精度地定位而作固定，同時需要配合 在上述集光位置之各光束的形狀而小型且高精度地製作，此 重定向系統係製造困難。又，收束腰之尺寸係與波長成比例 ，所以伴隨著近年來之雷射光源的短波長化，當上述尺寸變 小則重定向系統之高精度固定與小型化更加成爲必要，使得 製造難度漸漸變大。 【專利文獻1】日本專利特開平2002 - 202442號公報 【專利文獻2】美國專利第6462883B 1號說明書 【發明內容】 但是，上述雷射光合波裝置因爲難以實現小型且高輸出之 半導體雷射，因而有所謂的使複數個半導體雷射所射出的雷 射光合波以獲得大輸出（高能量密度）的雷射光束、且欲使裝 置尺寸小型化之強烈.的要求。亦即，具有所謂的欲獲得例如 藉由在不使合波的雷射光輸出降低之下使裝置尺寸小型化 ，且可獲得相應於裝置尺寸之大輸出的雷射光合波裝置的強 烈的要求。 然而，如上述，將由複數個半導體雷射所射出而偏移之各 光束所構成的全體光束使之收斂，再透過重定向系統使得各 200425602 光束之傳播方向一致之後，再利用集光光學系使各光束收斂 以入射到光纖，在此種合波方式中，從半導體雷射到光纖爲 止之上述各光束傳播的光路變長，且在上述光路中配置有使 各光束偏移的透鏡及使全體光束收斂的透鏡等、及多數的光 學構件，而具有造成所謂裝置尺寸大型化的問題。且，在上 述方式中，也具有伴隨著光源之短波長化，在收束腰上有必 要再設置小型且高精度之重定向系統的困難問題。 又，當由複數個半導體雷射所射出之各光束，通過相對於 此等光束之遲軸方向具傾斜圓柱形軸之圓柱形透鏡而使之 鲁 偏移時，則通過圓柱形透鏡的周緣部之光束的像差變大，具 有此種大的像差之光束係變難以正確地收斂（例如，變得難 以正確地入射於1條直徑50μιη之光纖的芯部），具有結合效 率降低爲例如60%程度之問題。特別是在爲了獲得具高能量 密度之雷射光，而使用配置多數半導體雷射所成之雷射長條 以將多數光束合波在光纖中之場合，因爲雷射長條因應合波 光束的數量而變長而有必要將上述偏移量.設大，所以距離通 過圓柱形透鏡之中心遠的位置（圓柱形軸方向之端部）之光 ® 束的像差增大，成爲難以獲得高結合效率。 且在上述任一場合也具有所謂的可合波於1條光纖中之雷 射光的入射範圍係受限於光纖的數値孔徑Ν Α之問題。 本發明係有鑑於上述事情所成者，爲提供一小型且高輸出 之雷射光合波裝置爲目的者，更詳言之，本發明之第1目的 係使裝置尺寸小型化，依此提供一相較於裝置尺寸爲大輸出 的雷射光合波裝置，本發明之第2目的係提供一伴隨著合波 -11- 200425602 光束之數量的增加而可抑制對上述光束的光纖結合效率降 低之雷射光合波裝置。 【解決課題之手段】 本發明之雷射光合波方法爲，使複數之半導體雷射所射出 之複數之光束各自於速軸方向偏移於互異的位置，且使前述 複數之光束的各光軸在速軸方向看係收斂，且使前述複數之 光束各自在遲軸方向及速軸方向收斂並且入射至光纖的端 面之雷射光合波方法，其特徵爲：於該速軸方向看係被收斂 之各光束的光軸其在速軸方向看爲相互交叉的位置當中之 _ 最上游側之位置，在其位置之更上游側配置收斂角變換光學 系，使得該速軸方向看係被收斂之由各光束所成之全體光束 通過該收斂角變換光學系，使該各光束所成的全體光束或一 部份之光束在速軸方向看之收斂角爲更小的收斂角且使此 全體光束入射至光纖的端面。 本發明之第1發明的雷射光合波裝置爲，具備有複數之半 導體雷射，且係使從複數之半導體雷射射出之複數之光束各 自偏移於速軸方向之互異的位置，同時使該複數之光束的各 # 光軸在速軸方向看係爲收斂，再者，使該複數之光束各自收 斂於遲軸方向及速軸方向而入射至光纖的端面，其特徵爲： 具備收斂角變換光學系，其配置於，在該速軸方向看爲被收 斂之各光束的光軸所位在於速軸方向看係相互交叉的位置 當中之最上游側的位置還上游側，該收斂角變換光學系係使 該各光束所成的全體光束在速軸方向看之收斂角爲更小的 收斂角且使該全體光束入射至光纖的端面。 -12- 200425602 上述雷射光合波裝置較佳爲，具備有使從該複數之半導體 雷射射出之各光束收斂於遲軸方向及速軸方向之光束收敛 裝置，該光束收斂裝置係使該光束收斂裝置所射出之各光束 在遲軸方向看之射出角爲較之於各光束由該半導體雷射射 出時在光束之遲軸方向看之放射角還小者。 由前述複數之半導體雷射各自所射出之光束的波長係可 設定爲350nm以上，460nm以下。使用有用以射出這些短 波長的光束之複數個半導體雷射之雷射光合波裝置係可使 合波之雷射光的集光點（SPOT)設小，亦即因爲可提高雷射光 籲 之能量密度，所以適用在雷射加工。 使由前述複數之半導體雷射射出的複數之光束各自於速 軸方向偏移在互異的位置之方式，係也可以爲使複數之半導 體雷射射出的複數之光束各自通過光學系而偏移的方式，或 ，也可以爲使複數之半導體雷射配置成，此等之半導體雷射 各自的活性層之位置係成爲在該活性層之厚度方向互異的 位置，使複數之半導體雷射射出的複數之光束各自於速軸方 向，在互異的位置偏移之方式。 · 使前述複數之光束的各光軸在速軸方向看呈收斂的方式 ，係也可爲使上述複數之光束各自通過光學系而收斂的方式. ，或，也可以爲將上述複數之半導體雷射配置成，由此等半 導體雷射射出時之各光束的光軸在速軸方向看係呈收斂，且 使前述複數之光束的各光軸在速軸方向看係呈收斂之方式。 前述上游側係在光束之傳播方向的上游側，亦即意味著光 束傳播的光路之光源側（半導體雷射之側）。 -13- 200425602 前述所謂的速軸方向看係意味著由速軸方向觀察，而所謂 的遲軸方向看係意味著由遲軸方向觀察。 前述收斂角爲，從速軸方向看收斂之全體光束的場合中， 此全體光束看收斂方向之角度。此外，此收斂角係以上述說 ' 明之第21圖所示的角度α來表示。 本發明之第2雷射光合波裝置爲，具備雷射塊、收斂分散 光學系、以及收斂角變換光學系，該雷射塊爲，複數之半導 體雷射係配置成該半導體雷射各自的活性層在同一平面上 排列，且將在該同一平面上具有相互平行的遲軸之各光束予 籲 以射出者，該收斂分散光學系係由對應該複數個半導體雷射 所射出之各光束而配置之各收斂分散個別透鏡所成，爲使各 光束所成的全體光束在該遲軸方向之寬度變狹窄般地收斂 ，同時使各光束各自在速軸方向偏移到互異的位置，且，使 各光束各自收斂於該各光束之遲軸方向及速軸方向，使各光 束各自在該各光束的速軸方向於互異的指定位置入射至該 收斂角變換光學系者，該收斂角變換光學系爲，各光束的光 軸被配置於比自速軸方向看爲相互交叉的位置當中之最上 ® 游側之位置還上游側，使該全體光束的收斂角爲比由該收斂 分散光學系射出時之全體光束的收斂角還更小的收斂角，且 使此全體光束入射至光纖者。 前述收斂分散光學系係可以作爲對應各光束而配置之收 斂分散個別透鏡，其兼備有：使前述各光束各自於速軸方向 的互異的位置偏移之機能；及使前述各光束所成的全體光束 在前述遲軸方向之寬度變狹窄般地收斂，同時使各光束各自 -14- 200425602 收斂於該各光束的遲軸方向及速軸方向之機能。 前述收斂分散個別透鏡係截斷型的透鏡者爲佳。 前述收斂分散光學系係可由如下所構成：偏移光學系，具 備有使對應前述各光束而配置之該各光束各自偏移於速軸 方向之互異的位置之機能；集光光學系，使該偏移光學系所 射出之各光束所成的全體光束令其在遲軸方向之寬度變狹 窄般地收斂，同時使各光束各自收斂於該各光束的遲軸方向 及速軸方向，使各光束於該各光束的速軸方向，在互異的指 定的位置，入射至前述收斂角變換光學系之機能。 鲁 前述偏移光學系係截斷型的透鏡者爲佳。 前述複數個半導體雷射可各自設定爲相互分離。 前述複數個半導體雷射係可以爲，複數個半導體雷射當中 至少2個以上相互地連接之一體化者。 且，前述收斂分散光學系與收斂角變換光學系之角色並不 受限於被完全分離之場合，也可設定爲兼用相互之機能的一 部份。例如，收斂角變換光學系也可以爲，具有使上述光束 在速軸方向之寬度變狹窄般地收斂，或使遲軸方向之寬度變 魯 狹窄般收斂之收斂分散光學系的機能之一部份者。 本發明之第3雷射光合波裝置爲，具備有雷射塊、全體收 斂光學系、以及收斂角變換光學系，該雷射塊，係複數之半 導體雷射配置成，該半導體雷射各自之活性層係成爲平行， 且，各自之活性層的位置爲於該活性層之厚度方向成爲互異 的位置，用以把具有相互平行的遲軸之各光束予以射出者， 該全體收斂光學系係使該複數之半導體雷射所射出之遲軸 -15- 200425602 爲相互平行的各光束所成之全體光束，在該遲軸方向之寬度 變狹窄般地收斂，同時使各光束各自收斂於該各光束的遲軸 方向及速軸方向，使各光束各自於該各光束的速軸方向’在 互異的指定的位置，入射至該收斂角變換光學系者，該收斂 角變換光學系爲，各光束的光軸被配置於比自速軸方向看爲 相互交叉的位置當中之最上游側之位置還上游側，使該全體 光束的收斂角爲比由該收斂分散光學系射出時之全體光束 的收斂角還更小的收斂角，且使此全體光束入射至光纖者。 前述全體收斂光學系，係可作爲使由前述半導體雷射射出 鲁 之各光束所成的全體光束，直接在遲軸方向之寬度變狹窄般 地收斂，同時使各光束各自收斂於該各光束的遲軸方向及速 軸方向，使各光束各自於該各光束的速軸方向，在互異的指 定的位置入射至前述收斂角變換光學系者。 前述全體收斂光學系係截斷型的透鏡爲佳。 前述全體收斂光學系係可由如下所構成··準直（collimate) 光學系，對應各光束而配置，用以使各光束各自成爲平行光 束；集光光學系，使前述平行光束之全體在前述遲軸方向之 · 寬度變狹窄般地收斂，同時使各光束各自收斂於該各光束的 遲軸方向及速軸方向，使各光束各自於該各光束的速軸方向 ，在互異的指定的位置入射至前述收斂角變換光學系。 前述準直光學系係截斷型的透鏡者爲佳。 此外，前述全體收斂光學系，及收斂角變換光學系的機能 不限於被完全地分離的場合，也可設定爲收斂角變換光學系 兼用全體收斂光學系之機能的一部份。例如，收斂角變換光 -16 - 200425602 學系也可以爲具有使上述光束在遲軸方向的寬度變狹窄般 地收斂的機能者。 本發明之第4雷射光合波裝置，其特徵爲具備：雷射塊， 係複數之半導體雷射係配置成，該半導體雷射各自之活性層 係成爲平行，且，各自之活性層之位置係於該活性層的厚度 方向成爲互異的位置，用以射出具有相互平行的遲軸及相互 平行的光軸之各光束；準直光學系，係令從該複數之半導體 雷射射出的各光束各自爲平行光束；光軸移位光學系，使通 過該準直光學系的各光束移位於該各光束之遲軸的方向，且 鲁 使各光軸排列於與遲軸正交之1平面上；收斂光學系，依該 光軸移位光學系使光軸爲排列於前述1平面上之由各光束所 成之全體光束收斂於該光束的遲軸方向及速軸方.向且入射 於光纖。 前述準直光學系係截斷型的透鏡爲佳。 此外，前述準直光學系，光軸移位光學系，及收斂光學系 的角色並不限於完全被分離的場合，也可設定爲兼用相互之 機能的一部份。例如，光軸移位光學系可以爲具有使上述光 鲁 束在速軸方向的寬度變狹窄般地收斂之機能的一部份者，或 ，準直光學系也可以爲具有使上述光束在遲軸方向的寬度變 狹窄般地收斂之機能的一部份者。 前述雷射光合波裝置係具備有：不同於前述複數之半導體 雷射之其他的半導體雷射；偏光合波裝置，係在由該複數之 半導體雷射所射出的光束入射於該光纖之前的該光束的光 路中，使從該複數之半導體雷射射出的光束和從前述其他的 -17- 200425602 半導體雷射射出的光束作偏光合波，且使從前述其他的半導 體雷射射出的光束也入射至前述光纖。 前述偏光合波係利用偏光的性質而使偏光方向互異之各 光束合波者。 前述雷射光合波裝置係具備有：不同於前述複數之半導體 雷射之其他的半導體雷射；波長合波裝置，係在由該複數之 半導體雷射所射出的光束入射於該之前的該光束的光路中 ，使從該複數之半導體雷射射出的光束和從前述其他的半導 體雷射射出的光束作波長合波，且使從前述其他的半導體雷 鲁 射射出的光束也入射至前述光纖。 前述波長合波係利用波長的差異而使具有互異的波長之 各光束合波者。 前述雷射光合波裝置係可爲利用入射至光纖且合波於該 光纖中之各光束所成的合波光，以激發固體雷射之媒質或光 纖雷射之媒質者。 前述雷射光合波裝置係可爲利用由收斂角變換光學系所 射出之全體光束，以直接激發固體雷射之媒質或光纖雷射之 ® 媒質者。 令前述合波光爲紅外光，前述媒質可爲包含有稀土類元素 N d3+，稀土類元素Yb3 +當中之至少1個者。 令前述合波光的波長設爲350n m以上，460n m以下，前 述媒質可爲包含有稀土類元素P r3+，稀土類元素E r3+， 稀土類元素Η 〇3 +當中至少1個者。 前述所謂的「使各光束各自偏移於速軸方向之互異的位置 -18 - 200425602 」，係意味著從遲軸方向看該各光束的光軸，各光束係各自 位在互異的位置。 所謂的前述截斷型之透鏡係意味著，在要把複數之透鏡排 列配置在與透鏡的光軸交叉的場合時，使透鏡排列方向之各 透鏡的尺寸從圓形之狀態塡滿上述透鏡排列方向而在一定 尺寸內配置多個透鏡。 前述收斂角變換光學系係可爲具有反射面，折射面，格柵 ，photonics結晶（將介電體作三次元配置的人工格子）等當中 任一者。例如，此收斂角變換光學系爲，在把使上述各光束 入射的厚度薄的複數個稜柱予以疊層的場合，可在各稜柱形 成反射面、折射面、或格栅面而構成收斂角變換光學系，將 各稜柱以photonics結晶形成而構成收斂角變換光學系。 【發明效果】 依本發明之雷射光合波方法及第1雷射光合波裝置，於速 軸方向看爲被收斂之各光束的光軸從速軸方向看係位在相 互交叉的位置當中之最上游側的位置，在其更上游側配置收 斂角變換光學系，而使於速軸方向看爲被收斂之各光束所成 的全體光束通過上述收斂角變換光學系，使各光束所成的全 體光束或一部份的光束之在速軸方向看的收斂角爲更小的 收斂角，且使此全體光束入射至光纖的端面，所以與以往相 較下係使屬於重定向系統的上述收斂角變換光學系更近光 源側，亦即可使之位在半導體雷射之側，同時可讓能合波於 1條光纖中之光束的數量增加，且，變得不用像以往在重定 向系統之下游側配置使光束收斂的光學系等，所以可縮短自 -19- 200425602 射出光束的半導體雷射到使此光束入射至光纖爲 長，且可使裝置小型化。依此，可提供小型且高輸 光合波裝置。 亦即，例如，如表示上述雷射光合波方法及第1 波裝置的槪略構成之平面圖第26(a )圖，及正面圖 圖所示，利用偏移裝置92使由複數之半導體雷射《 各光束L a、L c、L e偏移’於利用收敛光學系 收斂且通過收斂角變換光學系94而入射至光纖95 雷射光合波裝置90中，由收斂光學系93所收斂 L a、L c、L e的光軸從速軸方向看係位在相互 置當中之最上游側的位置P k，在其更上游側係配 角變換光學系94。 在此，於以往的方式，各光束的光軸係被決定成 的位置會與收束腰的位置一致，上述各光束的光軸 且重定向系統爲受限於被配置在成爲各光束的收 定的位置，與其場合相較之下，於本發明中，因爲 收斂角變換光學系94配置在收斂光學系93與上述 間之光軸方向（圖中箭頭Z軸方向）的任意位置，所 以往’可使裝置小型化，同時提高在製作裝置之際 置的自由度。 例如，在使用大型且製作容易之收斂角變換光學 的場合，於上述收斂光學系與光纖之間的上游側之 的間隔係變寬的位置上配置收斂角變換光學系，一 使用小型且製作精度高的收斂角變換光學系爲較 止的光路 出的雷射 雷射光合 第 26(b ) 9 1射出之 :93使之 之端面的 之各光束 交叉的位 置有收斂 相互交叉 係交叉， 束腰之指 可將上述 位置P k 以相較於 的零件配 系爲較佳 各光束間 方面，在 佳之場合 -20- 200425602 ，可於收斂光學系與光纖之間的下游側之各光束間的間隔變 窄的位置上配置收斂分散光學系。此外，若依上述以往的方 式，則可使用之收斂角變換光學系係限定爲小型且製作精度 高者。 又，由左側面（第26( a )圖之箭頭Z方向）看第26( c )圖之 通過收斂角變換光學系之光束的樣子之圖可知，通過收斂角 變換光學系中之光束並未在速軸方向作直線狀排列，所以各 光束間之間隔大，依此，此收斂角變換光學系之製作的自由 度增大且製作變容易。 鲁 又，光束收斂裝置若使此光束收斂裝置所射出之各光束其 在遲軸方向看的射出角、比由半導體雷射射出時之上述各光 束各自所對應的光束在遲軸方向看的放射角還小的話，則可 使入射至光纖之光束的入射角設小，因爲可將要入射到由光 纖的數値孔徑N A所決定的入射範圍內之光量設多，所以可 增大合波於此光纖中之光的光量。 又，在複數個半導體雷射各自所射出之光束的波長爲 350n m以上，460n m以下的場合時，可使用於裝置之光學 _ 構件係明顯受限定，所以在使用此限定的光學構件之際，提 高製作上述裝置之際的部品配置之自由度而可獲得容易·製 作裝置之顯著效果。又，使用有用以將這些短波長的光束予 以射出之複數個半導體雷射的雷射光合波裝置，係能使合波 的雷射光之集光點作小，亦即可提高雷射光之能量密度，所 以適合雷射加工。 關於下述第2雷射光合波裝置，在以此等半導體雷射各自 -21- 200425602 的活性層爲在同一平面上排列般地配置複數之半導體雷射 ，且具備有用以射出在同一平面上具有相互平行的遲軸之各 光束的雷射塊之雷射光合波裝置中，本發明者係對於將上述 裝置尺寸予以小型化的課題，針對使各光束合波之際使光路 長縮短的方式作了種種檢討的結果，係獲得了可把使上述各 光束偏移的機能或使各光束及全體光束收斂的機能等之複 數機能讓單一的光學構件具備之想法，之後再依這種想法以 達成此第2雷射光合波裝置的發明。 本發明之第2雷射光合波裝置，係具備有使全體光束之速 籲 軸方向看的收斂角設爲更小的收斂角且使此全體光束入射 至光纖的收斂角變換光學系，因爲使此收斂角變換光學系配 置在比各光束的光軸於速軸方向看相互交叉的位置當中之 最上游側的位置還要上游側的位置，所以與上述第1雷射光 合波裝置之場合同樣地，可獲得小型且高輸出的裝置，此外 ，若收斂分散光學系係由兼備有此收斂分散光學系所包含之 準直光束之機能、使光束偏移之機能、使各光束收斂之機能. 、及使各光束的光軸收斂之機能等當中之複數個機能的光學 · 系所構成，則可縮短光路長，可使裝置更加小型化。 又，當收斂分散光學系作爲兼備有使各光束各自偏移於速 軸方向之互異的位置之機能、及使前述各光束所成的全體光 束在遲軸方向之寬度變狹窄般地收斂，同時使各光束各自收 斂於該各光束的遲軸方向及速軸方向等兩種機能之收斂分 散個別透鏡時，則可在未個別地備有使各光束偏移之光學系 和使各光束收斂的光學系之下，可使從半導體雷射射出的光 -22- 200425602 束合波於光纖中，所以能更確實地縮短光路長且可使減少配 置在光路中之光學構件等。依此可使裝置可確實地小型化。 又，收斂分散光學系若爲以如下所構成者的話，則可在未 個別地備有使各光束的光軸收斂之光學系和使各光束各自 收斂的光學系之下，可使從半導體雷射射出的光束合波於光 纖中，所以能更確實地縮短光路長且可使減少配置在光路中 之光學構件等。依此可使裝置確實地小型化。該構成爲：偏 移光學系，對應各光束而配置且具備使該各光束各自偏移於 速軸方向之互異的位置之機能；集光光學系，具備有使偏移 鲁 光學系所射出之各光束所成的全體光束在遲軸方向之寬度 變狹窄般地收斂，同時使各光束各自收斂於該各光束的遲軸 方向及速軸方向，且使各光束於該各光束的速軸方向在互異 的之指定的位置入射至收斂角變換光學系之機能。 再者，當把收斂分個別透鏡作成截斷型之透鏡，或把偏移 光學系作成截斷型之透鏡時，則因爲恰好可使具有遲軸方向 的直徑爲小、速軸方向的直徑爲大的楕圓形狀斷面之上述各 光束通過此截斷型之透鏡，所以可使各光束有效率地通過透 鲁 鏡，且因爲可塡滿各光束間的間隔，所以裝置更小型化且輸 出可更加提高。 再者，前述複數個半導體雷射若各自爲相互分離者，則藉 由半導體雷射之位置調節而可實施半導體雷射和光學系之 調芯，因爲光軸調節之自由度增大，所以上述調芯係變容易 ’各光束對光纖之結合效率可更加提高。連帶地，可抑制由 半導體雷射發生的熱對其他的半導體雷射之影響，可使半導 -23- 200425602 體雷射之振盪穩定。 又，當複數之半導體雷射當中之至少2個以上爲相互連接 之一體化者時，則可構成爲將半導體雷射作爲雷射長條，可 提高半導體雷射之組裝密度。 本發明之第3雷射光合波裝置係具備有使全體光束之在速 軸方向看的收斂角收斂爲更小的收斂角且使此全體光束入 射至光纖之收斂角變換光學系，因爲使此收斂角變換光學系 配置於比各光束的光軸在速軸方向看係位於相互交叉的位 置當中之最上游側位置還上游側，所以與上述第1雷射光合 波裝置之場合同樣地可獲得小型且高輸出的裝置，而且，複 數之半導體雷射係具備有，該半導體雷射各自的活性層成爲 平行，且，各自的活性層位置係於該活性層厚度方向成爲互 異的位置般配置之，用以射出具有相互平行的遲軸的各光束 之雷射塊，所以在未使用例如，把圓柱形透鏡對遲軸方向傾 斜插入等之使光束像差增大那樣的手段之下，遲軸係相互平 行且於速軸方向，相互的位置係不同，亦即可在不使各光束 的像差劣化之下生成在速軸方向偏移之各光束，可與上述偏 移量無關地將像差少的各光束正確地導入光纖，可抑制合波 光束之數量增加所伴隨之對各光束的光纖之結合效率的降 低。再者，因爲可省略用以使由複數之半導體雷射所射出的 光束偏移的光學系，所以能使裝置小型化。 又，全體收斂光學系若使半導體雷射所射出之由各光束所 成的全體光束，直接在遲軸方向之寬度變狹窄般地收斂，同 時使各光束各自收斂於該各光束的遲軸方向及速軸方向，使 -24- 200425602 各光束各自於該各光束之速軸方向，在互異的指定的位置入 射至前述收斂角變換光學系的話，則在半導體雷射與全體收 斂光學系之間，例如可在未配置有用以準直各光束的光學系 之下使各光束入射至光纖，依此可縮短從半導體雷射至光纖 爲止的光路長，所以能使裝置更小型化。 又，當全體收斂光學系爲，由對應各光束而配置之用以使 各光束各自成爲平行光束之準直光學系；及使上述平行光束 全體在遲軸方向之寬度變狹窄般地收斂，同時使各光束各自 收斂於該各光束的遲軸方向及速軸方向，使各光束各自在該 鲁 各光束之速軸方向，在互異的指定的位置入射至收斂角變換 光學系之集光光學系所構成者時，則例如，在不對光路中個 別地配置用以使全體.光束收斂的光學系和使各光束個別地 收斂的光學系之下，可使各光束入射於光纖，依此可縮短從 半導體雷射至光纖爲止的光路長，所以能使裝置更小型化。 此外，使全體收斂光學系爲截斷型之透鏡，或使準直光學 系爲截斷型之透鏡的話，則因爲恰好可使具有遲軸方向的直 徑爲小、速軸方向之直徑爲大的楕圓形狀之斷面的上述各光 · 束通過此截斷型之透鏡，所以可使各光束有效率地通過透鏡 ，且因爲可塡滿各光束間的間隔，所以使裝置更加小型化可 使輸出更加提高。 本發明之第4雷射光合波裝置係具備有雷射塊，配置成使 複數之半導體雷射將具有相互平行的遲軸及相互平行的光 軸之各光束予以射出，所以與上述第3雷射光合波裝置同樣 地，在不使光束的像差增大之下，可生成於速軸方向偏移之 -25- 200425602 各光束，可與上述偏移量無關地將無像差的各光束正確地導 入光纖，可抑制合波光束之數量增加所伴隨之對各光束的光 纖之結合效率的降低。再者，因爲可省略用以使由複數之半 導體雷射所射出的光束偏移的光學系，所以能使裝置小型化 〇 又，若準直光學系作成爲截斷型的透鏡，則與上述同樣地 ，能使各光束有效率地通過透鏡，同時可塡滿各光束間的間 隔，所以使裝置更小型化且可使輸出更加提高。 又，當構成爲具備有偏光合波裝置、或波長合波裝置，且 使從其他的半導體雷射射出之光束也入射至光纖的話，則可 使合波於光纖中之合波光的輸出更加提高。 又，若利用合波於光纖中而成的合波光，以使固體雷射之 媒質或光纖雷射之媒質激發的話，則可獲得具有所期望的波 長之大輸出的雷射光。 又，若利用由收斂角變換光學系所射出之全體光束，直接 激發固體雷射之媒質或光纖雷射之媒質的話，則可獲得具有 所期望的波長之大輸出的雷射光。 【實施方式】 以下，茲使用圖面來說明本發明之第1實施形態。 <實施例1 一 1 > 第1圖係表示本發明之第1實施形態中的第1實施例（以 後，稱之爲實施例1 - 1)之雷射光合波裝置的槪略構成圖， 第1(a)圖由上方看上述雷射光合波裝置之平面圖，第1(b) 圖係由半導體雷射排列的方向看上述雷射光合波裝置之正 -26- 200425602 面圖，第1(c)圖係由光束的光軸方向看上述雷射光合波裝 置之左側面圖。又，第2圖表示雷射光束自半導體雷射的活 性層射出的樣態之斜視圖。第3圖表不收斂角變換光學系的 構造和通過此收斂角變換光學系而被合波於光纖之光束的 樣態圖。第3 ( a )圖係表示收斂角變換光學系之構造平面圖 ，第3(b)圖係表示收斂角變換光學系之構造正面圖，第4 圖係表示使後述的收斂分散透鏡使光束偏移，同時使之收斂 的樣態圖，第4( a )圖係以Y方向爲上方而由Z方向及X方 向看之通過上述集束分散透鏡的光束圖，第4(b )圖係以X · 方向爲上而由Z方向及Y方向看之通過上述集束分散透鏡 之光束圖。 如第1圖所示，上述實施例1 - 1之雷射光合波裝置101 係具備有配置著複數個半導體雷射之雷射塊1 1 〇、屬收斂分 散光學系之收斂分散透鏡120、及收斂角變換光學系30。 雷射塊1 1 〇係，複數之個別地獨立配置之半導體雷射 11 A、11 B、11 C…（以後，也全部稱之爲半導體雷射11)係 ，半導體雷射1 1各自的活性層12 A、12 B、12 C…（以後，_ 也全部稱之爲活性層1 2)在同一平面Η 1上排列般地配置， 用以射出在上述同一平面Η1上具有相互平行的遲軸之各光 束L a、L b、L c…者。 各半導體雷射1 1，係輸出爲1W、振盪波長400〜420 n m 且邊射型之氮化物系半導體雷射，如第2圖所示，活性層1 2 之厚度方向（圖中F軸方向，以後，也稱之爲速軸方向）的發 光幅D f = 1 μ m，與此速軸正交的活性層1 2平行的方向（圖 -27- 200425602 中S軸方向，以後，也稱之爲遲軸方向）之發光幅D s = ΙΟμιη。又，由各半導體雷射11射出之光束的速軸方向之有 效數値孔徑N A ( f )爲0.5，遲軸方向之有效數値孔徑N A (s )爲〇·2。此外，如上述般，在此所說的速軸方向係相對 於上述邊射型半導體雷射之活性層的垂直方向，遲軸方向係 相對於上述活性層之平行方向。此外，上述數値孔徑N A (f ) = 0·5係一般的半導體雷射所射出之光束的速軸方向之 有效數値孔徑之代表値。 上述X方向、Υ方向、Ζ方向係相互正交，半導體雷射11 _ 所射出之光束的速軸方向（光束之擴散角大的方向）成爲與 X方向同一方向，上述光束之遲軸方向(光束之擴散角小的 方向）成爲Υ方向同一方向。 又，上述雷射塊110係由配置有5個半導體雷射11Α、11 B、11C、11D、及11E所成者。 收斂分散透鏡1 20係由對應複數之半導體雷射1 1所射出 的各光束L a、L b、L c…而配置的各收斂分散個別透鏡 1 2 1 A、12 1 B 、1 2 1 C…所成，係使由上述各光束L a 、 · L b、L c…所成的全體光束在上述遲軸方向之寬度變狹窄 般地收斂，同時使各光束各自於速軸方向，在互異的位置（圖 中P 1、P 2、P 3…所示）偏移，且，使各光束L a 、L b、 L c…各自收斂於該各光束之遲軸方向及速軸方向，使各光 束L a、L b、L c…各自於該各光束的速軸方向，在互異之 指定位置39A、39B、39C···入射至收斂角變換光學系30 者’係兼具有使光束偏移之機能、使各光束的光軸收斂之機 >28- 200425602 能、以及使各光束各自收斂之機能者。在此，上述收斂角係 在使全體光束在遲軸方向之寬度變狹窄般地收斂之際，此全 體光束看收斂方向之y z平面之角度，亦即速軸方向看之收 斂角。又，收斂分散透鏡120係由各收斂分散個別透鏡 1 2 1 A、1 2 1 B、1 2 1 C…所成的截斷型之透鏡。 重定向系統之收斂角變換光學系30爲，使全體光束之速 軸方向看的收斂角在由收斂分散透鏡120射出時的全體光束 之收斂角αΐ成爲更小的收斂角α2,且使此全體光束入射至光 纖40的芯部41者，在速軸方向看（在此爲YZ平面），各光 籲 束的光軸係配置在相互交叉的位置當中之最上游側的位置 P a更上游側。此外光纖40之芯部41的直徑爲50μηι，數 値孔徑Ν Α爲0.2。 此外，收斂分散透鏡1 20之在速軸方向看的數値孔徑N A ，係設定爲比上述光纖40的數値孔徑Ν A還大。 如第3 ( a )、3 ( b )圖所示，收斂角變換光學系3 0係，於 X方向之上述速軸方向上厚度爲薄的複數個稜柱31A、 3 1 B、3 1 C…係在此速軸方向疊層而形成，係使全體光束之 籲 遲軸方向寬度變狹窄般之由收斂分散透鏡1 20所收斂、在速 軸方向看爲朝收斂角變換光學系30入射之光軸角度互異的 各光束L a、Lb、L c...令其等入射至各光束所對應之指 定的稜柱3 1 A、3 1 B、3 1 C…、而在各稜柱3 1 A、3 1 B、 31C…，變更各光束之傳播方向。亦即，於速軸方向看，稜 柱3 1 A、3 1 B、3 1 D、3 1 E係使收斂分散透鏡1 20射出之全 體光束的收斂角爲更小的收斂角，同時在遲軸方向看，係使 -29- 200425602 以發散狀態入射的各光束之光軸收斂（參照第3 ( b )圖）。在 此’位在中央之稜柱3 1 C係設定爲，被朝光纖中心傳播之光 束L c所通過，所以其傳播方向不彎曲。 以下針對上述實施形態中的作用加以說明❶ 由複數之半導體雷射11A、11B、11C…所射出之在同一 平面H1上具有遲軸之各光束l a、Lb、L c…係通過收 斂分散個別透鏡1 2 1 A、1 2 1 B、1 2 1 C…，使各光束L a、 L b、L c…所成的全體光束在上述遲軸方向之寬度變狹窄 般地收斂（亦即，速軸方向看係被收斂），同時各光束各自係 鲁 速軸方向，在互異的位置P 1、P 2、P 3…被偏移。連同地 ’各光束L a、L b、L c…各自係收斂於各光束的遲軸方 向及速軸方向。 亦即，用以構成收斂分散透鏡120之收斂分散個別透鏡 121 A、121 B、121 C…各自係具有使光束的傳播方向變化 之互異的屈光力。如第4圖所示，位在全體光束之周緣部的 收斂分散個別透鏡1 2 1 A係具有使入射的光束L a之傳播方 向在遲軸S方向變化大，以使相互的光軸之間隔狹窄，同時使 ® 得相互的光軸之間隔在速軸F方向寬大般地變化，且使此光 束L a收斂而入射至收斂角變換光學系30之指定的稜柱 3 1 A之機能。又，位在全體光束之中心部的收斂分散個別透 鏡121C，係具有使入射的光束L c之傳播方向不在遲軸S 方向也不在速軸F方向變化之下，使此光束L c收斂而入射 至收斂角變換光學系30之指定的稜柱3 1 C之機能。此外， 由Z軸方向看第4( a )及第4( b )圖之左側所示之收斂分散 -30- 200425602 個別透鏡1 2 1 A之圖中的實線係表示收斂分散個別透鏡 1 2 1 A之半導體雷射1 1 A側的透鏡面，上述圖中的虛線係表 示收斂分散個別透鏡1 2 1 A之收斂角變換光學系3 0側的透 鏡面，各個透鏡面之曲率中心的位置係相對於X軸及γ軸在 斜方向偏移。 其後，各光束La 、Lb、Lc…各自係於速軸F方向， 由互異的指定的位置3 9 A、3 9 B、3 9 C…而入射至收斂角變 換光學系30之指定的稜柱31 A、31 B、31 C ...，且依稜柱 31A、31B、31C…，如同上述，在速軸方向看，由收斂分 籲 散透鏡1 20射出時之全體光束的收斂角係成爲更小的收斂角 ，而在遲軸方向看，以發散狀態入射的各光束之光軸會收斂 般地各光束的光軸之方向被變換，上述全體光束係入射至光 纖40的芯部41。在此，使得上述各光束的收束腰會位在上 述芯部41之入射端面般地，使各光束係通過收斂分散透鏡 120及收斂角變換光學系30而被傳播， 依上述之情事，由5個之半導體雷射1 1 A、1 1 B、1 1 C… 所射出之具有各0.5W的輸出之光束係合波於光纖40的芯部 ® 4 1，可自芯部4 1輸出2 · 2 5 W的雷射光。亦即，5條的雷射 光束係以結合效率90%結合於光纖。 <實施例1 一 2 > 以下，針對本發明之第1實施形態中之第2實施例（以下 ，稱之爲實施例1 一 2)的雷射光合波裝置加以說明。第5圖 係表示上述雷射光合波裝置的槪略構成平面圖’第5 ( a )圖 係自上方看此雷射光合波裝置之平面圖’第5(b)圖係由半 200425602 導體雷射排列的方向看雷射光合波裝置之平面圖，第5(c) 圖係由光束的光軸方向看雷射光合波裝置之左側面圖，第6 圖係表示構成偏移透鏡之個別透鏡使光束偏移的機能圖，第 6( a )圖係以Y方向爲紙面上方而看到的上述個別透鏡之槪 念圖，第6 ( b )圖係以X方向爲紙面上方而看到的上述個別 透鏡之槪念圖，第7圖係表示在遲軸方向看收斂角變換光學 系使急劇收斂之全體光束的光軸收斂之程度減緩的狀況圖。 上述雷射光合波裝置102,係取代上述實施例1一 1中之屬 收斂分散光學系的收斂分散透鏡，而將偏移裝置的偏移透鏡 鲁 與收斂全體光束的集光透鏡各自個別地配置而構成者，其他 係由與上述實施例1 - 1同樣的構成所成。以下，有關具有 與上述實施例1 - 1的雷射光合波裝置1 0 1同樣機能之構成 係使用相同符號且省略說明。 上述雷射光合波裝置102’在收斂分散光學系方面，係由 對應複數之半導體雷射1 1 A、1 1 B、…所射出之各光束而配 置之，具有將該各光束各自予以準直，同時在速軸方向之互 異的位置偏移之機能的偏移透鏡1 2 3 ;及具有使此偏移透鏡 鲁 123所射出之由各光束所成的全體光束在遲軸方向之寬度變 狹窄般地收斂，同時使各光束各自收斂於該各光束的遲軸方 向及速軸方向，使各光束於該各光束的速軸方向，在互異的指 定的位置入射至前述收斂角變換光學系30 B之機能的集光 透鏡1 2 4所構成。 此外，偏移透鏡1 23係由對應各光束而配置之屬各透鏡的 偏移個別透鏡123A、123B、...所構成之截斷型的透鏡。又 -32- 200425602 ，由偏移透鏡123和集光透鏡124所成的光學系係與上述實 施例1 — 1中之收斂分散透鏡1 2 0執行同樣的工作。 由複數之半導體雷射11A、11B、11C·.·射出之在同一平 面H1上具有遲軸的各光束L a、Lb、L c.··係通過偏移 透鏡123，各光束各自係於速軸方向，被偏移在互異的位置 。更詳言之，如第6圖所示，構成偏移透鏡123之各偏移個 別透鏡123A、123B、123C…各自係具有使光束的傳播方 向變化之互異的屈光力。位在全體光束的周緣部之偏移個別 透鏡123A係使入射的光束L a的傳播方向不在遲軸方向變 籲 化而係在速軸方向變化且入射至集光透鏡1 2 4。此外，位在 全體光束的中心部之偏移個別透鏡1 23 C係不使入射的光束 L c的傳播方向在遲軸方向變化而也不在速軸方向變化而 入射至集光透鏡1 2 4。此外，由Z軸方向看到第6 ( a )及第 6 ( b )圖的左側所示之偏移個別透鏡1 2 3 A的圖中之實線係 表示偏移個別透鏡1 2 3 A之半導體雷射1 1 A側的透鏡面，上 述圖中的虛線係表示此偏移個別透鏡1 23 A之收斂角變換光 學系30B側的透鏡面，各個透鏡面之曲率中心的位置係在X · 軸方向偏移。 由偏移透鏡123所射出且爲由通過集光透鏡124之各光束 La、Lb、Lc···所成之全體光束，係使遲軸方向之寬度 變狹窄般收斂，同時各光束L a、L b、L c…各自係收斂 於各光束之遲軸方向及速軸方向。 其後，各光束L a、L b、L c…各自係於速軸F方向， 在互異的指定的位置入射至收斂角變換光學系3 0 B之指定 -33- 200425602 的稜柱，在速軸方向看，各光束所成的全體光束之收斂角（xl 係通過各稜柱，各光束所成的全體光束之收斂角係成爲更小 的收斂角α2，同時如第7圖所示，在遲軸方向看，以各光束 的光軸會急劇地收斂之狀態傳播的各光束之光軸係更緩慢 地收斂般地變換各光束之光軸方向，上述全體光束係入射至 光纖40的芯部4 1。亦即，與上述同樣地，收斂角變換光學 系30Β所射出之上述全體光束的收斂角α2係成爲比由集光 透鏡124射出時之全體光束的收斂角αΐ還小的角度。即便 是此場合，此收斂角變換光學系3 0 Β，係集光透鏡1 2 4所射 · 出且被收斂之各光束L a、L b、L c…的光軸乃配置在由 速軸方向看係位在比相互交叉的位置當中之最上游側的位 置P a更上游側。 依上述之情事，由5個之半導體雷射1 1 A、1 1 B、1 1 C ... 所射出之具有各0.5W的輸出之光束係合波於光纖40的芯部 41，可自芯部41輸出2.25W的雷射光。亦即，5條的雷射 光束係以結合效率90%結合於光纖。 又，上述實施例1一 1，實施例1一 2，及以下要說明之實 _ 施例2 - 1至2 - 5,及實施例3 - 1的雷射光合波裝置之方式 ，藉由半導體雷射之組裝配置，由截斷型透鏡所構成之收斂 分散光學系的光束收斂分散機能，及收斂角變換光學系的收 斂角變換機能等之設計的最佳化，也可適用在由本申請人既 已提案之專利文獻（例如，日本國專利特願2002 — 287640、 特願2002 - 201979)等所記載之具有堆疊型（在速軸方向疊 層半導體雷射之構造）之光纖•雷射（雷射光合波裝置）。 -34- 200425602 第8圖係表示在配置複數個半導體雷射之際的構成圖，第 8( a )圖係使複數個半導體雷射各自個別地獨立的構成圖， 第8(b)圖係表示使複數個半導體雷射分散在複數個基板上 之構成圖，第8(c)圖係表示將複數個半導體雷射作爲雷射 長條之構成圖。 於上述實施例1 一 1、實施例1 一 2中，如第8( a )圖所示 ，係使複數個半導體雷射1 5 A，1 5 B，…各自相互分離者， 但不受限於此種場合，複數個半導體雷射爲，由此等複數個 半導體雷射當中之至少2個以上17A、17B相互地連接而作 φ 爲一體化的雷射長條之構成者。 更具體言之，如第8(b)圖所示，上述複數之半導體雷射 係可採用，半導體雷射1 7 A、1 7 B…當中之至少2個以上， 亦即，半導體雷射17 A、17B係相互連接而被一體化，半導 體雷射17C、17D係相互連接而被一體化，再者，半導體雷 射17 E，17 F係相互連接而被一體化者，再者，如第8( c ) 圖所示，上述複數個半導體雷射也可採用，全部之半導體雷 射1 8 A至1 8 F係連接，而構成爲1條的雷射長條1 8者。 _ 此外，如第5圖所示，把實施例1 - 2的雷射光合波裝置 作爲，利用由半導體雷射1 1射出且入射於光纖40之芯部41 而合波於此光纖41中之各光束所成的合波光L X，激發固 體雷射之媒質Kb，或光纖雷射之媒質Fb，或以由半導體 雷射11射出且通過收斂角變換光學系30B之全體光束，直 接激發固體雷射之媒質K b，或光纖雷射之媒質F b者也可 以。 -35- 200425602 亦即，以利用上述雷射光合波裝置而入射合波於光纖40 之芯部41的合波光L X，或以通過收斂角變換光學系30B 之全體光束Lg，激發固體雷射之媒質Kb，而在此固體雷 射中之輸出鏡Μ 1與反射鏡Μ 2之間振盪以產生雷射光l k ，或激發配置在光纖40之芯部41的光纖雷射之媒質F b而 產生雷射光L f也可以。 於上述合波光L X爲紅外光之場合，使上述媒質κ b，及 媒質F b爲包含有稀土類元素N d3+，稀土類元素Yb3 +當 中至少1個爲佳。又，於上述合波光L X之波長爲350 n m 以上，460 n m以下時，使上述媒質K b，及媒質F b爲包 含有稀土類元素P r3+，稀土類元素E r3+，稀土類元素 Η 〇3 +當中至少1個爲佳。 此外，依合波於上述光纖中的合波光，固體雷射的媒質或 光纖雷射的媒質之激發，係可適用上述實施例1 一 1，或後述 的實施例2 - 1至實施例2 — 5 ’實施例3 - 1。 以下，茲使用圖面來說明本發明之第2實施形態。 此外，在第2實施形態中，有關具有與上述第1實施形態 同樣機能者係使用相同符號且省略說明。 〈實施例2 - 1 > 第9圖係表示本發明之第2實施形態中之第1實施例（以 後，稱之爲實施例2 - 1)的雷射光合波裝置201之槪略構成 圖，第9(a)圖係由上方看上述雷射光合波裝置之平面圖， 第9(b)圖係由半導體雷射排列的方向看上述雷射光合波裝 置之正面圖，第9(c)圖係由光束之光軸方向看上述雷射光 -36- 200425602 合波裝置之圖，第10圖係表示收斂角變換光學系使得於遲 軸方向看互爲平行的各光束之光軸予以收斂的狀況圖。 如第9圖所示，實施例2 — 1之雷射光合波裝置201係具 備雷射塊10、全體收斂光學系20、及收斂角變換光學系 30 C。 雷射塊1 〇係，複數之半導體雷射1 1 A、1 1 B、1 1 C ...( 以後，也全部稱之爲半導體雷射11)，半導體雷射11各自之 活性層12 A、12 B、12 C…（以後，也全部稱之爲活性層12) 係成爲平行，且，各自之活性層1 2 A、1 2 B、1 2 C…的位置 _ 係於活性層1 2的厚度方向（圖中箭頭X方向）成爲互異的位 置1 3 A、1 3 B、1 3 C…般地配置，且將具有相互平行的遲軸 之各光束予以射出者。亦即，在雷射塊1 0上形成有用以配 置各半導體雷射11之段差。 各半導體雷射1 1，係輸出爲1W、振盪波長400 n m至 4 20 n m之邊射型之氮化物系半導體雷射，速軸F方向的發 光幅D ί =1μηι，遲軸S方向的發光幅D s = 25μτη。且， 由各半導體雷射1 1射出的光束之速軸F方向的有效數値孔 鲁 徑N A ( f )爲0 · 5而遲軸S方向的有效數値孔徑N A ( s )爲 0.2。並且如第· 1實施形態所作之說明，在此所說之速軸f 方向係邊射型半導體雷射之活性層的厚度方向，遲軸方向係 平行於上述活性層之方向，自半導體雷射1 1射出的光束之 擴散角爲大的方向係光束之速軸方向（圖中箭頭F方向），光 束的擴散角爲小的方向係光束之遲軸方向（圖中箭頭S方向） -37- 200425602 上述雷射塊10係具有半導體雷射 HA、11B、lie、 1 1 D、1 1 E 等 5 個。 全體收斂光學系20係，使由複數之半導體雷射11射出之 遲軸爲相互平行且在速軸F方向爲相互位置不同之各光束 L a、L b、L c ...所成的全體光束在遲軸方向（在此與圖中 箭頭Y方向一致）之寬度變狹窄般收斂，同時使各光束各自 收斂於遲軸方向及速軸方向（在此與圖中箭頭X方向一致） ，使各光束L a、Lb、L c·.·各自於速軸F方向，在互異 的指定位置39 A、39 B、39 (入射至收斂角變換光學系 _ 30C。此外，由全體收斂光學系20射出之各光束La 、 L b、L c ...的光軸在遲軸方向看係成爲相互平行。 屬重定向系統的收斂角變換光學系30 C，係令全體光束之 在速軸方向看的收斂角爲比由全體收斂光學系20射出時之 全體光束的收斂角（X11還小的收斂角（xl 2,而使此全體光束入 射至光纖40的芯部4 1，各光束的光軸係配置在速軸方向看， 相互交叉的位置當中之較最上游側的位置P b還上游側。此 外，光纖40之芯部41之直徑爲50μιη，數値孔徑N A爲0.2 · 〇 又，此收斂角變換光學系30 C係如第.1 0圖所示，於遲軸 方向看，使由全體收斂光學系20射出之相互平行的各光束 La、Lb、Lc...的光軸收斂。 又，全體收斂光學系20之在速軸方向看之數値孔徑ΝΑ 係設定爲較上述光纖40的數値孔徑Ν Α還大。 上述全體收斂光學系20係由用以使複數之半導體雷射11 -38- 200425602 射出之各光束L a、Lb、L c…各自準直於遲軸方向及速 軸方向之個別準直透鏡21 A、21 B、21 C…（以後，也全部 稱之爲個別準直透鏡21)，及用以使各光束L a、L b、 L c…所成的全體光束在遲軸方向之寬度變狹窄般地收斂 之全體收斂透鏡22所構成。此外，個別準直透鏡2〗係作爲 截斷型之透鏡而被構成者。 此外，在上述構成中，速軸方向係經常與X方向一致。 其次，針對上述實施形態中之作用作說明。 由複數之半導體雷射1 1 A、1 1 B、1 1 C…所射出之於速軸 籲 方向相互的位置不同之各光束L a、Lb、L c.··，係通過 個別準直透鏡2 1 A、2 1 B、2 1 C…而成爲平行光束。被個別 準直透鏡21所準直光束之在速軸F方向相互位置不同之各 光束L a、L b、L c…所成的全體光束，係通過全體收斂透 鏡22而使遲軸S方向的寬度變狹窄般地被收斂。 其後，使各光束La、Lb、Lc…各自於速軸F方向， 由互異的指定位置39A、39B、39C…而被入射至收斂角變 換光學系30C之指定的稜柱31A、31B、31C…而入射至 _ 各稜柱3 1 A、3 1 B、3 1 C…，在各稜柱3 1 A、3 1 B、3 1 C… ，由各光束所成之全體光束的收斂角，在速軸方向看係成爲 更小的收斂角，且使各光束的光軸在遲軸方向看會收斂般地 變換各光軸之方向，上述全體光束係入射於光纖40的芯部 41。在此，各光束之收束腰會位在上述芯部41之入射端面 的近傍，各光束係通過收斂分散光學系20及收斂角變換光 學系30C而被傳播。 •39- 200425602 收斂角變換光學系30C所射出之上述全體光束的收斂角 α 1 2係從全體收斂透鏡22被射出，亦即，成爲比通過全體收 斂光學系20而射出時之全體光束的收斂角all還小的角度 〇 依上述情事，由具有5個之半導體雷射11A、11B、11 C ···所射出之各1.0W的輸出之光束係合波於光纖40的芯部 4 1，可自芯部4 1輸出4 · 5 W的雷射光。亦即，5條雷射光束 係以90%之結合效率結合於光纖。 〈實施例2 — 2〉 φ 以下，針對本發明之第2實施形態中之第2實施例（以下 ’稱之爲實施例2 — 2)的雷射光合波裝置加以說明。第1 1圖 係表示實施例2 - 2之雷射光合波裝置的槪略構成圖。 上述實施例2 - 2之雷射光合波裝置202,係依上述實施例 2 - 1之雷射光合波裝置的構成而再具備有使其他的半導體 雷射射出的光束作偏光合波之偏光合波裝置者。以下，有關 與上述實施例2 - 1之雷射光合波裝置20 1同樣的構成係使 用相同符號且省略說明。 · 上述實施例2 - 2之雷射光合波裝置202係具備有：雷射 塊10，配置有5個半導體雷射11A、11B、11C，11D， 1 1 E ;個別準直透鏡2 1，使從上述複數之半導體雷射1 1射 出的各光束L a、Lb、L c…各自準直於遲軸方向及速軸 方向；全體收斂透鏡22，使得依個別準直透鏡2 1而成爲並 行光束之由各光束L a、L b、L c...所成的全體光束在遲 軸方向之寬度變狹窄般地收斂，同時使.各光束各自收斂於遲 -40- 200425602 軸方向及速軸方向，使各光束L a、L b、L c...各自於速 軸方向，在互異的指定的位置入射至收斂角變換光學系 30C ;以及屬重定向系統之收斂角變換光學系30 C，使上述 全體光束之遲軸方向之寬度變狹窄般地由全體收斂透鏡22 所收斂的收斂角α 1 1令其成爲更小的收斂角α 1 2，以使上述 全體光束入射於光纖40。 此雷射光合波裝置202係更具備有：不同於上述複數之半 導體雷射11Α、11Β…之配置有其他的半導體雷射11ΤΑ 、11Τ Β、…（以後，也全部稱之爲半導體雷射11Τ )之雷射 鲁 塊1 〇 Τ ;偏光合波裝置45，係在半導體雷射1 1所射出的光 束入射於該光纖40之前的該光束的光路中，使從半導體雷 射1 1所射出的各光束L a 、L b、L c…和由其他的半導 體雷射1 1 T所射出之各光束T L a、T L b、T L c ...作偏 光合波，且使從其他的半導體雷射1 1 T射出之光束也入射至 光纖40者。 偏光合波裝置45係具有個別準直透鏡46、1/ 2λ波長板 47、及偏光分光器48，偏光分光器48係配置在個別準直透 · 鏡21與全體收斂透鏡22之間，1/ 2λ波長板47和個別準直 透鏡46係配置在半導體雷射11Τ與偏光分光器48之間。 雷射塊10Τ爲與上述雷射塊10同樣者，半導體雷射11Τ 各自的活性層係配置成對應半導體雷射1 1各自的活性層。 亦即，半導體雷射1 1 Τ Α的活性層和半導體雷射1 1 Α的活 性層係位在同一平面上，半導體雷射1 1 Τ B的活性層和半導 體雷射1 1 B的活性層係位在同一平面上，如此，相互對應的 -41 - 200425602 半導體雷射之活性層係位在同一平面上。 個別準直透鏡46爲與上述個別準直透鏡21同樣者，把由 各半導體雷射11T射出之各光束TL a、TL b、TL c... 各自設定光軸爲相互平行的平行光束。 1 / 2λ波長板47係改變直線偏光的方位者，使入射的各光 束T L a、T L b、T L c…之偏光的方位作90度旋轉。 此外，使得由半導體雷射1 1 T射出時之各光束的光軸和由 半導體雷射11射出時之各光束的光軸會正交般地配置上述 各構件。 _ 偏光分光器48係使第1 1圖中平行於紙面之屬直線偏光成 分的P偏光成分透過，且使垂直於紙面之屬直線偏光成分的 S偏光成分反射者，在此，係使由半導體雷射11射出且通 過個別準直透鏡2 1的光透過，把由半導體雷射丨丨丁射出且 通過個別準直透鏡46及1 / 2λ波長板47的光予以反射。 由複數之半導體雷射11Α、11Β…所射出之由上述Ρ偏光 成分所成的各光束L a、L b、L c…係通過個別準直透鏡 21、偏光分光器48、全體收斂透鏡22、以及收斂角變換光 籲 學系30 C而入射至光纖40。又，由半導體雷射ht所射出 之由上述P偏光成分所成的各光束TL a、TL b、TL c …係在個別準直透鏡46成爲平行光束之後，通過i / 2λ波 長板47而偏光方向旋轉90度而成爲由上述S偏光成分所成 之各光束TL a、TLb、TL c…，接著在偏光分光器48 之射束裂光器面B S1被反射。然後，在偏光分光器48反射 之各光束TL a、TLb、TL c…係通過與將偏光分光器 -42 - 200425602 48透過之各光束L a、L b、L c…各自相同的光路而入射 至光纖40。亦即，光束TL a與光束L a、光束TLb與光 束L b、…光束TL e與光束L e之各自對應的光束係通過 相同光路而入射至光纖40。收斂角變換光學系30 C係令由 全體收斂透鏡22射出時之全體光束的收斂角α 1 1爲更小的 收斂角α12，使此全體光束入射至光纖40。 又，上述收斂角變換光學系30C係與上述實施例2— 1同 樣地’由全體收斂透鏡22射出且被收斂之各光束L a 、 L· b、L c…的光軸係配置於速軸方向看係位在比相互交叉 的位置當中之最上游側的位置P b更上游側。 且’使用上述偏光合波裝置而獲得高輸出的雷射光之手法 也可適用在上述實施例1一 1，實施例1一 2，實施例2 - 1， 及後述之實施例2 - 3至實施例2 — 5，實施例3 - 1 ◊ 〈實施例2 - 3〉 以下，針對本發明之第2實施形態中之第3實施例（以下 ，稱之爲實施例2 — 3)的雷射光合波裝置加以說明？第1 2圖 係表示上述實施例2 - 3之雷射光合波裝置的槪略構成圖 此實施例2 - 3之雷射光合波裝置203係於上述實施例 2- 1之雷射光合波裝置20 1的構成中再具備有使其他的半 導體雷射所射出之光束作波長合波之波長合波裝置者。以下 ，有關與上述實施例2 - 1之雷射光合波裝置20 1同樣機能 的構成係使用相同符號且省略說明。 實施例2 - 3之雷射光合波裝置203係具備有：雷射塊1〇 ，配置有5個半.導體雷射11厶、1“、11(：、11〇、11£;個 -43- 200425602 別準直透鏡2 1，使上述複數之半導體雷射1 1所射出之各光束 L a、L b、L c…各自收斂於遲軸S方向及速軸F方向；全 體收斂透鏡22,使藉個別準直透鏡21而成爲並行光束之由各 光束L a、Lb、L c···所成的全體光束在遲軸方向之寬度 變狹窄般地收斂，同時使各光束各自收斂於遲軸方向及速軸 方向，且使各光束L a、Lb、L c···各自於速軸F方向在 互異的指定的位置入射於收斂角變換光學系30C;屬重定 向系統之收斂角變換光學系30 C，係使上述全體光束在由全 體收斂透鏡22射出時之收斂角ctll成爲更小的收斂角αΐ2 · ，使上述全體光束入射於光纖40。 此雷射光合波裝置203係更具備有：不同於複數之半導體 雷射1 1 A、1 1 Β…之配置有其他的半導體雷射1 1 U A、 1 1 U B、…（以後，也全部稱之爲半導體雷射1 1 U )的雷射塊 10 U ;和配置有其他的半導體雷射1 1 V A、1 1 V B、…（以後 ，也全部稱之爲半導體雷射1 1 V )之雷射塊1 0 V ;和在由半導 體雷射11所射出之光束入射於光纖40之前的該光束之光路 中’用以使半導體雷射11所射出之各光束L a 、Lb、 春 L c…與其他的半導體雷射1 1 U所射出之各光束u L a 、 U L b、U L c…作波長合波之波長合波裝置5 5 U ;以及使 半導體雷射11所射出之各光束La、Lb、L c..·與半導 體雷射1 1 V所射出之各光束V L a、V L b、V L c…作波 長合波之波長合波裝置55V ;且使從其他的半導體雷射iiu 及半導體雷射1 1 V射出之光束也入射至光纖40者。 此外’由各半導體雷射1 1射出的各光束之波長係各自爲 -44- 200425602 410n m，由各半導體雷射11U所射出之各光束的波長係各 自爲370 n m，由各半導體雷射11 V所射出之各光束的波長 各自爲450n m。 波長合波裝置5 5 U係具有個別準直透鏡5 6 U、及二向色 (Dichroic)分光器58U，二向色分光器58U係配置在個別準 直透鏡2 1與全體收斂透鏡2 2之間’個別準直透鏡5 6 U係配 置在半導體雷射11U與二向色分光器58U之間。 波長合波裝置55V係具有個別準直透鏡56V，及二向色 分光器58V，二向色分光器58V係配置在個別準直透鏡 _ 56 V與全體收斂透鏡22之間，個別準直透鏡56 V係配置在 半導體雷射11V與二向色分光器58V之間。 雷射塊1 〇 U及雷射塊1 0 V係與上述雷射塊10同樣，半導 體雷射1 1 U及半導體雷射1 1 V各自的活性層係配置成對應 半導體雷射1 1各自的活性層。亦即，半導體雷射11 U A及 半導體雷射1 1 V A的活性層和半導體雷射1 1 A之活性層係 位在同一平面上，半導體雷射11UB及半導體雷射11VB 的活性層和半導體雷射1 1 B的活性層係位在同一平面上，如 _ 此，相互對應的半導體雷射之活性層係位在同一平面上。 又，由半導體雷射1 1射出時之光束的光軸，係會與由半 導體雷射11U射出時之光束的光軸，及由半導體雷射11V 射出時之光束的光軸正交。 個別準直透鏡56 U係與上述個別準直透鏡2 1爲同樣者， 使各半導體雷射11U所射出之各光束UL a 、ULb、 U L c…各自設定光軸爲相互平行的平行光束。 -45- 200425602 個別準直透鏡56 V係與上述個別準直透鏡2 1爲同樣者， 由各半導體雷射11V射出之各光束VL a、VLb、VLc ...各自設定光軸爲相互平行的平行光束。 二向色分光器58U係使410n m的光透過且反射370n m 的光。二向色分光器58V係使37〇n m及410n m的光透過 且反射450n m的光。 由複數個半導體雷射1 1 A、1 1 B…所射出的各光束L a、200425602 (1) Description of the invention: [Technical field to which the invention belongs] The present invention relates to a laser light multiplexing device. In particular, it relates to converging an entire beam composed of laser beams emitted by a plurality of semiconductor lasers to converge Laser light multiplexing device incident on optical fiber. [Prior art] It has been known from the past that each light beam of laser light emitted by a plurality of semiconductor lasers aligned in one direction is transmitted through a collimating lens to become parallel light beams having mutually parallel optical axes aligned in one direction. The method of collecting the entire Φ of each of the light beams thus incident on one optical fiber and propagating laser light with a high energy density through the optical fiber (for example, Patent Document 1). In the above method, the efficiency (combination efficiency) of combining the laser beams emitted from a plurality of semiconductor lasers into a single optical fiber is, for example, 90%, and the incident angle of the beam incident on the optical fiber It is limited by the numerical aperture of this fiber (for example, the numerical aperture NA = 0.2), so the number of beams that can be multiplexed is limited. That is, the power of the laser light multiplexed in the optical fiber is limited by the aforementioned numerical aperture. Chunchun, in terms of a method of generating a plurality of laser lights having optical axes parallel to each other, it is known that there is a method of using a plurality of semiconductor lasers arranged in one direction on the same substrate, and the semiconductor laser systems thus arranged are active The layers are arranged on the same plane, so the light beams emitted by the plurality of semiconductor lasers described above have the parallel axes (X-axis) parallel to each other on the same plane. The plurality of semiconductor lasers thus constituted are sometimes referred to as laser bars (LASER BARS). In addition, the thickness direction of the active layer orthogonal to the direction of the late axis is 200425602, which is the direction of the speed axis (Y axis) of the light beam. In the range of the incident angle determined by the numerical aperture of the above-mentioned optical fiber, the method of multiplexing more laser beams into this optical fiber is known as the following multiplexing method. Figure 20 (a) is a plan view of the laser multiplexing device when viewed from above. Figure 20 (b) is a left side view of the laser multiplexing device when viewed from the direction of the optical axis of the beam. Figure 21 illustrates the convergence angle. FIG. 2 (a) is a diagram showing a state in which the entire light beam composed of the light beams is to converge, and FIG. 2 (b) is a light intensity distribution diagram in the direction of the slow axis of the entire light beam. The above-mentioned multiplexing method is such that a plurality of semiconductor lasers 1 A, 1 B, 1 C, ... arranged in the direction of the arrow Y in the figure are formed by a laser strip 1 formed by a plurality of semiconductor lasers 1 orthogonal to the Y direction. The entire light beams formed by the respective light beams La, Lb, Lc, and the like pass through the cylindrical lens 2 to be described later, and then converge the optical system 6 to make the late axis direction (the direction shown by the arrow S in the figure, here with Y The direction of the entire beam is narrowed so that the entire beam converges at a convergence angle oc91, so that the entire beam converges on the YZ plane on the redirection system 7 to a light collecting position P j that is one point, that is, , At different positions in the above-mentioned light collecting position P j in the linear area extending in the direction of arrow X (speed axis direction, indicated by arrow F in the figure) in the figure on the redirection system 7 so that the entire beam is formed The beams converge. Next, according to this, the redirection system 7 makes the directions of the optical axes of the light beams parallel to each other, and at the same time makes the light beams La, Lb, and L when viewed from the direction of the speed axis (the direction shown by the arrow F in the figure, which is consistent with the X direction). The optical axes of L c... Are aligned so that the above-mentioned light beams are emitted from the redirection system 7. Thereafter, the entire light beam formed by the above-mentioned light beams is passed through the light-collecting optical system 3 to converge the entire light beam at a convergence angle α92 (here, α92 < α91) It is a method of converging and injecting 200425602 to the core 5 of the optical fiber 4. In this way, a method (for example, Patent Document 2) of combining more light beams into one optical fiber is known. The convergence angle is as described below. That is, 'as shown in Fig. 2 1 (a), (b), a specific position, here based on the position (Y p, Z p) in Fig. 21 (a) as a reference, to find the overall positive convergence Light intensity distribution in the late axis direction (Y direction) of the light beam (see FIG. 21 (b)). In this light intensity distribution, 0, which is the largest light intensity 値 Pm a X, in this light intensity distribution is obtained. The position of the intensity of 1% is determined by the positions y1, y2 at the two ends of the outermost axis (the Y direction) of the entire beam. Then find the interval φ between the position y 1 and the position y 2. Further, a distance L in the optical axis direction (Z direction) from the position (Υ ρ, Z ρ) to the light collecting position ρ j of the entire light beam is obtained. Here, the convergence angle α can be determined as follows: ta η (α / 2) = (φ / 2) / ί = φ / 2ί The above redirection system 7 can be, for example, in the direction of the arrow χ (speed axis direction) in the figure. A plurality of mirrors having a thin thickness are laminated in the direction of the speed axis, and the light beams L a, L b, L c, which are converged by the converging optical system 6 in mutually different positions in the χ direction, are incident on the stack, respectively. The designated one of the mirrors of the layer is a mirror in which the optical axis of each light beam is aligned in the direction of the above-mentioned speed axis. Hereinafter, the observation from the direction of the speed axis will be referred to as the direction of the speed axis, and the observation from the direction of the slow axis will be referred to as the direction of the slow axis. More specifically, in the laser strip 1, a plurality of active layers 8 A, 8 B, 8 C,... Formed on the same plane are each shot in the same direction and have parallel directions on the same plane. The laser beams La, Lb, 200425602, Lc, etc. of the late axis are passed through a cylindrical lens 2 having a cylindrical axis (an axis determined by the direction in which the cylindrical lens extends) inclined with respect to the aforementioned slow axis. The late axes of the beams L a, L b, L c, etc. are kept parallel to each other, and the beams are shifted to different positions in the direction of the speed axis, and the shifted beams are passed through the convergence optical system 6 And incident on the redirection system 7. That is, the entire light beams formed by the light beams L a, L b, L c,..., Which are shifted by the cylindrical lens 2 in mutually different positions in the direction of the speed axis, are converged in the optical system 6 to have a width in the direction of the late axis. Converges narrowly, and makes each beam La, Lb, Lc. . . It converges in the direction of the slow axis and the direction of the speed axis, and the positions different from each other in the direction of the speed axis enter the redirection system 7 described above. The laser strip 1 is arranged on the block portion 9. Here, each of the light beams L a, L b, L c... Uses the convergent optical system 6. When viewed from the direction of the speed axis (that is, in the YZ plane in the figure), the optical axis systems of the light beams cross each other at the light collecting position P j. In general, each light beam is converged in a light-collecting manner at the light-collecting position P j. Hereinafter, the state in which each of the light beams L a, L b, L c, ... is incident on the optical fiber 4 through the redirection system 7 will be described in detail. Fig. 22 is a plan view showing the optical axis and outline of the light beam near the redirection system enlarged, and Fig. 23 is a view showing the light beam near the redirection system seen from the direction of arrow G in Fig. 20 or 22 An enlarged view of the optical axis and the outline, FIG. 24 is a state diagram of each light beam emitted by a redirection system described later arranged at a specified position and each light beam incident on an optical fiber, viewed along the propagation direction of the light beam, FIG. 24 (a Figure) shows the state of each beam emitted by the redirection system. Figure 24 (b) shows the state of each beam incident on the optical fiber. 200425602 State diagram 'Figure 25 shows the direction along which the beam propagates. The state diagram of the light beam when the redirection system is disposed away from the designated position. Figure 25 (a) shows the state of the light beam emitted by the redirection system. Figure 25 (b) shows the incident light on the optical fiber. State diagram of the light beam. In Figs. 22 and 23, only the light beam La and the light beam Lc are shown, and the illustrations of the other light beams Lb, Ld, and Le are omitted. As shown in Figures 22 and 23, in the above-mentioned entire beam system, the above-mentioned light collecting position P j is located on the redirection system 7 and the beam waist (BEAM WAIST) B of each beam. The position of w is also converged on the redirection system 7. Then, the redirection system 7 is viewed from the direction of the speed axis. In order to make the optical axis of each beam uniform, the direction of the optical axis of each beam is changed, and the directions of the optical axis of each beam are parallel to each other. 7 emits each light beam. Thereafter, each of the light beams emitted by the redirection system 7 propagates while diverging, but is collected again by the concentrating optical system 3 and incident on the core 5 of the optical fiber 4. In addition, as described above, when the redirection system 7 is disposed at a specified position, the optical axis of each beam emitted by the redirection system 7 is consistent when viewed in the direction of the speed axis, as shown in FIG. 24 (a), The light beams are aligned linearly in the direction of the speed axis, and the light beams incident on the optical fiber 4 are also aligned in a straight line in the direction of the speed axis as shown in FIG. 24 (b). In contrast, when the redirection system 7 is arranged to deviate from the designated position in the Z direction, as shown in FIG. 25 (a), when viewed from the direction of the speed axis, the optical axis system of each beam emitted by the redirection system 7 deviates. The light beams are not aligned linearly in the direction of the speed axis, and the light beams incident on the optical fiber 4 are also shown in FIG. 25 (b). Because there is no deviation caused by the linear alignment in the direction of the speed axis, as described above, 200425602 Compared with the case where each light beam is linearly arranged in the direction of the speed axis, it has a larger diameter range than the end face of the optical fiber 4, that is, it will enter the range outside the core diameter. Therefore, the coupling efficiency of the entire light beam to the optical fiber 4 decreases. Therefore, in order to suppress this decrease in coupling efficiency, it is required that the redirection system 7 be correctly arranged at a designated position in the Z direction. As mentioned above, it is necessary to make the redirection system itself be positioned and fixed with high precision in a very small area where a plurality of converging waists are gathered. At the same time, it needs to be small and high in accordance with the shape of each beam at the above-mentioned light collection position. Manufactured with precision, this redirection system is difficult to manufacture. In addition, the size of the beam waist is proportional to the wavelength, so with the short wavelength of laser light sources in recent years, when the size becomes smaller, the high-precision fixing and miniaturization of the redirection system becomes more necessary, making the manufacturing difficulty gradually Get bigger. [Patent Document 1] Japanese Patent Laid-Open Publication No. 2002-202442 [Patent Document 2] US Patent No. 6462883B 1 [Summary of the Invention] However, the above-mentioned laser light multiplexing device is difficult to achieve a small and high-output semiconductor laser, Therefore, there is a so-called multiplexing of laser light emitted by a plurality of semiconductor lasers to obtain a laser beam with a large output (high energy density), and it is strongly desired to reduce the size of the device. Requirements. That is, there are so-called strong requirements for obtaining, for example, a miniaturization of the device size without reducing the laser light output of the multiplexing, and a laser light multiplexing device having a large output corresponding to the device size. However, as described above, the entire beam composed of the beams shifted by a plurality of semiconductor lasers is allowed to converge, and then the redirection system is used to make the propagation directions of the 200425602 beams uniform, and then the light collection optical system is used to make Each beam converges and enters the optical fiber. In this multiplexing method, the optical path through which the above-mentioned beams propagate from the semiconductor laser to the optical fiber becomes longer, and in the optical path, a lens for shifting each beam and an entire lens are arranged. A lens or the like that converges the light beam, and many optical members have a problem that the size of the device is increased. In addition, in the above-mentioned method, there is a problem that it is necessary to install a small and high-precision redirection system on the beam waist along with the shortening of the wavelength of the light source. In addition, when each light beam emitted by a plurality of semiconductor lasers is shifted by a cylindrical lens having a cylindrical axis inclined with respect to the late axis direction of the light beams, the peripheral portion of the cylindrical lens passes through the lens. The aberration of the light beam becomes larger, and it becomes difficult for the light beam system having such a large aberration to converge correctly (for example, it becomes difficult to correctly incident on the core of a 50 μm diameter optical fiber). 60% problem. In particular, in order to obtain laser light with high energy density, a laser strip configured by most semiconductor lasers is used to multiplex most beams in an optical fiber, because the laser strip corresponds to the number of multiplexed beams. As it becomes longer, it is necessary to offset the above. Since it is set large, the aberration of the light ® beam from a position far from the center passing through the cylindrical lens (the end in the direction of the cylindrical axis) increases, making it difficult to obtain high coupling efficiency. And in any of the above cases, there is a problem that the incident range of laser light that can be multiplexed in one optical fiber is limited by the numerical aperture Α of the optical fiber. The present invention has been made in view of the foregoing, and is directed to provide a small and high output laser light multiplexing device. More specifically, the first object of the present invention is to miniaturize the size of the device. Compared with a laser light multiplexing device with a large output size, a second object of the present invention is to provide a mine capable of suppressing a decrease in the optical fiber coupling efficiency of the above-mentioned light beam as the number of multiplexing 11-200425602 beams increases. Light multiplexing device. [Means for solving the problem] The laser beam combining method of the present invention is to shift the plurality of light beams emitted by a plurality of semiconductor lasers to mutually different positions in the direction of the speed axis, and to make each light of the aforementioned plurality of light beams different. The laser light multiplexing method in which the axis converges when viewed in the direction of the speed axis and causes the aforementioned plurality of light beams to converge in the direction of the slow axis and the direction of the speed axis and enters the end face of the optical fiber is characterized in that the system is viewed in the direction of the speed axis. The optical axis of each of the converged beams is at the most upstream position among the positions that cross each other in the direction of the speed axis. A convergence angle conversion optical system is arranged further upstream of the position, so that the system of the speed axis direction is converged. The entire light beam formed by the light beams passes through the convergence angle conversion optical system, so that the convergence angle of the entire light beam or a part of the light beams formed by the light beams in the direction of the speed axis is a smaller convergence angle, and the entire light beam is made smaller. The light beam enters the end face of the optical fiber. The laser light multiplexing device of the first invention of the present invention is provided with a plurality of semiconductor lasers, and each of the plurality of light beams emitted from the plurality of semiconductor lasers is shifted to mutually different positions in the direction of the speed axis, and Each optical axis of the plurality of beams is converged when viewed in the direction of the speed axis, and the plurality of beams are converged in the direction of the slow axis and the direction of the velocity axis and incident on the end face of the optical fiber, which is characterized by: The angle conversion optical system is arranged such that the optical axis of each of the beams converged as viewed in the direction of the speed axis is located on the upstream side of the position where the systems of the speed axis direction intersect with each other, and the angle of convergence The conversion optical system makes the convergence angle of the entire light beam formed by the light beams in the direction of the speed axis smaller, and makes the entire light beam incident on the end face of the optical fiber. -12- 200425602 The above-mentioned laser light multiplexing device is preferably provided with a light beam convergence device for converging each light beam emitted from the plurality of semiconductor lasers in a late axis direction and a speed axis direction, and the light beam convergence device makes the light beam The emission angle of each light beam emitted by the convergence device when viewed in the late axis direction is smaller than the radiation angle when each light beam is emitted by the semiconductor laser when viewed in the late axis direction of the light beam. The wavelength of the light beam emitted by each of the plurality of semiconductor lasers can be set to 350 nm or more and 460 nm or less. The laser light multiplexing device using a plurality of semiconductor lasers for emitting these short-wavelength light beams can make the spotting point (SPOT) of the combined laser light small, that is, it can increase the energy density of the laser light. Therefore, it is suitable for laser processing. The method of shifting the plurality of light beams emitted from the plurality of semiconductor lasers to mutually different positions in the direction of the speed axis may be a method of shifting the plurality of light beams emitted from the plurality of semiconductor lasers through the optical system. Alternatively, a plurality of semiconductor lasers may be arranged such that the positions of the respective active layers of the semiconductor lasers are positions different from each other in the thickness direction of the active layer, so that the plurality of semiconductor lasers are emitted. The plural light beams are shifted at different positions in the direction of the speed axis. · The manner in which the optical axes of the aforementioned complex beams converge in the direction of the speed axis, or the manner in which the aforementioned complex beams each converge through the optical system. Or, the plurality of semiconductor lasers may be arranged so that the optical axis of each beam when the semiconductor laser is emitted converges in the direction of the speed axis, and the optical axes of the plurality of beams are at The speed axis looks convergent. The upstream side is the upstream side in the propagation direction of the light beam, that is, the light source side (the side of the semiconductor laser) of the light path through which the light beam propagates. -13- 200425602 The aforementioned so-called speed-axis direction means viewing from the speed-axis direction, and the so-called late-axis direction means viewing from the slow-axis direction. The above-mentioned convergence angle is an angle at which the entire light beam looks at the convergence direction when it is viewed from the direction of the speed axis. It should be noted that the convergence angle is represented by the angle α shown in FIG. 21 of the above description. The second laser light multiplexing device of the present invention includes a laser block, a convergent dispersion optical system, and a convergence angle conversion optical system. The laser block is a plurality of semiconductor laser systems arranged so as to have respective activities of the semiconductor laser. The layers are arranged on the same plane, and the light beams having mutually parallel late axes on the same plane are called to emit. The convergent dispersion optical system is configured by corresponding to the light beams emitted by a plurality of semiconductor lasers. Each convergence is formed by dispersing individual lenses, so that the entire beam formed by each beam converges in a narrow manner in the late axis direction, and at the same time, each beam is shifted to a different position in the speed axis direction, and, Each beam is made to converge to the late axis direction and the velocity axis direction of each beam, and each beam is made incident on the convergence angle conversion optical system at a different specified position in the velocity axis direction of each beam, and the convergence angle conversion is performed. The optical system is such that the optical axis of each light beam is arranged on the upstream side from the uppermost position of the positions that cross each other as viewed from the direction of the speed axis, so that the convergence angle of the entire beam is When all the convergence angle of the beam emitted by the ratio of the dispersion optical system converges the convergence angle is also smaller, and to make this light incident to the optical fiber by all. The aforesaid convergent-dispersion optical system can be used as a convergent-dispersion individual lens arranged corresponding to each light beam, and has both a function of shifting the mutually different positions of the respective light beams in the direction of the speed axis; and The entire beam converges narrowly in the aforementioned slow axis direction, and at the same time, each of the beams -14-200425602 converges to the functions of the slow axis direction and the velocity axis direction of each beam. The aforesaid convergent and dispersed individual lens system is preferably a truncated lens. The convergence and dispersion optical system can be composed of: an offset optical system having a function of shifting each of the light beams arranged corresponding to each of the light beams to mutually different positions in the direction of the speed axis; and a light collection optical system such that The entire light beam formed by the light beams emitted by the offset optical system converges narrowly in the width in the late axis direction, and at the same time, each light beam converges in the late axis direction and the speed axis direction of the light beam, so that each The light beams are incident on the function of the convergence angle conversion optical system at mutually different designated positions in the direction of the speed axis of each light beam. Lu is preferably a truncated lens of the offset optical system. The aforementioned plurality of semiconductor lasers can be set separately from each other. The plurality of semiconductor laser systems may be an integrated one in which at least two or more of the plurality of semiconductor lasers are connected to each other. In addition, the roles of the convergent-dispersion optical system and the convergent-angle conversion optical system are not limited to the case where they are completely separated, and they can also be set as part of the mutual function. For example, the convergence angle conversion optical system may be a part of the function of the convergence-dispersion optical system that narrows the width of the beam in the direction of the speed axis or narrows the width in the direction of the slow axis. By. The third laser light multiplexing device of the present invention includes a laser block, an entire convergent optical system, and a convergence angle conversion optical system. The laser block is configured by a plurality of semiconductor lasers, and each of the semiconductor lasers is The active layer systems are parallel, and the positions of the respective active layers are positions different from each other in the thickness direction of the active layer, and are used to emit the light beams having parallel axes that are parallel to each other. The entire convergent optical system The late axis -15-200425602 emitted by the plurality of semiconductor lasers is an entire beam formed by mutually parallel beams, and the width in the direction of the late axis is narrowed to converge, and each beam is converged to the respective beam. The late axis direction and the velocity axis direction of the beam are such that each beam is incident on the convergence angle conversion optical system at a mutually different designated position in the velocity axis direction of the beam, and the convergence angle conversion optical system is The optical axis of the light beam is disposed on the upstream side from the position on the most upstream side among the positions that cross each other as viewed from the direction of the speed axis, so that the convergence angle of the entire light beam is dispersed by the convergence. The convergence angle of the entire beam when the faculty emits is still smaller, and the entire beam is made incident on the optical fiber. The entire convergent optical system can converge the entire beam formed by the semiconductor laser beams emitted by the semiconductor laser directly in the width direction of the late axis, while converging each beam to the beam. The late axis direction and the velocity axis direction make each beam incident on the velocity axis direction of the beam at a predetermined position which is different from each other, and enter the convergence angle conversion optical system. The cut-off lens of the entire convergent optical system is preferable. The entire convergent optical system may be constituted as follows: a collimate optical system, which is arranged corresponding to each light beam so that each light beam becomes a parallel light beam; the light collection optical system makes the entire parallel light beam at a later time The axial direction and width converge as narrow as possible. At the same time, each beam is converged to the late axis direction and the velocity axis direction of the beam, so that each beam is at a different designated position from the velocity axis direction of the beam. It enters the aforementioned convergence angle conversion optical system. The aforementioned collimating optical system is preferably a truncated lens. In addition, the functions of the entire convergent optical system and the convergent angle conversion optical system are not limited to those where they are completely separated, and may be set as a part of the functions of the convergent angle conversion optical system that also functions as a whole convergent optical system. For example, the Department of Convergence Angle Conversion Light -16-200425602 may be a person who has a function of converging such that the width of the light beam in the late axis direction is narrowed. The fourth laser light multiplexing device of the present invention is characterized by comprising: a laser block; a plurality of semiconductor laser systems are arranged so that the respective active layers of the semiconductor laser become parallel and the positions of the respective active layers The thickness direction of the active layer is different from each other, and is used to emit light beams having parallel late axes and optical axes that are parallel to each other; the collimating optical system is to make each of the light emitted from the plurality of semiconductor lasers The light beams are each parallel light beams; the optical axis is shifted in the optical system so that each light beam passing through the collimating optical system is located in the direction of the late axis of the light beams, and the optical axes are arranged at 1 orthogonal to the late axis. On the plane; the converging optical system, according to the optical axis shifting the optical system so that the optical axis is arranged on the aforementioned 1 plane and the entire beam formed by each beam converges on the late axis direction and the speed axis side of the beam. Direct and incident on the fiber. The aforementioned collimated optical system is preferably a truncated lens. In addition, the roles of the aforementioned collimating optical system, optical axis shifting optical system, and convergent optical system are not limited to the case where they are completely separated, and may be set to use a part of mutual functions. For example, the optical axis shifting optical system may be a part having a function of converging such that the width of the optical beam in the direction of the speed axis is narrowed, or the collimating optical system may have a function of making the optical beam at a later time Part of the function that converges narrowly in the axial direction. The aforementioned laser light multiplexing device is provided with: other semiconductor lasers different from the aforementioned plurality of semiconductor lasers; and the polarized light multiplexing device is provided before the light beam emitted by the plurality of semiconductor lasers enters the optical fiber. In the optical path of the light beam, the light beams emitted from the plurality of semiconductor lasers and the light beams emitted from the other -17-200425602 semiconductor lasers are polarized and combined, and the light beams emitted from the other semiconductor lasers are also incident. To the aforementioned fiber. The aforementioned polarization multiplexing system is a combination of beams whose polarization directions are different from each other by utilizing the properties of polarization. The laser light multiplexing device is provided with: other semiconductor lasers different from the plurality of semiconductor lasers; and a wavelength multiplexing device, in which a light beam emitted by the plurality of semiconductor lasers is incident on the light beam before it In the optical path, the light beams emitted from the plurality of semiconductor lasers and the light beams emitted from the other semiconductor lasers are multiplexed with each other, and the light beams emitted from the other semiconductor lasers are also incident on the optical fiber. The aforementioned wavelength multiplexing system uses a difference in wavelength to multiplex the light beams having mutually different wavelengths. The aforementioned laser light multiplexing device may be one that uses the multiplexed light formed by the light beams incident on the optical fiber and multiplexed on the optical fiber to excite the solid laser medium or the optical fiber laser medium. The aforementioned laser light multiplexing device may be a medium that uses a whole beam emitted by the convergence angle conversion optical system to directly excite a solid laser medium or an optical fiber laser medium. Let the aforementioned multiplexing light be infrared light, and the medium may be at least one of the rare earth element N d3 + and the rare earth element Yb3 +. The wavelength of the multiplexed light is set to be 350 nm or more and 460 nm or less. The medium may include at least one of a rare earth element Pr3 +, a rare earth element Er3 +, and a rare earth element Η〇3 +. The so-called "shifting each light beam at a mutually different position in the direction of the speed axis-18-200425602" means that the optical axis of each light beam is viewed from the late axis direction, and each light beam is at a different position. . The so-called truncated lens means that when plural lens arrangements are arranged to cross the optical axis of the lens, the size of each lens in the lens arrangement direction is rounded from the circular state to the lens arrangement direction. A plurality of lenses are arranged within a certain size. The aforementioned convergence angle conversion optical system may be any one having a reflecting surface, a refracting surface, a grid, a photonics crystal (an artificial lattice in which a dielectric is arranged in a three-dimensional arrangement), and the like. For example, in this convergence angle conversion optical system, when a plurality of prisms having a thin thickness that makes each of the above-mentioned light beams incident is laminated, a reflection surface, a refraction surface, or a grid surface may be formed on each prism to form a convergence angle conversion. In the optical system, each prism is formed by crystals of photonics to form a convergence angle conversion optical system. [Effects of the Invention] According to the laser light multiplexing method and the first laser light multiplexing device of the present invention, the optical axes of the beams that are converged when viewed in the direction of the speed axis are located at the most intersecting positions from the direction of the speed axis On the upstream side, a convergence angle conversion optical system is arranged further upstream, and the entire light beam formed by the light beams that are converged as viewed in the direction of the speed axis passes through the above-mentioned convergence angle conversion optical system to make the entire body of each light beam. The convergence angle of the light beam or a part of the light beam in the direction of the speed axis is a smaller convergence angle, and the entire light beam is incident on the end face of the optical fiber. Therefore, the above-mentioned convergence angle belonging to the redirection system is compared with the past. The conversion optical system is closer to the light source side, that is, it can be positioned on the side of the semiconductor laser, and at the same time, the number of beams that can be multiplexed in one optical fiber is increased, and it is no longer necessary to reorient the system as in the past. An optical system or the like for converging the light beam is arranged on the downstream side, so that the semiconductor laser emitting the light beam from -19-200425602 can be shortened to make the light beam incident on the optical fiber long, and the device can be miniaturized. Accordingly, it is possible to provide a small-sized and high-output optical multiplexing device. That is, for example, as shown in a plan view 26 (a) and a front view showing the above-mentioned laser light multiplexing method and a schematic configuration of the first wave device, the offset device 92 is used to make a plurality of semiconductor lasers << The beams L a, L c, and Le are shifted by the convergence optical system and converged by the convergence angle conversion optical system 94 and incident on the optical fiber 95 laser multiplexing device 90. The convergence optical system 93 converges L a The optical axes of Lc, Lc, and Le are located at the position Pk, which is the most upstream side of each other when viewed from the direction of the speed axis, and the angle conversion optical system 94 is positioned further upstream. Here, in the conventional method, the position where the optical axis system of each beam is determined will be consistent with the position of the beam waist. The optical axis and redirection system of each beam is limited to be arranged as the beam beam. Compared with this case, in the present invention, the convergence angle conversion optical system 94 is arranged at an arbitrary position in the optical axis direction (the direction of the arrow Z axis in the figure) between the convergence optical system 93 and the above. 'It is possible to miniaturize the device, and at the same time increase the degree of freedom in making the device. For example, when using a large-scale and easy-to-produce convergence angle conversion optics, the convergence angle conversion optics is arranged at a position where the distance system on the upstream side between the convergence optics and the optical fiber is widened. The high-convergence angle conversion optical system is the laser beam from the stopped light path. The 26th (b) 9 1 is emitted: 93 so that the positions where the beams at the end face of the beam cross are convergent and cross each other. The beam waist It means that the above position P k can be compared with the parts as the best inter-beam aspect. In the best case, -20-200425602, it can be used to converge the interval between the beams on the downstream side between the converging optical system and the optical fiber. A convergent dispersion optical system is arranged at a narrowed position. In addition, according to the conventional method described above, the convergence angle conversion optical system that can be used is limited to a small one with high production accuracy. From the left side (direction of arrow Z in Fig. 26 (a)), it can be seen from Fig. 26 (c) that the light beam passing through the convergence angle conversion optical system is shown in Fig. 26 (c). The linear arrangement is in the direction of the speed axis, so the interval between the light beams is large. Accordingly, the degree of freedom in making the convergence angle conversion optical system is increased, and the production becomes easy. Lu You, if the light beam converging device makes each light beam emitted by the light beam converging device have an emission angle viewed in the late axis direction, the radiation angle of the respective light beams corresponding to the respective light beams emitted by the semiconductor laser when viewed in the late axis direction is radiated. If the angle is still small, the incident angle of the light beam incident on the optical fiber can be set small. Because the amount of light to be incident into the incident range determined by the numerical aperture NA of the optical fiber can be set more, the multiplexing can be increased here. The amount of light in the fiber. In addition, when the wavelengths of the light beams emitted by the plurality of semiconductor lasers are 350 nm or more and 460 nm or less, the optical components used in the device can be significantly limited. Therefore, when using this limited optical component, By increasing the degree of freedom in the arrangement of parts during the production of the above-mentioned device, it is possible to obtain a significant effect of ease of making the device. In addition, the use of a plurality of semiconductor laser laser light multiplexing devices for emitting these short-wavelength light beams can reduce the concentration point of the laser light of the multiplexing, thereby increasing the energy density of the laser light. , So suitable for laser processing. Regarding the second laser optical multiplexing device described below, a plurality of semiconductor lasers are arranged such that the active layers of the semiconductor lasers are 21-200425602 aligned on the same plane, and are provided to emit on the same plane. In the laser light multiplexing device of the laser block having the respective light beams with parallel axes parallel to each other, the present inventor has made the problem of miniaturizing the size of the device, and a method of shortening the optical path length when the light beams are multiplexed. As a result of various reviews, we obtained the idea that a plurality of machines, such as the function of shifting the above-mentioned beams or the function of converging each beam and the entire beam, can be provided by a single optical member, and then based on this idea, The invention of the second laser light multiplexing device was achieved. The second laser light multiplexing device of the present invention is provided with a convergence angle conversion optical system in which the convergence angle of the entire light beam as viewed in the axial direction is set to a smaller convergence angle, and the entire light beam is incident on an optical fiber. This convergence angle conversion optical system is disposed on the upstream side from the position of the most upstream side among the positions where the optical axes of the respective beams intersect with each other in the direction of the speed axis, so it is the same as in the case of the first laser light multiplexing device described above. Ground, a small and high-output device can be obtained. In addition, if the convergence-dispersion optical system has the function of collimating the beam, the function of shifting the beam, and the function of converging each beam. And a plurality of functional optical systems, such as the function of converging the optical axis of each beam, etc., the optical path length can be shortened, and the device can be made more compact. In addition, when the convergence-dispersion optical system has a function of shifting each of the light beams to mutually different positions in the direction of the speed axis, and narrowing the width of the entire light beam formed by the light beams in the late-axis direction, At the same time, each light beam is converged to the convergence of the two functions, such as the slow axis direction and the speed axis direction of the light beams. When the individual lenses are dispersed, an optical system for shifting each light beam and converging each light beam can be provided separately. Under the optical system, the light emitted from the semiconductor laser can be multiplexed into the fiber-22-200425602, so the optical path length can be shortened more reliably, and the optical components arranged in the optical path can be reduced. This allows the device to be reliably miniaturized. In addition, if the convergent-dispersion optical system is constituted as follows, an optical system that converges the optical axis of each light beam and an optical system that converges each of the light beams can be separately provided. The emitted light beams are multiplexed in the optical fiber, so the length of the optical path can be shortened more reliably, and the number of optical components arranged in the optical path can be reduced. This makes it possible to reliably miniaturize the device. The configuration is such that the offset optical system is arranged corresponding to each light beam and has a function of shifting each of the light beams to mutually different positions in the direction of the speed axis; the light collecting optical system is provided with a function of making the offset optical system emit The entire beam formed by the respective beams converges narrowly in the width of the late axis direction, and at the same time, each beam is converged to the late axis direction and the velocity axis direction of the beam, and each beam is aligned to the velocity axis of the beam. The direction is incident on the function of the convergence angle conversion optical system at different designated positions. Furthermore, when the convergent lens is made as a truncated lens or the offset optical system is made as a truncated lens, it is possible to make the diameter with the late axis direction small and the diameter with the velocity axis large. Each of the above-mentioned light beams with a circular cross-section passes through this truncated lens, so that each light beam can efficiently pass through the translucent lens, and because the space between the light beams can be filled, the device is more compact and the output can be improved. . In addition, if the plurality of semiconductor lasers are separated from each other, the semiconductor laser and the optical system can be aligned by adjusting the position of the semiconductor laser, because the freedom of optical axis adjustment is increased, so the above Alignment system becomes easier 'The efficiency of combining each beam to the fiber can be further improved. Together, it can suppress the influence of heat generated by semiconductor lasers on other semiconductor lasers, and stabilize the oscillation of semiconducting -23- 200425602 body lasers. In addition, when at least two or more of the plurality of semiconductor lasers are integrators connected to each other, the semiconductor laser can be configured as a laser strip, which can increase the assembly density of the semiconductor laser. The third laser light multiplexing device of the present invention is provided with a convergence angle conversion optical system that converges the convergence angle of the entire light beam as viewed in the direction of the speed axis to a smaller convergence angle and makes the entire light beam incident on the optical fiber. The convergence angle conversion optical system is disposed on the upstream side from the most upstream position among the positions where the optical axes of the respective beams intersect with each other in the direction of the speed axis. Therefore, it can be obtained in the same manner as in the case of the first laser light multiplexing device. A small and high-output device, and a plurality of semiconductor laser systems are provided. The active layers of the semiconductor lasers are arranged in parallel, and the positions of the respective active layers are arranged at positions different from each other in the thickness direction of the active layer. In other words, a laser block for emitting light beams having mutually parallel late axes is used. Therefore, without using means such as increasing the aberration of the beam by inserting a cylindrical lens at an angle to the late axis direction, etc., The axes are parallel to each other and in the direction of the speed axis, and their positions are different, that is, each beam that is shifted in the direction of the speed axis is generated without deteriorating the aberration of each beam. The above-described offset amount of the respective light beams irrespective less aberration properly introduced into the optical fiber, can be suppressed to increase the number of multiplexed beams attendant low binding efficiency to the optical fiber drop of each beam. Furthermore, since the optical system for shifting the light beams emitted by the plurality of semiconductor lasers can be omitted, the device can be miniaturized. In addition, if the entire converging optical system converges the entire light beam formed by each light beam emitted by a semiconductor laser in the width direction of the late axis directly, and converges each light beam in the late axis direction of the light beam. And the direction of the speed axis, so that each beam of -24-200425602 is incident on the direction of the speed axis of the beam at a different specified position and incident on the aforementioned convergence angle conversion optical system, the semiconductor laser and the entire convergence optical system For example, each light beam can be made incident on an optical fiber without an optical system for collimating the light beams, thereby shortening the optical path length from the semiconductor laser to the optical fiber, so that the device can be made more compact. In addition, when the entire convergent optical system is a collimating optical system configured to correspond to each light beam so that each light beam becomes a parallel light beam, and the width of the entire parallel light beam in the late axis direction is narrowed to converge at the same time, Converge each light beam to the direction of the slow axis and the speed axis of each light beam, and make each light beam incident on the convergence axis conversion optical system of the convergence angle conversion optical system in the direction of the speed axis of each light beam at a different specified position. Department of the constitution, for example, in the light path is not individually arranged to make the whole. Under the optical system that converges the light beams and the optical system that converges each light beam individually, each light beam can be made incident on the optical fiber, and the optical path length from the semiconductor laser to the optical fiber can be shortened, so that the device can be made more compact. In addition, if the entire convergent optical system is a truncated lens, or if the collimating optical system is a truncated lens, it is possible to make a circle with a small diameter in the late axis direction and a large diameter in the velocity axis direction. Each of the above-mentioned beams and beams in the shape of the cross-section pass through this truncated lens, so that each beam can efficiently pass through the lens, and because the space between the beams can be filled, the device can be made more compact, and the output can be improved. . The fourth laser optical multiplexing device of the present invention is provided with a laser block, and is arranged such that a plurality of semiconductor lasers emit respective light beams having parallel late axes and optical axes parallel to each other. In the same way, the radiating light multiplexing device can generate -25-200425602 beams of the speed axis direction shift without increasing the aberration of the beam, and can separate each beam without aberration regardless of the above-mentioned shift amount. Correctly introducing the optical fiber can suppress the decrease in the coupling efficiency of the optical fiber of each beam accompanying the increase in the number of multiplexing beams. In addition, since the optical system for shifting the light beams emitted by a plurality of semiconductor lasers can be omitted, the device can be miniaturized. If the collimating optical system is a truncated lens, it is the same as above. Ground, each beam can efficiently pass through the lens, and at the same time, the space between the beams can be filled, so the device can be made smaller and the output can be further improved. In addition, if the structure is provided with a polarization multiplexing device or a wavelength multiplexing device and the light beams emitted from other semiconductor lasers are also incident on the optical fiber, the output of the multiplexed light in the optical fiber can be further improved. . In addition, if a multiplexed light formed by multiplexing in an optical fiber is used to excite a solid laser medium or a fiber laser medium, a laser light having a large output with a desired wavelength can be obtained. In addition, if the entire beam emitted by the convergence angle conversion optical system is used to directly excite a solid laser medium or a fiber laser medium, a laser light having a large output with a desired wavelength can be obtained. [Embodiment] Hereinafter, a first embodiment of the present invention will be described using drawings. < Embodiment 1-1 > Fig. 1 is a schematic configuration diagram showing a laser light multiplexing device of a first embodiment (hereinafter, referred to as embodiment 1-1) in the first embodiment of the present invention. Figure 1 (a) is a plan view of the above laser light multiplexing device when viewed from above. Figure 1 (b) is a positive view of the above laser light multiplexing device when viewed from the direction of semiconductor laser alignment. 1 (c) is a left side view of the laser light multiplexing device as viewed from the optical axis direction of the light beam. Fig. 2 is a perspective view showing a state in which a laser beam is emitted from an active layer of a semiconductor laser. The third diagram shows the structure of the non-convergent angle conversion optical system and the state diagram of the light beam multiplexed by the optical fiber by the convergent angle conversion optical system. Fig. 3 (a) is a plan view showing the structure of a convergence angle conversion optical system, Fig. 3 (b) is a front view of the structure of a convergence angle conversion optical system, and Fig. 4 is a view showing that a convergence-dispersion lens to be described later is shifted. Figure 4 (a) shows the beam pattern that passes through the above-mentioned beam-scattering lens as viewed from the Z direction and the X direction with the Y direction as the upper direction, and the 4 (b) figure shows the X · The light beam pattern passing through the above-mentioned beam dispersing lens as seen from the Z direction and the Y direction when the direction is up. As shown in FIG. 1, the laser light multiplexing device 101 of the above-mentioned embodiment 1-1 is provided with a laser block 1 1 0 in which a plurality of semiconductor lasers are arranged, a convergence dispersing lens 120 which is a convergence dispersing optical system, and Convergent angle transform optical system 30. Laser block 1 1 0 series, a plurality of semiconductor lasers 11 A, 11 B, 11 C ... (hereinafter, also referred to as semiconductor laser 11) individually and individually arranged Layers 12 A, 12 B, 12 C ... (hereafter, _ are also referred to as active layers 1 2) are arranged in a line on the same plane Η1, and are used to emit the parallel axes on the same plane Η1. Each of the light beams L a, L b, L c... Each semiconductor laser 1 1 is a nitride semiconductor semiconductor laser with an output of 1 W, an oscillation wavelength of 400 to 420 nm, and an edge type. As shown in FIG. 2, the thickness direction of the active layer 12 (the F-axis direction in the figure) , Hereafter, also referred to as the direction of the speed axis), the luminous amplitude D f = 1 μm, and the direction of the active layer 12 orthogonal to the direction of the speed axis is parallel to the direction (S-axis direction in Fig.-27- 200425602, hereinafter also referred to as It is the direction of the late axis) and the light emission width D s = 10 μm. The effective number 値 aperture N A (f) in the velocity axis direction of the light beam emitted from each semiconductor laser 11 is 0.5, and the effective number 値 aperture N A (s) in the late axis direction is 0.2. In addition, as described above, the speed axis direction referred to herein is a vertical direction with respect to the active layer of the edge-emitting semiconductor laser, and the slow axis direction is parallel direction with respect to the active layer. In addition, the numerical aperture Δ (f) = 0.5 is the effective number 方向 of the aperture in the direction of the velocity axis of a light beam emitted by a general semiconductor laser. The X direction, the Y direction, and the Z direction are orthogonal to each other, and the speed axis direction of the light beam emitted by the semiconductor laser 11 _ (the direction in which the diffusion angle of the light beam is large) becomes the same direction as the X direction. The direction in which the diffusion angle of the light beam is small) becomes the same direction as the Υ direction. The laser block 110 is made of five semiconductor lasers 11A, 11B, 11C, 11D, and 11E. The converging and dispersing lenses 1 20 are respective converging and dispersing individual lenses 1 2 1 A, 12 1 B, 1 2 1 C arranged corresponding to the respective light beams L a, L b, L c, ... emitted from a plurality of semiconductor lasers 1 1. … Formed by converging the entire beam formed by the above-mentioned light beams L a, · L b, L c, ... in the above-mentioned late axis direction with a narrow width, and simultaneously making each light beam in the direction of the speed axis, mutually The different positions (shown as P1, P2, P3, ... in the figure) are shifted, and each beam La, Lb, Lc ... is converged to the late axis direction and the velocity axis direction of each beam, Each of the light beams L a, L b, L c... Is incident on the direction of the speed axis of each light beam at mutually different designated positions 39A, 39B, 39C. The function of shifting the beam, the mechanism of converging the optical axis of each beam > 28-200425602, and the function of converging each beam individually. Here, the above-mentioned convergence angle is the angle at which the entire beam looks at the y z plane of the convergence direction when the width of the entire beam is narrowed in the late axis direction, that is, the convergence angle when viewed in the direction of the speed axis. The convergence-dispersion lens 120 is a truncated lens formed by each of the convergence-dispersion individual lenses 1 2 1 A, 1 2 1 B, 1 2 1 C,.... The convergence angle conversion optical system 30 of the redirection system is such that the convergence angle αΐ of the entire beam when the convergence angle viewed from the direction of the speed axis of the entire beam is emitted from the convergence dispersion lens 120 becomes a smaller convergence angle α2, and When the light beam is incident on the core 41 of the optical fiber 40, when viewed in the direction of the speed axis (here, the YZ plane), the optical axis of each light beam is arranged at the position P a which is the most upstream side among the positions crossing each other. . In addition, the diameter of the core portion 41 of the optical fiber 40 is 50 μm, and the number of apertures NA is 0.2. The numerical aperture N A of the convergent dispersion lens 120 as viewed in the direction of the speed axis is set to be larger than the numerical aperture N A of the optical fiber 40. As shown in Figs. 3 (a) and 3 (b), the convergence angle conversion optical system 3 0 has a plurality of prisms 31A, 3 1 B, 3 1 C, etc., which are thin in the speed direction of the X axis. It is formed by laminating in the direction of the speed axis, and converges by the convergent dispersing lens 1 20 such that the width of the entire axis of light in the slow axis direction is narrowed. When viewed in the direction of the speed axis, the light is incident toward the convergence angle conversion optical system 30 The beams L a, Lb, L c, whose axis angles are different from each other, are made to be incident on the designated prisms 3 1 A, 3 1 B, 3 1 C, etc. corresponding to each beam, and at each prism 3 1 A , 3 1 B, 31C ..., change the propagation direction of each beam. That is, when viewed in the direction of the speed axis, the prisms 3 1 A, 3 1 B, 3 1 D, 3 1 E make the convergence angle of the entire light beam emitted by the convergent dispersion lens 120 to a smaller convergence angle, and at the same time, in the late axis Seen from the direction, it converges the optical axis of each light beam incident at -29-200425602 in a divergent state (refer to Figure 3 (b)). The prism 3 1 C located at the center is set so that the light beam L c propagating toward the center of the optical fiber passes therethrough, so that the propagation direction thereof is not bent. The function of the above embodiment will be described below. Each of the light beams la, Lb, L c, which have a late axis on the same plane H1 emitted by the plurality of semiconductor lasers 11A, 11B, 11C, etc., disperse the individual lenses by convergence. 1 2 1 A, 1 2 1 B, 1 2 1 C, etc., so that the entire beam formed by each of the light beams L a, L b, L c, ... converges narrowly in the width direction of the above-mentioned late axis (that is, the speed The axis is converged when viewed in the axial direction), and at the same time, each beam is in the direction of the speed axis, and is shifted at different positions P1, P2, P3 .... Together with ground ', each of the light beams L a, L b, L c ... converges in the direction of the slow axis and the speed axis of each light beam. That is, the convergent-dispersion individual lenses 121 A, 121 B, 121 C,... Constituting the convergent-dispersion lens 120 each have mutually different refractive powers that change the propagation direction of the light beam. As shown in FIG. 4, the individual lenses 1 2 1 A which are located at the periphery of the entire beam are dispersed and dispersed. The lens 1 2 1 A has a large variation in the propagation direction of the incident beam La in the direction of the late axis S, so that the distance between the optical axes of the beams is large. At the same time, it narrows the distance between the optical axes of each other in the direction of the speed axis F, and converges this light beam La to enter the designated prism 3 1 A of the convergence angle conversion optical system 30. In addition, the convergent-dispersion individual lens 121C located at the center of the entire light beam is provided so that the propagation direction of the incident light beam L c is not changed in the direction of the late axis S or the direction of the speed axis F, and the light beam L c is converged and incident. Function to designated prism 3 1 C of convergence angle conversion optical system 30. In addition, the convergence and dispersion shown on the left side of Figs. 4 (a) and 4 (b) as viewed from the Z axis direction. 30- 200425602 Individual lens 1 2 1 A The solid line in the figure indicates the convergence and dispersion of individual lens 1 2 1 A semiconductor laser 1 1 A lens side, the dotted line in the figure above indicates the convergence and dispersion of individual lens 1 2 1 A convergence angle conversion optical system 30 lens side, the position of the center of curvature of each lens surface The system is shifted diagonally with respect to the X-axis and the γ-axis. Thereafter, each of the light beams La, Lb, Lc, ... are respectively oriented in the direction of the speed axis F, and are incident on the designated angles of the convergence angle conversion optical system 30 from mutually different designated positions 3 9 A, 3 9 B, 3 9 C, .... The prisms 31 A, 31 B, 31 C ..., and according to the prisms 31A, 31B, 31C ..., as described above, when viewed in the direction of the speed axis, the convergence angle of the entire beam when the convergent divergent lens 120 is emitted becomes With a smaller convergence angle, when viewed in the late axis direction, the optical axis of each light beam incident in a divergent state converges so that the direction of the optical axis of each light beam is transformed, and the entire light beam is incident on the core 41 of the optical fiber 40. Here, the converging waist of each light beam is positioned at the incident end face of the core 41, and each light beam is propagated through the convergence dispersing lens 120 and the convergence angle conversion optical system 30. According to the foregoing, from 5 semiconductor lasers 1 1 A, 1 1 B, 1 1 C ... The emitted light beams each with an output of 0.5 W are multiplexed on the core part 4 of the optical fiber 40, and can be output from the core part 4 1 2 · 2 5 W laser light. That is, the five laser beams are bonded to the optical fiber with a coupling efficiency of 90%. < Embodiment 1 to 2 > A laser light multiplexing device according to a second embodiment (hereinafter, referred to as Embodiment 1 to 2) in the first embodiment of the present invention will be described below. Figure 5 shows a schematic plan view of the above-mentioned laser light multiplexing device. Figure 5 (a) is a plan view of the laser light multiplexing device viewed from above. Figure 5 (b) is a semi-200425602 conductor laser array. Figure 5 (c) shows the left side view of the laser multiplexing device from the direction of the optical axis of the beam. Figure 6 shows the individual lenses constituting the offset lens to deflect the beam. Figure 6 (a) is a conceptual diagram of the above-mentioned individual lens with the Y direction as the upper surface of the paper, and Fig. 6 (b) is the above-mentioned individual lens with the X direction as the upper surface of the paper Fig. 7 is a diagram showing a situation in which the convergence angle conversion optical system slows down the degree of convergence of the optical axis of the entire light beam that has sharply converged when viewed in the late axis direction. The above-mentioned laser light multiplexing device 102 replaces the convergence-dispersion lens of the convergence-dispersion optical system in the above-mentioned Embodiments 1-1, and separately arranges the offset lens of the offset device and the light-collecting lens that converges the entire beam The other components are the same as those in the first to first embodiments. In the following, the components having the same functions as those of the laser light multiplexing device 101 of the above-mentioned Embodiments 1-1 are denoted by the same reference numerals, and description thereof will be omitted. The above-mentioned laser light multiplexing device 102 ′ is configured by a plurality of light beams emitted from a plurality of semiconductor lasers 1 1 A, 1 1 B,... , And a shift lens 1 2 3 capable of simultaneously shifting in mutually different positions in the direction of the speed axis; and the width of the entire beam formed by the beams emitted by the shift lens Lu 123 in the direction of the slow axis is changed Converge narrowly, and simultaneously converge each beam to the late axis direction and velocity axis direction of each beam, so that each beam enters the aforementioned convergence angle conversion optics at different designated positions in the velocity axis direction of each beam. It is composed of a condenser lens 1 2 4 with a function of 30 B. In addition, the offset lens 123 is a truncated lens composed of offset individual lenses 123A, 123B, ... belonging to each lens, which are arranged corresponding to each light beam. Furthermore, the optical system formed by the offset lens 123 and the light collecting lens 124 is the same as that of the convergent dispersion lens 1 2 0 in the above-mentioned embodiment 1-1. Each of the plurality of semiconductor lasers 11A, 11B, 11C ... each of the light beams L a, Lb, L c, which have a late axis on the same plane H1, passes through the offset lens 123, and each of the light beams is at a high speed. The axis direction is shifted at different positions. More specifically, as shown in Fig. 6, each of the offset individual lenses 123A, 123B, 123C, ... constituting the offset lens 123 has mutually different refractive powers that change the propagation direction of the light beam. The individual lens 123A located at the peripheral edge portion of the entire light beam makes the propagation direction of the incident light beam La not change in the direction of the slow axis but changes in the direction of the speed axis and is incident on the light collecting lens 1 2 4. In addition, the offset individual lens 1 23 C located at the center of the entire beam does not change the propagation direction of the incident light beam L c in the late axis direction and does not change in the direction of the speed axis, and is incident on the light collecting lens 1 2 4. In addition, the solid line in the figure showing the offset individual lens 1 2 3 A shown on the left side of FIGS. 6 (a) and 6 (b) from the Z axis direction indicates the offset of the individual lens 1 2 3 A The lens surface on the side of semiconductor laser 1 1 A. The dotted line in the above figure indicates the lens surface on the side of the convergence angle conversion optical system 30B shifted from the individual lens 1 23 A. The position of the center of curvature of each lens surface is at X · Axis offset. The entire light beams emitted by the offset lens 123 and formed by the light beams La, Lb, Lc, ... passing through the light collecting lens 124 converge so as to narrow the width in the late-axis direction, and each light beam L a, L b, L c... Are converged to the slow axis direction and the velocity axis direction of each light beam. After that, each of the light beams L a, L b, L c, ... is in the direction of the speed axis F, and enters a prism of the convergence angle conversion optical system 3 0 B-2004- 25602 at a specified position different from each other at the speed. Seen in the axial direction, the convergence angle of the entire beam formed by each beam (xl is passed through each prism, and the convergence angle of the entire beam formed by each beam becomes a smaller convergence angle α2, and as shown in FIG. 7, As viewed in the axial direction, the optical axis of each beam propagating in a state where the optical axis of each beam converges sharply changes the optical axis direction of each beam so that it converges more slowly, and the entire beam system is incident on the core 4 of the optical fiber 40 1. That is, as described above, the convergence angle α2 of the entire light beam emitted by the convergence angle conversion optical system 30B is an angle smaller than the convergence angle αΐ of the entire light beam when emitted from the light collecting lens 124. Even if it is In this case, the optical axis of the convergence angle conversion optical system 3 0 Β and the convergent light beams L a, L b, L c, etc. emitted and emitted by the light collecting lens 1 2 4 is arranged in the direction of the speed axis. The position is the most upstream position among the positions crossing each other P a is further upstream. According to the above, according to the above-mentioned situation, the light beams emitted by the five semiconductor lasers 1 1 A, 1 1 B, 1 1 C, each having an output of 0.5 W are multiplexed on the optical fiber 40 The core portion 41 can output laser light of 2.25 W from the core portion 41. That is, the five laser beams are bonded to the optical fiber with a coupling efficiency of 90%. Also, the above-mentioned embodiments 1-1 and 1-2 are described above. And the following explanations _ Examples 2-1 to 2-5 and Examples 3-1 of the laser multiplexing device method, the semiconductor laser assembly configuration, the convergence and dispersion of the truncated lens The optimization of the beam convergence and dispersion function of the optical system and the convergence angle conversion function of the convergence angle conversion optical system can also be applied to patent documents already proposed by the applicant (for example, Japanese Patent Application No. 2002 — 287640, Japanese Patent Application No. 2002-201979) and other types of optical fiber and laser (laser light multiplexing device) with a stacking type (structure in which semiconductor lasers are stacked in the direction of the speed axis). -34- 200425602 Figure 8 shows The configuration diagram when a plurality of semiconductor lasers are arranged, and the eighth (a) diagram is a complex diagram Each of the semiconductor lasers is an independent structure diagram. FIG. 8 (b) is a diagram showing a structure in which a plurality of semiconductor lasers are dispersed on a plurality of substrates, and FIG. 8 (c) is a diagram showing a plurality of semiconductor lasers as Structure diagram of the laser bar. As shown in FIG. 8 (a) in the foregoing Embodiments 1-1, 1-2, each of a plurality of semiconductor lasers 1 5 A, 1 5 B, ... Those who are separated from each other, but are not limited to this case, the plurality of semiconductor lasers are such that at least two or more of the plurality of semiconductor lasers 17A, 17B are connected to each other to make φ an integrated laser length The constituents of the article. More specifically, as shown in FIG. 8 (b), the above-mentioned plural semiconductor laser systems may be adopted. At least two of the semiconductor lasers 1 7 A, 1 7 B, etc., that is, the semiconductor laser 17 A and 17B are connected and integrated, and semiconductor lasers 17C and 17D are connected and integrated, and semiconductor lasers 17 E and 17 F are connected and integrated. As shown in FIG. 8 (c), the above-mentioned plurality of semiconductor lasers can also be used. All the semiconductor lasers 1 8 A to 1 8 F are connected to form a single laser strip 18. _ In addition, as shown in FIG. 5, the laser light multiplexing device of Embodiments 1 to 2 is used as the laser light multiplexing device of Embodiment 1 to 2 and emitted to the core portion 41 of the optical fiber 40 and multiplexed in the optical fiber 41. The combined light LX formed by each beam excites the solid laser medium Kb, or the optical fiber laser medium Fb, or the entire beam emitted by the semiconductor laser 11 and passing through the convergence angle conversion optical system 30B to directly excite the solid laser The medium K b or the medium F b of the optical fiber laser may also be used. -35- 200425602 That is, the multiplexed light LX multiplexed into the core 41 of the optical fiber 40 using the above-mentioned laser multiplexing device, or the entire light beam Lg of the optical system 30B passing through the convergence angle conversion is used to excite the solid laser. The medium Kb, and the output mirror M 1 and the reflector M 2 in the solid laser oscillate to generate laser light lk, or to excite the medium F b of the optical fiber laser disposed in the core portion 41 of the optical fiber 40 to generate a laser. The emitted light L f is also acceptable. When the multiplexed light L X is infrared light, it is preferable that the medium κ b and the medium F b include at least one of rare earth elements N d3 + and rare earth elements Yb3 +. In addition, when the wavelength of the multiplexed light LX is 350 nm or more and 460 nm or less, the medium K b and the medium F b are made of a rare earth element P r3 +, a rare earth element Er 3+, and a rare earth element Η 〇 3 + At least one of them is better. In addition, the excitation of the multiplexed light in the above-mentioned optical fiber, the excitation of the solid laser medium or the optical fiber laser medium can be applied to the above-mentioned Embodiments 1 to 1 or Embodiments 2 to 1 to 2 described below — 5 '实施 例 3-1. Hereinafter, a second embodiment of the present invention will be described using drawings. In the second embodiment, those having the same functions as those in the first embodiment are denoted by the same reference numerals and descriptions thereof are omitted. <Embodiment 2-1 > Fig. 9 is a schematic configuration diagram of a laser light multiplexing device 201 of a first embodiment (hereinafter, referred to as Embodiment 2-1) in a second embodiment of the present invention. Figure 9 (a) is a plan view of the above-mentioned laser light multiplexing device when viewed from above, Figure 9 (b) is a front view of the above-mentioned laser light multiplexing device when viewed from the direction of the arrangement of semiconductor lasers, and Figure 9 (c) The figure shows the laser light-36- 200425602 multiplexing device viewed from the direction of the optical axis of the light beam. Figure 10 shows the convergence angle conversion optical system that converges the optical axes of the beams that are parallel to each other when viewed in the direction of the late axis. Situation chart. As shown in Fig. 9, the laser light multiplexing device 201 of Example 2-1 is provided with the laser block 10, the entire convergent optical system 20, and the convergent angle conversion optical system 30C. Laser block 10 series, plural semiconductor lasers 1 1 A, 1 1 B, 1 1 C ... (hereinafter, all are also referred to as semiconductor laser 11), and semiconductor laser 11 has an active layer 12 A , 12 B, 12 C ... (hereinafter, all are also referred to as active layer 12) are parallel, and the positions of the respective active layers 1 2 A, 1 2 B, 1 2 C ... are related to the active layer 1 2 The thickness directions (direction of arrow X in the figure) are arranged at mutually different positions 1 3 A, 1 3 B, 1 3 C, and the like, and each of the light beams having mutually parallel late axes is emitted. That is, a step is formed on the laser block 10 to configure each semiconductor laser 11. Each semiconductor laser 11 is a side-emitting nitride-based semiconductor laser with an output of 1 W and an oscillation wavelength of 400 nm to 4 20 nm. The light emission amplitude D in the direction of the speed axis F = 1 η, and the light emission in the direction of the slow axis S The amplitude D s = 25 μτη. In addition, the effective number of holes A in the direction F of the speed axis F of the light beams emitted by each semiconductor laser 11 is 0 · 5, and the effective number of holes N A (s) in the direction of the late axis S is 0.2. As described in the first embodiment, the direction of the speed axis f is the thickness direction of the active layer of the edge-emitting semiconductor laser, and the direction of the slow axis is parallel to the direction of the active layer. The direction in which the emitted light beam has a large diffusion angle is the direction of the beam's speed axis (the direction of the arrow F in the figure), and the direction of the small beam's diffusion angle is the slow axis direction of the beam (the direction of the arrow S in the figure) -37- 200425602 The above-mentioned laser block 10 has five semiconductor lasers HA, 11B, lie, 1 1 D, 1 1 E and so on. The entire converging optical system 20 is made up of a plurality of light beams L a, L b, L c ... formed by delaying the axes of a plurality of semiconductor lasers 11 parallel to each other and having mutually different positions in the direction of the speed axis F. The width of the beam in the late axis direction (consistent with the arrow Y direction in the figure) becomes narrow and converges. At the same time, each beam converges in the late axis direction and the velocity axis direction (here, the arrow X direction in the figure), so that Each of the light beams L a, Lb, L c... Is in the direction of the speed axis F, and is at a different designated position 39 A, 39 B, 39 (incident into the convergence angle conversion optical system _ 30C. In addition, the entire convergence optical system The optical axes of the light beams La, Lb, Lc, etc. emitted from 20 become parallel to each other in the direction of the late axis. The convergence angle conversion optical system 30 C, which belongs to the redirection system, makes the entire beam in the direction of the speed axis. The convergence angle seen is smaller than the convergence angle (X11) of the entire beam when it is emitted from the entire convergence optical system 20 (X11, and the entire beam is made incident on the core 41 of the optical fiber 40. The light of each beam The shaft system is arranged in the direction of the speed axis. P b is also on the upstream side. In addition, the core 41 of the optical fiber 40 has a diameter of 50 μιη and a numerical aperture NA of 0.2 · 〇 The convergence angle conversion optical system 30 C system is shown in Fig. 10, and When viewed in the axial direction, the optical axes of the mutually parallel light beams La, Lb, Lc, etc. emitted from the entire convergent optical system 20 are converged. In addition, the number of the entire convergent optical system 20 viewed in the direction of the speed axis 値 aperture NA system It is set to be larger than the numerical aperture ΔA of the optical fiber 40. The entire convergent optical system 20 is composed of the respective light beams L a, Lb, L c, etc. emitted from a semiconductor laser 11 -38- 200425602 for complex numbers. The individual collimating lenses 21 A, 21 B, 21 C, which are straight to the late axis direction and the speed axis direction (hereinafter, all are also referred to as individual collimating lenses 21), and are used to make the respective light beams L a, L b, L c... Is formed by the entire converging lens 22 that converges the width of the entire light beam in the late axis direction. The individual collimating lens 2 is constituted as a truncated lens. In the configuration, the speed axis direction system always coincides with the X direction. Next, the above-mentioned embodiment is described. The function is explained. Each of the light beams L a, Lb, L c., Which are emitted from a plurality of semiconductor lasers 1 1 A, 1 1 B, 1 1 C, etc., and whose positions are different from each other in the direction of the speed axis, are The individual collimating lenses 2 1 A, 2 1 B, 2 1 C, etc. become parallel light beams. The light beams L a, L b, The entire beam formed by L c ... is converged so that the width in the late axis S direction is narrowed by the entire convergence lens 22. Thereafter, each of the beams La, Lb, Lc, ... is oriented in the direction of the speed F, and Different designated positions 39A, 39B, 39C ... and incident on designated prisms 31A, 31B, 31C of the convergence angle conversion optical system 30C ... and incident on _ each prism 3 1 A, 3 1 B, 3 1 C ..., At each prism 3 1 A, 3 1 B, 3 1 C, ..., the convergence angle of the entire beam formed by each beam becomes a smaller convergence angle when viewed in the direction of the speed axis, and the optical axis of each beam is delayed. When viewed in the axial direction, the directions of the respective optical axes are transformed in a convergent manner, and the entire light beam is incident on the core 41 of the optical fiber 40. Here, the converging waist of each light beam is located near the incident end face of the core 41, and each light beam is propagated by the convergence-dispersion optical system 20 and the convergence-angle conversion optical system 30C. • 39- 200425602 The convergence angle α 1 2 of the entire beam emitted by the convergence angle conversion optical system 30C is emitted from the entire convergence lens 22, that is, it is more convergent than the entire beam when emitted through the entire convergence optical system 20. The angle all is also a small angle. 0 According to the above, the light beams with 1.0W output from each of the five semiconductor lasers 11A, 11B, and 11C are multiplexed at the core 41 of the optical fiber 40. 4 · 5 W laser light can be output from the core 41. That is, the five laser beams are bonded to the optical fiber with a coupling efficiency of 90%. <Example 2-2> φ Hereinafter, a laser light multiplexing device of a second example (hereinafter referred to as "Example 2-2") in the second embodiment of the present invention will be described. FIG. 11 is a schematic configuration diagram showing a laser light multiplexing device of Embodiment 2-2. The laser light multiplexing device 202 of the above-mentioned embodiment 2-1 is further provided with the polarization multiplexing of the polarization multiplexing of the light beams emitted by other semiconductor lasers in accordance with the structure of the laser light multiplexing device of the above embodiment 2-1. Wave installer. In the following, the same components as those of the laser light multiplexing device 201 of the embodiment 2-1 are denoted by the same reference numerals, and description thereof will be omitted. · The laser light multiplexing device 202 of the above embodiment 2-2 is provided with: a laser block 10 configured with five semiconductor lasers 11A, 11B, 11C, 11D, 1 1 E; individual collimating lenses 21, so that Each of the light beams L a, Lb, L c ... emitted from the above-mentioned plurality of semiconductor lasers 1 1 are respectively collimated in the direction of the slow axis and the direction of the speed axis; the entire converging lens 22 makes the parallel beams according to the individual collimating lenses 21 1 The entire beam formed by each of the beams L a, L b, L c, ... converges narrowly in the width of the late axis direction, and simultaneously makes each beam converge in the late -40- 200425602 axis direction and velocity axis. Directions so that each of the light beams L a, L b, L c, ... is incident on the direction of the speed axis and enters the convergence angle conversion optical system 30C at mutually different designated positions; and the convergence angle conversion optical system 30 which is a redirection system C, the convergence angle α 1 1 converged by the overall convergence lens 22 such that the width of the entire light beam in the late axis direction is narrowed so that it becomes a smaller convergence angle α 1 2 so that the entire light beam is incident on the optical fiber 40 . This laser light multiplexing device 202 is further provided with: other semiconductor lasers 11A, 11B, ... which are different from the above-mentioned plural semiconductor lasers 11TA, 11T Β, ... (hereinafter, all are also referred to as semiconductor laser 11T) ) Of the laser block 110; the polarization multiplexing device 45 is in the optical path of the light beam before the semiconductor laser 11 enters the optical fiber 40, so that the light emitted from the semiconductor laser 11 is emitted. Each of the light beams L a, L b, L c ... and each of the light beams TL a, TL b, TL c ... emitted by other semiconductor lasers 1 1 T are polarized and multiplexed, and the laser beams from other semiconductors are irradiated. The light beam emitted by 1 1 T is also incident on the optical fiber 40. The polarization multiplexing device 45 has an individual collimator lens 46, a 1/2 / 2-wavelength plate 47, and a polarizing beam splitter 48. The polarizing beam splitter 48 is disposed between the individual collimator lens 21 and the entire convergence lens 22, 1 / The 2λ wavelength plate 47 and the individual collimating lenses 46 are arranged between the semiconductor laser 11T and the polarizing beam splitter 48. The laser block 10T is the same as the above-mentioned laser block 10, and the respective active layers of the semiconductor laser 11T are arranged to correspond to the respective active layers of the semiconductor laser 11. That is, the active layer of the semiconductor laser 1 1 T A and the active layer of the semiconductor laser 1 1 A are located on the same plane, the active layer of the semiconductor laser 1 1 T B and the active layer of the semiconductor laser 1 1 B The positions are on the same plane. Therefore, the active layers of -41-200425602 semiconductor laser corresponding to each other are on the same plane. The individual collimator lens 46 is the same as the individual collimator lens 21 described above, and sets the respective light beams TL a, TL b, TL c, ... of the semiconductor lasers 11T to set the optical axes to be parallel light beams parallel to each other. The 1/2 wavelength plate 47 changes the orientation of the linearly polarized light, and rotates the orientation of the polarized light of each of the incident light beams T L a, T L b, T L c, ... by 90 degrees. In addition, the optical axis of each light beam when emitted from the semiconductor laser 11 T and the optical axis of each light beam when emitted from the semiconductor laser 11 are arranged orthogonally to each other. _ The polarizing beam splitter 48 transmits the P polarized light component which is a linearly polarized component parallel to the paper surface in FIG. 11 and reflects the S polarized light component which is a linearly polarized component perpendicular to the paper surface. Here, a semiconductor device The light emitted from the laser 11 and passed through the individual collimator lens 21 is transmitted, and the light emitted from the semiconductor laser and passed through the individual collimator lens 46 and the 1/2 wavelength plate 47 is reflected. Each of the light beams L a, L b, L c formed by the above-mentioned P polarization components emitted by the plurality of semiconductor lasers 11A, 11B, ... passes through the individual collimating lens 21, the polarizing beam splitter 48, the entire convergence lens 22, And the convergence-angle-converted optical system 30 C is incident on the optical fiber 40. In addition, each of the light beams TL a, TL b, and TL c formed by the P polarization components emitted by the semiconductor laser ht is polarized by the i / 2λ wavelength plate 47 after the individual collimating lenses 46 become parallel light beams. The directions are rotated by 90 degrees to form the respective light beams TL a, TLb, TL c,..., Which are composed of the S-polarized light components, and are then reflected on the beam splitter surface B S1 of the polarization beam splitter 48. Then, the light beams TL a, TLb, TL c, etc. reflected by the polarizing beam splitter 48 are incident through the same optical paths as the light beams L a, L b, L c, ... passing through the polarizing beam splitter -42-200425602 48, respectively. To fiber 40. That is, the respective beams of the light beams TL a and La, the light beams TLb and Lb, ..., the light beams TLe and the light beams Le are incident on the optical fiber 40 through the same optical path. The convergence angle conversion optical system 30 C system makes the convergence angle α 1 1 of the entire light beam when emitted from the entire convergence lens 22 to be a smaller convergence angle α 12, and makes the entire light beam incident on the optical fiber 40. The optical axis system of the convergence angle conversion optical system 30C is the same as that of the embodiment 2-1. The optical axis systems of the light beams L a, L · b, L c, etc. emitted from the entire convergence lens 22 and converged are arranged on the speed axis. The direction is located more upstream than the position P b on the most upstream side among the positions crossing each other. And the method of using the above-mentioned polarized light multiplexing device to obtain high-output laser light can also be applied to the above-mentioned Embodiments 1-1, 1-2, 2-1, and 2-3 to the following embodiments. Examples 2-5, Examples 3-1 <Examples 2-3> Hereinafter, a laser photosynthesis of a third example (hereinafter, referred to as Example 2-3) in the second embodiment of the present invention will be described. Wave device to explain? Fig. 12 shows a schematic configuration diagram of the laser light multiplexing device of the above embodiment 2-3. The laser light multiplexing device 203 of this embodiment 2-3 is the laser light multiplexing device of the above embodiment 2-1. The structure of 20 1 further includes a wavelength multiplexing device for making the light beams emitted by other semiconductor lasers multiplexed in wavelength. In the following, components having the same functions as those of the laser light multiplexing device 201 of the above-mentioned embodiment 2-1 are denoted by the same reference numerals, and description thereof will be omitted. The laser light multiplexing device 203 of Example 2-3 is provided with: a laser block 10 configured with five halves. A conductor laser 11 厶, 1 ", 11 (:, 11〇, 11 £; a -43 -200425602 Do not collimate the lens 21, so that each of the light beams L a, L b, L c emitted by the above-mentioned plurality of semiconductor lasers 1 1 converge in the direction of the slow axis S and the direction of the speed F; the entire convergence lens 22, The entire beam formed by the individual beams L a, Lb, L c,..., Which is made into a parallel beam by the individual collimating lens 21, converges so that the width in the direction of the late axis becomes narrow. Axis direction and velocity axis direction, and make each beam L a, Lb, L c ··· incident on the convergence angle conversion optical system 30C at different specified positions in the velocity axis F direction; it is a convergence angle of the redirection system The conversion optical system 30 C makes the convergence angle ctll of the entire beam when it is emitted from the entire convergence lens 22 becomes a smaller convergence angle αΐ2 ·, so that the entire beam is incident on the optical fiber 40. This laser multiplexing device 203 is more Equipped with: different semiconductor lasers 1 1 A, 1 1 Β, etc. are equipped with other semiconductor lasers 1 1 UA, 1 1 UB, ... (hereinafter, also referred to as semiconductor lasers 1 1 U) laser blocks 10 U; and other semiconductor lasers 1 1 VA, 1 1 VB, ... (hereinafter (Also referred to as semiconductor laser 11V) laser block 10V; and in the optical path of the beam before the light beam emitted by semiconductor laser 11 enters optical fiber 40, to make semiconductor laser Each of the light beams L a, Lb, and spring L c emitted from 11 and other semiconductor lasers 1 1 U, each light beam u L a, UL b, UL c, etc. emitted as a wavelength multiplexing device 5 5 U; and each of the light beams La, Lb, L c emitted by the semiconductor laser 11 and the light beams VL a, VL b, VL c emitted by the semiconductor laser 1 1 V are combined by wavelength The wave device is 55V; and the light beams emitted from other semiconductor lasers iiu and semiconductor laser 1 1 V are also incident on the optical fiber 40. In addition, the wavelength of each light beam emitted from each semiconductor laser 11 is -44. -200425602 410n m, the wavelength of each beam emitted by each semiconductor laser 11U is 370 nm, and each semiconductor laser 11V emits The wavelength of each beam is 450 nm. The wavelength multiplexing device 5 5 U has an individual collimator lens 5 6 U and a dichroic beam splitter 58U. The dichroic beam splitter 58U is arranged at the individual collimator. Between the lens 21 and the entire convergence lens 22, the 'individual collimator lens 5 6 U series is arranged between the semiconductor laser 11U and the dichroic beam splitter 58U. The wavelength multiplexing device 55V has an individual collimator lens 56V and a dichroic beam splitter 58V. The dichroic beam splitter 58V is disposed between the individual collimator lens 56 V and the entire convergence lens 22, and the individual collimator lens 56 The V series is arranged between a semiconductor laser 11V and a dichroic beam splitter 58V. The laser block 10 U and the laser block 10 V are the same as the laser block 10 described above. The semiconductor laser 1 1 U and the semiconductor laser 1 1 V have their respective active layers arranged to correspond to the semiconductor laser 1 1 Active layer. That is, the active layer of the semiconductor laser 11 UA and the semiconductor laser 1 1 VA and the active layer of the semiconductor laser 1 1 A are located on the same plane, the active layer of the semiconductor laser 11UB and the semiconductor laser 11VB and the semiconductor laser The active layers of shot 1 1 B are located on the same plane. As such, the active layers of corresponding semiconductor lasers are located on the same plane. The optical axis of the light beam when emitted by the semiconductor laser 11 is orthogonal to the optical axis of the light beam when emitted by the semiconductor laser 11U and the optical axis of the light beam when emitted by the semiconductor laser 11V. The individual collimator lens 56 U is the same as the individual collimator lens 21 described above, and each of the light beams UL a, ULb, U L c,... Emitted from each semiconductor laser 11U is set as parallel light beams whose optical axes are parallel to each other. -45- 200425602 The individual collimator lens 56 V is the same as the individual collimator lens 21 described above, and each of the light beams VL a, VLb, VLc emitted by each semiconductor laser 11V is set to have the optical axes parallel to each other Parallel beam. The dichroic beam splitter 58U transmits 410 nm light and reflects 370 nm light. The dichroic beam splitter 58V transmits light of 370 nm and 410 nm and reflects light of 450 nm. Each light beam L a, emitted by a plurality of semiconductor lasers 1 1 A, 1 1 B, ...
Lb、Lc···係通過個別準直透鏡21，二向色分光器58U ，二向色分光器58V，全體收斂透鏡22，及收斂角變換光 _ 學系30 C而入射至光纖40。 又，由半導體雷射11U射出的各光束UL a 、ULb、 U L c…係在個別準直透鏡5 6 U被設爲平行光束之後，在二 向色分光器58U之射束裂光器面U1被反射。然後，在二向 色分光器58U被反射的各光束UL a、UL b、UL c ...係 通過與透過此二向色分光器58U的上述各光束l a、L b、 L c…之各自相同的光路而入射至光纖40。亦即，光束 ULa和光束La ，光束ULb和光束Lb，···光束ULe · 和光束L e各自所對應的光束彼此係通過相同光路而入射 至光纖40 〇 再者，由半導體雷射11V射出之各光束VLa、VLb、 V L c…在個別準直透鏡56 V成爲平行光束之後，於二向色 分光器58V之射束裂光器面VI被反射。然後，在二向色分 光器58V被反射之各光束VL a、VL b、VL c...係通過 與將此二向色分光器58V透過之各光束L a、L b、L c ... -46- 200425602 及各光束UL a、ULb、UL c…之各自相同的光路而入 射至光纖40。亦即，光束VL a，光束UL a及光束L a係 通過相同光路，光束VLb，光束ULb及光束Lb係通過 相同光路，…光束VL e，光束UL e及光束L e係通過相 同光路而入射至光纖40。 依此，各光束La 、Lb 、Lc·.·、各光束ULa 、 ULb、ULc···、及各光束 VLa、VLb、VLc...係 被合波於光纖40中。 _ 且，上述收斂角變換光學系30C爲與上述實施例2— 1同 _ 樣地，由全體收斂透鏡22被射出且被收斂之各光束L a、 L b、L c ...的光軸係配置於在速軸方向看係位在比相互交 叉的位置當中之最上游側的位置之光軸收斂位置P b更上 游側。 此外，使用上述波長合波裝置而獲得高輸出之雷射光的手 法也可適用在上述實施例1 一 1、實施例1 一 2、實施例2 — 1 、實施例2 - 3及後述之實施例2 - 4至實施例2 — 5、實施例 3- 1。 籲 <實施例2 — 4 > 第1 3圖係表示在第2實施形態中之第4實施例（以下，稱 之爲實施例2- 4)的雷射光合波裝置之槪略構成圖，第13( a)圖係由上方看上述雷射光合波裝置之平面圖，第13(b) 圖係由半導體雷射排列的方向看上述雷射光合波裝置之正 面圖，第13(c)圖係由光束的光軸方向看上述雷射光合波裝 置之左側面圖。又，第1 4圖係表示收斂透鏡之機能的圖， -47- 200425602 第1 4( a )圖係把Y方向設爲上方而看到的收斂透鏡之槪念 圖，第14( b )圖係把X方向設爲上而看到的收斂透鏡之槪念 圖。 如第1 3圖所示，上述實施例2 — 4之雷射光合波裝置係， 將實施例2 - 1中由個別準直透鏡2 1和全體收斂透鏡22所 構成的全體收斂光學系，以各收斂透鏡24 A、24 B、24 C… 所成之屬於截斷型之透鏡的收斂透鏡24加以代替者。 亦即，收斂透鏡24係由使光束的傳播方向變化之具有各 自不同屈光力的收斂透鏡24 A、24 B、24 C…所構成，使複 籲 數之半導體雷射11所射出之各光束L a、L b、L c ...所 成的全體光束在遲軸方向之寬度變狹窄般地收斂，同時使各 光束各自收斂於遲軸方向及速軸F方向，使各光束L a 、 L b 、L c ...各自於速軸F方向，通過互異的指定的位置 39A、39B、39C...而入射至收斂角變換光學系30C。 更詳言之，如第1 4圖所示，位在全體光束的周緣部之收 斂透鏡24 A係使入射的光束L a之傳播方向在遲軸方向作 大的變化，且使此光束L a收斂而入射至收斂角變換光學系 隹 30 C的指定稜柱31 A (參照第3圖）。且，位在全體光束的中 心部之收斂透鏡24 C係在不使入射的光束L c之傳播方向 變化之下，使此光束L c收斂而入射至收斂角變換光學系 3 0 C的指定稜柱3 1 C。 此外，由Z軸方向看見第14( a )及第14( b )圖之紙面左側 所示的收斂透鏡24A之圖中的實線係表示收斂透鏡24 A之 半導體雷射1 1 A側的透鏡面，上述圖中的虛線爲表示收斂透 -48- 200425602 鏡24 A的收斂角變換光學系30 C側之透鏡面，各自的透鏡 面之曲率中心的位置係在Y方向偏移。 其他的構成及作用爲上述實施例1同樣，利用與上述同樣 之收斂角變換光學系30C的作用，使得上述遲軸方向之寬度 變狹窄般地由屬於全體收斂光學系之收斂透鏡24所收斂的 收斂角α21之全體光束，係入射至成爲更小的收斂角α2 2之 光纖40之直徑50μιη的芯部41。 此外，上述收斂角變換光學系30C係與上述實施例2 - 1 同樣地，從全體收斂透鏡22射出且被收斂之各光束L a、 φ L b、L c…的光軸係配置於比在速軸方向所看相互交叉的 位置當中之最上游側位置的光軸收斂位置P b還上游側。 <實施例2 - 5 > 第1 5圖係表示第2實施形態中之第5實施例（以後，稱之 爲實施例2 — 5)的雷射光合波裝置之槪略構成圖，此第1 5圖 係由上方看上述雷射光合波裝置之平面圖。 如第15圖所示，實施例2— 5雷射光合波裝置205之雷射 塊10 Q係，5個半導體雷射1 1 A、11 B、1 1 C…係配置成半 鲁 導體雷射1 1各自的活性層1 2 A、1 2 B、1 2 C…係成爲平行， 且，各自的活性層1 2 A、1 2 B、1 2 C…之位置係於活性層 12之厚度方向（圖中X方向，也是速軸方向）成爲互異的位置 般地配置，且，由半導體雷射11射出時之各光束La、 L b、L c…的光軸係由速軸方向看爲光軸間的間隔相互變 狹窄般地配置。 因此，由半導體雷射11射出時之各光束La 、Lb、 -49- 200425602 L c ...的遲軸係成爲不平行。 全體收斂光學系20 Q係使自上述半導體雷射1 1射出之於 速軸方向相互的位置不同之各光束L a、L b、L c...各自 個別地收斂於遲軸方向及速軸方向（圖中箭頭X方向），與上 述同樣地，使各光束L a、L b、L c…各自於速軸方向之 互異的指定的位置，入射於和上述同樣的收斂角變換光學系 30 C。 此外，全體收斂光學系20 Q係由將上述各光束L a、L b 、L c…各自成爲平行光束之準直透鏡26A、26B、26C..· · ，及使成爲上述平行光束之各光束L a、L b、L c…各自 集光於遲軸方向及速軸方向之集光透鏡27 A、27 B、27 C… 所構成。 由上述各半導體雷射11射出時之各光束La 、Lb、 L c ...的光軸與由全體收斂光學系20 Q射出時之各光束 La、Lb、Lc...的光軸係會一致。 此外，各光束La 、Lb、Lc…之光軸以第15圖中的光 軸“、“、：^…來表示。 # 在此，由全體收斂光學系20 Q射出時之全體光束的收斂角 α3 1係變成相等於由半導體雷射1 1射出時之全體光束的收 斂角，由收斂角變換光學系30 C射出時之上述全體光束的收 斂角ct32係變成比由全體收斂光學系20Q射出之全體光束 的收斂角ot 3 1還小的角度。 其他的構成及作用係與上述實施例1及實施例2同樣。 在此，藉由令各準直透鏡26 A、26 B、26 C…之焦點距離 -50- 200425602 爲3m m、數値孔徑n A爲0.6，使各集光透鏡27 A、27 B 、27 C ···之焦點距離爲9m m、數値孔徑N A 0.2，則由5個 之導體雷射11A、11B、11C…所射出之具有各1W的輸 出之光束係合波於光纖40的芯部41，可自芯部41輸出 4.5W的雷射光。亦即，5條的雷射光束結合於光纖之際的結 合效率成爲9 0 %。 此外，上述收斂角變換光學系30C係與上述實施例2 - 1 同樣地，係配置於，較之於自全體收斂光學系2 0 Q射出且被 收斂之各光束L a、L b、L c…的光軸在速軸方向看係相 互交叉的位置當中之最上游側的光軸收斂位置P c還上游 在上述各實施例1 一 1、實施例1 一 2、實施例2 - 1至實施 例2— 5中之雷射光合波裝置中，用以使自複數之半導體雷 射11射出之各光束收斂於遲軸方向及速軸方向之屬光束收 斂裝置的各光學系，係使由此各光學系所收斂之各光束其在 遲軸方向看之射出角爲比各光束由前述半導體雷射被射出 時之光束在遲軸方向看之放射角還小者。 亦即，在本發明中使用的邊射型之半導體雷射所射出之光 在速軸方向之寬度（亦即，在遲軸方向看之寬度）爲以數値孔 徑來表示時係數値孔徑N A 1 = 0.5程度，另一方面，當光入 射至一般的光纖之際的入射光之寬度爲以數値孔徑N A來 表示時係較上述數値孔徑N A 1還小之數値孔徑N A = 0.3 以下，通常爲數値孔徑N A 2 = 0.2程度。因此，使半導體雷 射射出之光有效率地結合於光纖之重要點爲，相較於半導體 -51- 200425602 雷射所射出之光的放射角，係使光由上述光學系入射於光纖 之際的射出角設小之手法乃一般習知。此外，偏離光纖之數 値孔徑N A 2所規定之範圍而入射的光，係在不與此光纖之 模態結合之下而漏洩至光纖外。 於是，如第1 6圖所示，於各實施例1 一 1，實施例1 一 2， 實施例2— 1至實施例2 - 5之各雷射光合波裝置中，藉由使 從數値孔徑N A = 0·5之半導體雷射1 1射出的光通過光束收 斂裝置130而入射至光纖40之數値孔徑ΝΑ2=0·2的範圔 內’則可使半導體雷射所射出的光高效率地結合於光纖，用 _ 以達成此目的之放大倍率R e爲， R e = f 2/ f 1=ΝΑ2/ΝΑ1=0.5/0.2=2.5 因此，至少把上述光束收斂裝置1 30設計成放大倍率R e 爲較1·〇大的倍率係成爲用以實現高效率結合之必要條件。 亦即，把由第16圖中所示之上述光束收斂裝置130(各光 學系）所收斂之光束在遲軸方向看之射出角Θ2設計成比在半 導體雷射11射出時之光束在遲軸方向看之放射角Θ1還小， 係成爲用以實現高效率結合之必要條件。 _ 此外，與上述光束收斂裝置130(各光學系）對應之，實施 例.1 - 1之雷射光合波裝置101中之收斂分散透鏡120、實施 例1一 2之雷射光合波裝置102中之偏移透鏡123與集光透 鏡1 24之組合所成的光學系、實施例2 - 1之雷射光合波裝 置201中之全體收斂光學系20、實施例2 - 2之雷射光合波 裝置202中之偏光合波裝置45與全體收斂透鏡22之組合所 成的光學系、實施例2 - 3之雷射光合波裝置203中之波長 -52- 200425602 合波裝置55U與全體收斂透鏡22之組合所成的光學系、波 長合波裝置55V與全體收斂透鏡22之組合所成的光學系、 實施例2 - 4之雷射光合波裝置2〇4中之收斂透鏡24、及實 施例2 — 5之雷射光合波裝置205中之全體收斂光學系20Q 係設計成，依此等所收斂之光束在遲軸方向看之射出角Θ2 係變成比由半導體雷射11射出時的光束在遲軸方向看之放 射角Θ 1還小。 然而，本發明之雷射光合波裝置並不限定上述光束收斂裝 置係設計成，由此光束收斂裝置射出之各光束在遲軸方向看 之射出角Θ2爲比由各光束之半導體雷射射出時之光束在遲 軸方向看之放射角Θ 1還小之場合。 <實施例3 — 1 > . 以下，茲使用圖面來說明本發明之第3實施形態。此外， 在第3實施形態中，有關具有與上述第2實施形態同樣機能 者係使用與第2實施形態同一符號且省略說明。 第1 7圖係表示本發明之第3實施形態之雷射光合波裝置 的第1實施例（實施例1 一 1)之槪略構成圖，第17( a )圖係由 上方看上述雷射光合波裝置之平面圖，第17(b)圖係由半導 體雷射排列的方向看上述雷射光合波裝置之正面圖，第17 (C )圖係由光束的光軸方向看上述雷射光合波裝置之左側 面圖。又，第18圖係表示光軸移位光學系之構造的平面圖 ，第1 9圖係表示依收斂光學系使各光束被收斂的樣子之槪 念圖，第19(a )圖係使光束在遲軸方向收斂的樣子之圖，第 19(b )圖係表示使光束在速軸方向收斂的樣子之圖。 -53- 200425602 上述實施例3 - 1之雷射光合波裝置3〇1係具備有··複數 之半導體雷射5 1 A、5 1 B、5 1 C ...(以後，也全部稱之爲半 導體雷射51)而半導體雷射51 A、51 B、51 C ··.各自的活性 層52A、52B、52C…係成爲平行，且各自的活性層52A 、52 B、52 C…之位置係於活性層52 A、52 B、52 C…之 厚度方向（圖中箭頭X方向）成爲互異的位置53A、53B、 5 3 C…般地配置之雷射塊5 0 ;使由複數之半導體雷射5 1射 出之各光束La、Lb、L c…具有相互平行的光軸，且遲 軸S係相互爲平行的平行光束之準直光學系60;使通過準直 鲁 光學系60之速軸F方向（圖中箭頭F方向）相互位置不同的 各光束在遲軸S方向（圖中箭頭S方向）移位且各光束L a 、：Lb、L c，··之速軸F在與遲軸S正交之1平面H2上排 列般之屬重定向系統的光軸移位光學系7 0 ;以及，使由光軸 移位光學系70射出之各光束L a、L b、L c…所成的全 體光束及各光束，收斂於遲軸S方向及速軸F方向而入射至 光纖40之收斂光學系80。 各半導體雷射51爲與上述第2實施形態中之半導體雷射 _ 同樣的輸出1W，振盪波長400〜420n m的氮化物系半導體 雷射，速軸F方向之發光幅D f =1μΐΏ，遲軸S方向之發光 幅D s = 25μΐΏ。又，各半導體雷射51所射出之光束的速軸 F方向之有效數値孔徑N A ( f )爲0.5，遲軸S方向之有效 數値孔徑N A ( s )爲0.2。 準直光學系60係由各光束所配置之準直透鏡61A、61B 、6 1 C…所構成的截斷型之透鏡。 -54 - 200425602 光軸移位光學系70係如第1 8圖所示，爲厚度薄的複數個 稜柱7 1 A、7 1 B、7 1 C…在圖中X方向疊層而形成，例如， 入射於稜柱7 1 A之光束L a係在稜柱7 1 A之平行平面R 1、 R2間被各自反射且光軸在上述平面H2上移位而自此稜柱 7 1 A射出。其他的稜柱之作用也同樣。但是，光束L c的光 軸係在對光軸移位光學系70入射前就位在上述平面H2上 ，所以光束L c的光路係在不被移位之下通過稜柱71C。此 稜柱7 1 C係可作爲例如不使光束的光路變更之光學平板。 收斂光學系80如第19圖所示，係由使光軸移位光學系70 · 射出之各光束L a、L b、L c…所成的全體光束收斂於速 軸F方向之收斂F透鏡81，及使上述全體光束收斂於遲軸S 方向之收斂S透鏡82所構成。 以下針對上述實施形態中的作用加以說明。 複數之半導體雷射51所射出之各光束La、Lb、Lc …係依準直光學系60，具有相互平行之光軸，遲軸S係相互 平行且成爲速軸F.方向之相互的位置不同的平行光束而被 入射於光軸移位光學系7〇之各稜柱71A、71B、71C...。 鲁 各光束係依各稜柱7 1 A、7 1 B、7 1 C…而被移位遲軸S方 向，各光束L a、L b、L c…之速軸F被排列於於遲軸S 正交之1平面H1上而自光軸移位光學系70被射出。 由光軸移位光學系70所射出之各光束L a、L b、L c …所成的全體光束係通過收斂F透鏡81而被收斂在速軸F 方向（於XZ平面），在通過收斂S透鏡82而收斂於遲軸S 方向（於Y Z平面）之後，入射至光纖40之直徑50μιη的芯部 •55- 200425602 41 〇 此外，第1實施形態，第2實施形態，及第3實施形態的 各雷射光合波裝置係依半導體雷射之實裝配置，截斷型透鏡 之集光角度，及收斂角變換光學系之集光機能或光軸移位光 學系之光軸移位機能等之設計的最適化，也可適用於由本申 請人既提案的專利文獻（例如，日本國專利特願 2002 — 287 640，特願2002 - 20 1 97 9)等所記載之具有堆疊型（於速軸 方向將半導體雷射疊層的構造）之光纖•雷射（雷射光合波 裝置）。 φ 又，上述實施例1 一 1、實施例1 一 2 '實施例2 — 1至實施 例2 - 5、及實施例3 - 1中之雷射光合波裝置，光束被入射 且合波之光纖40係使用芯徑爲25μπΐ至400μιη者，使用特 多的尺寸爲芯徑50μηΐ〜ΙΟΟμπί。 又，於上述各實施例1 一 1，實施例1 一 2，實施例2 - 1至 實施例2 - 5及實施例3 - 1中所使用之截斷型之透鏡係可爲 球面透鏡，也可爲非球面透鏡。又，在實施例中，作爲截斷 型之透鏡所作之說明，不限定爲一定是截斷型之透鏡的場合 鲁 ，也可使用由光軸方向看來爲圓形形狀之一般的透鏡。 又’以可作爲上述各貫施例1 一 1，實施例1 一 2，實施例2 一 1至實施例2 — 5及實施例3 — 1的半導體雷射1 1來採用之 半導體雷射一例而言，發光幅D s (參照第2圖）之大小之差 異係具有以下種類者。 •單模態半導體雷射 橫向模態（遲軸方向）係成爲單模態。發光幅D s的値爲 -56- 200425602 Ιμιη至3μιη，而通常輸出係數mW至500mW。 •多模態半導體雷射 橫向模態（遲軸方向）係成爲多模態。發光幅D s的値爲數 μιτί至ΙΟΟμίΉ，而通常輸出係lOOmW至2000mW。 又，於上述實施例1 一 1、實施例1 一 2、實施例2 - 1至實 施例2— 5中之收斂角變換光學系，或實施例3— 1中之光軸 移位光學系並不限定爲組合稜柱而形成之場合，可使用反射 元件、折射元件、格柵元件、或p h 〇 t ο n i c s結晶（將介電體作三 次元配置的人工格子）等而形成，或將此等元件組合而形成。 參 此外，本發明之雷射光合波裝置中的合波條數不限定爲5 條，也可選擇合波條數爲2條以上之任意數目。 又，由上述各半導體雷射所射出之光束的波長係3 50 n m 以上，460 n m以下者爲佳，但非限定在此範圍，再者，由’ 上述各半導體雷射所射出之光束的波長爲離開35 0 n m以上 、460 n m以下的範圍之場合，例如也可爲紅外光。 【圖式簡單說明】 【第1圖】表示本發明之第1實施形態中之實施例1 - 1的 鲁 雷射光合波裝置之槪略構成圖。 【第2圖】表示雷射光束自半導體雷射的活性層射出的樣態 之斜視圖。 【第3圖】表示收斂角變換光學系的構造和被合波於光纖之 光束的樣態圖。 【第4圖】表示使收斂分散個別透鏡中的光束偏移而收斂的 機能圖。 -57- 200425602 【第5圖】表示實施例1- 2之雷射光合波裝置的槪略構成 平面圖。 【第6圖】表示偏移透鏡使光束偏移的機能圖。 【第7圖】係由遲軸方向觀察變換在收斂角變換光學系之光 束的光軸方向之機能圖。 【第8圖】表示複數個半導體雷射之配置例的平面圖。 【第9圖】表示第2實施形態中之實施例2 - 1的雷射光合 波裝置之槪略構成圖。 【第1 〇圖】係由遲軸方向觀察變換在收斂角變換光學系之 · 光束的光軸方向之機能圖。 【第1 1圖】表示實施例2 - 2之雷射光合波裝置的槪略構成 平面圖。 【第12圖】表示實施例2 - 3之將光束偏光合波之雷射光合 波裝置的槪略構成平面圖。 【第1 3圖】表示實施例2 - 4之將波長合波之雷射光合波裝 置的槪略構成平面圖。 【第I4圖】表示實施例2— 4之雷射光合波裝置中之收斂透 _ 鏡的機能圖。 【第1 5圖】表示實施例2 - 5之雷射光合波裝置的槪略構成 平面圖。 【第16圖】表示使用在雷射光合波裝置之收斂光學系的特 性圖。 【第1 7圖】表示第3實施形態之雷射光合波裝置的槪略構 成平面圖。 -58- 200425602 【第18圖】表示光軸移位光學系的構造圖。 【第1 9圖】表示利用收斂光學系以收斂各光束之樣態的槪 念圖。 【第20圖】表示以往的雷射光合波裝置之槪略構成圖。 【第2 1圖】說明收斂角的圖。 【第22圖】表示光束通過重定向系統之樣態圖。 【第23圖】表示光束通過重定向系統之樣態圖。 【桌24圖】表不通過位在指定位置之重定向系統的各光束 之樣態圖。 φ 【第25圖】表示通過位在自指定位置偏離的位置之重定向 系統的各光束之樣態圖。 【第26圖】表示在本發明之雷射光合波裝置中可配置收斂 分散光學系之區域圖。 【主要符號說明】 11 半導體雷射 12 .活性層 3〇 收斂角變換光學系 φ 40 光纖 41 芯部 110 雷射塊 120 收斂分散透鏡 -59-Lb and Lc are incident on the optical fiber 40 through the individual collimator lens 21, the dichroic beam splitter 58U, the dichroic beam splitter 58V, the entire convergent lens 22, and the convergence angle conversion light 30 ° C. In addition, each of the light beams UL a, ULb, and UL c emitted by the semiconductor laser 11U is after the individual collimator lenses 5 6 U are set as parallel light beams, and then the beam splitter surface U1 of the dichroic beam splitter 58U is used. Be reflected. Then, each of the light beams UL a, UL b, UL c ... reflected by the dichroic beam splitter 58U passes through the respective light beams la, L b, L c, ... passing through the dichroic beam splitter 58U. The same optical path is incident on the optical fiber 40. That is, the light beams ULa and La, the light beams ULb and Lb, ..., the light beams corresponding to the light beams ULe, and the light beams Le respectively enter the optical fiber 40 through the same optical path, and are emitted by the semiconductor laser 11V. Each of the light beams VLa, VLb, VL c ... is reflected by the beam splitter surface VI of the dichroic beam splitter 58V after the individual collimating lenses 56 V become parallel light beams. Then, the respective light beams VL a, VL b, VL c, ... reflected by the dichroic beam splitter 58V pass through the respective light beams L a, L b, L c .. -46- 200425602 and the respective light beams UL a, ULb, UL c, ... have the same optical path and are incident on the optical fiber 40. That is, the light beam VL a, the light beam UL a, and the light beam La pass through the same optical path, the light beam VLb, the light beam ULb, and the light beam Lb pass through the same optical path, ... the light beam VL e, the light beam UL e, and the light beam Le enter through the same optical path. To fiber 40. Accordingly, each of the light beams La, Lb, Lc, ..., each of the light beams ULa, ULb, ULc, ..., and each of the light beams VLa, VLb, VLc, ... are multiplexed in the optical fiber 40. In addition, the above-mentioned convergence angle conversion optical system 30C is the same as the above-mentioned embodiment 2-1. Similarly, the optical axes of the respective light beams L a, L b, L c, which are emitted by the entire convergence lens 22 and are converged, are ... The optical axis convergence position P b is positioned on the upstream side of the optical axis convergence position P b as viewed in the direction of the speed axis from the position on the most upstream side among the positions crossing each other. In addition, the method of using the above-mentioned wavelength multiplexing device to obtain high output laser light can also be applied to the above-mentioned embodiments 1-11, embodiment 1-12, embodiment 2-1, embodiment 2-3, and embodiments described later. 2-4 to Example 2-5, Example 3-1. ≪ Embodiment 2-4 > Fig. 13 is a schematic configuration diagram showing a laser light multiplexing device of a fourth embodiment (hereinafter, referred to as embodiment 2-4) in the second embodiment. Figure 13 (a) is a plan view of the above laser light multiplexing device when viewed from above, Figure 13 (b) is a front view of the above laser light multiplexing device when viewed from the direction of the arrangement of semiconductor lasers, and Figure 13 (c) The figure is a left side view of the laser light multiplexing device as seen from the optical axis direction of the light beam. Fig. 14 is a view showing the function of a convergent lens. -47- 200425602 Fig. 14 (a) is a view of a convergent lens viewed with the Y direction set upward, and Fig. 14 (b) This is an image of a convergent lens seen with the X direction set to the top. As shown in FIG. 13, the laser light multiplexing device system of Embodiments 2 to 4 described above uses the entire converging optical system composed of the individual collimating lens 21 and the entire converging lens 22 in Embodiment 2-1 to Each of the convergent lenses 24 A, 24 B, 24 C,... Is a truncated lens, and a convergent lens 24 is used instead. That is, the converging lens 24 is constituted by converging lenses 24 A, 24 B, 24 C,... Having different refractive powers, which change the propagation direction of the light beam, and makes each light beam L a emitted by the semiconductor laser 11 having a complex number of beams a. , L b, L c, etc., the entire beams converge in a narrow width in the direction of the late axis, and at the same time, each beam is converged in the direction of the slow axis and the direction of the speed F, so that each of the beams L a, L b , L c ... are incident on the convergence angle conversion optical system 30C in mutually different designated positions 39A, 39B, 39C, ... in the direction of the speed axis F. More specifically, as shown in FIG. 14, the convergent lens 24 A located at the peripheral portion of the entire light beam changes the propagation direction of the incident light beam La in the late axis direction, and makes the light beam La Converges and enters a designated prism 31 A of the convergence angle conversion optical system 隹 30 C (see FIG. 3). In addition, the convergence lens 24 C located at the center of the entire light beam is configured to make the light beam L c converge and enter a designated prism of the convergence angle conversion optical system 3 0 C without changing the propagation direction of the incident light beam L c. 3 1 C. In addition, when the convergence lens 24A shown on the left side of the paper surface of Figs. 14 (a) and 14 (b) is seen from the Z axis direction, the solid line in the figure represents the transmission on the semiconductor laser 1 1 A side of the convergence lens 24 A. Mirror surface, the dotted line in the above figure shows the lens surface on the 30 C side of the convergence angle conversion optical system of the lens 24 A of the convergence lens -48- 200425602. The position of the center of curvature of each lens surface is shifted in the Y direction. The other structures and functions are the same as those in the first embodiment, and the convergence angle conversion optical system 30C is used to narrow the width in the late-axis direction as described above, and is converged by the convergence lens 24 belonging to the entire convergence optical system. The entire light beam of the convergence angle α21 is incident on the core portion 41 of the optical fiber 40 having a smaller convergence angle α2 2 and having a diameter of 50 μm. In addition, as for the convergence angle conversion optical system 30C, as in the above-mentioned Embodiment 2-1, the optical axis systems of the respective beams L a, φ L b, L c, etc. emitted from the entire convergence lens 22 and converged are arranged at a ratio of The optical axis convergence position P b, which is the most upstream position among the positions crossing each other in the direction of the speed axis, is also upstream. < Embodiment 2-5 > Fig. 15 is a schematic configuration diagram of a laser light multiplexing device of a fifth embodiment (hereinafter, referred to as embodiment 2-5) in the second embodiment. Figure 15 is a plan view of the above laser light multiplexing device as viewed from above. As shown in FIG. 15, the laser beam multiplexing device 205 of Embodiment 2-5 has a laser block 10 Q system, five semiconductor lasers 1 1 A, 11 B, 1 1 C, etc., which are arranged as semi-Lube conductor lasers. 11 The respective active layers 1 2 A, 1 2 B, 1 2 C ... are parallel, and the positions of the respective active layers 1 2 A, 1 2 B, 1 2 C ... are in the thickness direction of the active layer 12 (The X direction in the figure is also the direction of the speed axis) are arranged at mutually different positions, and the optical axis systems of the light beams La, L b, L c,... When emitted from the semiconductor laser 11 are viewed from the direction of the speed axis. The intervals between the optical axes are narrowly arranged. Therefore, the late axis systems of the respective light beams La, Lb, -49- 200425602 L c,... When emitted from the semiconductor laser 11 are not parallel. The entire convergent optical system 20 Q system converges each of the light beams L a, L b, L c, ... emitted from the semiconductor laser 1 1 in positions different from each other in the direction of the speed axis, and converges individually in the direction of the slow axis and the speed axis. The direction (direction of arrow X in the figure) is the same as described above, so that each of the light beams L a, L b, L c, ... at a predetermined position different from each other in the direction of the speed axis enters the same convergence angle conversion optical system as above. 30 C. In addition, the entire converging optical system 20 Q is composed of collimating lenses 26A, 26B, 26C, ..., each of which makes each of the above-mentioned light beams L a, L b, L c, ... into parallel light beams, and each of the light beams made into the above-mentioned parallel light beams. L a, L b, L c ... are constituted by light collecting lenses 27 A, 27 B, 27 C, ..., which collect light in the late axis direction and the speed axis direction, respectively. The optical axes of the beams La, Lb, Lc, ... when emitted from the semiconductor lasers 11 described above, and the optical axes of the beams La, Lb, Lc, ... when emitted from the overall convergent optical system 20Q are Consistent. In addition, the optical axes of the respective light beams La, Lb, Lc, ... are represented by the optical axes ",",: ^, ... in Fig. 15. # Here, the convergence angle α3 1 of the entire light beam when emitted from the entire convergent optical system 20 Q becomes equal to the convergence angle of the entire light beam when emitted from the semiconductor laser 1 1 and emitted from the convergent angle conversion optical system 30 C The above-mentioned convergence angle ct32 of the entire light beam becomes an angle smaller than the convergence angle ot 31 of the entire light beam emitted from the overall convergence optical system 20Q. Other structures and functions are the same as those of the first and second embodiments. Here, by setting the focal distance -50-200425602 of each collimator lens 26 A, 26 B, 26 C ... to 3 mm, and the numerical aperture n A to be 0.6, each of the condenser lenses 27 A, 27 B, 27 The focal distance of C ... is 9mm, and the number of apertures is NA 0.2, and the light beams with 1W output from 5 conductor lasers 11A, 11B, 11C, etc. are multiplexed at the core of the optical fiber 40 41. Laser light of 4.5 W can be output from the core 41. That is, the coupling efficiency when the five laser beams are combined with the optical fiber is 90%. The above-mentioned convergence angle conversion optical system 30C is the same as that in the above-mentioned embodiment 2-1, and is arranged in the respective light beams L a, L b, and L c which are emitted from the entire convergent optical system 2 Q and are converged. The optical axis convergence position P c of the most upstream side among the positions where the optical axes intersect each other in the direction of the speed axis is also upstream of each of the above-mentioned embodiments 1 to 1, embodiment 1 to 2, and embodiments 2 to 1 to implementation In the laser light multiplexing device in Example 2-5, each optical system belonging to the light beam converging device for converging the respective light beams emitted from the plurality of semiconductor lasers 11 to the late axis direction and the speed axis direction is made of The emission angle of each light beam converged by each optical system when viewed in the late axis direction is smaller than the radiation angle of the light beam in the late axis direction when each light beam is emitted by the semiconductor laser. That is, the width of the light emitted by the edge-emission type semiconductor laser used in the present invention in the direction of the speed axis (that is, the width viewed in the direction of the slow axis) is the time coefficient 値 aperture NA expressed in terms of the number of apertures 1 = 0.5 degree. On the other hand, when the width of the incident light when the light is incident on a general optical fiber is expressed by a number of apertures NA, the number is smaller than the number of apertures NA 1 above. The aperture NA = 0.3 or less , Usually a degree of numerical aperture NA 2 = 0.2. Therefore, the important point of efficiently combining the light emitted by a semiconductor laser with an optical fiber is that, compared with the radiation angle of the light emitted by a semiconductor-51-200425602 laser, the light is incident on the optical fiber from the above optical system It is common practice to set a small shot angle. In addition, light incident outside the range specified by the number of optical fibers 値 aperture N A 2 is leaked out of the optical fiber without being combined with the mode of the optical fiber. Therefore, as shown in FIG. 16, in each of the laser light multiplexing devices of Embodiments 1 to 1, Embodiments 1 to 2, and Embodiments 2-1 to 2-4, the number of Semiconductor laser 1 with an aperture NA = 0.5. The light emitted by the semiconductor laser 1 1 passes through the beam converging device 130 and is incident on the optical fiber 40. Within the range of the aperture NA 2 = 0.2, the light emitted by the semiconductor laser can be made high. Efficiently combined with the optical fiber, use _ to achieve the magnification Re that achieves this, R e = f 2 / f 1 = NA / 2 / NA1 = 0.5 / 0.2 = 2.5 Therefore, at least the above-mentioned beam convergence device 1 30 is designed to be amplified A magnification ratio R e greater than 1.0 is a necessary condition for achieving high-efficiency bonding. That is, the exit angle Θ2 of the light beam converged by the above-mentioned light beam converging device 130 (each optical system) shown in FIG. 16 is designed to be on the late axis than the light beam when the semiconductor laser 11 is emitted. The radiating angle Θ1 when viewed in the direction is still small, which becomes a necessary condition for achieving high-efficiency bonding. _ In addition, corresponding to the above-mentioned beam converging device 130 (each optical system), the convergent dispersion lens 120 in the laser light multiplexing device 101 in Example 1-1, and the laser light multiplexing device 102 in Example 1-2 The optical system formed by combining the offset lens 123 and the collecting lens 1 24, the entire convergent optical system 20 in the laser light multiplexing device 201 of Example 2-1, and the laser light multiplexing device of Example 2-2. The optical system formed by the combination of the polarizing multiplexing device 45 and the overall convergent lens 22 in 202, and the wavelength -52- 200425602 of the multiplexing device 55U and the overall convergent lens 22 in the laser multiplexing device 203 of Embodiments 2-3. The optical system formed by the combination, the optical system formed by the combination of the wavelength multiplexing device 55V and the overall convergence lens 22, the convergence lens 24 in the laser light multiplexing device 204 of Examples 2 to 4, and Example 2 — The entire converging optical system 20Q system in the laser light multiplexing device 205 of 5 is designed so that the exit angle Θ2 of the converged light beam viewed in the direction of the late axis becomes longer than the light beam emitted by the semiconductor laser 11 on the late axis The radiation angle Θ 1 viewed from the direction is still small. However, the laser light multiplexing device of the present invention is not limited to the above-mentioned beam converging device is designed so that the emission angle Θ2 of each beam emitted by the beam converging device when viewed in the direction of the late axis is larger than when the semiconductor laser is emitted from each beam When the radiation angle θ 1 of the light beam viewed in the late axis direction is still small. < Embodiment 3-1 > Hereinafter, a third embodiment of the present invention will be described using drawings. In the third embodiment, those having the same functions as those in the second embodiment are given the same reference numerals as those in the second embodiment, and descriptions thereof are omitted. Fig. 17 is a schematic configuration diagram showing a first embodiment (Embodiment 1 to 1) of a laser light multiplexing device according to a third embodiment of the present invention, and Fig. 17 (a) is a view from above of the laser light Figure 17 (b) is a plan view of the multiplexing device. Figure 17 (b) shows the front view of the laser multiplexing device from the direction of the semiconductor laser array. Figure 17 (C) shows the laser multiplexing from the direction of the optical axis of the beam. Left side view of the device. Fig. 18 is a plan view showing the structure of the optical axis shifting optical system, Fig. 19 is a schematic view showing how each light beam is converged by the convergent optical system, and Fig. 19 (a) is a light beam in which FIG. 19 (b) is a diagram showing a state of convergence in the direction of the slow axis, and FIG. 19 (b) is a diagram showing a state of convergence of the light beam in the direction of the speed axis. -53- 200425602 The laser light multiplexing device 3101 of the above embodiment 3-1 is equipped with a plurality of semiconductor lasers 5 1 A, 5 1 B, 5 1 C ... (hereinafter, all are also referred to as (Semiconductor laser 51) and semiconductor lasers 51 A, 51 B, 51 C ... The respective active layers 52A, 52B, 52C ... are parallel and the positions of the respective active layers 52A, 52 B, 52 C ... The laser blocks 5 0 arranged in the thickness direction (direction of arrow X in the figure) of the active layers 52 A, 52 B, 52 C, etc. become mutually different positions 53A, 53B, 5 3 C, etc .; Each of the light beams La, Lb, L c emitted from the semiconductor laser 51 has a collimated optical system 60 having parallel optical axes and the late axis S is parallel to each other; the collimating optical system 60 passes through The beams with different positions in the direction of the speed axis F (direction of arrow F in the figure) are shifted in the direction of the late axis S (direction of arrow S in the figure) and the beams L a, Lb, L c, ... The optical axis shifting optical system 70, which is a redirection system, is arranged on a plane H2 orthogonal to the late axis S; and each of the light beams L a, L b, and L emitted from the optical axis shifting optical system 70 is arranged. c And each light beam formed by the whole body-convergent optical system 80 of the optical fiber 40 and enters the later-speed shaft axis S direction and the F direction. Each semiconductor laser 51 is a nitride-based semiconductor laser with an output of 1 W and an oscillation wavelength of 400 to 420 nm, which has the same output as that of the semiconductor laser in the second embodiment described above. The light emission width D s of the axis S direction is 25 μΐΏ. The effective number 値 aperture N A (f) in the direction of the speed axis F of the light beam emitted by each semiconductor laser 51 is 0.5, and the effective number 値 aperture N A (s) in the direction of the late axis S is 0.2. The collimating optical system 60 is a truncated lens composed of collimating lenses 61A, 61B, 6 1 C, ... arranged in each light beam. -54-200425602 As shown in Figure 18, the optical axis shifting optical system 70 is a plurality of prisms 7 1 A, 7 1 B, 7 1 C, which are thin in thickness. The light beam L a incident on the prism 7 1 A is reflected between the parallel planes R 1 and R 2 of the prism 7 1 A and the optical axis is shifted on the plane H 2 and is emitted from the prism 7 1 A. The same applies to other prisms. However, the optical axis of the light beam L c is positioned on the above-mentioned plane H2 before being incident on the optical axis shifting optical system 70, so the optical path of the light beam L c passes through the prism 71C without being shifted. The prism 7 1 C can be used as an optical flat plate that does not change the optical path of a light beam, for example. As shown in FIG. 19, the convergent optical system 80 is a convergent F lens in which the entire light beam formed by shifting the optical axis of the optical system 70 · each of the light beams L a, L b, L c,... 81 and a convergent S lens 82 that converges the entire light beam in the late-axis S direction. The function in the above embodiment will be described below. Each of the light beams La, Lb, Lc emitted by the plurality of semiconductor lasers 51, according to the collimating optical system 60, has optical axes parallel to each other, and the late axes S are parallel to each other and have different positions in the direction of the speed axis F. The parallel beams are incident on the prisms 71A, 71B, 71C, ... of the optical axis shift optical system 70. The beams of Lu are shifted in the direction of the slow axis S according to the prisms 7 1 A, 7 1 B, 7 1 C, etc., and the speed axes F of the beams L a, L b, L c, ... are aligned on the late axis S. The optical system 70 is emitted from the optical axis shifting optical plane 70 on the orthogonal plane H1. The entire light beams formed by the light beams L a, L b, L c, etc. emitted by the optical axis shifting optical system 70 are converged in the direction F of the speed axis (on the XZ plane) by the convergent F lens 81 and converge after passing The S lens 82 converges in the late-axis S direction (on the YZ plane), and then enters the core of the optical fiber 40 with a diameter of 50 μm. 55-200425602 41 〇 In addition, the first embodiment, the second embodiment, and the third embodiment Each laser light multiplexing device is based on the semiconductor laser installation configuration, the light collection angle of the truncated lens, and the light collection function of the convergence angle conversion optical system or the optical axis shift function of the optical axis shift optical system. The optimization of the design can also be applied to patent documents proposed by the applicant (for example, Japanese Patent Application Nos. 2002-287 640, 2002--20 1 97 9), etc., which have a stack type (for the speed shaft) Optical fiber and laser (laser light multiplexing device) with a structure in which semiconductor lasers are laminated in the direction). φ In the above-mentioned Embodiments 1-1, 1-2, and the laser light multiplexing device in Embodiments 1-1 to 2-5, and 3-1, the light beam is incident and multiplexed by the optical fiber. The 40 series uses a core diameter of 25 μπΐ to 400 μιη, and a special size is a core diameter of 50 μημ to 100 μπί. In addition, the truncated lens systems used in each of the foregoing embodiments 1-1, 1-2, 2-1 through 1-5, and 3-1 may be spherical lenses or Aspheric lens. Also, in the embodiment, the description as a cut-off lens is not limited to the case where the cut-off lens is necessarily used, and a general lens having a circular shape as viewed from the optical axis direction may be used. Another example is a semiconductor laser that can be used as the semiconductor lasers 1 in the above-mentioned embodiments 1 to 1, 1 to 2 and 2 to 1 and 2 to 5 and 3 to 1. In other words, the difference in the size of the light emission width D s (see FIG. 2) is one of the following types. • Single-mode semiconductor laser The lateral mode (late axis direction) becomes single-mode. The luminous intensity of the light-emitting range D s is -56- 200425602 1 μm to 3 μm, and the output coefficient is usually mW to 500 mW. • Multi-modal semiconductor laser The lateral modal (late axis) system becomes multi-modal. The luminescence amplitude of the light-emitting range D s is several μιτί to 100μΙ, and usually the output is 100mW to 2000mW. In addition, the convergence angle conversion optical system in Embodiments 1-1, 1-2, and 2-1 to 2-5, or the optical axis shift optical system in Example 3-1, and When it is not limited to a combination of prisms, it can be formed by using a reflective element, a refractive element, a grid element, or a ph ot nics crystal (an artificial lattice in which a dielectric is arranged in a three-dimensional arrangement), or the like. Components are formed. In addition, the number of multiplexing beams in the laser light multiplexing device of the present invention is not limited to five, and any number of multiplexing beams may be selected. The wavelength of the light beam emitted by each of the semiconductor lasers is more than 3 50 nm and preferably less than 460 nm, but is not limited to this range. Furthermore, the wavelength of the light beam emitted by each of the semiconductor lasers is described above. When it is out of the range from 350 nm to 460 nm, infrared light may be used, for example. [Brief Description of the Drawings] [Figure 1] A schematic diagram showing the structure of a laser beam combining device according to Example 1-1 of the first embodiment of the present invention. [Fig. 2] A perspective view showing a state in which a laser beam is emitted from an active layer of a semiconductor laser. [Fig. 3] A diagram showing a structure of a convergence angle conversion optical system and a beam multiplexed on an optical fiber. [Fig. 4] A function diagram showing the convergence of the divergent light beams in the individual lenses. -57- 200425602 [FIG. 5] A plan view showing a schematic configuration of the laser light multiplexing device of Embodiment 1-2. [Figure 6] A functional diagram showing a shift lens for shifting a light beam. [Fig. 7] It is a function diagram of the optical axis direction of a light beam transformed into a convergence angle conversion optical system when viewed from the late axis direction. Fig. 8 is a plan view showing an arrangement example of a plurality of semiconductor lasers. [Fig. 9] Fig. 9 is a schematic configuration diagram of a laser light multiplexing device of Example 2-1 in the second embodiment. [Fig. 10] This is a functional diagram of the optical axis direction of the beam in the convergence angle conversion optical system when viewed from the late axis direction and transformed. [Fig. 11] Fig. 11 is a plan view showing a schematic configuration of the laser light multiplexing device of Embodiment 2-2. [Fig. 12] Fig. 12 is a plan view showing a schematic configuration of a laser beam multiplexing device for polarizing and multiplexing beams in Embodiments 2-3. [Fig. 13] Fig. 13 is a plan view showing a schematic configuration of a laser light multiplexing device for multiplexing wavelengths in Embodiments 2 to 4. [Fig. [Fig. I4] A functional diagram of a convergent lens in the laser multiplexing device of Embodiments 2-4. [Fig. 15] A plan view showing a schematic configuration of a laser light multiplexing device of Embodiments 2 to 5. [Fig. [Fig. 16] A characteristic diagram of a convergent optical system used in a laser multiplexing device. [Fig. 17] Fig. 17 is a plan view showing a schematic configuration of a laser light multiplexing device according to a third embodiment. -58- 200425602 [Fig. 18] A structural diagram showing an optical axis shift optical system. [Fig. 19] A conceptual diagram showing a state in which each light beam is converged using a convergent optical system. [Fig. 20] A schematic configuration diagram of a conventional laser light multiplexing device. [Fig. 21] A diagram illustrating a convergence angle. [Fig. 22] A diagram showing a state in which a light beam passes through a redirection system. [Figure 23] A diagram showing the state of the beam passing through the redirection system. [Table 24] It shows the state of each beam passing through the redirection system at the specified position. φ [Fig. 25] It shows the state of each beam of the redirection system passing through the redirection system at a position deviating from the specified position. [Fig. 26] A diagram showing an area where a convergent dispersion optical system can be arranged in the laser multiplexing device of the present invention. [Description of main symbols] 11 Semiconductor laser 12. Active layer 30 Convergence angle conversion optical system φ 40 fiber 41 Core 110 Laser block 120 Convergent dispersion lens -59-