TW200420198A - Processing device - Google Patents
Processing deviceInfo
- Publication number
- TW200420198A TW200420198A TW92107023A TW92107023A TW200420198A TW 200420198 A TW200420198 A TW 200420198A TW 92107023 A TW92107023 A TW 92107023A TW 92107023 A TW92107023 A TW 92107023A TW 200420198 A TW200420198 A TW 200420198A
- Authority
- TW
- Taiwan
- Prior art keywords
- environmental gas
- processing device
- container
- density
- ultraviolet light
- Prior art date
Links
Landscapes
- Plasma Technology (AREA)
- Treatment Of Fiber Materials (AREA)
Abstract
The processing device of the present invention comprises: a container (1) containing the processed object (W); an ultraviolet light generation means (41) to output ultraviolet light (UV) toward the environmental gas (P) containing the chemical base in the container (1); a UV ray absorbing means (42) to absorb the UV ray passing the environmental gas (P); an analyzing control means (43, 44) to calculate the density of the chemical base in the environmental gas (P) according to the output signal of the UV ray absorbing means (42), so as to control the processing parameters. Accordingly, the density of the base can be kept constant, and the repeating property of the process can be enhanced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92107023A TWI243631B (en) | 2003-03-26 | 2003-03-26 | Processing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92107023A TWI243631B (en) | 2003-03-26 | 2003-03-26 | Processing device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200420198A true TW200420198A (en) | 2004-10-01 |
TWI243631B TWI243631B (en) | 2005-11-11 |
Family
ID=37025435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92107023A TWI243631B (en) | 2003-03-26 | 2003-03-26 | Processing device |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI243631B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602226B (en) * | 2016-08-30 | 2017-10-11 | 上海新昇半導體科技有限公司 | Etching apparatus and method for dividing a semiconductor wafer |
-
2003
- 2003-03-26 TW TW92107023A patent/TWI243631B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602226B (en) * | 2016-08-30 | 2017-10-11 | 上海新昇半導體科技有限公司 | Etching apparatus and method for dividing a semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
TWI243631B (en) | 2005-11-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |