200419180 玖、發明說明 發明所屬之技術領域： 本發明是有關於一種微振鏡結構（t ο I· s i ο n a 1 micromirror)，且特別是有關於一種具有大扭 轉角度之微振鏡結構，根據本發明之微振鏡結構， 可使用遠小於傳統結構所需求之電流與磁場，即可 產生大於10度之扭轉角度。 先前技術： 於雷射印表機或條碼讀取機等光學系統中，主 要的元件大概可以分為三大部份：雷射光源、光源 掃瞄機構及反射光源解碼裝置。其中最重要的零組 件為光源掃瞄機構的設計，製造與其控制技術的研 發，傳統的光源掃瞄機構是利用多面鏡（Ρ 〇 1 y g ο η Mirror)與旋轉多面鏡之馬達所組合而成。而多 面鏡的製造過程當中，鏡面的平坦度則是最大的考 量因素，至於旋轉多面鏡之馬達則需仰賴控制技術 使其轉速穩定，才能達到高解析度。傳統上利用精 密加工所製造出來的鏡面與馬達不僅體積大，且製 造價錢十分的昂貴。 現階段，有使用振鏡代替傳統之多面鏡以進行 5 200419180 掃描。目前有多種之振鏡被提出，如以驅動的方式 來分類，主要可分為熱驅動式振鏡，靜電力驅動式 振鏡’及電磁力驅動式振鏡。熱驅動式振鏡’由於 其需高溫環境（通常高於400QC)工作，影響振鏡 元件壽命及可靠度。對靜電力驅動式振鏡（如美國 專利案號第4 3 1 7 6 1 1號所揭示）而言，因受限於 鏡面與兩極板間之間距，使得該式振鏡難以達到大 角度之扭轉；此外，為使該式振鏡產生扭轉，需施 加高電壓（通常高於100伏特）以產生高靜電場， 而高電壓的產生，對目前之積體電路而言是不容易 整合的。電磁力驅動式振鏡，由於其靠線圈電流和 磁場作用而使振鏡之鏡面發生扭轉，因此不需如靜 電力驅動式振鏡之下層電極板，而可有大角度之扭 轉。傳統之電磁力驅動式振鏡結構如第一圖所示， 此結構包括一鏡面板10 (mirror plate)、兩扭 轉傳動桿 12a 和 12b ( torsional beam)、支 架 13 ( supporting frame )和位於此鏡面板 1 0上之導電線圈1 4所組成。而此振鏡係利用一 電磁力（或稱為勞倫茲力）來產生扭轉，然而此種 結構在電流小於1 0 0毫安，或磁場小於3 0 0 0高 斯之情況下，並不容易產生超過 1〇度之扭轉角 度。尤其在使用微系統技術（M i c r 〇 S y s t e m Technologies)製造該振鏡時，因為其製造所使 6 200419180 用之多為半導體材料，如多晶（poly crys 或單晶（single crystal)矽，其楊氏 (young’s modulus)近似於鋼材（〜ΙΟΟχ P a )，很難被所施加之微電磁力所扭轉。為了 半導體材料所製成之鏡面板10有一個較大之 角度，傳統上，需將該振鏡置於一高磁場（ 6 0 0 0高斯）或高電流（大於2 0 0毫安）的環境 然而，此種方式除耗能外，在此高磁場環境工 所延伸之電磁干擾 （Electromagn《 Interference)亦為週邊的積體電路帶來可 的問題。 發明内容： 有鑑於上述傳統之電磁力驅動式振鏡結構 陷：如傳統之振鏡結構因為其楊氏係數近似 材，很難被扭轉，而為了達到所需之扭轉角度 常會施加南磁場或南電流在此振鏡結構上’而 高耗能及高電磁干擾等缺點。因此，本發明的 目的即是針對上述之缺點，提出一種由平板製 振鏡結構，其扭轉傳動桿在相同之施加電流下 大之扭轉敏感度；此外，並提出藉由不同扭轉 桿，電極板及電線圈的安排，以使振鏡在不需 t a 1 ) 係數 1 0 9 讓由 扭轉 大於 上。 作下 ί t i c 靠度 的缺 於鋼 ，通 產生 主要 成之 有較 傳動 共振 200419180 的頻率下工作，提供上下或左右之一或二維之振動 模態。 根據本發明之振鏡結構，包括一具鏤空部分之 支架’一鏡面板放置於該鐘空部分’並經由一或數 組扭轉傳動桿和此支架相連，其中此任一扭轉傳動 桿是由單一或數個直部分和彎曲部分所形成。另有 一或數組導電線圈被置於鏡面板和扭轉傳動桿上。 實施方式： 在不限制本發明之精神及應用範圍之下，以下 即以一實施例，介紹本發明之實施；熟悉此領域技 藝者，在瞭解本發明之精神後，當可應用本發明之 振鏡結構於各種不同之反射裝置中，藉由本發明的 結構，可讓扭轉傳動桿在相同之電流下有較大之扭 轉敏感度，並可降低其等效彈性係數。本發明之應 用當不僅限於以下所述之較佳實施例。 參閱第二圖所示，為根據本發明完成後的振鏡 架構示意圖，其係包括一具鏤空部分 25 之支架 20，一鏡面板21放置於該鏤空部分25，並經由 兩傳動桿2 2和2 3和此支架2 0相連，其中傳動 桿2 2是由直部分2 2 a和2 2 b和彎曲部分2 2 c所 形成，而傳動桿2 3是由直部分2 3 a和2 3 b和彎 8 200419180 曲部分2 3 c所形成，一導電線圈2 4被置於鏡面 板2 1和兩傳動桿2 2和2 3上，而鏡面板21用來 反射入射之光線。 於第一圖之前技藝中，其扭轉角度可由扭轉傳 動桿 1 2 a和 1 2 b決定，扭轉兩扭轉傳動桿 12a 和1 2 b所需之扭矩Γ,如下式（1 )所示：200419180 玖 、 Explanation of the invention Technical field to which the invention belongs: The present invention relates to a micromirror structure (t ο si ο na 1 micromirror), and in particular to a micromirror structure with a large torsion angle, according to The micro-mirror structure of the present invention can use a current and magnetic field far smaller than that required by the conventional structure, and can generate a twist angle greater than 10 degrees. Prior technology: In optical systems such as laser printers or bar code readers, the main components can be roughly divided into three parts: laser light source, light source scanning mechanism and reflective light source decoding device. The most important component is the design, manufacture and control technology development of the light source scanning mechanism. The traditional light source scanning mechanism is a combination of a polygon mirror (P 〇1 yg ο η Mirror) and a motor that rotates the polygon mirror. . In the manufacturing process of the polygon mirror, the flatness of the mirror surface is the biggest consideration. As for the motor that rotates the polygon mirror, it needs control technology to stabilize its rotation speed to achieve high resolution. Mirrors and motors traditionally manufactured by precision machining are not only bulky, but also very expensive to manufacture. At present, there are galvanometers instead of traditional polygon mirrors for 5 200419180 scanning. At present, a variety of galvanometers have been proposed. If they are classified by driving methods, they can be mainly divided into thermally driven galvanometers, electrostatically driven galvanometers', and electromagnetically driven galvanometers. Thermally driven galvanometers ’affect the life and reliability of the galvanometer components because they require high-temperature environments (usually higher than 400QC) to work. For an electrostatically driven galvanometer (as disclosed in U.S. Patent No. 4 3 1 7 6 1 1), it is difficult to achieve a large angle due to the distance between the mirror surface and the two plates. In addition, in order to cause the galvanometer to twist, a high voltage (usually higher than 100 volts) is required to generate a high electrostatic field, and the generation of a high voltage is not easy to integrate for current integrated circuits. The electromagnetic force-driven galvanometer, due to its coil current and magnetic field, causes the mirror surface to be twisted. Therefore, it is not necessary to rotate the large-angle electrode plate like a static electric-driven galvanometer. The traditional electromagnetic force-driven galvanometer structure is shown in the first figure. This structure includes a mirror plate 10, two torsional beams 12a and 12b (torsional beam), a support frame 13 (supporting frame), and a mirror located on the mirror. It is composed of conductive coils 14 on the panel 10. The galvanometer system uses an electromagnetic force (also called Lorentz force) to generate torsion. However, this structure is not easy when the current is less than 100 mA or the magnetic field is less than 3 000 Gauss. Generates twist angles in excess of 10 degrees. Especially when using micro system technology (Microsystems Technologies) to manufacture the galvanometer, 6 200419180 is mostly used for semiconductor materials, such as poly crys or single crystal silicon. Young's modulus is similar to steel (~ ΙΟχχ P a), and it is difficult to be twisted by the applied micro-electromagnetic force. In order for the mirror panel 10 made of semiconductor materials to have a large angle, traditionally, it is necessary to The galvanometer is placed in a high magnetic field (600 gauss) or high current (greater than 2000 milliamps) environment. However, in addition to energy consumption, this method extends electromagnetic interference ( Electromagn's "Interference" also brings possible problems to the surrounding integrated circuits. Summary of the invention: In view of the above-mentioned traditional electromagnetic force-driven galvanometer structure depression: such as the traditional galvanometer structure because its Young's coefficient is similar to the material, it is difficult It is twisted, and in order to achieve the required twist angle, a south magnetic field or south current is often applied to the galvanometer structure, and the disadvantages are high energy consumption and high electromagnetic interference. Therefore, the object of the present invention is to pin The shortcomings mentioned above propose a flat galvanometer mirror structure with a large torsional sensitivity of the torsion transmission rod under the same applied current; in addition, the arrangement of different torsion rods, electrode plates and electric coils is proposed to make the vibration The mirror does not need ta 1) The coefficient 1 0 9 allows the twist to be greater than the upper one. The reliability of ί t i c is lacking in steel, and the main cause is to work at a frequency of relatively high drive resonance 200419180, providing one or two-dimensional vibration modes of up and down or left and right. According to the galvanometer structure of the present invention, it includes a bracket with a hollow portion, 'a mirror panel is placed on the bell space portion', and is connected to the bracket via an or an array of twisting transmission rods, wherein any one of the twisting transmission rods is Formed by several straight and curved parts. Another one or an array of conductive coils are placed on the mirror panel and the torsion drive rod. Embodiments: Without limiting the spirit and scope of the present invention, the following describes the implementation of the present invention with an example. Those skilled in the art can understand the spirit of the present invention and apply the vibrations of the present invention. The mirror structure is used in various reflecting devices. With the structure of the present invention, the torsional transmission rod can have greater torsional sensitivity under the same current, and its equivalent elastic coefficient can be reduced. The application of the present invention is not limited to the preferred embodiments described below. Refer to the second figure, which is a schematic diagram of the galvanometer structure after completion according to the present invention. It includes a bracket 20 with a hollowed portion 25, a mirror panel 21 is placed on the hollowed portion 25, and two transmission rods 22 and 2 3 is connected to this bracket 20, wherein the driving rod 22 is formed by the straight portions 2 2 a and 2 2 b and the curved portion 2 2 c, and the driving rod 23 is formed by the straight portions 2 3 a and 2 3 b He bend 8 200419180 is formed by the curved part 2 3 c. A conductive coil 24 is placed on the mirror panel 21 and the two transmission rods 22 and 23, and the mirror panel 21 is used to reflect the incident light. In the technique before the first picture, the torsion angle can be determined by the torsional transmission rods 1 2 a and 1 2 b. The torque Γ required to twist the two torsional transmission rods 12 a and 1 2 b is shown in the following formula (1):
其中/△為扭轉傳動桿12a和12b之長度， w &為扭轉傳動桿12a和12b之寬度，“為扭轉 傳動桿1 2. a和1 2 b之厚度，G為材料之剪力模數 (shear modulus )可以下式（2)所示：Where / △ is the length of the torsion transmission rods 12a and 12b, w & is the width of the torsion transmission rods 12a and 12b, "is the thickness of the torsion transmission rods 1 2. a and 1 2 b, and G is the shear modulus of the material (shear modulus) can be expressed by the following formula (2):
其中 E 為揚氏係數，u 為波以松比 (Poisson’s ratio)，於式（1)中 K e 稱為扭 轉常數（torsional constant)，其大小可由扭 轉傳動桿1 2 a和1 2 b之材料特性和外觀形狀（/ & 長度，w &寬度和^厚度）決定，式（1)描述出 扭矩Γ ,和扭轉角度0間之關係。然而由於半導體 材料之楊氏係數大，使得剪力模數亦跟著變大，因 此造成最後之扭轉常數變大。大扭轉常數將使得振 9 200419180 鏡轉動不易；即使使用微系統技術製造，使扭轉傳 動桿1 2 a和1 2 b微小化，其施加之電磁力在相同 之電流及磁場下亦微小化，如扭轉傳動桿 1 2 a和 1 2 b在無新材料及新結構應用的情況下，仍很難 產生很大之扭轉角度。 因此，本發明提出一種扭轉傳動桿之新結構， 在不改變原本所使用之材料情形下，本發明扭轉傳 動桿2 2和2 3之結構，藉由加入彎曲部分2 2 c和 23c，可降低扭轉常數尺，，因此在相同之力矩下， 可產生較大之扭轉角度0。其中，扭轉常數尺e降 低之大小以一比例值/等蛛之，此時式（1 )可以 下式描述之： me (3) 其中，扭轉常數尺，降低之比例值/大小與扭 轉傳動桿2 2和2 3彎曲部分2 2 c和2 3 c之幾何 形狀有關。 以下舉一實施案例，說明藉由加入彎曲部分 22c和23c之扭轉傳動桿22和23之結構，可有 效降低扭轉常數[e之事實。若使用如第一圖所示 之振鏡結構，假設此振鏡結構使用單晶矽材料，厚 度為2 μπι，其中鏡面板10之面積為250x250 μιη，而扭轉傳動桿 12a和 12b 之長度為 250 μπι，寬度為ΙΟμηι，於此狀況下之單晶砍材料其 10 200419180Where E is the Young's coefficient and u is the Poisson's ratio. In Eq. (1), Ke is called the torsional constant, and its size can be determined by the materials of the torsional transmission rods 1 2 a and 1 2 b. The characteristics and appearance shape (/ & length, w & width and thickness) are determined. Equation (1) describes the relationship between the torque Γ and the torsion angle 0. However, due to the large Young's coefficient of the semiconductor material, the shear modulus also increases, which causes the final torsional constant to increase. A large torsion constant will make it difficult to rotate the mirror 9 200419180; even if the micro-system technology is used to make the torsional transmission rods 1 2 a and 1 2 b miniaturized, the electromagnetic force applied by them will also be miniaturized under the same current and magnetic field, such as The torsion transmission rods 1 2 a and 1 2 b are difficult to produce a large torsion angle without the application of new materials and new structures. Therefore, the present invention proposes a new structure of the torsion transmission rod. Without changing the materials used originally, the structure of the torsion transmission rod 2 2 and 23 of the present invention can be reduced by adding the curved portions 2 2 c and 23 c. Torsion constant rule, so under the same moment, a larger torsion angle 0 can be produced. Among them, the reduction of the torsional constant rule e is a proportional value / equal. At this time, formula (1) can be described as follows: me (3) Among which, the torsional constant rule, the reduced proportional value / size and the torsion transmission rod The geometric shapes of the 2 2 and 2 3 curved portions 2 2 c and 2 3 c are related. An example is given below to illustrate the fact that the torsional constant [e] can be effectively reduced by adding the structures of the torsion transmission rods 22 and 23 of the curved portions 22c and 23c. If the galvanometer structure shown in the first figure is used, it is assumed that the galvanometer structure is made of a single crystal silicon material with a thickness of 2 μm. The area of the mirror panel 10 is 250x250 μm, and the length of the torsion transmission rods 12a and 12b is 250. μπι, width is 10μηι, the single crystal chopping material under this condition is 10 200419180
揚氏係數為 1 3 0 X 1 0 9 P a，波以松比為 0.28, 經過式（1 .)之計算後，扭轉常數炙e為1 . 3 1 3 X 1 0 ' 7 Nt-m/rado 此時若經由導電線圈1 4傳送之電流為1 m A 時，此時所產生之磁場將為1 0 0 0高斯（G a u s s )， 振鏡結構自身會產生一扭矩 2%約為 5x 1〇-8 N t - m，此扭矩之產生係因為一勞倫茲力，扭矩Γ e 與扭轉常數中放入式（1)計算後，在如第一 圖之結構下，扭轉角度Θ約在0.0027。，因此需 增加電流或磁場約 5 0 0 0倍，振鏡才有大於 1 0。 以上的轉角。 然而若使用本發明之振鏡結構，如第二圖所 示，在扭轉傳動桿2 2和2 3之結構，加入彎曲部 分2 2 c和2 3 c，此彎曲部分2 2 c和2 3 c之結構 如第三A圖所示，具有一與鏡面板21相同之厚度 2 μιη，彎曲部分22c和23c之寬度，如第三A 圖所示之31為10 μπι;高度如第三A圖所示之 33為250 μπι;間距如第三A圖所示之32為2 μ m 。 其中如第二圖所示，彎曲部分2 2 c之左側是藉 由直部分22a與支架20相接，而右侧是藉由直 部分2 2 b與鏡面板2 1相接。另一彎曲部分2 3 c 之右側是藉由直部分23a與支架20相接，而左 11 200419180 側是藉由直部分2 3 b與鏡面板2 1相接。其中各 直部分22a、22b、23a和23b之長度均為108 μηι，寬度為 10 μιη和厚度為 2 μπι，因此扭轉 傳動桿2 2和2 3之總長度亦均為2 5 0 μ m，與第 一圖之例子相同。 藉由模擬方法，如使用有限元素分析法 (Finite Element Method)，扭轉常數尺g 為 5 , 5 4 4 X 1 0 ' 9 Nt-m/rad ；而於式（3)中，扭 轉角度尺e降低之大小比例值/為〇 . 〇 4 2，亦即藉 由將扭轉傳動桿2 2和2 3加入彎曲部分，可將相 同長度之傳統直式扭轉傳動桿之扭轉常數降低 一比例值/。因此，本發明之振鏡結構可使用一較 小之力矩 即可產生與.傳統結構相同之扭轉角 度。在使用與上例相同之操作條件下，可產生 0.129。之扭轉角度，即降低47倍。使原本需要 增加電流或磁場約 5 0 0 0倍，振鏡才有大於 1 0。 以上轉角的情況下變為僅需要增加電流或磁場約 1 0 0倍；如施加的電流為1 0 0 m A，即可於1 0 0 0 高斯的磁場環境中，使振鏡產生大於1 0 °以上的轉 角。 由上例可見，本發明之扭轉傳動桿結構，在不 改變材料及增加扭轉傳動桿總長的情況下，確實有 效降低有效扭轉常數尺e，增進扭轉角度Θ。 12 200419180 值得注意的是，振鏡結構之振動模式有數種。 一般位於低頻的兩種振動模式，第一種是將扭轉傳 動桿當作扭轉軸而沿著此軸左右扭轉而來回振 動，第二種是沿鏡面之垂直轴上下彎曲而來回振 動，亦即讓鏡面板上下振動。對於一種具有直形扭 轉傳動桿之振鏡結構，如於美國專利案 5, 629, 790中所揭露者，上述兩種振動方式之共 振頻率差異性可高達 2 0 %。然而，由於本發明將 扭轉傳動桿2 2和 2 3分別加入彎曲部分2 2 c和 2 3 c，因此其扭轉常數尺，與等效彈性係數可被同 步降低，即扭轉傳動桿2 2和2 3較易發生扭轉及 彎曲，而使得上述兩種之共振頻率差異性接近，亦 即可低於 2 0 %，而使本發明不同於該專利案。此 外，當扭轉傳動桿2 2和2 3之彎曲力矩小於扭轉 力矩時，第一種振動模式則為上下彎曲之振動模 式，第二種振動模式則為左右扭轉之振動方式。 本發明扭轉傳動桿2 2和2 3之彎曲部分2 2 c 和23c亦可如第三B圖與第三C圖所示，亦即使 用複數個彎曲部分來構成本發明之扭轉傳動桿。第 四圖為另一種彎曲部分之設計，其亦可適用於本發 明之扭轉傳動桿。 於傳統上所設計之振鏡，如第一圖所示，其鏡 面板10上具有兩個導電線圈14，為使振鏡具有 13 200419180 不同方式之振動（如左右振動或上下振動），通常施 加頻率和振鏡共振頻率相同之電流或磁場驅動振 鏡，以使該振鏡工作於不同之振動模式，而產生不 同模式之振動。 為使振鏡不用在共振頻率下，亦可得到不同形 式之振動，本發明提供一簡易之方法。參閱第五 圖’若連接導電線圈 24之電極被區分成兩對電 極，分別為34a和34b與35a和35b，其中電 極對3 4 a和3 4 b構成電流路徑3 4，而另一對電 極3 5 a和3 5 b構成另一電流路徑3 5。藉由控制 電流路徑中電流的流動方向，在不變磁場方向的情 況下，即可決定鏡面板振動方式。 第六A圖至第六D圖分別為從第五圖之AA’ 看入之剖視圖，其中於第六A圖與第六B圖所示， 磁場方向係由左至右，而電流路徑3 4與3 5中之 電流方向一為指出紙面，一為指向紙面，此時之振 動方式，在電流與磁場共同作用下所產生之電磁力 會讓鏡面板產生左右扭轉。而另一方面，於第六C 圖與第六D圖所示，其中磁場方向亦為由左至右， 而電流路徑3 4與3 5中之電流方向均為指出紙面 如第六C圖，或均為指向紙面如第六D圖，此時 之振動方式，在電流與磁場共同作用下所生之電磁 力會讓鏡面板產生上下振動。因此，在固定磁場的 14 200419180 情況下，透過對兩組電線圈電流方向的安排， 所施加之電流頻率不在振鏡結構的共振頻率9 有上下振動及左右扭轉之不同振動形式。 由於藉由扭轉傳動桿彎曲部分之設計，使 轉傳動桿之扭轉常數和等效彈性係數均可 低，而容易被扭轉。因此透過如第七圖之安排 使得單一維度之振鏡具有二維之振動。如第七 示之振鏡，於鏡面74之四邊各連接73a，7 73c，及73d之扭轉傳動桿，於鏡面74及該 扭轉傳動桿73a，73b，73c，及73d上有 線圈7 1及7 2分別位於不同層且兩組線圈不 連接。一磁場7 5於X - y軸上分別具X分量 及y分量7 5 b，當線圈7 1施加如方向7 6之 時，鏡面將沿X軸扭轉；同時，如線圈7 2施 方向7 7之電流時，鏡面將沿y軸扭轉。如此 X軸及y軸扭轉之鏡面將可合成出具二維掃描 之振鏡。 如將第七圖之兩電流線圈 7 1和 7 2如第 般各分為兩組’共四組電流線圈’八個電極才 如以適當之電流方向組合，可得除沿 X - y軸 之二維掃描以外，並可使得鏡面沿紙面上下 動。如第八 A 圖所示為兩層電流線圈分為八 極板，81a、81b、81c、81d、82a、82b、 即使 亦可 得扭 被降 ，可 圖所 3b， 四組 兩組 相互 7 5a 電流 加如 之沿 機制 五圖 方向 之振 個電 8 2c 15 200419180 和8 2 d，分別位於x方向和y方向，藉由施加如 第八A圖中所示之X方向電流7 6和y方向電流 7 7，可得除沿X - y軸方向之二維掃描以外，並可 使得鏡面沿紙面上下之振動。 第八B圖所示為一層電流線圈分為四組。藉由 施加如第八B圖中所示之X方向電流Ix86a、86c 和y方向電流I y 8 6 b、8 6 d可得除沿X - y軸方向 之二維掃描以外，並可使得鏡面沿此皆可達成沿 X - y轴方向之二維掃描加沿紙面上下之振動。值得 注意的是，本發明振鏡結構，其扭轉傳動桿不僅僅 如圖中所示之四個，其亦可由多個扭轉傳動桿來共 同連接鏡面板和支架。 雖然本發明已以一較佳實施例揭露如上，然其 並非用以限定本發明，任何熟習此技藝者，在不脫 離本發明之精神和範圍内，當可作各種之更動與潤 飾，因此本發明之保護範圍當視後附之申請專利範 圍所界定者為準。 16 200419180 圖式簡單說明 為讓本發明之上述和其他目的、特徵、和優點 能更明顯易懂，下文特舉數個較佳實施例，並配合 所附圖式，作詳細說明如下： 第一圖所示為傳統振鏡結構示意圖。 參 第二圖所示為根據本發明較佳實施例完成後的 振鏡結構不意圖。 第三A圖至第三C圖所示為扭轉傳動桿彎曲 部分之各種設計結構示意圖。 第四圖所示為扭轉傳動桿另一種彎曲部分之設 計結構示意圖。 第五圖所示為根據本發明較佳實施例完成後的 振鏡結構不意圖。 第六A圖至第六D圖分別為從第五圖之AA’ 看入之剖視圖。 第七圖所示為根據本發明另一較佳實施例完成 後的振鏡結構不意圖。 第八A圖與第八B圖所示為使用八個電極板 之振鏡結構不意圖。 17 200419180 圖式標記說明 1 〇 鏡面板 1 2 a和1 2 b扭轉傳動桿 13 支架 1 4 導電線圈 2 0 支架 2 1鏡面板 ® 73a、73b、73c、73d、83a、83b、83c、83d、 2 2和2 3 扭轉傳動桿 22a、 22b、 23a 和 23b 直部分 2 2 c和2 3 c 彎曲部分 2 4 導電線圈 2 5 鏤空部分 3 1寬度 3 2間距 籲 3 3高度 3 4和3 5 電流路徑 34a、34b、35a、35b、71、72、81a、81b、 81c、81d、82a、82b、82c*82d 電極 ” 76、77、86a、86b、86c 和 86d 電流 7 5和8 5 磁場方向 75a、75b、85a和85b 磁場於x-y軸上分量 18The Young's coefficient is 1 3 0 X 1 0 9 P a, and the wave-to-loose ratio is 0.28. After the calculation of formula (1.), the torsion constant e is 1. 3 1 3 X 1 0 '7 Nt-m / If the current transmitted by the rado through the conductive coil 14 is 1 m A at this time, the magnetic field generated at this time will be 1 0 0 0 Gauss, and the galvanometer structure will generate a torque of 2% approximately 5x 1 〇-8 N t-m. The torque is generated by a Lorentz force, the torque Γ e and the torsional constant are calculated by formula (1). Under the structure as in the first figure, the torsional angle Θ is about 0.0027. Therefore, it is necessary to increase the current or magnetic field by about 50,000 times before the galvanometer is greater than 10. Above the corner. However, if the galvanometer structure of the present invention is used, as shown in the second figure, a curved portion 2 2 c and 2 3 c is added to the structure of the torsion transmission rods 22 and 2 3, and this curved portion 2 2 c and 2 3 c The structure is as shown in FIG. 3A, and has the same thickness 2 μm as the mirror panel 21, and the width of the curved portions 22c and 23c. As shown in FIG. 3A, 31 is 10 μm; the height is as shown in FIG. 3A The number 33 shown is 250 μm; the pitch shown in Figure 3A is 2 μm. As shown in the second figure, the left side of the curved portion 2 2 c is connected to the bracket 20 through the straight portion 22 a, and the right side is connected to the mirror panel 21 through the straight portion 2 2 b. The right side of the other curved portion 2 3 c is connected to the bracket 20 through a straight portion 23 a, and the left 11 200419180 side is connected to the mirror panel 21 through a straight portion 2 3 b. The lengths of the straight portions 22a, 22b, 23a, and 23b are 108 μm, the width is 10 μm, and the thickness is 2 μm. Therefore, the total length of the twisted transmission rods 22 and 23 is also 2 50 μm, and The example in the first figure is the same. By using a simulation method, such as the Finite Element Method, the torsion constant g is 5, 5 4 4 X 1 0 '9 Nt-m / rad; and in equation (3), the torsion angle e The reduced size ratio value is 0.04, that is, by adding the torsion transmission rods 22 and 23 to the bending portion, the torsion constant of the conventional straight torsion transmission rod of the same length can be reduced by a ratio value /. Therefore, the galvanometer structure of the present invention can generate a twist angle which is the same as that of the conventional structure by using a small moment. Using the same operating conditions as in the previous example, it yields 0.129. The twist angle is reduced by 47 times. It is necessary to increase the current or magnetic field by about 5000 times before the galvanometer is greater than 10 times. In the case of the above rotation angle, it is only necessary to increase the current or magnetic field by about 100 times; if the applied current is 100 m A, the galvanometer can generate more than 10 in a magnetic field environment of 1 0 0 0 Gauss. Angle above °. It can be seen from the above example that the torsion transmission rod structure of the present invention does effectively reduce the effective torsion constant e and increase the torsion angle Θ without changing the material and increasing the total length of the torsion transmission rod. 12 200419180 It is worth noting that there are several vibration modes of the galvanometer structure. There are two vibration modes generally located at low frequencies. The first is to use a torsion transmission rod as a torsion axis and torsional vibration along this axis. The second is to bend up and down along the vertical axis of the mirror to vibrate back and forth. The mirror panel vibrates up and down. For a galvanometer structure with a straight twisting transmission rod, as disclosed in US Patent No. 5, 629, 790, the difference between the resonance frequencies of the two vibration modes can be as high as 20%. However, since the present invention adds the torsional transmission rods 22 and 2 to the curved portions 2 2 c and 2 3 c, respectively, the torsion constant rule and the equivalent elastic coefficient can be reduced simultaneously, that is, the torsion transmission rods 2 2 and 2 3 It is easier for twisting and bending to occur, so that the difference in resonance frequency between the above two types is close, that is, less than 20%, which makes the present invention different from the patent case. In addition, when the bending moment of the torsion transmission rods 22 and 23 is smaller than the torsional moment, the first vibration mode is a vibration mode of up-and-down bending, and the second vibration mode is a vibration mode of torsional rotation. The curved portions 2 2 c and 23 c of the torsional transmission levers 22 and 23 of the present invention can also be formed by a plurality of curved portions as shown in FIGS. 3B and 3C. The fourth figure is another design of the curved portion, which can also be applied to the twist transmission rod of the present invention. The traditionally designed galvanometer, as shown in the first figure, has two conductive coils 14 on the mirror panel 10. In order to make the galvanometer have 13 200419180 different ways of vibration (such as left and right vibration or up and down vibration), usually apply The galvanometer is driven by a current or magnetic field with the same frequency as the galvanometer resonance frequency, so that the galvanometer operates in different vibration modes, and generates different modes of vibration. In order that the galvanometer does not need to be at the resonance frequency and can obtain different forms of vibration, the present invention provides a simple method. Refer to the fifth figure 'If the electrode connected to the conductive coil 24 is divided into two pairs of electrodes, respectively 34a and 34b and 35a and 35b, where the electrode pairs 3 4 a and 3 4 b constitute the current path 34 and the other pair of electrodes 3 5 a and 3 5 b constitute another current path 3 5. By controlling the direction of current flow in the current path, the mirror panel vibration mode can be determined without changing the direction of the magnetic field. The sixth diagrams A to D are sectional views taken from AA ′ of the fifth diagram, respectively. As shown in the sixth diagram A and the sixth diagram B, the direction of the magnetic field is from left to right, and the current path is 3 4 The direction of the current in 3 and 5 is to point to the paper surface, and one is to point to the paper surface. In this vibration mode, the electromagnetic force generated by the current and magnetic field will cause the mirror panel to twist left and right. On the other hand, as shown in the sixth C chart and the sixth D chart, the magnetic field directions are also from left to right, and the current directions in the current paths 34 and 35 are indicated on the paper as in the sixth C chart. Or both are pointing at the paper surface as shown in the sixth D diagram. At this time, the vibration mode, the electromagnetic force generated under the combined action of current and magnetic field will cause the mirror panel to vibrate up and down. Therefore, under a fixed magnetic field of 14 200419180, through the arrangement of the current directions of the two sets of electric coils, the applied current frequency is not at the resonance frequency of the galvanometer structure. 9 There are different vibration forms of vertical vibration and torsional twist. Due to the design of the curved part of the torsion transmission rod, the torsion constant and equivalent elastic coefficient of the torsion transmission rod can be both low and easily twisted. Therefore, through the arrangement as shown in the seventh figure, the single-dimension galvanometer has two-dimensional vibration. As shown in the seventh galvanometer, torsion transmission rods 73a, 73c, and 73d are connected to the four sides of the mirror 74, and there are coils 7 1 and 7 on the mirror 74 and the torsion transmission rods 73a, 73b, 73c, and 73d. 2 are located on different layers and the two sets of coils are not connected. A magnetic field 7 5 has an X component and a y component 7 5 b on the X-y axis, respectively. When the coil 7 1 is applied as the direction 7 6, the mirror surface will be twisted along the X axis; at the same time, as the coil 7 2 is applied in the direction 7 7 When the current is applied, the mirror will twist along the y-axis. In this way, the mirrors with X-axis and y-axis twist can be combined to form a galvanometer with two-dimensional scanning. If the two current coils 7 1 and 7 2 in the seventh figure are divided into two groups, as shown in the figure, the eight electrodes are combined in an appropriate current direction, and the voltage along the X-y axis can be divided. In addition to 2D scanning, the mirror surface can be moved up and down along the paper surface. As shown in Figure 8A, the two-layer current coil is divided into eight pole plates, 81a, 81b, 81c, 81d, 82a, 82b. Even if the twist can be lowered, it can be shown in Figure 3b. The current plus the vibrations along the five directions of the mechanism 8 2c 15 200419180 and 8 2 d are located in the x direction and the y direction, respectively, by applying the X direction current 76 and the y direction shown in the eighth figure A The current 7 7 can be obtained in addition to the two-dimensional scanning along the X-y axis direction, and can make the mirror surface vibrate up and down the paper. Figure 8B shows a layer of current coils divided into four groups. By applying the X-direction currents Ix86a, 86c, and y-direction currents I y 8 6 b, 8 6 d as shown in the eighth B diagram, in addition to the two-dimensional scanning in the X-y axis direction, the mirror surface can be made. Along the way, two-dimensional scanning along the X-y axis and vibration up and down the paper surface can be achieved. It is worth noting that the torsion transmission lever of the galvanometer structure of the present invention is not only four as shown in the figure, but it can also be connected to the mirror panel and the bracket by a plurality of torsion transmission levers. Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make various changes and decorations without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application. 16 200419180 Brief description of the drawings In order to make the above and other objects, features, and advantages of the present invention more comprehensible, several preferred embodiments are described below in conjunction with the accompanying drawings to make a detailed description as follows: First The figure shows the structure of a traditional galvanometer. Referring to the second figure, the structure of the galvanometer after the completion of the preferred embodiment of the present invention is not intended. Figures 3A to 3C are schematic diagrams of various design structures of the bent portion of the torsion transmission rod. The fourth figure shows a schematic diagram of the design structure of another curved part of the torsion transmission rod. The fifth figure shows the structure of the galvanometer after the completion of the preferred embodiment of the present invention. Figures 6A to 6D are sectional views taken from AA 'of the fifth figure, respectively. The seventh figure shows the structure of the galvanometer according to another preferred embodiment of the present invention. Figures 8A and 8B show the structure of the galvanometer using eight electrode plates. 17 200419180 Description of the graphical symbols 1 〇 Mirror panels 1 2 a and 1 2 b Twist the transmission lever 13 Bracket 1 4 Conductive coil 2 0 Bracket 2 1 Mirror panel ® 73a, 73b, 73c, 73d, 83a, 83b, 83c, 83d, 2 2 and 2 3 Twist the drive levers 22a, 22b, 23a and 23b Straight part 2 2 c and 2 3 c Bend part 2 4 Conductive coil 2 5 Hollow part 3 1 Width 3 2 Pitch 3 3 Height 3 4 and 3 5 Current Paths 34a, 34b, 35a, 35b, 71, 72, 81a, 81b, 81c, 81d, 82a, 82b, 82c * 82d electrodes "76, 77, 86a, 86b, 86c, and 86d Current 7 5 and 8 5 Magnetic field direction 75a , 75b, 85a, and 85b Magnetic field components on the xy axis 18