(1) (1)200418649 玫、發明說明 【發明所屬之技術領域】 本發明是有關決定用以驅動液滴噴出裝置的噴出噴頭 之最適的驅動波形的技術。 【先前技術】 以往使用噴出液滴來附著於對象媒體的液滴噴出裝置 。在此液滴噴出裝置中，是藉由壓電元件的伸縮（利用電 壓的施加）來使充塡液體的充塡部收縮或膨脹。藉此，液 滴噴出裝置會從液滴噴出噴頭的噴出口來噴出液滴。就此 液滴噴出裝置的用途而言，例如有對電子機器的配線基板 之配線。這可藉由將分散導電性粒子的液體材料噴出至基 板上來進行。 但，在液滴噴出裝置的工業應用中所被使用液體材料 有各式各樣，隨材料的不同，密度，粘度等的特性也會有 所不同。由於液滴的噴出狀態（1滴的份量，噴出速度等） 會隨著液體材料的特性而變化，因此必須對各液體材料調 整施加於壓電元件之驅動電壓的波形，而使能夠經常形成 最適的噴出狀態。 因此有以控制此類液滴的噴出狀態爲目的的技術被提 案（例如，專利文獻1)。就記載於專利文獻1的技術而言， 是按照油墨卡匣内的墨水餘量來變更驅動電壓波形（以下 稱爲驅動波形），藉此來謀求所被噴出之墨水量的安定化 -5- (2) (2)200418649 【專利文獻1】特開平1 1 - 3 0 9 8 7 2號公報 【發明內容】 (發明所欲解決的課題） 但，以往在決定驅動波形時，因爲須一邊試著測定噴 出後的液滴重量或飛行速度等，一邊試行錯誤，所以在決 定驅動波形時需要長時間，且爲了決定驅動波形須消耗多 量的液體材料，因此會有導致高成本化的問題。 本發明有鑑於上述課題，而以能夠提供一種可以較少 的試行來決定液滴噴出裝置的適確驅動波形之技術爲其目 的。 (用以解決課題的手段） 爲了解決上述課題，本發明之驅動波形決定裝置的特 徵係具有： 噴出噴頭，其係具備充塡有液體材料的液體充塡部， 按照驅動波形來使上述液體充塡部膨脹或收縮，藉此來使 上述液體材料液滴化而噴出； 驅動控制手段，其係供給驅動波形至上述噴出噴頭； 條件記憶手段，其係記憶上述液滴的最適重量及噴出 速度； 重量測定手段，其係測定自上述噴出噴頭所噴出的液 滴的重量； 速度測定手段，其係測定自上述噴出噴頭所噴出的液 -6 - (3) (3)200418649 滴的噴出速度； 基本驅動波形記憶手段，其係記憶上述驅動波形的基 本形； 波形調整手段，其係自上述基本驅動波形記憶手段讀 出基本形的驅動波形，調整該驅動波形，而使上述重量測 定手段所測定的重量及上述速度測定手段所測定的噴出速 度能夠與上述條件記憶手段所記憶的重量及噴出速度形成 一致；及 波形記憶手段，其係記憶藉由上述波形調整手段而調 整的驅動波形。 在上述構成的驅動波形決定裝置中，重量測定手段會 測定所被噴出之液滴的重量，速度測定手段會測定液滴的 噴出速度。然後，波形調整手段會以液滴的重量及速度能 夠與記憶於條件記憶手段的重量及速度形成一致之方式來 調整驅動波形，波形記憶手段會記憶所被調整的驅動波形 〇 若利用此驅動波形決定裝置，則可以較少的試行來決 定液滴噴出裝置之適確的驅動波形。由於可測定每一液滴 的重量及噴出速度，因此可反應實際的噴出狀態來進行正 確的調整。並且，可藉由記憶驅動波形來選擇最適的驅動 波形。 又，最好上述驅動波形決定裝置具有：物性値取得手 段，其係取得自上述噴出噴頭所噴出的液滴的物性値； 上述基本驅動波形記憶手段係記憶對應於液滴的物性 (4) (4)200418649 値之複數個驅動波形； 上述波形調整手段係由上述基本驅動波形記憶手段來 讀出對應於上述物性値取得手段所取得的物性値之驅動波 形； 上述波形記憶手段係使藉由上述波形調整手段而調整 的驅動波形與上述物性値取得手段所取得的物性値有所對 應而予以記憶。 若利用上述構成，則可按照液滴的物性値來決定最適 的驅動波形。 又，最好上述波形調整手段係針對自上述基本驅動波 形記憶手段讀出的驅動波形來進行對應於上述噴出噴頭的 固有週期之修正，且針對修正後的驅動波形進行上述調整 c 若利用上述構成，則可按照噴出噴頭的固有週期來修 正驅動波形的基本形。 又，最好上述物性値至少包含粘度，表面張力，接觸 角及密度的其中之一。 又，最好上述物性値取得手段係至少由1個上述物性 値的測定手段所構成。 若利用上述構成，則即使事先不知液體材料的物性値 ，照樣能夠藉由測定手段來測定物性値。 又，最好上述重量測定手段具有： 電極，其係設置成與上述噴出噴頭呈 對向； 振動子，其係對應於上述電極表面所附著的物質的重 -8- (5) (5)200418649 量來變化頻率； 頻率計算器，其係測定上述振動子的頻率；及 算出手段，其係根據上述頻率計算器所測定之上述液 滴的附著前後的頻率的變化量來算出上述液滴的重量。 若利用上述構成，則可正確地測定液滴的重量，使具 有所望重量的液滴噴出，決定最適的驅動波形。 又’最好上述物性値取得手段係利用上述液滴附著於 上述電極表面時之上述振動子的振幅的衰減特性來求取上 述液滴的粘度。 若利用上述構成，則可正確地測定液滴的粘度，按照 液滴的粘度來決定最適的驅動波形。 又’最好上述速度測定手段係利用自上述噴出噴頭所 噴出的液滴之不同的2個時刻的位置及2個時刻的時間差來 求取該液滴的噴出速度。 若利用上述構成，則可正確地測定液滴的噴出速度， 以所望的噴出速度來使液滴噴出，決定最適的驅動波形。 又，最好上述噴出噴頭具有複數個噴嘴，上述波形調 整手段係測定上述複數個噴嘴的噴出速度的偏差，以該偏 差能夠形成最小的方式來決定維持上述驅動波形的最高電 位的保持時間。 若利用上述構成，則可以複數個噴嘴的噴出速度的偏 差能夠形成最小的方式來決定驅動波形。 又，最好上述波形調整手段係以上述驅動波形的高頻 領域之液滴的重量的減少幅度能夠形成最小之方式來決定 -9- (6) (6)200418649 維持上述驅動波形的最低電位的保持時間。 若利用上述構成，則對驅動波形的頻率變化而言，可 使液滴的重量安定化。 又，最好上述波形調整手段係以上述液滴的重量及噴 出速度能夠與記憶於上述條件記憶手段的値一致之方式來 決定上述驅動波形的最高電位及中間電位。 若利用上述構成，則可以能夠取得所望的重量及噴出 速度之方式來決定驅動波形。 上述驅動波形決定裝置亦可裝入液滴噴出裝置來使用 〇 該液滴噴出裝置的特徵係具有： 噴出噴頭，其係具備充塡有液體材料的液體充塡部， 按照驅動波形來使上述液體充塡部膨脹或收縮，藉此來使 上述液體材料液滴化而噴出； 驅動控制手段，其係供給驅動波形至上述噴出噴頭。 又’上述驅動控制手段係將上述驅動波形決定裝置所 決定的驅動波形供給至上述噴出噴頭。 若利用上述構成的液滴噴出裝置，則由於驅動波形決 定裝置爲組裝於液滴噴出裝置中，因此可迅速地決定供以 使液滴能以所望的重量及噴出速度噴出之驅動波形。又， 於生産現場，可按照液滴的種類來迅速地決定驅動波形， 提高生産效率。 又’最好是利用上述液滴噴出裝置來製造光電裝置。 又’最好是將利用上述液滴噴出裝置來製造的光電裝置搭 -10- (7) (7) 200418649 載於電子機器。 【實施方式】 以下，利用圖面來說明本發明的實施形態。 <驅動波形決定裝置的構成> 首先，說明本發明之驅動波形決定裝置的構成。圖1 是表示驅動波形決定裝置1 0 0的構成圖。驅動波形決定裝 置100是例如將使銀微粒子分散於C14H3()(十四（碳）烷） 溶媒的液體材料噴出至基板的預定位置，藉此來決定在基 板上形成導電膜圖案之液滴噴出裝置的噴出噴頭的驅動波 形者。 驅動控制部120會將用以使噴出噴頭1 10驅動的驅動波 形供應給噴出噴頭。噴出噴頭1 1 0具備設有壓電元件的液 體充塡部（圖示省略），根據此驅動波形來使壓電元件伸張 或收縮’藉此來使液體充塡部的容量膨脹或收縮。藉此， 噴出噴頭1 1 0會使液體材料液滴化而朝向基板噴出。並且 ’噴出噴頭110具有複數個噴嘴。 解析部154爲電腦裝置，具有CPU(Central Processing Unit) ’ R〇M(Read Only Memory)，RAM(Random Access Memory)等，CPU會執行儲存於ROM的電腦程式來進行 驅動波形決定裝置1 0 0的各部控制。 解析部1 5 4會使液滴的最適重量，最適的噴出速度與 液體材料的種類物性値温度有所對應而予以記憶。又 -11 - (8) (8)200418649 ，解析邰1 5 4會判斷從噴出噴頭所噴出之液滴的重量及噴 出速度是否與所被記憶的値一致，進行最適驅動波形的決 定。又，解析部i 5 4會使所被決定的驅動波形與液體材料 的種類物性値温度有所對應而予以記憶。有關利用解 析部1 5 4來進行的處理程序方面會在往後敘述。 又’於本實施形態中，液體材料的物性値爲使用粘度 ，但亦可使用表面張力，接觸角，密度等。 重量粘度測定部1 5 0是利用液滴附著於水晶振動子 時之共振頻率的變化來測定液滴的重量之QCM( Quartz Crystal Micro balance)，具有重量測定手段及物性値測定 手段的機能。又，當液體材料的物性値爲使用表面張力， 接觸角’密度等時，物性値測定手段具有測定該等物性値 的機能。 圖2是表示重量粘度測定部1 5 0的構成圖。重量粘 度測定部1 5 0的主要構件爲感測器晶片42 1，頻率計算器 422，運算部42 3及脈衝產生部420。圖3是表示感測器晶片 4 2 1的構成圖。同圖中顯示與感測器晶片42 1的噴出噴頭 1 10呈對向的面。在水晶振動子424的兩面，一對的電極 42 5 a，42 5 b會對向安裝。絶縁體426會經由具有導電性的 支持體427a，427b來可振動自由地保持水晶振動子424。 支持體427a會與電極425a導通，且與固定於絶縁體426的 端子428a導通。另一方面，支持體427b會與電極425b導 通，且與固定於絶縁體426的端子428b導通。藉由上述構 成，若從脈衝產生部420輸出的脈衝訊號經由端子428a ’ -12- 200418649 Ο) 42 8b而被輸入感測器晶片421，則水晶振動子424會以共 振頻率來振動。 感測器晶片421會被設置成其一方的電極42 5 a能夠與 噴出噴頭1 1 〇的液滴噴出面呈對向。在重量 粘度測定部 4 2 0中，若從噴出噴頭1 1 〇噴出的液滴附著於電極4 2 5 a，則 會算出附著的液滴質量。 水晶振動子若作用於本身的外力爲一定，則會以一定 的共振頻率來振動，但若於電極42 5 a的表面附著有物質 而造成外力變化的話，則共振頻率會按照該變化量來變化 。並且，當附著的物質爲具有粘彈性時，水晶振動子424 會按照該物質的粘彈性特性値來變化共振頻率。 在此，說明有關液滴的重量測定。液滴的重量測定爲 了排除液滴的粘彈性的影響，而於液滴乾燥析出溶質後進 行。頻率計算器422是在於檢測出附著析出物的水晶振動 子424的共振頻率，且將顯示檢出結果的訊號供應給運算 部42 3。在此，附著於水晶振動子的物質重量與共振頻率 的關係爲既知。運算部4 2 3若接受從頻率計算器4 2 2輸出之 顯示共振頻率的訊號，則會利用此來求取析出物的重量。 然後’由液體材料的濃度與析出物的重量來求取乾燥前的 液滴重量。並且，在本實施形態中，雖是使用水晶振動子 ’但亦可使用壓電元件或磁應變元件等。 又，液滴的重量測定亦可使用以下所示的方法。 (a)採取法 -13- (10) (10)200418649 就採取法而言，是僅以一定的次數來噴出液滴，採取 至容器。利用電子天秤等的手段來測定所被採取之液體的 重量，且以液滴數來除以其重量，而求取每一液滴的重量 (b)減量法 就減量法而言，是在液滴噴出前後測定收容液體的槽 重量，且以液滴數來除以噴出前後的重量差，而求取每一 液滴的重量。 其次，說明有關液滴的粘彈性特性値的測定。在本實 施形態中，在粘彈性特性値之中，使用粘度。粘度的測定 是利用粘度與衰減定數的關係。當接觸於具有粘性的液體 的物體振動時，該物體的振動的振幅會因液體的粘性而衰 減。顯示此刻的時間與振幅的關係的物性値爲衰減定數， 粘度與衰減定數具有相關關係。在本實施形態中會利用此 來求取液滴的粘度。具體而言，會根據實驗來事先求取液 體材料的粘度與衰減定數的關係。在此，有關粘度與衰減 定數的關係爲既知的液體材料，亦可不經實驗來使用既知 的關係。然後，由液滴附著於水晶振動子時之振動的振幅 變化來求取衰減定數，求取對應於該衰減定數的粘度。 除了上述的方法以外，液滴的粘度與重量可如以下所 示來求取。圖4是表示重量粘度測定部310的構成圖。重 量 粘度測定部3 1 0除了上述重量粘度測定部1 5 0的構成 以外，還更加具有阻抗運算部4 3 0。 -14- (11) (11)200418649 水晶振動子’如上述，具有以對應於液滴質量的共振 頻率來振動’且按照該物質的粘度來變化共振頻率的特性 。重量粘度測定部3 1 〇是利用此特性來求取液滴的質量 及粘度。具體而言’阻抗運算部4 3 〇會由施加於感測器晶 片4 2 1的電壓與電流的關係來求取水晶振動子4 2 4的電性阻 抗。此阻抗具有在共振頻率附近大幅度變化的性質。阻抗 的電阻成份爲最小時的頻率會形成共振頻率，其電阻成份 會形成共振電阻値。阻抗運算部4 3 0會藉由運算來求取水 晶振動子424的共振頻率，且將顯示共振頻率的訊號供應 給運算部423。又，頻率計算器422會檢測出水晶振動子 424的共振頻率’且將顯示檢出結果的訊號供應給運算部 42 3。運算部42 3若接受從阻抗運算部43 0輸出之顯示共振 電阻値的訊號’及從頻率計算器422輸出之顯示共振頻率 的訊號，則會利用顯示共振頻率，液滴的粘度及質量的關 係之既知的計算式來算出液滴的粘度及質量。 其次，說明有關液滴之噴出速度的測定。噴出速度的 測定是利用CCD(Charge Coupled Devise)攝影機152a及頻 閃觀測器1 5 2 b來於暗室内進行。C C D攝影機1 5 2 a是設置 於可由與飛行中的液滴噴出方向垂直的方向來攝影的位置 。解析部1 5 4是以預定的時間間隔來將時序訊號供應至頻 閃觀測器1 52b及CCD攝影機1 52a。若被供給此時序訊號 ，則頻閃觀測器152b的發光及CCD攝影機152a的攝影會 同步進行。此時間間隔是設定成從一液滴噴出後到附著於 感測器晶片42 1爲止的期間能夠進行複數次的攝影。然後 -15- (12) 200418649 ，利用所被攝影之液滴的影像的2點間的位置及該等被攝 影的時間間隔來求取液滴的噴出速度。(1) (1) 200418649 Description of the invention [Technical field to which the invention belongs] The present invention relates to a technique for determining an optimum driving waveform for driving a discharge head of a liquid droplet discharge device. [Prior Art] Conventionally, a liquid droplet ejection device that ejects liquid droplets to adhere to a target medium has been used. In this liquid droplet ejection device, the liquid-filled portion is contracted or expanded by the expansion and contraction of the piezoelectric element (by application of voltage). Thereby, the liquid droplet ejection device ejects liquid droplets from the ejection port of the liquid droplet ejection head. The application of the droplet discharge device is, for example, wiring to a wiring board of an electronic device. This can be performed by ejecting a liquid material in which conductive particles are dispersed onto a substrate. However, there are various liquid materials used in the industrial application of the liquid droplet ejection device, and the characteristics such as density, viscosity, etc. may vary depending on the material. The droplet discharge state (1 drop amount, discharge speed, etc.) varies with the characteristics of the liquid material. Therefore, the waveform of the driving voltage applied to the piezoelectric element must be adjusted for each liquid material, so that it can always form the optimum Squirting state. Therefore, a technique for controlling the ejection state of such droplets has been proposed (for example, Patent Document 1). In the technology described in Patent Document 1, the driving voltage waveform (hereinafter referred to as the driving waveform) is changed in accordance with the remaining amount of ink in the ink cartridge, thereby achieving stabilization of the amount of ink to be ejected. (2) (2) 200418649 [Patent Document 1] Japanese Patent Application Laid-Open No. 1 1-3 0 9 8 7 2 [Summary of Invention] (Problems to be Solved by the Invention) However, in the past, when driving waveforms were determined, it was necessary to test Trial errors were made while measuring the droplet weight and flying speed after ejection. Therefore, it takes a long time to determine the driving waveform, and a large amount of liquid material is consumed to determine the driving waveform. Therefore, there is a problem of high cost. The present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to provide a technique capable of determining an appropriate driving waveform of a liquid droplet ejection device with less trial and error. (Means for Solving the Problems) In order to solve the above-mentioned problems, the driving waveform determining device of the present invention is characterized by having a discharge head including a liquid filling portion filled with a liquid material, and charging the liquid according to the driving waveform. The crotch part expands or contracts to make the above-mentioned liquid material droplets and eject; the driving control means is to supply driving waveform to the above-mentioned ejection head; the condition memory means is to memorize the optimal weight and ejection speed of the above-mentioned droplets; The weight measuring means measures the weight of the liquid droplets ejected from the above-mentioned ejection head; the speed measuring means measures the liquid ejection speed of the liquid-6- (3) (3) 200418649 from the above ejection head; basic The driving waveform memory means memorizes the basic shape of the driving waveform. The waveform adjustment means reads the basic shape driving waveform from the basic driving waveform memory means, and adjusts the driving waveform so that the weight measured by the weight measuring means and The ejection speed measured by the speed measurement means can be recorded with the condition memory means. And the discharge rate of formation of uniform weight; and the waveform memory means, by which the memory system and said waveform adjusting means adjusting the entire drive waveform. In the driving waveform determining device having the above-mentioned configuration, the weight measuring means measures the weight of the liquid droplets to be discharged, and the speed measuring means measures the discharging speed of the liquid droplets. Then, the waveform adjustment means will adjust the driving waveform in such a way that the weight and speed of the droplet can be consistent with the weight and speed stored in the conditional memory means. The waveform memory means will memorize the adjusted driving waveform. If this driving waveform is used, The determination device can determine the proper driving waveform of the droplet ejection device with less trial. Since the weight and ejection speed of each droplet can be measured, the actual ejection state can be reflected to make correct adjustments. In addition, the most suitable driving waveform can be selected by memorizing the driving waveform. Further, it is preferable that the driving waveform determining device includes: physical property acquisition means for acquiring the physical properties of the liquid droplets ejected from the ejection head; and the basic driving waveform storage means for memorizing the physical properties corresponding to the liquid droplets (4) ( 4) 200418649: a plurality of driving waveforms; the above-mentioned waveform adjustment means reads the driving waveform corresponding to the physical properties obtained by the physical property acquisition means by the basic drive waveform storage means; the waveform memory means uses the above The driving waveform adjusted by the waveform adjusting means corresponds to the physical properties obtained by the physical property obtaining means described above, and is memorized. With the above configuration, the optimum driving waveform can be determined according to the physical properties of the droplet. In addition, it is preferable that the waveform adjustment means performs a correction corresponding to a natural cycle of the ejection head on a driving waveform read from the basic driving waveform memory means, and performs the adjustment on the corrected driving waveform. C. , You can modify the basic shape of the drive waveform according to the natural cycle of the ejection head. The physical properties 上述 preferably include at least one of viscosity, surface tension, contact angle, and density. Further, it is preferable that the physical property radon acquisition means is constituted by at least one of the physical property radon measurement means. According to the above configuration, even if the physical property 値 of the liquid material is not known in advance, the physical property 値 can be measured by a measuring means. Further, it is preferable that the weight measuring means includes: an electrode provided to face the ejection head; and a vibrator corresponding to a weight of a substance attached to the surface of the electrode. -8- (5) (5) 200418649 A frequency calculator that measures the frequency of the vibrator; and a calculation means that calculates the weight of the droplet based on the amount of change in frequency before and after the droplet is attached measured by the frequency calculator . With the above configuration, the weight of the droplet can be accurately measured, and a droplet having a desired weight can be ejected to determine the optimum driving waveform. Further, it is preferable that the physical property acquisition means is to obtain a viscosity of the droplet by using an attenuation characteristic of an amplitude of the vibrator when the droplet is attached to the electrode surface. With the above configuration, the viscosity of the droplet can be accurately measured, and the optimum driving waveform can be determined according to the viscosity of the droplet. Further, it is preferable that the speed measurement means uses the position of the two droplets and the time difference between the two droplets from the droplet ejected from the ejection head to determine the ejection velocity of the droplet. According to the above configuration, the droplet discharge speed can be accurately measured, and the droplets can be discharged at a desired discharge speed to determine an optimum driving waveform. Preferably, the ejection head has a plurality of nozzles, and the waveform adjustment means measures a deviation in the ejection speed of the plurality of nozzles, and determines a holding time for maintaining the highest potential of the driving waveform so that the deviation can be minimized. According to the above configuration, the driving waveform can be determined so that the variation in the ejection speed of the plurality of nozzles can be minimized. Furthermore, it is preferable that the waveform adjustment means determines the minimum reduction in the weight of the droplets in the high-frequency region of the driving waveform so that -9- (6) (6) 200418649 maintains the minimum potential of the driving waveform. Hold time. According to the above configuration, the weight of the droplet can be stabilized with respect to the frequency change of the driving waveform. Further, it is preferable that the waveform adjustment means determines the maximum potential and the intermediate potential of the driving waveform so that the weight and the ejection speed of the droplets are consistent with those stored in the condition storage means. With the above configuration, the driving waveform can be determined so that the desired weight and discharge speed can be obtained. The driving waveform determining device can also be used by incorporating a liquid droplet ejection device. The characteristics of the liquid droplet ejecting device include: a discharge head having a liquid filling portion filled with a liquid material, and the liquid is driven in accordance with the driving waveform. The filling portion expands or contracts, thereby dropletizing the liquid material and ejecting it; and a driving control means for supplying a driving waveform to the ejection head. Further, the driving control means supplies the driving waveform determined by the driving waveform determining means to the ejection head. According to the liquid droplet ejection device having the above-mentioned configuration, the driving waveform determining device is incorporated in the liquid droplet ejection device, so that the driving waveform for supplying the liquid droplets at a desired weight and ejection speed can be quickly determined. In addition, at the production site, the driving waveform can be quickly determined according to the type of the droplet, thereby improving production efficiency. It is also preferable to use the above-mentioned droplet discharge device to manufacture a photovoltaic device. It is also preferable that the photoelectric device manufactured by using the above-mentioned droplet ejection device is mounted on an electronic device. (10) (7) (7) 200418649. [Embodiment] Hereinafter, embodiments of the present invention will be described using drawings. < Configuration of driving waveform determination device > First, the configuration of the driving waveform determination device of the present invention will be described. FIG. 1 is a block diagram showing a drive waveform determination device 100. The driving waveform determination device 100, for example, ejects a liquid material in which silver fine particles are dispersed in a C14H3 () (tetradec (carbon) alkane) solvent to a predetermined position on a substrate, thereby determining the ejection of droplets forming a conductive film pattern on the substrate. The drive waveform of the nozzle of the device. The drive control section 120 supplies a drive waveform for driving the discharge head 110 to the discharge head. The ejection head 1 10 is provided with a liquid charging portion (not shown) provided with a piezoelectric element, and the piezoelectric element is expanded or contracted based on the driving waveform ', thereby expanding or contracting the capacity of the liquid filling portion. Accordingly, the ejection head 110 causes the liquid material to be dropletized and ejects toward the substrate. The ejection head 110 has a plurality of nozzles. The analysis unit 154 is a computer device and has a CPU (Central Processing Unit) 'ROM (Read Only Memory), RAM (Random Access Memory), etc. The CPU executes a computer program stored in ROM to drive the waveform determination device 1 0 0 Of the Ministry of Control. The analysis unit 154 memorizes the optimal weight of the liquid droplets and the optimal ejection speed in accordance with the physical properties and temperature of the liquid material. In addition, -11-(8) (8) 200418649, the analysis of 邰 1 5 4 will determine whether the weight and discharge speed of the liquid droplets ejected from the ejection head are consistent with the memorized 値, and determine the optimum driving waveform. In addition, the analysis unit i 5 4 memorizes the determined driving waveforms in accordance with the physical properties and temperature of the type of liquid material. The processing procedure performed by the analysis unit 154 will be described later. In addition, in this embodiment, the physical properties of the liquid material are viscosity, but surface tension, contact angle, density, etc. may be used. The weight viscosity measuring unit 150 is a QCM (Quartz Crystal Micro balance) for measuring the weight of a liquid droplet by using a change in resonance frequency when the liquid droplet is attached to a crystal vibrator, and has functions of a weight measurement method and a physical property measurement method. When the physical properties of a liquid material are surface tension, contact angle, density, etc., the physical property measurement means has a function of measuring such physical properties. FIG. 2 is a configuration diagram showing a weight viscosity measurement unit 150. FIG. The main components of the weight-viscosity measurement unit 150 are a sensor wafer 42 1, a frequency calculator 422, a calculation unit 42 3, and a pulse generation unit 420. FIG. 3 is a configuration diagram showing a sensor wafer 4 2 1. In the same figure, the ejection head 1 10 facing the sensor wafer 42 1 is shown to face the opposite side. On both sides of the crystal oscillator 424, a pair of electrodes 42 5 a and 42 5 b are mounted facing each other. The insulator 426 can vibrate and hold the crystal oscillator 424 via the conductive supports 427a and 427b. The support 427a is electrically connected to the electrode 425a, and is electrically connected to the terminal 428a fixed to the insulator 426. On the other hand, the support 427b is electrically connected to the electrode 425b, and is electrically connected to the terminal 428b fixed to the insulator 426. With the above configuration, if the pulse signal output from the pulse generator 420 is input to the sensor chip 421 through the terminal 428a'-12-200418649 0) 42 8b, the crystal oscillator 424 will vibrate at the resonance frequency. The sensor wafer 421 is provided so that one of its electrodes 42 5 a can face the droplet discharge surface of the discharge head 1 10. In the weight-viscosity measuring section 4 20, if the droplets discharged from the discharge head 110 are attached to the electrode 4 2 5 a, the mass of the adhered droplets is calculated. If the external force acting on the crystal oscillator is constant, it will vibrate at a certain resonance frequency. However, if a substance is attached to the surface of the electrode 42 5 a and the external force changes, the resonance frequency will change according to the amount of change. . In addition, when the attached substance is viscoelastic, the crystal oscillator 424 changes the resonance frequency according to the viscoelastic characteristics of the substance. Here, measurement of the weight of the droplet will be described. The weight of the liquid droplets was measured so as to exclude the influence of the viscoelasticity of the liquid droplets, and was performed after the liquid droplets were dried to precipitate a solute. The frequency calculator 422 detects the resonance frequency of the crystal vibrator 424 to which a deposit is attached, and supplies a signal indicating the detection result to the computing unit 423. Here, the relationship between the weight of the substance attached to the crystal oscillator and the resonance frequency is known. When the computing unit 4 2 3 receives the signal showing the resonance frequency output from the frequency calculator 4 2 2, it uses this to determine the weight of the precipitate. Then, the weight of the liquid droplet before drying is determined from the concentration of the liquid material and the weight of the precipitate. In this embodiment, a crystal vibrator is used, but a piezoelectric element, a magnetic strain element, or the like may be used. In addition, the weight of a droplet can be measured by the method shown below. (a) Adopting method -13- (10) (10) 200418649 In terms of adopting method, the liquid droplets are ejected only a certain number of times and taken to the container. Use electronic scales to measure the weight of the liquid to be taken, and divide the weight by the number of liquid droplets, and find the weight of each liquid droplet. (B) Weight reduction method The weight of the tank containing the liquid was measured before and after the droplet was ejected, and the number of droplets was divided by the weight difference before and after the ejection to determine the weight of each droplet. Next, the measurement of the viscoelastic property 値 of a droplet will be described. In this embodiment, the viscosity is used among the viscoelastic properties. The viscosity is measured by using the relationship between viscosity and attenuation constant. When an object in contact with a viscous liquid vibrates, the amplitude of the vibration of the object is attenuated by the viscosity of the liquid. The physical property showing the relationship between time and amplitude at this moment is the decay constant, and the viscosity has a correlation with the decay constant. In this embodiment, this is used to determine the viscosity of the droplet. Specifically, the relationship between the viscosity of the liquid material and the attenuation constant is determined in advance based on experiments. Here, the relationship between the viscosity and the attenuation constant is a known liquid material, and the known relationship may be used without experimentation. Then, the attenuation constant is obtained from the amplitude change of the vibration when the droplet is attached to the crystal oscillator, and the viscosity corresponding to the attenuation constant is obtained. In addition to the methods described above, the viscosity and weight of the droplets can be determined as shown below. FIG. 4 is a configuration diagram showing a weight viscosity measurement unit 310. In addition to the above-mentioned configuration of the weight-viscosity measurement unit 150, the weight-viscosity measurement unit 3 10 further includes an impedance calculation unit 430. -14- (11) (11) 200418649 As described above, the crystal vibrator has the characteristic of vibrating at a resonance frequency corresponding to the mass of a droplet 'and changing the resonance frequency according to the viscosity of the substance. The gravimetric viscosity measuring section 3 10 uses this characteristic to determine the mass and viscosity of the droplet. Specifically, the 'impedance calculation unit 4 3 0' determines the electrical impedance of the crystal oscillator 4 2 4 from the relationship between the voltage and current applied to the sensor wafer 4 2 1. This impedance has a property that it varies greatly around the resonance frequency. The frequency at which the resistance component of the impedance is at its minimum forms a resonance frequency, and its resistance component forms a resonance resistance 値. The impedance calculation unit 430 obtains the resonance frequency of the crystal oscillator 424 by calculation, and supplies a signal showing the resonance frequency to the calculation unit 423. In addition, the frequency calculator 422 detects the resonance frequency 'of the crystal oscillator 424 and supplies a signal indicating the detection result to the computing unit 42 3. If the computing unit 42 3 receives the signal showing the resonance resistance 输出 output from the impedance computing unit 43 0 and the signal showing the resonance frequency output from the frequency calculator 422, it uses the relationship between the resonance frequency, the viscosity of the droplet, and the mass. A known calculation formula is used to calculate the viscosity and mass of the droplet. Next, the measurement of the discharge speed of the liquid droplets will be described. The discharge speed was measured in a dark room using a CCD (Charge Coupled Devise) camera 152a and a stroboscope 15 2b. The C C D camera 1 5 2 a is installed at a position where the image can be taken in a direction perpendicular to the droplet ejection direction in flight. The analysis unit 154 supplies the timing signals to the stroboscope 1 52b and the CCD camera 1 52a at predetermined time intervals. If this timing signal is supplied, the lighting of the stroboscope 152b and the photography of the CCD camera 152a will be performed simultaneously. This time interval is set so that a plurality of images can be taken from the period from the ejection of a droplet to the attachment to the sensor wafer 42 1. Then -15- (12) 200418649, using the position between two points of the image of the droplet to be photographed and the time interval between these photographs to determine the ejection speed of the droplet.
上述的測定方法亦可利用於供以調查液滴的噴出速度 的偏差。在噴出噴頭1 1 〇設有複數個噴嘴，但各噴嘴的尺 寸或輸出特性會有誤差。因此，在噴嘴間每一滴會產生重 量偏差。在此，於全噴嘴施加同一波形的驅動方法中，可 知液滴的重量與噴出速度具有相關性，在噴出速度的偏差 較少的狀態下，每一液滴的重量的偏差也會變少。 在本實施形態中，利用此關係來測定各噴嘴的噴出速 度，藉此來評價噴嘴間的噴出量的偏差。有關偏差的評價 方面會在往後敘述。 又’噴出速度的測定亦可利用以下的方法。 (a) 以能夠通過液滴的飛行路徑上的2點之方式來射出 雷射光’在對面於光源的測定部測定雷射光的強度。若液 滴被噴出，則會藉由飛行中的液滴來遮斷雷射光的一部份The above-mentioned measurement method can also be used to investigate variations in the discharge speed of liquid droplets. A plurality of nozzles are provided in the ejection head 110, but there is an error in the size or output characteristics of each nozzle. Therefore, every drop between the nozzles causes a weight deviation. Here, in the driving method in which the same waveform is applied to all the nozzles, it is understood that the weight of the liquid droplets is related to the ejection speed, and the deviation of the weight of each liquid droplet is also reduced when the variation of the ejection speed is small. In this embodiment, this relationship is used to measure the ejection speed of each nozzle, thereby evaluating the deviation of the ejection amount between the nozzles. The evaluation of the deviation will be described later. The measurement of the ejection speed can also be performed by the following method. (a) Laser light is emitted so that it can pass through two points on the flight path of a droplet '. The intensity of the laser light is measured at a measurement unit opposite to the light source. If the droplet is ejected, a part of the laser light is blocked by the droplet in flight
’檢測出此刻的能量變化，藉此來求取液滴的通過時刻。 然後’由2點間的距離與通過時刻的時間差來求取液滴的 速度。 (b) 液滴的噴出時刻是根據驅動控制部12〇的設定値而 爲即知。並且，液滴的附著時刻是與重量粘度測定部 1 5 0的共振頻率變化開始的時刻相同。可由兩者的時間差 ’及噴出噴頭11 〇與感測器晶片42 1上面的距離來求取液滴 的噴出速度。 -16- (13) (13)200418649 <驅動波形的決定手順> 其次，針對利用上述驅動波形決定裝置1 〇〇之驅動波 形的決定程序來進行説明。 圖5是表示驅動波形決定的流程圖。 最初，決定基本驅動波形，亦即形成決定驅動波形時 的出發點（步驟S 1 )。 圖6是表示基本驅動波形的一例圖。此基本驅動波形 是由：使噴出噴頭11 0的液體充塡部膨脹的期間t 1〜t2， 維持液體充塡部的膨脹的期間t 2〜t 3 (保持時間P wh 1 )， 使液體充塡部收縮的期間t3〜t4，維持液體充塡部的收縮 的期間t4〜t5(保持時間 Pwh2)，解放液體充塡部的收縮 的期間t5〜t6，維持液體充塡部的初期容積的期間t6〜tl 所構成。在此，於期間t6〜tl中，中間電位VC會被施加 於噴出噴頭，在期間t2〜t3中，最高電位VH會被施加於 噴出噴頭，在期間t4〜t5中，最低電位VL會被施加於噴 出噴頭。 參數T c是以下述方式來測定。首先，將圖6所示波形 的驅動電壓施加至噴出噴頭，藉此以某噴出速度來噴出液 滴。此噴出速度會根據驅動波形來變化。圖7是表示使保 持時間Pwh 1變化時之噴出速度的變化圖。橫軸爲保持時 間Pwhl ’縱軸爲噴出速度vm。如同圖所示，噴出速度 vm會按照保持時間Pwh 1的長度來週期性的變化。此刻之 噴出速度vm的變化週期tp-ta會形成參數Tc。 其次，針對使用於供以決定驅動波形的另一個參數 -17- (14) (14)200418649 T a來進行説明。圖8是表示使用於決定T a時之驅動波形 的一例圖。此驅動波形是由：使噴出噴頭1 1 0的液體充塡 部膨脹的期間11〜t 2，維持噴出噴頭1 1 0的液體充塡部的 膨脹的期間t 2〜t 3，使噴出噴頭1 1 0的液體充塡部收縮的 期間t 3〜14，維持噴出噴頭1 1 〇的液體充塡部的收縮的期 間14〜t 1 (保持時間w)所構成。在此’期間t 1〜12，期間 t2〜t3，期間t3〜t4具有同一長度TaO’期間t4〜tl具有 長度w。長度TaO是由噴出噴頭的設計値來事先求取，作 爲供以求取Ta的初期値使用。 參數Ta是以下述方式來測定。首先，將圖8所示波形 的驅動電壓施加至噴出噴頭，藉此以某噴出速度來噴出墨 水。此噴出速度是根據驅動波形來變化。 圖9是表示使保持時間w變化時之噴出速度vm的變 化圖。橫軸爲保持時間w，縱軸爲噴出速度。如同圖所示 ，噴出速度會按照保持時間 w的變化來週期性的變化。 此波形會形成複數個波形合成者，可根據傅里葉解析來求 取各波形成份的週期。較長部份的週期相當於參數Tc。 又，較短部份的週期爲參數Ta。’The energy change at this moment is detected to determine the passing time of the droplet. Then, the velocity of the droplet is obtained from the time difference between the distance between the two points and the passing time. (b) The discharge timing of the droplets is immediately known based on the setting of the drive control unit 12o. In addition, the droplet attachment timing is the same as the timing at which the resonance frequency change of the gravity viscosity measurement unit 150 starts. The ejection speed of the liquid droplet can be obtained from the time difference between the two 'and the distance between the ejection head 110 and the sensor wafer 42 1. -16- (13) (13) 200418649 < Determining driving waveforms > Next, a procedure for determining a driving waveform using the driving waveform determining device 100 will be described. FIG. 5 is a flowchart showing determination of a driving waveform. Initially, the basic driving waveform is determined, that is, the starting point when determining the driving waveform is formed (step S1). FIG. 6 is a diagram showing an example of a basic driving waveform. This basic driving waveform consists of a period t 1 to t 2 during which the liquid filling portion of the ejection head 110 is expanded, and a period t 2 to t 3 that maintains the expansion of the liquid filling portion (holding time P wh 1). Period t3 to t4 of contraction of the palate, period t4 to t5 of maintaining the contraction of the liquid-filled palate (holding time Pwh2), period of t5 to t6 to release contraction of the liquid-filled palate, and period to maintain the initial volume of the liquid-filled palate t6 ~ tl. Here, during the period t6 to t1, the intermediate potential VC is applied to the ejection head. During the period t2 to t3, the highest potential VH is applied to the ejection head. During the period t4 to t5, the lowest potential VL is applied. For spray nozzle. The parameter T c is measured in the following manner. First, a driving voltage having a waveform shown in Fig. 6 is applied to a discharge head, thereby discharging liquid droplets at a certain discharge speed. This ejection speed varies depending on the driving waveform. Fig. 7 is a graph showing a change in discharge speed when the holding time Pwh 1 is changed. The horizontal axis is the holding time Pwhl 'and the vertical axis is the ejection speed vm. As shown in the figure, the ejection speed vm will change periodically according to the length of the holding time Pwh 1. At this moment, the variation period tp-ta of the ejection speed vm will form the parameter Tc. Next, another parameter -17- (14) (14) 200418649 T a used for determining the driving waveform will be described. Fig. 8 is a diagram showing an example of a driving waveform used in determining Ta. This driving waveform is such that the period 11 to t 2 of the liquid filling portion of the ejection head 1 1 0 is expanded, and the period t 2 to t 3 of the liquid filling portion of the ejection head 1 10 is maintained to cause the ejection head 1 The period t 3 to 14 of the contraction of the liquid filling portion 10 is constituted by a period 14 to t 1 (holding time w) in which the contraction of the liquid filling portion of the ejection head 1 10 is maintained. In this 'period t1 to 12, period t2 to t3, period t3 to t4 have the same length TaO' and period t4 to t1 has length w. The length TaO is obtained in advance by the design of the ejection head, and is used as an initial stage for the purpose of obtaining Ta. The parameter Ta is measured in the following manner. First, a driving voltage having a waveform shown in Fig. 8 is applied to the ejection head, whereby ink is ejected at a certain ejection speed. This ejection speed is changed according to the driving waveform. Fig. 9 is a graph showing changes in the ejection speed vm when the holding time w is changed. The horizontal axis is the holding time w, and the vertical axis is the ejection speed. As shown in the figure, the ejection speed will change periodically according to the change of the holding time w. This waveform will form a plurality of waveform synthesizers, and the period of each waveform component can be obtained according to Fourier analysis. The longer period corresponds to the parameter Tc. The shorter period is the parameter Ta.
Tc可使用上述2個方法的其中之一來求取。 圖1〇是表示利用上述求取的Tc及Ta來作成的基本驅 動波形的例圖。在同圖中，（a)是表示基本驅動波形的第1 候補，（b )是表示第2候補，（c )是表示第3候補。首先，利 用第1候補的驅動波形來試行噴出，根據在速度測定部1 5 2 的CCD攝影機152a所攝取的畫像來觀察液滴的噴出狀態 -18- (15) (15)200418649 。若由設置於噴出噴頭1 1 〇的複數個噴嘴全體來噴出液滴 ，則會採用第1候補的驅動波形來作爲驅動波形決定用的 基本驅動波形。另一方面，當未噴出液滴的噴嘴存在時， 不採用第1候補’而是使用第2候補的驅動波形來試行噴出 。又，若根據第2候補的驅動波形來從全體的噴嘴噴出液 滴的話’則會採用第2候補的驅動波形來作爲基本驅動波 形。當即使根據第2候補的驅動波形，還是會有未噴出液 滴的噴嘴存在時，會採用第3候補的驅動波形來作爲基本 驅動波形。 又，基本驅動波形的決定亦可使用以下所述的方法。 此方法是首先在解析部1 5 4中，使過去求取的驅動波形與 粘度有所對應而予以記憶。然後，在重量粘度測定部 1 5 0測定液滴的粘度，由所被記憶的波形中來選擇對應於 最接近所被測定的粘度的粘度之波形。 以上’若基本驅動波形被決定，則會進行其次波形的 調整。 在波形的調整中，最初進行最高電位的保持時間 Pwhl的調整（步驟S2)。保持時間Pwhl的調整是藉由以下 所示的方法來進行。 首先，利用在步驟S 1所選擇的基本驅動波形來噴出 液滴，使用CCD攝影機152a來攝取從複數個噴嘴所噴出 的液滴的影像，藉此來測定各噴嘴的噴出速度。在此，噴 出速度的測定是使基本驅動波形的Pwh 1變化成幾種形式 來進行。然後，對每個噴嘴求取離目標噴出速度vm的誤 -19- (16) (16)200418649 差（偏差），且求取其平均値δ v m。並且，將誤差的平均値 δ vm除以目標噴出速度vm，而求取對速度之偏差的產生 比例（相對偏差）δνηι/vm。 圖1 1是表示保持時間P w h 1與相對偏差δ v m / v m的關 係圖。如同圖所示，相對偏差δνηι/vm在保持時間P wh 1 0 具有極小値。亦即，將最高電位的保持時間設定成P w h 1 0 ，而使得噴出速度的相對偏差會形成最小。因此，P w h 1 0 會形成最高電位的保持時間的最適値。 其次，調整最低電位的保持時間Pwh2(步驟S3)。保 持時間P wh 2的調整是藉由以下所示的方法來進行。 首先，利用在步驟S 2所決定的驅動波形來噴出液滴 ，測定液滴的重量。在此，重量測定是使驅動電壓的頻率 變化成幾種形式來進行。圖12是表示驅動電壓的頻率f與 被噴出之液滴的重量Iw的關係圖。如同圖所示，隨著驅 動電壓的頻率f變高，液滴的重量I w會變小，若超過某 頻率，則重量I w會急速減少。在此，重量I w的最大値與 頻率f爲20kHz時的重量的差爲δίχν。 其次’使保持時間Pwh2變化成幾種形式，而與上述 同樣的測定液滴的重量。圖1 3是表示上述δ I w與保持時間 Pwh2的關係圖。如同圖所示，siw是在保持時間Pwh2保 持極小値。亦即，將最低電位的保持時間設定成Pwh20， 藉此即使對較高的頻率，液滴的重量下降也會形成最少。 因此，Pwh20會形成最低電位之保持時間的最適値。 又’最低電位的保持時間Pwh2的調整亦可藉由以下 -20- (17) 200418649 所示的方法。圖i 4是表示液滴的重量i， 的關係圖。如同圖所示，當Pwh2位於 會正常被噴出’當離開該範圍時’會引 將此液滴正常噴出之P wh2的範圍的中 適値。 如此一來’驅動波形的時間軸方向 藉此，可抑止噴嘴間的偏差，謀求液滴 化。針對於此’以下會進行電位的調整 重量與噴出速度。 最初調整最高電位VH(步驟S4)。 整是如以下進行。首先’利用在步驟 形來噴出液滴’測定液滴的噴出速度’ 電位VH變化成幾個形式，測定噴出3 示最高電位VH與噴出速度vm的關係 著最高電位VH變高，液滴的噴出速度 結果可求取取得所望噴出速度的最高電 其次，調整中間電位VC(步驟S5) 調整是如以下所示進行。首先’利用泊 驅動波形來噴出液滴，測定液滴的重i 間電位V C變化成幾種形式，測定液滴 表示中間電位VC與液滴重量Iw的關 ，隨著中間電位V C變高，液滴的重量 ，噴出速度vm會無關於中間電位VC 果可求取取得所望液滴重量的中間電位 〜與保持時間Pwh2 某範圍内時，液滴 起噴出不良。亦可 點當作 P w h 2 0的最 的要素會被決定。 重量對頻率的安定 ，取得所望的液滴 最高電位VH的調 S 3所求得的驅動波 vm。在此，使最局 ^度 vm。圖15是表 。如同圖所示，隨 v m會増加。由此 位VH。 。中間電位V C的 E步驟 S 4所求得的 t Iw。在此，使中 的重量I w。圖1 6是 係圖。如同圖所示 Iw會増加。並且 而爲一定。由此結 VC。 -21 - (18) (18)200418649 其次，再調整最高電位VH(步驟S6)。最高電位VH 的再調整是如以下所不進行。首先，利用在步驟 S 5所求 得的驅動波形來噴出液滴’測定液滴的重量I w。在此， 使最高電位V Η變化成幾種形式，測定液滴的重量I w。圖 1 7是表示最高電位V Η與液滴重量I w的關係圖。如同圖 所示，隨著最高電位VH變高，液滴的重量Iw會増加。 由此結果可求取取得所望液滴重量的最高電位V Η。 藉此來決定驅動波形。並且，液滴的噴出狀態也會依 液體材料的温度而變化，因此會在想定的範圍内的複數階 段的温度中進行上述驅動波形決定作業。然後，使對應於 液體材料的種類，粘度及温度之顯示驅動波形的資料記憶 於解析部1 5 4。 如以上所述，若利用本發明，則可以較少的試行來決 定液滴噴出裝置之適確的驅動波形。由於可測定每一液滴 的重量及噴出速度，因此可反應實際的噴出狀態進行正確 的調整。並且，可使對應液滴的粘度及驅動波形來予以記 憶’因此可按照液滴的粘度來選擇最適的驅動波形。 <變形例> 在上述實施形態所述的驅動波形決定裝置爲一例，本 發明可改變成各式各樣的形態。 上述實施形態爲驅動波形決定裝置的例子，但亦可將 此驅動波形決定裝置安裝於液滴噴出裝置。圖1 8是表示液 滴噴出裝置的例圖。液滴噴出裝置1 〇具備對基板9噴出液 滴的噴頭部2 0。作業台！ 2是供以設定基板9 (紙苯酚或玻 -22- (19) (19)200418649 璃等的薄板）的載置台。 在此，噴頭部2 0可藉由滑件3 1來移動於X方向，作業 台12可藉由滑件32來移動於y方向。藉此，噴頭部20與基 板9之相對位置的調整會被進行，可將液滴噴出至基板9的 任意位置。 藉由在如此的液滴噴出裝置中裝入本發明的驅動波形 決定裝置，可於生産現場迅速地按照液滴的種類來決定最 適的驅動波形，而使能夠提高生産效率。 又，上述實施形態中，雖是對設置於噴出噴頭1 1 0的 複數個噴嘴施加同一波形的電壓，但亦可對每個噴嘴施加 不同波形的電壓。此情況，同樣可利用上述波形調整方法 來對每個噴嘴產生最適的波形。 又，上述實施形態中，雖是使進行噴出噴頭之液體充 塡部的膨脹及收縮，而利用噴出液滴的驅動波形來進行説 明，但除此以外，亦可使進行噴出噴頭之液體充塡部的膨 脹及其膨脹的解放（亦即回到中間電位V C)，而可適用於 噴出液滴的驅動波形。又，亦可適用於圖6所示之驅動波 形的反相位的驅動波形。 上述實施形態中，噴墨裝置是使含導電性材料的液滴 附著於基板1 3 2的預定位置者，但除此以外，亦可利用於 者色液體的用紙印字，EL(Electro Luminescence)元件的 製造’光阻的形成’液晶顯示裝置之玻璃基板上的彩色濾 光器形成，或液晶材料的封入，微透鏡陣列的製造，或供 以測定生體物質的液體噴出等。 -23- (20) (20)200418649 就本發明的噴墨裝置而言，例如有形成有機E L元件 之電洞輸送性發光層或電子輸送層等的層的裝置，或無機 EL元件之螢光發光層的層形成裝置。除此以外，本發明 的噴墨裝置，例如還有在預定的導電膜圖案形成時光蝕刻 微影過程之塗佈光阻劑的裝置，在微透鏡陣列的製造過程 中將光透過性材料塗佈於具有複數個凸部的原盤的裝置， 以及噴出供以測定注入於試 管等的容器媒體之 DNA(deOXyribonucleic acid)等的生體物質的種類或量的觸 媒的裝置，或將該生體物質本身噴出至試 管等的媒體的 裝置。 <光電裝置及電子機器> 針對具有藉由液滴噴出裝置（被供給在上述驅動波形 決定裝置所決定的驅動波形）而形成的彩色濾光器之光電 裝置，及使用該光電裝置作爲顯示部的電子機器來進行説 明。 圖1 9是表示具有彩色濾光器的光電裝置的剖面圖。如 該圖所示，光電裝置640大致具有：朝觀察者側放出光的 背光機構642，及使從背光機構642放出的光選擇性地透過 之被動型液晶顯示面板644。其中，液晶顯示面板644具有 :基板6 4 6，電極6 4 8，配向膜6 5 0，間隔件6 5 2，配向膜 654，電極656及彩色濾光器660。彩色濾光器660由隔壁 620來看基板600側會位於上側（觀察者側）。含於此彩色濾 光器660的紅色彩色濾光器632R，綠色彩色濾光器632G及 -24- (21) 200418649 藍色彩色濾光器63 2 B是藉由本發明的液滴噴出 成圖案者，具有設計値相等的厚度。並且，在各 器6 3 2 R，6 3 2 G，6 3 2 B的背面側設有作爲保護目 層 6 5 8。 在隔著間隔件6 5 2而對向的兩個配向膜6 5 0， 隙中封入有液晶，若藉由電極648，65 6來施加電 則可使從背光機構642放出的光選擇性地透過對 色濾光器632R，632G，632B的每個領域。 其次，圖20是表示搭載光電裝置640的行動胃 的外觀圖。在此圖中，行動電話機700除了複數 鈕7 10以外，還具備受話部720，送話部73 0，及 號碼等各種資訊的顯示部，亦即含彩色濾光器的 640。 又，除了行動電話機7 0 0以外，利用本發明 出裝置而製造的光電裝置640亦可使用於電腦， 數相位機，PDA(Personal Digital Assistant)，車 影印，音響機器等各種電子機器的顯示部。 【圖式簡單說明】 圖1是表示驅動波形決定裝置100的構成圖。 圖2是表示重量粘度測定部150的構成圖。 圖3是表示感測器晶片4 2 1的構成圖。 圖4是表示重量粘度測定部3 1 0的構成圖。 圖5是表示驅動波形決定的流程圖。 裝置來形 彩色濾光 的之塗佈 6 5 4的間 壓的話， 應於各彩 S話機700 個操作按 顯不電話 光電裝置 的液滴噴 投影機， 載機器， -25- (22) (22)200418649 圖6是表示基本驅動波形的一例圖。 圖7是表示使保持時間Pwhl變化時之噴出速度的變化 圖。 圖8是表示使用於決定Ta時之驅動波形的一例圖。 圖9是表示使保持時間w變化時之噴出速度的變化圖 〇 圖1 〇是表示使用TC及Ta來作成之基本驅動波形的例 圖。 圖1 1是表示保持時間Pwh 1與相對偏差的關係圖。 圖1 2是表示驅動電壓的頻率與所被噴出之液滴的重量 的關係圖。 圖13是表示3Iw與保持時間Pwh2的關係圖。 圖1 4是表示液滴的重量I w與保持時間P w h 2的關係圖 〇 圖15是表示最高電位VH與噴出速度vm的關係圖。 圖1 6是表示中間電位V C與液滴的重量I w的關係圖 〇 圖1 7是表示最高電位VH與液滴的重量Iw的關係圖 〇 圖1 8是表示液滴噴出裝置的例圖。 圖19是表示具有彩色濾光器的光電裝置的剖面圖。 圖20是表示搭載光電裝置640的行動電話機70〇的外觀 圖。 -26- (23) 200418649 〔符號之說明〕 100.. .驅動波形決定裝置 110…噴出噴頭 12 0...驅動控制部 1 5 0...重量 粘度測定部 1 52a·.· CCD 攝影機 152b...頻閃觀測器 154.. .解析部 -27-Tc can be obtained using one of the two methods described above. FIG. 10 is a diagram showing an example of a basic driving waveform created using the Tc and Ta obtained as described above. In the figure, (a) is a first candidate showing a basic driving waveform, (b) is a second candidate, and (c) is a third candidate. First, the first candidate driving waveform is used for trial ejection, and the ejection state of the droplet is observed from the image captured by the CCD camera 152a of the speed measurement section 152 -18- (15) (15) 200418649. When droplets are ejected from the entire plurality of nozzles provided on the ejection head 110, the first candidate driving waveform is used as the basic driving waveform for determining the driving waveform. On the other hand, when a nozzle that does not eject liquid droplets exists, the first candidate 'is not used, but the second candidate driving waveform is used for trial ejection. If a droplet is ejected from the entire nozzle based on the second candidate driving waveform, the second candidate driving waveform is used as the basic driving waveform. When there are nozzles that do not eject liquid droplets even based on the second candidate driving waveform, the third candidate driving waveform is used as the basic driving waveform. The determination of the basic driving waveform can also be performed by the method described below. In this method, in the analysis unit 154, the driving waveform obtained in the past and the viscosity are associated with each other and memorized. Then, the viscosity of the droplet is measured in the gravimetric viscosity measuring section 150, and a waveform corresponding to the viscosity closest to the measured viscosity is selected from the stored waveforms. When the above basic driving waveform is determined, the next waveform adjustment is performed. In the adjustment of the waveform, the holding time Pwhl of the highest potential is adjusted first (step S2). The holding time Pwhl is adjusted by the method shown below. First, droplets are ejected using the basic driving waveform selected in step S1, and images of droplets ejected from a plurality of nozzles are captured using a CCD camera 152a to measure the ejection speed of each nozzle. Here, the measurement of the ejection speed is performed by changing Pwh 1 of the basic driving waveform into several forms. Then, the difference (deviation) of the error -19- (16) (16) 200418649 from the target ejection speed vm is obtained for each nozzle, and its average 値 δ v m is obtained. Then, the average error 値 δ vm is divided by the target ejection speed vm, and the ratio (relative deviation) δνηι / vm to the deviation of the speed is obtained. Fig. 11 is a graph showing the relationship between the holding time P w h 1 and the relative deviation δ v m / v m. As shown in the figure, the relative deviation δνηι / vm has an extremely small value at the holding time P wh 1 0. That is, the holding time of the highest potential is set to P w h 1 0 so that the relative deviation of the ejection speed is minimized. Therefore, P w h 1 0 will form the optimum holding time for the highest potential. Next, the holding time Pwh2 of the lowest potential is adjusted (step S3). The holding time P wh 2 is adjusted by the method shown below. First, the droplet is ejected using the driving waveform determined in step S2, and the weight of the droplet is measured. Here, the weight measurement is performed by changing the frequency of the driving voltage into several forms. Fig. 12 is a graph showing the relationship between the frequency f of the driving voltage and the weight Iw of the discharged droplets. As shown in the figure, as the frequency f of the driving voltage becomes higher, the weight I w of the droplet becomes smaller, and if it exceeds a certain frequency, the weight I w decreases rapidly. Here, the difference between the maximum value of the weight I w and the weight when the frequency f is 20 kHz is δίχν. Next, 'the holding time Pwh2 was changed into several forms, and the weight of the droplet was measured in the same manner as described above. FIG. 13 is a diagram showing the relationship between the δ I w and the holding time Pwh2. As shown in the figure, siw is kept extremely small for the hold time Pwh2. That is, the holding time of the lowest potential is set to Pwh20, whereby the drop in the weight of the droplet is minimized even at a higher frequency. Therefore, Pwh20 will form the optimum holding time for the lowest potential. It is also possible to adjust the holding time Pwh2 of the lowest potential by the method shown in the following -20- (17) 200418649. Fig. I 4 is a graph showing the relationship between the weight i of the droplets. As shown in the figure, when Pwh2 is located in the range of P wh2 which would normally be ejected ' when leaving the range ', the droplet would normally be ejected. In this way, the time axis direction of the driving waveform can suppress the variation between the nozzles and achieve droplet formation. In response to this, the potential adjustment and the discharge speed are performed. The highest potential VH is adjusted first (step S4). The adjustment is performed as follows. First, 'use the step to eject the droplets' to measure the droplet ejection speed' The potential VH is changed into several forms, and the measurement of the ejection 3 shows that the relationship between the highest potential VH and the ejection speed vm is that the highest potential VH becomes higher and the ejection of the droplets The speed result can be obtained by obtaining the highest electric power at the desired ejection speed, and then adjusting the intermediate potential VC (step S5). The adjustment is performed as follows. First of all, the droplet is ejected using a poise driving waveform, and the potential VC of the droplet i is measured into several forms. The measured droplet indicates the relationship between the intermediate potential VC and the weight Iw of the droplet. As the intermediate potential VC becomes higher, the liquid The weight of the droplet does not depend on the ejection speed vm. The intermediate potential VC can be obtained. If the intermediate potential to obtain the desired droplet weight is within a certain range from the holding time Pwh2, the droplet ejection fails. The point that can be regarded as the most important element of P w h 2 0 will be determined. The stability of the weight to the frequency is to obtain the driving wave vm obtained by adjusting the desired maximum potential VH of the droplet S3. Here, make the most bureau ^ degree vm. Figure 15 is the table. As shown in the figure, it will increase with v m. This bit is VH. . T Iw obtained in step S 4 of the intermediate potential V C. Here, let the weight I w be. Figure 16 is a series diagram. Iw will increase as shown in the figure. And for certain. This concludes VC. -21-(18) (18) 200418649 Next, the highest potential VH is adjusted again (step S6). The readjustment of the maximum potential VH is not performed as follows. First, using the driving waveform obtained in step S5, the droplets' are ejected to measure the weight Iw of the droplets. Here, the maximum potential V Η was changed into several forms, and the weight I w of the droplet was measured. FIG. 17 is a graph showing the relationship between the maximum potential V Η and the droplet weight I w. As shown in the figure, as the maximum potential VH becomes higher, the weight Iw of the droplet increases. From this result, the highest potential V 取得 to obtain the desired droplet weight can be obtained. This determines the drive waveform. In addition, the discharge state of the droplets also changes depending on the temperature of the liquid material. Therefore, the driving waveform determination operation described above is performed at a temperature in a plurality of stages within a predetermined range. Then, the data of the display driving waveform corresponding to the type, viscosity, and temperature of the liquid material are stored in the analysis unit 154. As described above, if the present invention is used, the proper driving waveform of the droplet ejection device can be determined with less trial. Since the weight and ejection speed of each droplet can be measured, the actual ejection state can be accurately adjusted. Furthermore, it is possible to memorize the viscosity and driving waveform corresponding to the droplet 'so that an optimum driving waveform can be selected according to the viscosity of the droplet. < Modifications > The drive waveform determination device described in the above embodiment is an example, and the present invention can be modified into various forms. The above-mentioned embodiment is an example of the driving waveform determining device, but the driving waveform determining device may be mounted on a droplet ejection device. Fig. 18 is a diagram showing an example of a liquid droplet ejection device. The liquid droplet ejection apparatus 10 includes an ejection head 20 for ejecting liquid droplets onto the substrate 9. Workbench! 2 is a mounting table for setting the substrate 9 (paper phenol or glass -22- (19) (19) 200418649 glass or the like). Here, the nozzle head 20 can be moved in the X direction by the slider 31, and the work table 12 can be moved in the y direction by the slider 32. Thereby, the relative position of the nozzle head 20 and the substrate 9 can be adjusted, and droplets can be ejected to an arbitrary position on the substrate 9. By incorporating the driving waveform determining device of the present invention in such a liquid droplet ejection device, it is possible to quickly determine the optimal driving waveform according to the type of liquid droplets at the production site, thereby improving production efficiency. In the above-mentioned embodiment, a voltage having the same waveform is applied to a plurality of nozzles provided in the ejection head 110, but a voltage having a different waveform may be applied to each of the nozzles. In this case, the above-mentioned waveform adjustment method can also be used to generate an optimal waveform for each nozzle. In the above-mentioned embodiment, the expansion and contraction of the liquid-filled portion of the ejection head is explained using driving waveforms of the ejected droplets, but in addition, the liquid-filled portion of the ejection head may be filled. The expansion of the part and the liberation of the expansion (that is, return to the intermediate potential VC) can be applied to the driving waveform of the ejected droplet. It can also be applied to an inverse-phase driving waveform of the driving waveform shown in FIG. 6. In the above-mentioned embodiment, the inkjet device is used to attach a droplet containing a conductive material to a predetermined position on the substrate 1 3 2. However, in addition to this, it can also be used for printing on paper with a color liquid, EL (Electro Luminescence) element. Manufacturing of 'resistance formation' formation of color filters on glass substrates of liquid crystal display devices, sealing of liquid crystal materials, manufacturing of microlens arrays, or ejection of liquids for measuring biological substances. -23- (20) (20) 200418649 The inkjet device of the present invention is, for example, a device having a layer such as a hole-transporting light-emitting layer or an electron-transporting layer for an organic EL element, or fluorescent light from an inorganic EL element. A layer forming device for a light emitting layer. In addition, the inkjet device of the present invention includes, for example, a device for applying a photoresist in a photolithography process during the formation of a predetermined conductive film pattern, and a light-transmitting material is applied in a manufacturing process of a microlens array A device for a master disk having a plurality of convex portions, and a device for ejecting a catalyst for measuring the type or amount of a biological substance such as DNA (deOXyribonucleic acid) injected into a container medium such as a test tube, or the biological substance A device that ejects itself to a medium such as a test tube. < Photoelectric device and electronic device > A photoelectric device having a color filter formed by a droplet discharge device (supplied with a driving waveform determined by the driving waveform determining device), and using the photoelectric device as a display The electronic equipment will be described below. FIG. 19 is a cross-sectional view showing a photovoltaic device having a color filter. As shown in the figure, the optoelectronic device 640 roughly includes a backlight mechanism 642 that emits light toward the observer, and a passive liquid crystal display panel 644 that selectively transmits light emitted from the backlight mechanism 642. The liquid crystal display panel 644 includes a substrate 6 4 6, an electrode 6 4 8, an alignment film 6 50, a spacer 6 5 2, an alignment film 654, an electrode 656, and a color filter 660. The color filter 660 is located on the upper side (viewer side) of the substrate 600 when viewed from the partition wall 620. The red color filter 632R, the green color filter 632G, and -24- (21) 200418649 included in the color filter 660 are the color filters that are ejected into a pattern by droplets of the present invention. , With design 値 equal thickness. In addition, a protective layer 6 5 8 is provided on the back side of each of the 6 3 2 R, 6 3 2 G, and 6 3 2 B. Liquid crystal is enclosed in the two alignment films 6 50 that are opposed to each other with the spacer 6 5 2 interposed therebetween. If electricity is applied through the electrodes 648 and 65 6, the light emitted from the backlight mechanism 642 can be selectively Transmits each area of the color filters 632R, 632G, and 632B. Next, Fig. 20 is an external view showing a mobile stomach on which the photovoltaic device 640 is mounted. In this figure, in addition to the plural buttons 7 10, the mobile phone 700 also includes a receiving section 720, a transmitting section 730, and a display section for various information such as a number 640 including a color filter. In addition to the mobile phone 700, the optoelectronic device 640 manufactured by using the device of the present invention can also be used in display units of various electronic devices such as computers, digital phase machines, PDAs (Personal Digital Assistant), car photocopying, and audio equipment. . [Brief Description of the Drawings] FIG. 1 is a block diagram showing a drive waveform determination device 100. FIG. 2 is a configuration diagram showing a weight viscosity measurement unit 150. FIG. 3 is a configuration diagram showing a sensor wafer 4 2 1. FIG. 4 is a diagram showing a configuration of a weight viscosity measuring section 3 10. FIG. 5 is a flowchart showing determination of a driving waveform. If the device is used to apply a color filter with a pressure of 6 5 4, it should be operated on each color S phone at 700 operations. The liquid droplet spray projector of the optoelectronic device of the display phone, the machine, -25- (22) ( 22) 200418649 FIG. 6 is a diagram showing an example of a basic driving waveform. Fig. 7 is a graph showing a change in ejection speed when the holding time Pwhl is changed. FIG. 8 is a diagram showing an example of driving waveforms used in determining Ta. Fig. 9 is a diagram showing a change in the ejection speed when the holding time w is changed. Fig. 10 is a diagram showing an example of a basic driving waveform created using TC and Ta. FIG. 11 is a diagram showing the relationship between the holding time Pwh 1 and the relative deviation. Fig. 12 is a graph showing the relationship between the frequency of the driving voltage and the weight of the discharged liquid droplets. FIG. 13 is a diagram showing the relationship between 3Iw and the holding time Pwh2. FIG. 14 is a graph showing the relationship between the weight I w of the droplet and the holding time P w h 2. FIG. 15 is a graph showing the relationship between the highest potential VH and the ejection speed vm. FIG. 16 is a diagram showing the relationship between the intermediate potential V C and the weight of the droplet I w 〇 FIG. 17 is a diagram showing the relationship between the highest potential VH and the weight of the droplet I w 〇 FIG. 18 is an example of a droplet ejection device. FIG. 19 is a cross-sectional view showing a photovoltaic device having a color filter. FIG. 20 is an external view of a mobile phone 70o equipped with a photovoltaic device 640. FIG. -26- (23) 200418649 [Explanation of Symbols] 100... Drive waveform determination device 110 ... ejection head 12 0 ... drive control unit 1 5 0 ... weight viscosity measurement unit 1 52a ... CCD camera 152b ... strobe observer 154 ...