TW200413127A - Precision compound machining tool - Google Patents

Abstract

The present invention relates to a precision compound machining tool, including: a lathe system, a power system, an electrolysis polishing system and a CMP system. The lathe system retains and turns a metal workpiece to be machined by a lathe of the lathe system. The tool turret of the lathe is provided with a lathe tool for cutting the workpiece. The power system is connected to the metal with its positive terminal and the cutting tool with its negative terminal such that the two are provided with different polarity. The electrolysis polishing system injects electrolysis fluid to the gap maintained by the cutting tool and workpiece of different polarities for electrolysis-polishing the workpiece. The CMP system may press against the radial surface of the workpiece via polishing pad dabbed with polishing fluid for CM polishing the workpiece. Accordingly, the compound machining tool of this invention is equipped with lathing, electrolysis polishing and CMP applications to accommodate different needs.

Description

200413127

[Technical field to which the invention belongs] The present invention is related to processing equipment, and more specifically, it refers to a precision composite processing device that can be combined with three methods such as turning, electrolytic polishing, and chemical mechanical polishing. . [Prior art]

According to the general round workpiece from processing to finished products, usually need to go through professional skills σ, such as turning, holding light (p〇1 丨 sh 丨 ng) and other processing programs, the processing of the workpiece, you must first The roughing and finishing turning operations are performed to obtain the dimensions close to the expected value. After that, the workpiece is polished to reduce the surface roughness and obtain better flatness. Among them, the existing professional processing of turning, polishing, etc. Most of the equipment are independent designs with a single function. Therefore, when the turning operation is completed, the workpiece after turning must be removed and then installed on another professional processing equipment, such as polishing equipment, for subsequent polishing processing; In addition, as far as the existing polishing equipment is concerned, traditional manual polishing and mechanical polishing are still the first. [Summary of the Invention] Disadvantages: single processing function design, work injury completion, making the work, resulting in poor processing efficiency

The conventional processing equipment still has the following shortcomings: 1. As the conventional power equipment is independent, so 'Each processing process requires different installations, removals, and corrections in different force σ parts. 2 Whether it is manual or mechanical polishing

Page 5 200413127 V. Description of the invention (2): 2 Lai ’s control and operation ‘cause &’ Its polishing accuracy and efficiency and use are possible.卩 Jungu is susceptible to the operator's technology and experience. ^ Cannot effectively improve the quality of processing. It is also unstable. Heart = two precision molds are more obvious. ... the present invention provides a precision composite machining device, which mainly includes a cutting system, a power supply system, an electrolytic polishing system, and a chemical mechanical polishing system. The turning system uses a turning machine to fix and rotate a gold workpiece to be processed, and A turning tool is installed on the turning tool holder for turning workers. The power supply system is connected to the metal workpiece with a positive pole, and the turning knife is connected with a negative pole. In the gaps between turning tools and workpieces of different polarities, 1 = the pieces produce electrolytic polishing. The chemical mechanical pepper light system can be elastically pressed against the radial surface of the workpiece to produce a chemical mechanical polishing effect. The processing device will be good and ancient, magical ^ ^, do, / 1 1 You have three purposes of turning, electrolytic polishing and chemical mechanical polishing, which can be used in appropriate combinations according to user needs, and can also improve the work piece Machining efficiency and surface quality, especially can be changed to cover the negative impact of the current manual mold polishing process on the production schedule and precision . … Can P [Embodiment] Please refer to the first and second figures. The precision composite processing device Ί 〇 of the present invention includes a turning system 2 ◦, a power supply system 3 〇, an electrolytic polishing system 40, a chemical mechanical polishing System 5 Q; Straight · 200413127 V. Description of the invention (3) The turning system is provided with ^ It can be rotated on the turning tool holder 2 Axle head 2 2 can be fixed 2 3 The vehicle mounted on the 3 is opposite to the turning tool For turning, it can also be used for positioning the metal fixed rotation person against the top; The power supply system is connected to the workpiece 6 on the spindle head 2 2 2 to provide the workpiece 6 〇 The electrolytic polishing electrolyte storage 橹 4 solution Nozzle 4 4. This electrolyte storage tank can insert and remove the electrolyte 4 for jet flow. It can keep directly facing the car receiving pipeline. 4 5 series of electrolyte can be passed through the solution storage tank at Ί20. It has a machine tool. Main body 21, its main spindle head 2 2, a turning tool holder 2, 3, one, mounted! Turning tool 2 4 and-thimble 2 5, the main force: metal workpiece 60, the turning tool holder W tool 2 4 and the radial surface of the metal workpiece 6 〇 2 2 4 can be on the guard piece 6 〇 as required Pinch on the surface = choose to maintain a predetermined gap with the radial surface of the workpiece 60 for subsequent electrolytic polishing, and the τ page needle 25, the end of the piece 60, to ensure that the metal workpiece 60 is stable 30, Electrolytic polishing system for the negative connection and turning tools (1), 1, a pump and a recovery line 4 1 are stored in the 'returning' the electrolyte cutting tool 2 4 the machine tool filter 4 6 Medium 'Make electrolytic DC power supply 2 4, There is positive and required electricity for turning tools 2 4 When the light function is available at the appropriate time, please cooperate with No. 4 2. One input 4 5 and one with appropriate power transmission lines 4 3 Nozzle 4 4 and workpiece 6 〇 Body 2 After proper filtration, the liquid can continuously flow into the pipeline filter 4 to decompose the liquid, and send the seal to the gap clearance section installed on it. Use the ring with its positive pole to connect the spindle head 2 Negative polarity, co-current; shown, has a 4 3, a electricity 6; of which, the pump 4 2 solution nozzle 4 sprays in the exact direction of the flow direction, and the recovery received by the return position is sent to electricity, and, by

200413127 V. Description of the invention (4) Spraying the liquid solution in the gap S between two turning tools 24 of different polarities and the workpiece 60 'can apply metal electrolysis (Electro Poli shing) (also known as Electrochemical polishing or electrolytic polishing); The chemical mechanical polishing system 5 〇, please cooperate with the fourth figure, with a driving wheel 5 1, a driven wheel 5 2, a polishing cloth 5 3, an elastic stop Piece 5 4 and a polishing liquid nozzle 5 5; wherein, the polishing cloth 5 3 is located between the driving wheel 5 4 and the driven wheel 5 2 and is driven by the driving wheel 5 1, and the elastic abutting member 5 4 is Act on the driven wheel 5 2 and then use the driven wheel 5 2 to link the polishing cloth 5 3 elastically against the radial surface of the workpiece 60. 'The polishing liquid nozzle 5 5 is installed at an appropriate position above the throwing cloth 5 3' And can spray corrosive polishing liquid (or chemical polishing liquid) onto the polishing cloth 5 3 'so that the polishing cloth immersed in the polishing liquid $ 3 can apply chemical mechanical polishing to the radial surface of the metal workpiece 60 effect. In order to further understand the structural features, application techniques, and expected effects of the present invention, 1 the use of the present invention is described, and it is believed that there will be a deeper and more specific understanding of the present invention, as follows: ^ Invention precision The composite processing device 丄 〇, according to the difference in processing requirements, can be divided into the following five processing modes. · () Turning: Turning on the turning system 2 0 alone: ΐΐ 4ΐΐ radial surface of the workpiece 6 0 for turning The operation is particularly low; ^ The speed of obtaining the size is fast, but the roughness of the radial surface is low, which is suitable for those with lower surface accuracy requirements. 5 d mechanical polishing: the use of a chemical mechanical polishing system alone 3 polishing cloth with polishing liquid 5 3 grinding and polishing operations, because

200413127 V. Description of the invention (5) Its surface roughness and roundness are generally good for turning, so it is suitable for workpieces that have been turned in advance 60. '(3) Electrolytic polishing: The electrolytic solution in electrolytic polishing system 4 alone is continuously sprayed into the gap S between the turning tool 24 and workpiece 60 which is energized, and the workpiece 60 produces the opposite of the ordinary electric mine. Electrolytic reaction, because the electrolytic polishing directly uses the surface of the positive electrode workpiece to be electrolyzed to produce a smooth and shiny surface, so it can achieve better roundness, surface roughness, gloss and money resistance than the above chemical mechanical polishing process, so it is also applicable. The workpiece has been turned 60. (4) Turning first and then chemical mechanical polishing: first use the turning system 20 to turn the workpiece 60 in advance to achieve the preliminary eight-inch and radial surface 'outstanding', and then use the chemical mechanical calendering system 50 to perform Polishing of workpiece 60 to further improve the roundness and surface roughness of workpiece 60. ”Mechanical polishing and then 0, in order, 0 pairs of workpieces 6 workpieces 6 0 can obtain true roundness can be controlled in Ra Ming of many special built machine tools and electrolytic polishing workpieces 6 0 (five) first chemical turning operations of the workpiece 6 and electrolytic The polishing system 4 polishes, so that it will make the degree, generally speaking, its 'surface roughness is about the last, the present invention 1 · The present invention can be cut, chemical mechanical polishing' The operator can use the chemical mechanical polishing system 5 0 0 The best roundness and surface roughness caused by chemical mechanical polishing and electrolysis can be controlled within 50nm (nanometers) = within 10nm (nanometers). The colors and advantages are summarized as follows: an online depletion process, which is also about three different cars. Processing mode focuses on the same processing requirements of one machine, choose one of them

200413127

One or two items are processed in order, and all the processing can be completed in situ, which can improve the waste of the workpiece 60, and the turning and polishing processing. 2 The invention can complete the chemical mechanical polishing process of the car, and then cooperate Effectiveness of roundness and surface roughness, good gloss, surname resistance and ultra-precision ruler3 · Because of the main features of the present invention, it can be used for traditional mechanical polishing and electrolytic polishing because of the expensive purchase cost of existing turning. To sum up, the present invention has the same applicability, and it has been found at home and abroad that there are no patents for the same structure in the same structure. It is not necessary to do any disassembly and replacement in accordance with the law, so the machine tool can be greatly improved. Processing efficiency is more efficient when processing equipment or processes. On the workpiece to be machined, the electrolytic polishing process is first performed to achieve excellent quality. In particular, the general circular parts can meet the surface size requirements. The architecture is based on the general turning machine tool. The machine tool is modified, so it does not require Angular turning processing function, and further cooperates with chemistry to obtain a multiplicative effect. This kind of product actually has its excellent progress. The technical data of this kind of structure are first in the literature, so the invention has already been applied for. The above-mentioned one is only one of the preferred feasible embodiments of the present invention, and the "equivalence of the application of the present specification and the scope of patent application ... constitutional changes should be included in the scope of patents of the present invention.

200413127 Brief description of the drawings [Simplified description of the drawings] The first figure is not a component of the system and equipment of the precision composite processing device of the present invention. The second figure is a schematic configuration diagram of the precision composite processing device of the present invention. The third figure is a schematic diagram of the implementation state of the electrolytic polishing system of the present invention. The fourth figure is a schematic diagram of the state of implementation of the chemical mechanical polishing system of the present invention. Some of the representative symbols are explained.] 1 0 Composite processing device 2 0 Turning system 2 1 Machine tool body 2 2 Main hoe 2 3 Turning tool holder 2 4 Turning tool 2 5 Thimble 3 0 Power system 4 0 Electrolytic polishing system 4 1 Electrolyte storage tank 4 2 Pump 4 3. Input line 4 4 Electrolyte nozzle 4 5 Recovery line 4 6 Filter 5 0 Chemical mechanical polishing system 5 1 Active Wheel 5 2 driven wheel 5 3 polishing cloth 5 4 elastic abutment 5 5 polishing liquid nozzle 6 0 workpiece S gap

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Claims (1)

200413127 VI. Scope of patent application-1. A precision composite machining device, including a turning system, with a machine tool body, a predetermined position on which is provided with a rotatable spindle head and a turning tool holder, the spindle head Can be used to fix a metal workpiece to be processed. 'The turning tool holder is also equipped with a turning tool opposite the radial surface of the metal workpiece, so that the turning tool can be turned on the workpiece's surface as required'. The radial surface of the workpiece is kept at a predetermined gap for electropolishing; ‧ A power system is a direct current power supply. Its positive pole is connected to the spindle head, and its negative pole is connected to the turning tool, so that the spindle head The workpiece and the turning tool have positive and negative polarity at the appropriate time, and simultaneously provide the current required for the electrolytic polishing of the workpiece; an electrolytic light removal system with an electrolyte storage tank, a pump, a wheel-in pipeline, and an electrolyte nozzle 1, a recovery pipeline and a filter; in beans, the electrolyte storage tank stores an appropriate electrolyte, which can be electrolyzed Take out, and then send it to the electrolyte nozzle through the conveying pipe to perform the jet flow action. The electrolyte nozzle is installed in the direction of the jet stream which can keep the gap between the turning tool and the workpiece directly. The electrolyte received at a predetermined position below the body is properly filtered through a filter and then recovered and sent to the electrolyte storage tank, so that the electrolyte can be continuously recycled. ^ By turning tools and workpieces with two different polarities The electrolyte is sprayed in the gap, which can apply electrolytic polishing to metal workpieces;-chemical mechanical polishing system, at least one driving wheel, one driven wheel :: polishing cloth,-elastic stopper and-polishing liquid nozzle; The polishing cloth is set between the driving wheel and the driven wheel and is driven by the driving wheel driving belt. 200413127 The elastic abutment piece acts on the driven wheel, and then the polishing cloth is elastically pressed against the radial surface of the workpiece through the Dailer wheel. The polishing liquid nozzle is installed at an appropriate position above the polishing cloth and can spray. The corrosive polishing liquid is applied to the polishing cloth, so that the polishing cloth soaked with the polishing liquid can apply chemical mechanical polishing to the radial surface of the metal workpiece. Page 13