TW200412276A - Abrasive fluid jet system - Google Patents

Abstract

The invention provides an abrasive jet system having a high-pressure fluid supply means supplying fluid to a vessel which includes a layer of abrasive slurry and a top layer over the layer of abrasive slurry. The abrasive fluid jet system also includes a first conduit which leads from the fluid supply means to the top layer of fluid in the vessel and as high-pressure fluid is fed into the vessel, causes displacement of abrasive slurry from a discharge conduit. The abrasive fluid jet system further includes a second conduit which connects at different points to the first conduit and the discharge conduit, and including a fluid valve between the operative connection to the first conduit and the discharge conduit, which fluid valve controls the fluid flow between the first conduit and the discharge conduit by means of the second conduit. The fluid valve is closed once the system is pressurised to displace abrasive slurry through the discharge conduit and is opened upon de-pressurization of the system to allow fluid flow from the first conduit to the second conduit and to stop discharge of the abrasive slurry.

Description

200412276 V. Description of the invention (1) < Technical field to which the invention belongs > The present invention relates to a polishing liquid jet cutting system, and in particular to a method for supplying a pressurized slurry from a pressurized polishing slurry storage container to a polishing jet nozzle so that Perform cutting or other abrasive liquid jet cutting operations. < Previous technology > In the process technology, the abrasive fluid jet system is used in many applications that require precision cutting. One example of this application is the single cutting of substrates. One type of abrasive fluid jet system uses an abrasive that is stored under pressure and discharged in a pressure vessel to mix the abrasive and the driving fluid immediately before the nozzle to form an abrasive slurry, which is usually accelerated through the slurry. Nozzle to form a polishing liquid jet tool for cutting a substrate. These existing systems require the abrasive to be separated and transported separately to give each nozzle that must be provided with a multi-nozzle cutting head, and such independent transport must be independently controlled, and the operation of one or more multi-nozzle cutting heads must be increased. Opportunity, and therefore in a less desirable state. Another structure of a liquid-mixed abrasive is shown, for example, in PCT Patent No. WO 95/29/997. In PCT Patent No. WO 9 5/2 9 7 9 2, a pressure vessel is provided inside, and the abrasive and liquid can be mixed under pressure before being conveyed, and then passed through the duct to the nozzle. As the hydraulic pressure used today is increasing to take advantage of its increased cutting force, the compressibility of the liquid becomes an important factor. When high pressure is generated and it is necessary to stop discharging the grinding slurry and reduce the pressure of the grinding slurry pressure vessel to suspend the operation process or facilitate refilling of the abrasive, the pressure capacity

200412276 V. Description of the invention (2) A large amount of compressed liquid still remains in the device. In the conventional system in this state, when the compressed liquid volume is released under reduced pressure, the only discharge path is through a discharge duct, and the outlet of the discharge duct is located in a sealed slurry container. Therefore, the amount of slurry to be continuously discharged will cause the problem of nozzle clogging, and because the discharged slurry is operated below normal pressure and lacks effective momentum, it cannot be avoided by depositing in the transfer pipe or nozzle. Clogging, so the problem of such clogging occurs. This undesired discharge may occur, for example, when the pressure valve of the slurry pressure holding vessel fails, because the slurry in the pressure vessel is under high pressure and is compressed by the pressure valve, so when the pressure When the valve fails, the compressed slurry will have to be conveyed through the transfer pipe in a short time to continuously discharge the ground slurry from the nozzle. In designing a solution, it is important to avoid high wear rates and reliability issues, including those caused by high pressure and processing media containing abrasives. < Summary of the Invention > The object of the present invention is to improve the above disadvantages, and to avoid clogging of the nozzles or provide a choice that is beneficial to the public. According to a first aspect of the present invention, the polishing liquid jet system includes: a container including a polishing slurry layer and an upper layer above the polishing slurry layer; a high-pressure liquid supply device that supplies liquid to the container; A first conduit through which the high-pressure liquid supply device can be passed to

200412276 V. Description of the invention (3) The upper layer of the liquid in the container is used to move the grinding slurry from the discharge tube when the high-pressure liquid is introduced into the container through the first tube; and a second tube makes the first tube And the discharge duct may be selectively connected at different points thereof, and a connection point between the operation connecting portion to the first duct and the discharge duct includes a liquid valve, and the liquid valve may be controlled at the point through the second duct The liquid flow between the first conduit and the discharge conduit; wherein when the system is pressurized, the liquid valve is closed to displace the grinding slurry through the discharge conduit; and when the system is decompressed, the opening is opened A liquid valve allows liquid flow from the first conduit to the second conduit, and stops the container from discharging the ground slurry. When starting the system, it is best to open the liquid valve to allow water to flow through the second conduit to pressurize the system, and it is best to close the liquid valve for the abrasive fluid jet when the container has sufficient pressure System operation. Preferably, the high-pressure liquid supply device also feeds liquid to the discharge duct through a third duct to produce a mixture of liquid and ground slurry, and ejects it through a spraying device provided at the end of the discharge duct. Preferably, a second liquid valve provided in the first conduit controls the liquid flow so that the liquid flow flows from the high-pressure liquid supply device to the container. The system preferably includes a liquid storage tank and a valve for supplying the ground slurry to the container, and the valve draws liquid from the liquid layer above the container, and by using the container, The slurry is sucked into the container by the pressure created by pumping the liquid from the liquid storage tank. According to a second aspect of the present invention, the abrasive fluid jet system includes: a pressure vessel, in which a compartment is defined, and the compartment can be separately maintained

200412276 V. Description of the invention (4) The amount of grinding slurry and the liquid containing substantially no grinding material on the amount of grinding slurry; a grinding mixing supply device which can be connected to the compartment; a transfer duct which The liquid is conveyed into the compartment under pressure through the first opening of the pressure vessel, and the first opening is formed in the conveying duct; a slurry extraction and conveying duct conveying the compartment of the pressure vessel The liquid slurry is driven into a nozzle through the second opening of the pressure vessel under the driving of liquid, and enters the compartment through the first opening under pressure, wherein the second opening is formed in the slurry extraction An access and delivery conduit; and a pressure control conduit connected to the substantially abrasive-free liquid flow, the pressure control conduit including a liquid flow control valve to regulate the pressure within the compartment. Preferably, the pressure control conduit is fluidly connected to the compartment through a third opening of the compartment, the third opening being disposed in the pressure control conduit and located within the substantially abrasive-free liquid. Preferably the delivery conduit extends into the compartment to position the first opening within the abrasive slurry. Preferably, the pressure control conduit is fluidly connected to the compartment through the first opening, and the first opening is located within the substantially abrasive-free liquid. When the liquid flow control valve is not closed, Preferably, the pressure control conduit is also fluidly connected to the slurry extraction and transfer conduit to be remotely controlled from the compartment, and the pressure within the compartment is removed and released through the nozzle.

200412276 V. Description of the invention (5) When the liquid flow control valve is not closed, it is preferable that the pressure control conduit includes a discharge port to be remotely controlled from the compartment, and through the discharge port in the compartment. The internal pressure is released. Preferably, the liquid flow control valve system is responsive to the delivery conduit hydraulic pressure, and if the hydraulic pressure system is a specific pressure relatively smaller than the desired system operating pressure, the liquid flow control valve will be left unclosed. Preferably the liquid comprises a majority of water. Preferably, the slurry is composed of an abrasive material within the liquid. In another aspect of the present invention, the method of operating the aforementioned system may include: to the compartment containing the amount of grinding slurry and a liquid substantially free of the amount of grinding slurry on the amount of grinding slurry, at The liquid is conveyed through the delivery conduit under pressure, while allowing the pressure to release the pressure from the compartment through the pressure discharge conduit through the liquid flow control valve when it is not closed; and when sufficient pressure reaches the compartment, When the nozzle is operated in the desired material cutting mode, the liquid flow control valve is closed, and then the pressure of the compartment is pushed to pass through the slurry extraction and transfer duct, and is released to the slurry by the slurry transfer. nozzle. In yet another aspect of the present invention, the method of operating the aforementioned system may include: operating under pressure the fluid barrier including the amount of ground slurry and the amount of liquid substantially free of the amount of ground slurry on the amount of ground slurry To transfer the liquid through the transfer conduit, thereby moving the slurry from the compartment to the nozzle through the slurry capture and transfer conduit; and

200412276 V. Description of the invention (6) Move the liquid flow control valve to the non-closed condition to avoid the slurry pressure in the compartment because the slurry pressure is lower than the slurry slurry extraction and delivery duct Displacement by moving pressure. In yet another aspect of the present invention, the method of controlling the foregoing system may include: operating the liquid containing the grinding slurry amount and substantially no grinding slurry amount on the slurry slurry under pressure. A compartment to transfer liquid through the delivery conduit, thereby moving the slurry from the compartment to the nozzle through the pulp retrieval and delivery conduit; and allowing the nozzle to operate if the pressure within the compartment is lower than The desired material cutting mode is to prevent the slurry from moving to the second conduit and stop the discharge of the abrasive slurry by moving the liquid flow control valve to an unclosed condition. In yet another aspect of the present invention, the abrasive fluid jet system includes: a) a container having a compartment to hold (a) the amount of ground slurry and (b) the amount of ground slurry from substantially no ground The amount of liquid composed of liquid; b) a high-pressure liquid supply device that supplies liquid to the container; c) a discharge duct including a water inlet, which is located within the grinding slurry volume and the nozzle; d )-A transfer tube that feeds high-pressure liquid from the high-pressure liquid supply device into the container to feed the liquid into the container under high pressure, and guides the flow of the grinding slurry and flows through the discharge tube In the nozzle; and e) a pressure relief conduit that is in fluid connection with the container to be operatively connected

Page 10 200412276 V. Description of the invention (7) Between the quantity consisting essentially of liquid and the discharge conduit, the pressure discharge conduit contains a liquid valve to control the fluid flowing in it. Among them, the liquid valve in the open state is selectively released from the container by flowing, and passes through the pressure discharge conduit to the nozzle. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS OF THE INVENTION The present invention relies on the natural tendency of liquids to accept the smallest path, so that the compressed liquid can be discharged into a discharge duct designed to contain no abrasive. < Performance mode > Referring to FIG. 1, which is a block diagram showing a first embodiment of the present invention, in which a pressure vessel 11 is provided, and the pressure vessel 11 is provided with a compartment to hold the grinding slurry. . The abrasive slurry is a mixture containing a liquid and an abrasive material, and the liquid is, for example, water or a liquid containing water. The pressure vessel 11 contains a liquid 4 provided on the upper layer of the grinding slurry 2. The liquid 4 is the same as the liquid used to store the grinding particles, so as to be provided in the slurry but above the liquid level n Lπ in the container. Without mixing with the abrasive. A pressurized liquid source 10 is combined with a compression valve to feed the liquid into the pressure vessel 11 and the liquid feed from the pressurized liquid source 10 is passed through the transfer ducts 14 and 15. The transfer conduit 15 is provided to transfer liquid to the capture and transfer conduit, thereby providing a proper dilution of the slurry that is displaced through the opening, and this dilution is necessary to avoid clogging of the capture and transfer conduit . The transfer conduit 14 is mainly a conduit for a transfer and pressurized container. As shown in the structure of the first figure of the present invention, the transfer conduit 14 has a drainage opening 24, and the drainage opening 24 is defined in the container. The first opening while the liquid

200412276 V. Description of the invention (8) Only in the area of the pressure vessel (ie above the liquid level L). The liquid storage tank 17 feeds the grinding slurry 2 to the container 1 through the conduit 19, and the pressure discharge conduit 2 1 is provided to communicate with the amount of liquid in the container and to flow with the liquid without abrasive. contact. In the structure of Fig. 1, the flow contact is provided through a local delivery conduit 14 and a liquid valve 1 3 controls the liquid flow across the pressure discharge conduit 21. In the normal operation of the system, the valve system transfers the compressed liquid to the container, and this causes the grinding slurry to move to the nozzle 12 through the opening 30 of the extraction and transfer conduit 16 and the opening 30 It is preferably located below the liquid level L and preferably near the bottom of the container 11. The pressure discharge conduit 21 can be considered to be bypassed by a bypass conduit to the liquid flow containing the abrasive in the container, the bypass can be controlled by a liquid flow control valve, and the liquid flow control valve can be used to close the conduit 2 1 . In the structure of Fig. 1, the conduit 14 is connected to the top of the container 11, and there is no grinding slurry 2 on the top. Under reduced pressure (for example, when the pressurized liquid source 10 is insufficient and is about to be shut down), the liquid valve connects the conduit 21 to the outside of the transfer conduit, and the container is opened. The amount of liquid in the container will remain compressed, but there is a tendency to expand outward. It is best to discharge through the conduit 21 with two openings that can accommodate this expansion, instead of opening through the delivery conduit 16 30, because the internal diameter and length of the opening 30 of the transfer duct 16 and the resistance of the grinding slurry 2 will result in higher flow resistance. At the beginning of the system and during pressure delivery, the liquid valve 1 3-is initially opened, and the liquid will flow from the pressurized liquid source 10 through the conduit 14

Page 12 200412276 V. Description of the invention (9) Move into the container. When the liquid valve 13 is opened, some liquid flow will flow into the conduit 21, and the pressure delivery of the container will also be generated, but the pressure will be reduced due to the partial liquid flow transfer. A preferred form is that the pressure discharge conduit is connected to the second opening (water inlet) 30 (and preferably outside the container) above the capture and transfer conduit, because the research of the flow through the opening 30 The combination of the impedance of the slurry and the phenomenon of the liquid actually passing through the conduit 21 and flowing into the capture and transfer conduit creates a back pressure, which lies in the part of the capture and transfer conduit towards the opening 30. While passing no slurry through the nozzle. A sufficient amount of liquid will flow into the pressure vessel near the nozzle, so that the abrasive is displaced into the water inlet 30 of the conduit 16. When the liquid valve 13 is closed, the liquid flow from the pressurized liquid source 10 passes through the conduit 14 and enters the container 11, thereby displacing the abrasive to the opening of the retrieval and transfer conduit 16 In 30, the main liquid flow from the duct 15 is mixed here, and is brought into the nozzle through the extraction and transmission duct 16. The abrasive flow can also be stopped by opening the liquid valve 13 at any time. During decompression, the liquid valve 13 is opened to provide a replaceable and better path for the compressed liquid through the conduit 21, when in the container When the content is expanded, these expansions are formed through the exhaust duct 21. When the conduit 14 has an opening on the liquid surface L in the container, the opening can ensure that the grinding slurry can reach the liquid valve 13 and therefore can be normally operated with minimum pressure difference on clean water, and Can have a longer service life than conventional systems. In addition, the inner diameter of the duct 21 is large enough to ensure that the speed of liquid outflow is lower than the set speed of the grinding slurry used. In this way, it is more predictable

Page 13 200412276 V. Description of the invention (ίο) Will any abrasive particles on the liquid surface L in the container enter the conduit 1 4 through the liquid valve 1 3 and enter the conduit 2 1 along the conduit 1 4 . Fig. 2 shows a second embodiment of the present invention in which a separate discharge duct 21 is provided. The second embodiment is different from that shown in the first embodiment in that the conduit 21 is not connected to the conduit 15 and is used only as a path for the amount of the compressed liquid in the container 11 to flow out. The second liquid valve 23 is always operated in dry-clean water, and the liquid valve 13 is operated less frequently, which means that the liquid valve 13 is usually used in the pressure delivery and decompression stages. As a result, the abrasion on the liquid valve 13 can be reduced, and the second liquid valve 23 is preferably spared rather than unnecessary. In the case where the liquid flow needs to be separated, when the valve compresses the pressurized liquid source_10 and drops it, the pressure loss in the conduit or the valve can be detected by a pressure sensor, so The liquid valve 13 can be automatically opened to release the pressure in the container through the conduit 21. In the case that the liquid flow of the grinding slurry needs to be stopped but the pressurized liquid source 10 continues to operate, the valve can only be opened, and the liquid flow can continue to flow into the container 11 through the conduits 14 and 15 However, because the minimum resistance route of the pressure material inside the container is through the conduit, water will enter and flow out only above the liquid level L, so it can be ensured that only water can be discharged through the conduit 21 to the Nozzle 1 2. As long as the valve continues to compress the pressurized liquid source 10, the liquid flow will continue to operate, the pressure of the compressed liquid flow cannot be balanced, and the valve will remain open. The diaphragm valve 18 is used to draw the liquid 4 from the duct 20, which generates pressure in the container 11 and sequentially draws the ground slurry from the liquid storage tank 17 into the container 11. In the specific embodiment in FIG. 2, the liquid valve 13 and the second liquid

Page 14 200412276 V. Description of the invention (π) The valve 23 is closed, and the diaphragm valve 18 is used to draw liquid from the container through the duct 20 to generate a vacuum, and to pass through the duct 19 from The liquid storage tank 17 draws the grinding slurry. The advantage of this system is that during the pressurization or decompression phase of the system, the abrasive can be prevented from being discharged to the nozzle under improper conditions due to the compressibility of the liquid. By providing the amount of compressed liquid in the container during expansion An alternative path with less resistance can be used without bringing abrasive into the nozzle, so the present invention helps prevent nozzle clogging. Reference is made to Figure 3, which shows an alternative structure in which the transfer conduit is positioned to have a first opening immersed in the mortar. In this structure, the separate opening provided by the pressure discharge duct must be positioned above the liquid level L, and the spare first opening 24 is close to the second opening (water inlet) 3 0 and closer to A mixture of water and abrasive can be obtained at the second opening. Figure 4 shows another alternative structure in which the pressure relief conduit is not discharged to the capture and transfer conduit, but in a different location, which is the next better choice, because in the conduit 21, the liquid from the liquid The resulting pressure cannot be used to provide the back pressure required for the liquid in the retrieval and delivery conduit 16 and therefore allows certain mortars (during the expansion of the content of the container) to move through the opening to The retrieval and delivery catheter. The present invention herein permits changes, modifications, and / or other supplementary explanations in addition to the above specific descriptions, and it should be understood that all changes, modifications, and / or additions are within the spirit and scope of the above descriptions of the present invention. The description should be included in the present invention.

Page 15 200412276

BRIEF DESCRIPTION OF THE DRAWINGS The first diagram is a block diagram showing a first embodiment of the present invention; the second diagram is a block diagram showing a second embodiment of the present invention; the third diagram is a block diagram showing a second embodiment of the present invention Figures; and Figure 4 are block diagrams showing a fourth embodiment of the present invention. Brief description of drawing number 2 Grinding slurry 4 Liquid 1 0 • • • • Compressed liquid 1 1 • Pressure vessel 1 2 Nozzle 1 3 Body valve 1 4 1 5 1 6 • Conduit 1 7 • Reservoir 1 8 Diaphragm valve 1 9 2 0 • • • • Duct 2 1 • • • Pressure relief duct 2 4 • Drain opening σ 3 0 The first opening L side

Page 16

Claims (1)

200412276 6. Scope of patent application1. A grinding fluid jet system includes: A pressure vessel, which defines a compartment therein, and the compartment can separately store the grinding slurry amount and the grinding slurry amount without substantial An amount of liquid that grinds the material; a grind mixing supply device that can be connected to the compartment; a transfer conduit that passes liquid through the first opening of the pressure vessel into the compartment under pressure, and the The first opening is formed in the transfer duct; a slurry extraction and transfer duct, which transfers the slurry in the compartment of the pressure vessel, is driven by a liquid into a nozzle through the second opening of the pressure vessel, and Enter the compartment through the first opening under pressure, wherein the second opening is formed in the slurry extraction and delivery conduit; and a pressure control conduit that flows with the substantially abrasive-free liquid Connected, the pressure control conduit contains a liquid flow control valve to regulate the pressure within the compartment. 2 · The abrasive fluid jet system according to item 1 of the scope of patent application, wherein the pressure control guide is connected to the compartment through the third opening of the compartment, and the third opening is provided in the pressure control The catheter is inside the substantially abrasive-free liquid. 3. The abrasive fluid jet system as described in item 1 of the scope of the patent application, wherein the transfer duct extends into the compartment to position the first opening within the sweet grinding slurry. 4 · The abrasive fluid jet system described in item 1 of the patent application scope, wherein Page 17 200412276 VI. Scope of patent application The pressure control conduit is connected to the compartment through the first opening for flow connection, and the first opening is located in the liquid substantially free of abrasives. The abrasive fluid_jet system according to item 1, 2, 3 or 4, wherein when the liquid flow control valve is not closed, the pressure control conduit also captures and transmits the flow of the conduit with the slurry, It is moved to be remotely controlled from the compartment, and the pressure inside the compartment is removed and released through the nozzle. 6 · The abrasive fluid jet system as described in claim 1, 2, 3 or 4, wherein when the liquid flow control valve is not closed, it is preferable that the pressure control conduit includes a discharge port to Remotely controlled from the compartment_, and released through the pressure of the discharge port within the compartment. • The abrasive fluid jet system according to item 1 of the patent application scope, wherein the liquid flow control valve system Responsive to transfer conduit hydraulic pressure, and if the hydraulic system is a specific pressure that is relatively less than the desired system operating pressure, the liquid flow control valve will be left unclosed. 8 • The abrasive fluid jet system as described in item 1 of the scope of the patent application, the fluid including most of the water. 9 · The abrasive liquid jet system described in item 1 of the scope of the patent application, the slurry is composed of an abrasive material in the liquid. 1 0 · A β method of operating the polishing liquid jet system as described in the first item of the patent application, including: to the content including the grinding slurry amount and the essence of the grinding slurry amount Page 18 200412276 VI. The patent-free range of the liquid compartment without grinding and grinding slurry, the liquid is conveyed through the transfer duct under pressure, while allowing the pressure to be discharged through the pressure through the liquid flow control valve in the unclosed condition. Duct, and release pressure from the compartment; and when sufficient pressure reaches the compartment to operate the nozzle in the desired material cutting mode, close the liquid flow control valve, and then push the compartment The pressure is released to the nozzle through the slurry extraction and transfer conduit, and is transferred by the slurry. 1 1 · A method of operating a grinding fluid jet system as described in item 1 of the scope of the patent application, comprising: operating under pressure the amount of grinding slurry and substantially no grinding slurry on the amount of grinding slurry Φ The liquid compartment to transfer the liquid through the transfer conduit, thereby moving the slurry from the compartment to the nozzle through the slurry capture and transfer conduit; and moving the liquid flow control valve to the closed position, To avoid the mortar being displaced due to the pressure within the compartment being lower than the pressure that would allow the mortar to move through the mortar excavation and delivery conduit. 1 2 · A method for controlling a grinding fluid jet system as described in item 1 of the scope of the patent application, comprising: operating the grinding slurry amount under pressure and a substantially non-grinding slurry amount on the grinding slurry amount The liquid compartment to transfer the liquid through the transfer conduit, thereby moving the slurry from the compartment to the nozzle through the slurry capture and transfer conduit; and if the pressure within the compartment is lower than Allows this nozzle operation to be Page 19 200412276 VI. Patented material cutting mode, by moving the liquid flow control valve to the unclosed condition, to avoid the slurry moving to the second duct and stopping the discharge of the slurry. 1 3-A polishing fluid jet system comprising: a) a container having a compartment to hold (a) the amount of ground slurry and (b) a liquid consisting of a liquid having substantially no amount of ground slurry Amount b) — high-pressure liquid supply device, which supplies liquid to the container; c) a discharge duct, which includes a water inlet, which is located within the grinding slurry volume and the nozzle; d) — a delivery duct, which is Feeding high-pressure liquid from the high-pressure liquid supply device to the container to feed the liquid into the container under high pressure to guide the grinding slurry to flow and flow into the nozzle through the discharge duct; and e)- A pressure discharge conduit is fluidly connected to the container to be operatively connected between the quantity consisting essentially of liquid and the discharge conduit. The pressure discharge conduit includes a liquid valve to control the fluid flowing therein. f) Wherein, the liquid valve in the opened state is selectively released from the container by flowing, and passes through the pressure discharge conduit to the nozzle. Page 20