TW200411512A - System for managing worker, device for managing worker, and method for managing worker - Google Patents

Abstract

A system for managing workers comprises: a factory (100) divided into a plurality of work areas depending on the content of a work, a data base (220) for storing work-specific information associating each work area (112), or the like, with the content of a work being done thereat, and worker sensors (130) provided in respective work areas. A work area where a worker is present is specified based on the output from the worker detecting means, and the work being done currently by that worker is specified from the work area of the specified worker based on the work-specific information in the work specific information database. Based on the current work thus specified, a decision is made for that worker whether to continue the current work or to do a new work, and execution of work is designated for that worker depending on the decision results. Specification of a work being done currently by the worker, allocation of a new work, re-allocation of a work, and the like, are thereby facilitated and the work efficiency of each worker can be enhanced by posting the right worker in the right place.

Description

200411512 (1) (ii) Description of the invention [Technical field to which the invention belongs] The present invention relates to an operator management system, an operator management device, and an operator management method. [Prior art]

For example, in a work place such as a semiconductor manufacturing plant, an equipment room including a clean room such as a semiconductor manufacturing device is installed, and various operations are performed in various areas. For example, an input operation for producing a semiconductor device takes place outside the device in a clean room, an obstacle response operation of a semiconductor manufacturing device occurs inside the device room, and a part management operation such as a maintenance warehouse still occurs outside the clean room. As these tasks are different, the skills required to perform the tasks are also different, so operators with various skills are often required.

However, it is not easy to manage these operators with various skills, and once the efficiency of assignment is not good, the efficiency of each operator will decrease. Therefore, it is a problem how to appropriately arrange the workers to improve the work efficiency of each worker. Therefore, although it is ideal to select the operator who is most suitable for the job at the right time and give instructions, it is actually difficult. For example, when a new operation occurs while the operator is working, the operator cannot issue an instruction to perform a new operation. At this time, if the operator is unable to grasp the work currently being performed by the operator ', it is also impossible to determine whether to interrupt the current work to perform a new operation. You can also consider finding him-5- (2) (2) 200411512 He replaces the operator to perform new operations, but this is only limited to those who have the skills required to perform the new operations. . Therefore, it is necessary to specify what the operator is currently doing. However, at the same time, there are many types of the above-mentioned operations occurring in semiconductor manufacturing plants and the like, and it is extremely difficult to specify the operations being performed by each operator. In order to specify the work, for example, as shown in Japanese Patent Application Laid-Open No. 8-1 07096, if a person who can input the password to the screen of the operation panel according to the type of work can be determined in advance, the password can be used to some extent. Identify which operator is doing what. It is also possible that the operator can only input the screen for operation, and the engineer can input the screen for the engineer through the password. However, in this technique, only the types of operators (operator classification) called operators and engineers can be understood, and it is impossible to detect which operation a particular operator is performing. In this regard, if the ID is determined according to the operator's type in advance, and the operator enters the operator ID first and then operates the screen of the operation panel, then it can be detected which operator has the operator ID and which operation it is. Can be thought of. However, in the case of inputting the operator ID ', it is impossible to specify the operation for operations that do not perform screen input or the like, which is a problem. On the other hand, each time an operator performs an operation, if it is required to input the operation content into the screen of the operation panel or the like to leave a record, the operation of each operator can be specified. However, it is cumbersome to require all operators to input the content of the work whenever they perform the work, and it may even reduce the work efficiency. Especially when there is an emergency such as a fire or an obstacle, the operator must take obstacle response work as quickly as possible. (6) (3) 200411512 It is not appropriate to force the operator to enter the operation content for the sake of operator management. However, in semiconductor manufacturing plants and the like, there are a large number of work areas such as clean indoors and indoors, and indoors and outdoor installations. Therefore, it is conceivable that the work area can be used to perform a certain degree of work specificity. Therefore, the inventors of the present invention have come up with the idea that the operator's work can be specified as long as the area where the operator is located can be specified. The present invention has been made in view of the nature of the field in which a semiconductor manufacturing plant or the like can be operated to a certain degree. Therefore, the present invention has been made in view of the above problems, and an object thereof is to provide an operator management system, an operator management device, and an operator management method, so that the operator is currently specifying a job, assigning a new job, and re-running the job. Distribution and the like can be made easier, and operators can be appropriately and appropriately instructed, and the work efficiency of each operator can be improved. [Summary of the Invention] In order to solve the above-mentioned problem, according to the first aspect of the present invention, a worker management system may be provided, including: a work field divided into a plurality of work areas according to the work content; and each work of the previous work field Area and the work performed in each work area to give the relevant work special day to day, 1 day to 3 days of special work information storage means; and operator detection means set in each work area in the previous note; and based on Output of preamble operator detection means, specific operator position specific means in which work area the preamble operator is located in; and operating characteristics based on the specific information memorization means of the preparatory work (4) 200411512 Defining information 'by the operator position The working area of the operator specified by the sufficient means, the current operation specific means of the operation that the operator is currently performing; and the current operation specified by the redundant current operation specific means. The method of judging whether the operation is continuing or making it perform a new operation; and Note determination result of the determination means, the means instructs the job execution instruction of the operator. According to the operator management system of the present invention, the area (place) where the operator is located can be detected, and the related operations assigned to the area can be used to easily detect the operation that the operator is currently performing. For this reason, for example, when a new job occurs, the assignment of the new job, the redistribution of the job, etc. can be made easier, the operator can perform the job appropriately, and the work efficiency of each operator can be improved. In addition, it also saves the time and procedures for the operator to input the work content, thereby improving the work efficiency of the operator. In order to solve the above-mentioned problem, according to another aspect of the present invention, an operator management system may be provided, including: a work area divided into a plurality of work areas according to work contents; and each work area of the pre-work area and the work area. Operation-specific information storage means for storing operation-specific information related to the operation content performed in the operation area; and operator detection means provided in each operation area of the preamble; and specific preamble operations based on the output of the pre-operator detection means The operator's location-specific means in which work area the operator is located; and the work-specific information of the previous work-specific information storage means, and the work area of the operator specified by the previous-worker's location-specific means, identifying the operator who is currently working Specific means of current operation of the work; and -8- (5) 1200411512 which will be written by each operator and each operator

Means for memorizing operator skill information by assigning skills information to related operators; and means for memorizing priority information for memorizing priority information for assignments; and means for detecting new operations to detect the occurrence of new assignments; and if previously noted The new operation detection method detects a new operation, and then extracts the operator extraction method of the operator who can perform the new operation of the previous operation according to the operator's skill information of the previous operation skill information memory means; The current operation of the operator extracted by the pre-extracting operator extraction method is specified, and the prior order of the pre-existing current operation and the prior order of the pre-existing new operation are obtained and compared according to the prior information of the pre-existing operation priority information storage means. The priority of the previous work is higher than the current work of the previous work, and the specific operation of the new work is specified by the operator-specific processing. ”And the operator specified by the specific operation of the previous work, Instructions to issue instructions to perform previous assignments示 Means.

According to the operator management system of the present invention, the priority of the detected current job and the new job can be compared, and if the priority of the new job is high, an instruction is given to the operator. In this way, even when a new job occurs, it is possible to determine whether or not the operator is required to perform a new job according to the priority of the current job, so that a higher priority job, that is, an important job can be processed sooner. In this way, operators can be instructed appropriately to optimize the distribution of jobs. In addition, it can also be a means of memorizing the skill information of the previous operator, which is to memorize the operator classification according to each operator; and to set up ... to assign related tasks to each task and the operator classification that has the skills to perform the task. -9- (6) 200411512

Occupational skill information memorization means for memorizing professional skill information; and obtaining the classification of the operators obtained from the previous memorization of the operator's skill information memorization means for each operator extracted by the pre-exposure operator extraction means, and at the same time according to the operation skills of the pre-exposure operation skill memorization means Information to obtain the operator classification of the previous new operation, and set the priority order of the obtained operators to the same operator as the high priority, and give priority to the priority order giving means to the operator; specific means of the previous operator, Among the operators extracted by the operator extraction means, the operator has a higher priority order from the operators assigned by the pre-priority order giving means, and performs the operator specific processing in order. In this way, for workers who are regarded as being able to carry out new work, they can be given priority, so that the workers who are most suitable for the new work (such as engineers, operators, regular workers, etc.) can be given priority. The improvement also starts from the operator with a higher priority-comparing the priority of the current operation with the new operation to determine the operator who performs the new operation. In this way, the operator who is most suitable for the new job can be found faster, and the operator can be pointed at the appropriate place.

Show. In order to solve the above-mentioned problems, according to another aspect of the board invention, an operator management system may be provided, including: a work area divided into a plurality of work areas according to the work content; and each work area of the pre-work area and the work area. Operation-specific information storage means for storing operation-specific information related to the operation content performed in the operation area; and operator detection means provided in each operation area of the preamble; and specific preamble operations based on the output of the pre-operator detection means The operator's location-specific means in which work area the operator is located; and the operation of the specific information-memory means based on the previous work -10- (7) 200411512 specific information, from the work area of the previous operator's position, to identify the specific work method for the operator; And the method of memorizing the best information of the operation; and detecting new operations and if the new operation detection method is described in advance, the industry-specific methods are used to specify the full operator's priority information for the operation that already includes the new operation's all operation methods. Redistributing hands Assigned work. If the work according to the present invention is born, it is possible to more appropriately allocate the worker and operator, because the work of the full worker and the new work and the rework of the new work are detected, and the work allocation can be achieved. In addition, the operation of the above-mentioned operation redistribution means is recognized as a new operation; and the operation that the operator can perform is assigned to the related operator skill information memory means; the operator skill information of the memory means, and the operator's operator extraction means; and In the paragraph, the new operation detection method that takes the previous operation information specified by the pre-extraction operator extraction method and memorizes the current information of the current operation of the operator specified by the pre-operation priority investment specific method; to For new assignments, the previous assignments are now the current assignments. Among these current assignments, the priority assignments of the previous assignments' priority information memory are used to redistribute means from higher-priority assignments; and the instruction means management system that assigns the previous assignments to all operators. , When a new job is found in the job and it will contain the current assignment, A new job. In this way, the efficiency can be indicated and the efficiency of operations can be indicated. The department can also set the priority from the job priority: memorizing the previous operator and the skill information of each operator and extracting the new operator ’s skill based on the previous operator ’s skill information. "11-(8) 200411512 of the current work of the operator and the means of memorizing and remembering the prior order of the current work in the preamble to obtain and compare it, and the high priority of the new work in the previous work is specified as the new work in the previous work" Operator-specific means. With this, the operator can be determined sooner when a job including a new job is performed in the order of high job priority. When the operation is redistributed, the detection can also be compared first. If the new operation is preferred, it will be instructed to perform the new operation. In this way, the more suitable the operator is, the more suitable the operator is to achieve the optimization of the assignment. In order to solve the problem described above, if a root management system is provided, it is divided into a business area and a plurality of work areas. The operation of memorizing specific information in the area is specified to output the manual detection means of the operator in each operation area, to specify the specific means of the previous operator position; and to specify the specific information of the previous operator, the operation area of the previous operator position is used to specify the output. The specific operation method of the operator; and the priority order of the current operation and the previous new operation specified by the specified operator at the specified time plus the priority order that is higher than the redistribution of the entire operation in the specific place of the operator of the current operator Because the operators are determined one by one, the more important it is, even if the priority of the current operation and the new operation that includes all new operations is high, it will be issued to the operator, because the higher the priority, the more suitable it is. Indicate the efficiency of work operations where appropriate. According to other aspects of the present invention, it may be characterized as having: a field according to the content of the work; and a means for storing related work information for the content of each work in the previous work field; and provided in the preceding paragraph; and which one is located according to the work of the previous operator The operator in the work area is identified by the operation-specific information storage means. The operator is currently working on the current work, and the current work is previously specified, and the current work is based on the full operator-12- (9) (9) 200411512 The memorizing means of operation information memorized separately; and the means of generating an operation report based on the operation information of the operation information memorization means, generating an operation report containing the content of the operation performed by the desired operator at each predetermined time. According to the operator management system of the present invention, an operation report such as an operation daily report and an operation monthly report can be easily generated. And because the operator's work can be automatically detected to generate work information as the basis of the work report, it can save the operator from entering procedures from a portable information terminal and so on, and improve work efficiency. . In addition, since it is not necessary to entrust the operator to report by himself, an operation report can be frequently and accurately generated. In addition, it can also be a means of memorizing pre-work information, which also stores the unit price of each job at the time of each operation; and a means of generating a pre-work report, which generates a total of the unit price of the job and the total amount of the unit price. Homework report. In addition, the preamble operation site may be a semiconductor manufacturing plant. In this case, the preamble operator may be a worker dispatched by a company different from the company that owns the preamble operation site, that is, the semiconductor manufacturing plant. With this, for example, when requesting payment from the dispatched company for the work performed by the dispatch operator, the operation unit price and the total amount of each operation can also be printed in the operation report, or it can be requested based on the total amount. The fees are in accordance with the content of the operation. In order to solve the above problem, according to the second aspect of the present invention, a worker management device can be provided. The worker management device belongs to a worker management device that manages workers who work in a work field divided into a plurality of work areas according to the work content. It is characterized by having the following: (10) (10) 200411512 memorizing means for storing job-specific information, and assigning job-specific information to each job area of the previous work field and the content of the work performed by each job area; and The output of the operator detection means in each work area of the preamble, the operator location-specific means that specifies the work area in which the preamble operator is located; and the job-specific information based on the pre-job specific information storage means, specified by the pre-operator position-specific means The working area of the operator specifies the current operation specific means of the operation that the operator is currently performing; and whether or not the operator is allowed to continue the current operation based on the current operation specified by the previous current operation specific means. Or the judge who made it work Paragraph; and the instruction means to issue instructions to the operator in accordance with the judgment results of the preceding judgment means. According to such an operator management device of the present invention, the area (place) where the operator is located can be detected, and the work currently being performed by the operator can be easily detected by the work associated with the area. Therefore, for example, when a new job occurs, the assignment of the new job, the redistribution of the job, and the like become easy, so that the operator can perform the job appropriately and appropriately, and the work efficiency of each operator is improved. In order to solve the above problem, according to another aspect of the present invention, a worker management device can be provided. The worker management device belongs to a worker management device that manages workers who work in a work field divided into a plurality of work areas according to the content of the work. It is provided with: operation-specific information storage means for memorizing each operation area of the preparatory work field and the operation content performed by each operation area with specific information related to the operation; Output, the specific location of the operator in which work area the preamble operator is located; and the work specific information based on the predecessor work specific information storage means, which is specified by the preamble operator's location -14- (11) 200411512

The operation area of the operator specified by the means, and the current operation specific means of the operation that the operator is currently performing; and assigning the skill information of the related operators to the previous operators and the operations that the operators can perform. Memorized operator skill information memorization means; and job priority information memorization means that memorizes priority information of the job; and new job detection means to detect the occurrence of a new job; and if the previous new job detection means detects a new For the assignment, the operator extraction means of the operator who can perform the previous assignment of the new operation is extracted according to the operator's skill information of the previous operator ’s skill information memorizing means;

And carry out "Previous current work specific means to specify the current work of the operator extracted by the previous operator extraction means, and according to the priority information of the previous work priority information memory means, prioritize the current order of the previous work and the new work in the previous To obtain and compare the priority order of the previous job, and to assign a higher priority order to the previous job than the current job in the previous job, to specify the operator-specific treatment of the new job operator in the previous job, and the operator-specific means; Operators identified by specific means issue instruction means instructing them to perform pre-recorded new operations. According to the operator management device of the present invention, the priority of the detected current job and the new job can be compared, and if the priority of the new job is high, an instruction is given to the operator. In this way, even when a new job occurs, it is possible to determine whether or not the operator is required to perform a new job according to the priority of the current job, so that a higher priority job, that is, an important job can be processed sooner. In this way, operators can be instructed appropriately to optimize the distribution of jobs. It can also be a means of memorizing the skill information of pre-workers, which is to classify the work -15- (12) 200411512 according to each operator. The pre-worker can extract the skills and information that can perform the work. The method of extracting information from the information memory means of the operator's memorization means of the operation skill information, and set the obtained operator position to high, and assign a segment to the operator; the former operator specific means, among the operators " Priority is given to high-ranking operators, and sequential advancement will enable early discovery of the most suitable operators for new assignments. In order to solve the above-mentioned problem, if a worker management device is provided, the work management device divided into a plurality of work areas is characterized by having: work-specific information for memorizing work performed in each work area, and recording a worker detection in the work area Means the location of the operator in which work area determines the current work memory of the worker specified by the work-specific means of the work-specific information storage means; and settings: assign the work classification of each work and the operator to the related work capabilities Means of information memorization; and obtaining the previous operator's skills & class of each operator, and at the same time, according to the previous operator's skills, the new operator's classification of the previous operator is classified into the same operator. It is the operator-specific processing given priority to the operator given by the position-imparting means extracted by the operator extraction means. In this way, the operator who can be used, and where appropriate, refers to other viewpoints according to the present invention, and the operator who belongs to the operator who manages the work performed on the field according to the content of the work will be given the various work areas and contents of the previous work field Relevant job-specific information recall means; and specific preamble operators are located in specific means based on the output set in each preface; and preface operator specific information, the predecessor operator is located in a specific business area to specify the specific means of the operator now; And the prioritized information memorization means for memorizing the priority information of the work -16- (13) 1200411512 information; the new means for detecting new work; and if the new work is recorded in advance, the specific means currently recorded in the current work are used for special operations. In the current assignment, priority is given to the assignments that already contain the new prior assignment priority information memorizing means, and redistribution means are re-assigned from the higher priority assignments; and the instruction means of the pre-assignment assignment means operator instructions. If the operator manages the installation according to the present invention, the redistribution of the current operation of the full operator and the full operation of the new operation is detected, so that the operator can be more appropriately assigned to the entire operation. In this way, the operator can achieve the efficiency of the assignment of the work, and can also be a means of redistributing the work, which is recognized as a new work from the work; and the setting: the work that the former operator can perform is given to the related operator Operator skill information memorization means; and operator skill extraction means based on operator skill information of previous memorization means; and "predecessor operator extraction by means of the former operator extraction means", and Priority information memory means obtains and compares the priority of the current job in the previous note with the new work in the previous note. 'Identifies the operator with the higher priority of the new job in the previous record as the operator of the new job in the previous record and the detection means that detects the new job is detected. The newly assigned full operator ’s current assignment is assigned to all the assignments assigned to the superior assignment assigned to the assignment by the information. When a new assignment is issued, it will contain the current assignment for the applicable new assignment. The efficiency of the local instruction work is memorized. Each operator with high work priority and the information of each work can be memorized. Operator skill information Pre-record new assignments, current assignments, current assignments, and special job priority information, and job priorities are prioritized over operator-specific treatments for previous assignments. 17- (14) (14) 200411512 " Operator-specific means. Thereby, because the more important work can be selected with the higher priority, the more suitable operator can be selected, so that the operator can be instructed appropriately and appropriately, so that the assignment of the work can be optimized and the work can be made more efficient. In order to solve the above problem, according to another aspect of the present invention, a worker management device can be provided. The worker management device belongs to a worker management device that manages workers who work in a work field divided into a plurality of work areas according to the content of the work. For setting: operation-specific information memorization means that memorizes each operation area of the pre-job site and the operation content performed by each operation area with specific information related to the operation; and according to the operator detection means set in each pre-work area Output, specific operator location specific means in which work area the preamble operator is located; and the work specific information of the predecessor work specific information storage means, and the work area of the operator specified by the predecessor operator position specific means, The specific means of current operations that the operator is currently working on; and every time a predetermined time is reached, the current operations of all the operators are specified by the current operation special means, and the current operations are stored according to the operation information of all the operators. Means of memory; and Job information memory means, the operator generates jobs report containing the expectations of the PRC job report in job content of each book to generate the report given time means. According to the operator management device of the present invention, an operation report such as an operation daily report and an operation monthly report can be easily generated. And because the operator's work can be automatically detected to generate work information as the basis of the work report, it can save the operator from entering procedures from a portable information terminal and so on, and improve work efficiency. . In addition, since it is not necessary to entrust the operator to report by himself (18) (15) (15) 200411512, the operation report can be generated frequently and correctly. In addition, it can also be a means of memorizing pre-work information, which also stores the unit price of each job at the time of each operation; and a means of generating a pre-work report, which generates a total of the unit price of the job and the total amount of the unit price. Homework report. In addition, the preamble operation site may be a semiconductor manufacturing plant. In this case, the preamble operator may be a worker dispatched by a company different from the company that owns the predecessor operation site, that is, the semiconductor manufacturing plant. With this, for example, when requesting payment from the dispatched company for the work performed by the dispatch operator, the operation unit price and the total amount of each operation can also be printed in the operation report, or it can be requested based on the total amount. The fees are in accordance with the content of the operation. In order to solve the above problem, according to the third aspect of the present invention, a worker management method can be provided, which belongs to a worker management method for managing workers who perform work in a work field divided into a plurality of work areas according to the work content. It is characterized in that: according to the output of the operator detection means provided in each work area of the preamble, the specific location of the work area where the preamble worker is located and the specific project; and according to each work area of the preface work area and the work area. The content of the work performed is given to the specific information of the related work. The specific information of the work is memorized. The specific information of the work is "the work area of the operator specified by the predecessor operator's position specific project". The current work specific project of the operation; and the current work specified by the previous current work specific project to determine whether to make the operator continue the current operation or to make a new operation; and according to the previous judgment method Judgment19- (16) (16) 2004 11512 As a result, the worker is instructed to issue a job execution instruction. According to the operator management method of the present invention, the area (place) where the operator is located can be detected, and the related work assigned to the area can be used to easily detect the work currently being performed by the operator. For this reason, for example, when a new job occurs, the assignment of the new job, the redistribution of the job, etc. can be made easier, the operator can perform the job appropriately, and the work efficiency of each operator can be improved. In order to solve the above problem, according to another aspect of the present invention, a worker management method may be provided. The worker management method belongs to a worker management method for managing workers who perform work in a work field divided into a plurality of work areas according to the work content. In order to have: the operator's position and specific work to specify which work area the preamble operator is located according to the output of the operator detection means provided in each work area of the preamble; The work content gives related work-specific information to memorize the work-specific information. The work-specific information in the means for memorizing the work is 'the work area of the operator specified by the predecessor operator's location-specific project'. Current job-specific projects; and new job detection projects that detect the occurrence of new jobs; and if a new job is detected by the pre-recorded new job detection means, the pre-recorded operators and the jobs that each operator can perform Assigning skills to related operators to memorize them Operator ’s skill information memorization means to extract the operator ’s skill information from the operator who can perform the previous work; and perform the “previous current work specific project to add the current work of the operator extracted from the previous work extraction work Specific, and based on the job priority information of the job priority information -20- (17) (17) 200411512 which is memorized, the prioritization order of the previous job and the prioritization of the new job are obtained and compared. ", The priority of the previous new work is higher than that of the previous work, and the specific work of the new work of the operator is specified by the operator-specific process"; and the work specified by the specific work of the previous operator In addition, according to the operator management method of the present invention, the detected current operation can be compared with the priority of the new operation. High priority gives instructions to the operator. In this way, even when a new job occurs, it is possible to determine whether the operator is required to perform a new job according to the priority of the current job, so that a higher priority job, that is, an important job can be processed sooner. In this way, operators can be instructed appropriately to optimize the distribution of jobs. In addition, it can also be a means for memorizing the skill information of the previous operator, which is to memorize the operator's classification according to each operator's classification; and to set up: assign each operation and an operator's classification that has the skills capable of performing the operation to the related operation skills Means for memorizing work skill information by memorizing information; and obtaining operator classifications obtained by means of memorizing work skill information for each operator previously extracted by means of the previous work operator extraction means, and at the same time based on the work skill information of the work skill memory means for the previous work Obtaining the operator classification of the previous new work, and setting the priority of the obtained operators to the same operator as the high priority, and giving priority to the priority giving means to the operator; the specific means of the previous operator is the work Among the -21-(18) (18) 200411512 extracted by the operator extraction method, the operator's specific processing is performed in order from the operator who has been given priority by the pre-priority priority assignment means. In this way, the operator who is most suitable for the new operation can be found more quickly, and the operator can be instructed where appropriate. In order to solve the above problem, according to another aspect of the present invention, a worker management method may be provided. The worker management method belongs to a worker management method for managing workers who perform work in a work field divided into a plurality of work areas according to the work content. In order to have: the operator's position and specific work to specify which work area the preamble operator is located according to the output of the operator detection means provided in each work area of the preamble; The work content gives related work-specific information to memorize the work-specific information. The work-specific information in the means for memorizing the work is 'the work area of the operator specified by the predecessor operator's location-specific project'. A new job detection project that detects the occurrence of a new job; and a new job detection project that detects the occurrence of a new job; and if a new job is detected by the previous new job detection means, the previous job specific project is previously recorded to specify the current job of the full operator, These new assignments are for new assignments Full assignment of jobs, according to the job priority information memorizing the job priority information memorizing means of the job priority information to give priority to the job order, starting from the higher priority job to reassign the entire job assignment job redistribution project; and the predecessor job The instructions assigned by the redistribution means to all operators. According to the operator management method of the present invention, when a new job occurs, because the current job of all the workers is detected, it will contain the current • 22- (19) (19) 200411512 job and the new job. All-job redistribution ', so the operator can be more appropriately assigned to the whole job containing the new job. Thereby, the operator can be instructed appropriately and appropriately, and the efficiency of the assignment and the efficiency of the operation can be achieved. In addition, reassignment works for preparatory work can be recognized as new work from the work with the highest priority of work; and it has the skill information of related operators according to the preparatory work and the work that each operator can perform. The memorized operator skill information memorization means of the operator skill information, extracting the operator extracting work of the operator who can perform the new work in the previous record; and performing the work of "the previous record of the current work specific project extracting the previous work operator in the project. The current assignment of the former is specified, and the priority order of the previous assignment and the new assignment of the previous assignment are obtained and compared according to the operation priority information of the previous assignment priority information storage means, and the priority of the previous assignment is higher than the previous assignment. The operator-specific process for which the high-level operator specifies the operator-specific processing of the previous new operator. Thereby, since an important job with a higher priority can be selected, a more suitable operator can be selected. Therefore, the operator can be instructed appropriately and appropriately, so that the assignment of the job can be optimized and the operation can be made more efficient. In order to solve the above problem, according to another aspect of the present invention, a worker management method may be provided. The worker management method belongs to a worker management method for managing workers who perform work in a work field divided into a plurality of work areas according to the work content. It is characterized in that: according to the output of the operator detection means provided in each work area of the preamble, the specific position of the work area where the preamble worker is located, and the specific work of the predecessor work area; 23 · (20) ( 20) 200411512 The area and the work performed by each work area give the work-specific information to memorize the work-specific information. The work-specific information in the means of memorizing the work is the work area of the operator specified by the predecessor's position specific project. , Specifying the current operation specific project of the current operation of the operator; and every time a predetermined time is reached, the current operation of the specific operation of the specific project is previously recorded, and the current operation is recorded as the operation of the entire operator. Information recording project; and memory project based on operation information The memorized operation information generates an operation report generation process including an operation report containing the operation content of the desired operator at each predetermined time. According to the operator management method of the present invention, an operation report such as an operation daily report and an operation monthly report can be easily generated. And because the operator's work can be automatically detected to generate work information as the basis of the work report, it can save the operator from entering procedures from a portable information terminal and so on, and improve work efficiency. . In addition, since it is not necessary to entrust the operator to report by himself, an operation report can be frequently and accurately generated. Also, it can also be a pre-recorded job information memory project. For each job, the unit price of the job at the time of each job is also memorized, and the pre-paid job report generation project is to generate the unit price of the job containing the job and the total amount of the unit price of the job. Job report. In addition, the preamble operation site may be a semiconductor manufacturing plant. In this case, the preamble operator may be a worker dispatched by a company different from the company that owns the predecessor operation site, that is, the semiconductor manufacturing plant. With this, for example, when requesting payment from the dispatched company for the work performed by the dispatch operator, the operation unit price and the total amount of each operation can also be printed in the operation report, or it can be requested based on the total amount. This paragraph is in accordance with the cost of -24-(21) 200411512 operation content. In addition, it can also be the operator detection method in the operator management system and operator method described above. It is set to receive the electromagnetic waves from the transmitter. The receiver is set to send electromagnetic waves of different frequencies to each operator. ; The specific means is to find the pre-operator detection means that receives the electromagnetic waves that are regarded as the detection rate of the work area, and specify the work area where the segment is set to be stored by the operator, so that specific work can be easily detected. Where the operator is located, the operator's current business can be easily detected by the information of the operation area. In addition, it can also be the operator detection method in the operator management system and the author's method described above. It is a receiver that is set to hold the electromagnetic waves from the transmitter. Identifying the operator ’s magnetic wave; The specific means of pre-position operator position is the identification information transmitted by the means, and the operation area set by the pre-position operator detection means and the detection means is set as The work area. In this way, it is also possible to easily detect a specific operation area, and it is easy to detect an ongoing operation from the information of the operation area. It is also possible for the operator in the above-mentioned operator management system and the author's method to set a transmitter for receiving each operator's recorder from a device installed on the former operator's device, and the operator who sets the position of the operator of the previous operator should be The operator detects the working area where the hand is. Each operation area, and in the current operator ’s device and the receiver ’s transmitter, the identification information of the pre-recorded operator detection area is set to identify the detection objects, and -25- (22) (22) 200411512 The operation information acquisition means of the operator to obtain the operation information of the operator; which is the specific means of pre-existing current operation. In addition to obtaining the work area information specified in the work area where the operator is located, the work information transmitted from the work device in which the operator is currently working is also obtained from the work information acquisition means in the previous work. (Also known as "device information"), and based on these area information and operation information to identify the current operation of the operator. In this way, the operation content of the operator can be detected to some extent (such as operation classification of obstacle correspondence processing, general operation operations, etc.), and more detailed operations can be detected from the operation information. Contents (for example, breakdown processing for electrical systems, breakdown processing for mechanical systems) [Embodiment] The preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. In this specification and the drawings, the constituent elements having substantially the same functions are denoted by the same reference numerals, and repeated descriptions thereof are omitted. (First Embodiment) First, a first embodiment of a worker management system when the present invention is applied to a semiconductor manufacturing plant will be described with reference to the drawings. Fig. 1 is a block diagram of an example of the overall structure of a worker management system in a semiconductor manufacturing plant. 100 is a semiconductor manufacturing plant, and is an example showing a layout within the plant 100. 2 0 0 is an operator management device. The semiconductor manufacturing plant 100 is shown in Figure 1. For example, it is mainly divided into: • 26-(23) (23) 200411512 clean room area 110 in the factory and area 12 outside the clean room (hereinafter referred to as "clean room" Outdoor area "). Furthermore, the clean room area 1 10 is divided into, for example, the device room area 1 2 and the area outside the device room 1 1 4 (hereinafter referred to as "out-of-device area"). In the device room area 1 12, semiconductor manufacturing devices such as a process device and a measurement device 1 40 are arranged. The process equipment includes, for example, an engraving device, a CVD (Chemical Vapor Deposition) device, a photoresist coating machine, a cleaning device, a CMP (Chemical Mechanical Polishing) device, and a pvD (Physical Vapor Deposition) : Physical vapor growth method) device, exposure device, ion implanter, etc. Examples of the measurement device include a film thickness device, an ODP (Optical Digital Profiler), and FTIR. In addition, different types of semiconductor manufacturing devices 140 may be provided in each of the device room areas 112 in the housing area 112, or a plurality of types of semiconductor manufacturing devices 140 may be arranged in the same device room area 112. The above-mentioned device room area 1 12 is provided with an indoor control unit for each semiconductor manufacturing device 1 40 etc. in the indoor control device room area i 丨 2 when performing operations such as maintenance or periodic inspection. The indoor control section 6 controls the semiconductor manufacturing apparatus 14 in the apparatus room. An outdoor control unit 18 for controlling the semiconductor manufacturing apparatus i 40 and the like from the outside of the device room may also be provided. The control unit of the semiconductor manufacturing apparatus 140 may also be provided in the semiconductor manufacturing apparatus 140 itself, and may be controlled from the control unit. Semiconductor manufacturing equipment. The above-mentioned indoor control unit 1 1 6, outdoor control unit 1 1 8, and other control units are constituted by, for example, an operation panel. Each of these indoor control units 1 1 6 and U 8 and half -27- (24) (24) 200411512 conductor manufacturing device 140 is electrically connected to the input / output unit 2 08 of the operator management device 200 through a communication line or the like. Can send and receive device information (device-specific operation information) such as access information and device status information. When each of the control sections described above controls the semiconductor manufacturing apparatus, the operator's ID and password are input from the control section in accordance with the operation, and then accessed. This allows you to specify which operator is controlling. The outdoor area U 4 of the device is an area where the outdoor control unit 1 1 8 is installed. In addition, the device outdoor area 1 1 4 is not necessarily limited to the installation area of the outdoor control unit 1 1 8, and may include a passage formed between the device room area 1 12. The clean outdoor area 1 2 0 indicates the area inside the factory other than the clean room. For example, the central monitoring room area 1 22, the clean room area 1 24, the storage area 1 126, the office area 1 2 8 and the rest room area 1 2 9 (may also include toilets). Device room area 112, device outdoor area 114 in clean room area 110 above, central monitoring room area 122 in clean room area 120, clean room area 1 2 4, storage area 1 2 6, office area 1 28. In each of the rest room areas 1 to 29, an operator detection sensor 130 is provided as an operator detection means. The operator detection sensor 130 is electrically connected to the input / output section 208 of the operator management device 2000 by a communication cable, and can send and receive sensing information from the operator detection sensor 130. The above-mentioned operator detection sensor 130 is constituted by, for example, a sensor that receives electromagnetic waves (or radio waves) of a transmitter carried by each operator. The operator's detection sensor 130 is, for example, a ceiling or wall installed in each area -28- (25) (25) 200411512 wall. Fig. 2 is an example in which a receiver 1 34, which is an example of the operator detection sensor 130, is disposed in the device room area 1 1 2 of the non-chamber room area i i 0. The receiver 1 3 4 is installed on the ceiling of the device room 1 2 2 divided by the device room area 1 1 2. On the other hand, the operator 1 3 6 always carries the transmitter] 3 8 ′ and simultaneously performs operations such as the semiconductor manufacturing apparatus 14 0. Operator 136 — Once the semiconductor manufacturing device 1 40 has to be maintained, for example, when entering the device room 1 2 2, the ceiling-mounted receiver 1 3 4 will receive the transmitter 1 carried by the operator. 3 8 electromagnetic waves coming. By this, the event that the operator 136 was in the device room area 112 can be detected. At this time, the above-mentioned transmitter 1 3 8 can also be used to send electromagnetic waves of different frequencies (radio frequencies) for different operators. Then, the frequency information associated with the frequency given to each operator and each operator is stored in the frequency information database as an example of the frequency information storage means. The frequency information database may also be included in various databases 2 10 as shown in FIG. 3. According to the frequency information of the frequency information database, the operator who is located in the operation area set by the operator detection sensor 130 can be received by receiving the frequency of the electromagnetic wave from the operator detection sensor 130. specific. The operator management device 2 00 is a sensor for detecting the operator frequency electromagnetic wave of the operator who has received the object frequency detected as the object of the detection from the sensor information of the operator detection sensor 130 1 3 0, and the operator detection sensor 1 3 0 is set to a specific work area as the work area in which the worker is located. In addition, the above-mentioned transmitter 1 3 8 can also encode the ID data identifying the identification information of each operator and convert it into electromagnetic waves. The receiver -29- (26) 200411512 1 3 4 series will receive The electromagnetic wave of the self-transmitting machine 1 3 8 is demodulated and decoded to obtain ID data, and it is sent to the operator as 2000 as sensor information. This ID is recorded in the operator skill library 2 50 as shown in FIG. 8. According to the ID information of the operator's skill information database (2 50 0), by receiving additional information from the operator detection sensor 1 3 0), the setting of the operator detection sensor 1 3 0 can be set. The operator of the domain is specified. In this way, the operator management device 2 0 0 finds the operator ID (identification information) as the detection object of the operation area from the sensor information of each operator detection sensor 1 3 0. The operator detection sensor 1 3 0, and the area of the operator detection sensor 1 3 0 is specified as the working area where the operator is located. In addition, 1 3 8 may be a mobile phone, a portable information terminal described later, and the like, and the receiver 1 3 4 and the transmitter 1 3 8 may both be transceivers. Specific examples will be described later. In addition, the operator ID (identification information) can be stored in advance in the memory means (not shown) of the transmitter 1 3 8 held by the user, or it can be stored in the memory of the transmitter 1 3 8 through the barcoded ID. In terms of means, for example, a bar code reading device such as an infrared reading means may be installed on a transmitter 1 3 8 of a mobile phone or a portable information terminal, and the barcoded ID may be read by the bar code reading means. After the memory device 1 3 8 memory means. (Operator Management Device) The operator management device 200, for example, manages the installation information (identification ID (identification operation area) from the above-mentioned operator detection and encoding, and can be composed of a received job by setting up a transmitter. Can be read. The means of taking is in the sending sensor (27) 200411512

1 3 0 Input data, and detect each operator's area based on the data from the operator detection sensor 1 3 0. The operator management device 200, as shown in FIG. 3, includes a control unit 202 including a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), and the like. Display section 204 for screens and the like displaying various information, input section 206 for inputting various data, input / output section 2 for inputting data from operator detection sensor 1 3 0, and various database 2 10, and other storage methods such as hard disk devices that store other programs not shown. The memory of the above-mentioned control unit 202 stores programs or data for CPU access, for example, programs stored in a recording medium such as the above-mentioned hard disk device can be read out and stored therein as required. The above-mentioned various databases 2 1 0, for example, as shown in FIG. 4, include a job-specific information database 220, a job priority information database 2 3 0, a job skill information database 240, a worker skill information database 2 50, and obstacles. Information (abnormal information) database 260, etc.

(Operation Specific Information Database) As shown in FIG. 5, the operation specific information database 220 stores the operation specific information that is associated with the area information 222, the device information (operation information for the device) 224, and the operation content 226. Information. The job-specific information is used, for example, when a job that a particular operator is performing is required. Specifically, with the operation specific information such as the area information of the operator detected by the operator detection sensor 130 and the access information of the semiconductor manufacturing device 140, it is specified that the operator is currently in progress Work (-31-(28) (28) 200411512 work now). Area information 2 2 2 is the information of each area of the factory as shown in Figure 1. In this embodiment, the device room area Π 2, the device outdoor area 114, and the clean room area .120 in the clean room area Π 〇 are the central monitoring room area 122, the clean room area 124, and the storage area 126 in the clean room area 120. Office area 1 2 8 and rest room area 1 2 9 are regarded as each area. The device information 2 2 4 is, for example, the access information sent to the control unit of the indoor control unit 1 1 6 and the outdoor control unit 1 1 8 of the semiconductor manufacturing device 1 0 0 described above, or the semiconductor manufacturing device when an abnormality occurs. 1 40 alarm sounds, warning lights, and other abnormal notification information, the semiconductor manufacturing device 1 40 alarm sounds' warning lights and other maintenance notification information that occurs when maintenance is required. The access information sent to the control room is, for example, whether there is access information for each operation such as maintenance of the semiconductor manufacturing apparatus 140. The work content 2 2 6 is the type of work performed in each area. Here, an example of determining the work content 2 2 6 in each area will be described with reference to FIG. 5. First, the operations in the equipment room area 112 of the clean room area 110 are, for example, obstacle corresponding operations (obstacle corresponding maintenance) and periodic operations. The obstacle corresponding operation in the operation contents of the device room area 1 12 above is the operation performed when the obstacle occurs in the semiconductor manufacturing device 14 in the device room area 112 to remove the obstacle. This obstacle correspondence operation is further divided into an electrical system obstacle response operation when the electrical system of the device is abnormal, a mechanical system obstacle response operation when the device mechanical system is abnormal, and a process system obstacle response operation when the manufacturing process is abnormal such as etching. The obstacle of the semiconductor manufacturing device i 4 () is reported by an alarm sound or the like by means of the notification means of the device, or -32 · (29) (29) 200411512 makes the warning light blink by means of light, etc. Know the existence or type of obstacle. Therefore, when the operator is judged to be located in the equipment room area 1 12 and the obstacle-specific operation is known from the operation-specific information, it can be determined that the operator is performing the obstacle-response operation. In this case, you can determine more detailed obstacle-response operations based on the types of obstacles (such as electrical system, mechanical system, and process system) that are specific to the operation. In addition, when there is a notification (alarm) of the semiconductor manufacturing apparatus 140, the general operator will access the semiconductor manufacturing apparatus 140 from the indoor control section 1 16 and the like to switch to the maintenance mode, and perform inspection operations, etc. Therefore, the operator's access information can also be used to determine the obstacle corresponding operation. The above-mentioned periodic operations in the operation contents of the device room area 1 12 include, for example, operations such as replacement of parts or wet cleaning of the semiconductor manufacturing device 140. The wet rinsing is an operation in which the operator opens the processing chamber of the semiconductor manufacturing apparatus 1 40 in the apparatus room region 112 and cleans it with a chemical solution. Although the wet cleaning is taken as an example for the operation of the equipment room area 1 12 here, it is not necessarily limited to this. In addition, when parts are replaced or wet-cleaned, maintenance notifications such as notifications (alarms) or flashing lights, or switching to maintenance mode from the indoor control unit 1 1 6 etc. are required to access the semiconductor manufacturing equipment 1 4 0. Therefore, when the operator is judged to be located in the equipment room area 1 12, if the operator is performing regular operations based on the job-specific information such as the access information or maintenance report information. Next, the operations of the outdoor area 1 1 4 of the device in the clean room area 1 10 include normal operation, regular operation, and other operations. Normal operation -33- (30) (30) 200411512 operations, such as inputting process conditions for manufacturing instructions for semiconductor devices from the outdoor control unit 1 1 8 or a carrier (FOUP, (Front Opening Unified Pod)) setting, moving, etc. In addition, the operation of setting and moving the carrier (F 0 UP) is performed in the device room area 1 12, but since the semiconductor device production instruction is subsequently issued from the outdoor control unit 118, it is included in the device outdoor area Π 4 in operation. However, when these operations are performed in the device room area 1 12, the operations in the device room area 1 12 may also be considered. In this way, the operation is usually operated because it is usually from the outdoor control department! i 8 accesses the semiconductor manufacturing device 140, so when the operator is judged to be located in the device room area 1 12, if the access information is used, it can be determined that the operator is performing normal operation. The periodic operation in the outdoor area 1 1 4 of the device is, for example, dry cleaning or drying (s e a s n n n g) of the semiconductor manufacturing device 14. The dry cleaning is performed by accessing the semiconductor manufacturing apparatus 140 'from the outdoor control unit [i8], etc., and entering necessary information to clean the processing chamber of the semiconductor manufacturing apparatus 140. Here, although dry washing or drying is taken as an example of the operation in the outdoor area 1 1 4 of the device, it is not necessarily limited to this. The outdoor operation of other devices in the device outdoor area 114 (including other operations in the operation classification described later in FIG. 6) is the monitoring of the semiconductor manufacturing device 1 40 or the sweeping of the surroundings. When the operator is judged to be located in the outdoor area 1 1 4 and there is no operation-specific information such as access information or maintenance information, it can be determined that other operations are in progress. If you want to make more detailed judgments about these tasks, you can also input tasks such as monitoring and sweeping from the operator's carry-34- (31) (31) 200411512 type information terminal. It is also possible to use these input work_content information as job-specific information to judge a job. Next, operations in the clean outdoor area 120 include operations in the central inspection room area 122, the clean room area 124, the storage area 126, and the office area 128, for example. These jobs are all included in other jobs in the job classification described later in FIG. 6. In addition, the use of rest or toilets in the rest room area 1 2 9 can also be considered. The central monitoring room area 1 2 2 above, clean room area 124, storage area 126, and office area 128 operations, such as production preparation operations (also engineering management operations). Production preparation operations, for example, in the central inspection room area 1 22, such as the monitoring of the entire production process of semiconductor devices or changes in production schedules (production engineering plans), etc., and the management of goods in the storage area 1 2 6 , Ordering other sundries in the office area i 2 8. In the clean room area 1 2 4, obstacles such as malfunctions of air purifiers in the clean room, etc., or air operations are performed. As described above, the work in progress can be judged according to which area the operator is in. In addition, although the above-mentioned example explained the operation in the area inside the factory, even outside the factory, the out-of-factory operation such as the loading operation of the medicine tank containing the medicines used for washing and the like is performed. Therefore, when an operator is detected in an area outside the factory, it can be judged that the operator is working outside the factory. A method for determining whether an operator is located outside the factory. For example, when the operator detection sensor 1 3 0 installed in the factory cannot detect the operator's location, if the operator is present, the operator is judged. Located outside the factory. -35- (32) 200411512 In this way, in this embodiment, the area information specifying the operator by using the operation area information 2 2 2 and the device information 2 2 4 222 is the operation. The current work being performed by the user can be determined by the device information 224 such as access information and so on, and the current work can also be specified only as the work specific resource 2 2 2. For example, the area in the factory can be specified in a certain degree of detail by the area information 2 22, or the current operation can be specified only by the access information 224 as the operation specific information. (Operation Priority Database) The operation priority information database 2 3 0 stores the job classification and the operation priority to which the operation classification belongs (excellent operation priority information. For example, as shown in FIG. 6, the highest priority starts from the lowest priority. Priority 2 of degree 5 is the job classification of priority 1 with the highest job classification priority 1. This emergency operation includes, for example, the response to a gas leak in response to a gas leak in the event of a fire, etc. The specificity of these operations is judged, for example, by a disaster sensor installed in each device's fire alarm, etc. The operation classification of priority 2 corresponds to the obstacle corresponding operation operation of the obstacle provided in the device semiconductor manufacturing apparatus 140. The area containing the specific information of the clean room area 1 1 0 shown in Figure 5 is now operating. This can be roughly judged in more detail. However, the area information is not subdivided, and it is only operating now. The information of the device is roughly prioritized.) The priority of the information degree is 1 23 4 ° It belongs to the emergency operation fire extinguishing operation and the root leakage corresponds to the operating room area 1 1 2 The field 112. Correspondence to the obstacle in the device room area -36- (33) (33) 00411512 1 1 2 This obstacle corresponding operation is maintenance corresponding to the above-mentioned obstacles such as electrical obstacles, mechanical obstacles, and process obstacles. In addition, the obstacle-related operations also include electrical obstacles and mechanical obstacles such as air and static machines in the clean room area 1 2 4. These operations impede the production and quality of semiconductor devices and lead to inefficiency. Therefore, the corresponding work of obstacles is the highest priority in the non-emergency work. A job classification with a priority of 3 is a normal operation job. This normal operation is the normal operation in the outdoor area 1 1 4 of the apparatus including the clean room area 1 10 shown in FIG. 5. This normal operation is performed by, for example, inputting process conditions and the like of the production instruction of the semiconductor device described above, or setting up and moving a carrier (FOUP) containing a semiconductor wafer. In general, as long as there are no obstacles, normal operations are given priority. This is because the operation is generally performed to produce a semiconductor device. The job classification of priority 4 is a regular job. This periodic operation includes both the periodic operation in the equipment room area 112 of the clean room area 110 shown in FIG. 5 and the periodic operation in the equipment outdoor area 1 1 4. The regular operations include maintenance such as wet cleaning, dry cleaning, and replacement of parts as described above. Even regular operations of air purifiers in clean room area 1 24 are included. Since these operations are in principle impossible until the production of a semiconductor device is suspended, in this embodiment, the priority is set to be lower than that of a normal operation operation. However, it is not necessarily limited to this, and the operation may be performed when it is deemed most appropriate not to be limited to priorities, for example, to judge the whole or the previous production schedule in the production process of the semiconductor device. In this case, at what point in time -37- (34) (34) 200411512 can be cut into regular operations, it can also be determined by an operator with engineering management skills to judge the overall or before and after production schedule, and the above will be prioritized according to the time point Make appropriate changes. The job classification of priority 5 belongs to other jobs. The so-called other operations here include, in addition to the other outdoor operations in the device outdoor area 1 1 4 of the clean room area 11 0 shown in FIG. 5, the operations of the central monitoring room area 122 in the clean outdoor area 2, Work in the storage area 126, work in the office area 128, work in the rest room area 129, and work in the area outside the factory. Therefore, "other operations" here include, for example, ordering of parts, adjustment of production schedules of semiconductor devices, monitoring and cleaning of semiconductor manufacturing devices 140, and the like. In addition, although the work priority in this embodiment is divided into five, it is not necessarily limited to this, and may be six or more or four or less. The way of distinguishing other tasks is not limited to this. (Working skill information database) The working skill information database 2 40 is for memorizing the skill information (job skill information) required by the writing industry itself, and the skill information (operator skill information resource) of the memorizing operators described later. Of the operator skill information database 2 5 0 is different. The work skill information database 2 40, specifically, as shown in FIG. 7, memorizes work skill information associated with work 242 and roughly classified worker classification 244. 5 jobs 242 'can be subdivided into job categories 246 and job contents 248 included in the job categories 246. The job classification 246 here corresponds to • 38- (35) 200411512 In each of the jobs shown in Figure 6, the job is performed first, and the job is assigned to the operator. The mechanical operation of the corresponding job is performed by the manufacturer. Having the corresponding expertise does not mean that there is an ability to be instructed. It is also possible for ordinary conductors to operate as conductors. Ordinary operators usually have ordinary operations. Do this on a regular basis, as described above, by the operator, as shown in the job classification 234. Each of the job categories 246 belonging to this job category 246 is assigned a related best operator category 244. The emergency response to the fire extinguishing operation, etc. 244 is irrelevant > It is best if all people are involved. It is best performed by engineers. Furthermore, it is best that the corresponding electrical system obstacle handling operations in the electrical system engineering are performed by the mechanical department engineer and the process system obstacle engineer respectively. This is because each operator in the teacher's class has his / her special field, so it is best for the engineer who has passed the examination to do the work. In other words, it is necessary to have a dedicated engineer to do it, but there should be an engineer with obstacles, even if the operator does not perform the job. The operation is to perform operations such as the above-mentioned control unit 1 16 in order to bring the semiconductor manufacturing apparatus 140 into production, and it is preferably performed by an operator. In addition, this does not necessarily have to be performed by the operator. For example, since it has the skills as an operator, it can also be performed by an engineer, such as a maintenance operator such as cleaning or replacement of parts. In addition, it is not necessary for the regular operator to perform the regular operation. For example, because workers often have the skills of being late-stage operators, or their work, they are teachers of obstacles and obstacles, and they should be treated as concessions. This is if the project is done in half, which means that the project is carried out. -39- (36) 00411512 Regular operations can be performed by engineers. Other operations are, for example, the production schedule of semiconductor devices. Therefore, it is best to perform other tasks by those who can handle the tasks. (Operator skill information database) The operator skill information database 2 50 is shown in Fig. 8 about the operator skill information possessed by the operator. The skills of the operator are, for example, items such as number 2 5 1, name 2 5 2, ID 2 5 3, 2 5 5, operator classification 2 5 6, assignment 2 5 7, and the like. In addition, other examples of these items may also include shifts, operation schedules of semiconductor manufacturing equipment, and the like. The unit price at the time of performing the operation is memorized in each operation classification. The price system can be used, for example, in a case where the cost is determined depending on the operation when an operator is dispatched by another company. The organization number 2 5 1 is the serial number of the operator, and the name 2 5 2 is used to identify the operator. The above-mentioned department 2 5 5 memorizes the name of the factory and company to which the operator belongs. For example, when the operator is an operator of a factory equipped with the system of the present invention, the operator will be remembered within 25.5. In addition, when an operator belonging to another factory is dispatched to a factory having the operator management system in question, the name of the other factory to which the factory belongs belongs to 25. · Even if it is divided into the sales of semi-conductive 140 companies (selling companies) and other operations such as purchasing semiconductor manufacturing, as described later, the information is memorized. It is a password of 2 5 4 items and the time of the memorizer can also be used in this operation. The name of a certain factory and ID253 factory, and the operator. The name of the factory. The present invention memorizes the body manufacturing equipment 140 -40- (37) 200411512. The customer (purchasing company) of the company, the employees of the sales company When dispatched to the factory where the company was purchased as an operator, the name of the sales company was remembered in the affiliate 2 5 5.

In the worker classification 2 5 6, the worker classification shown in FIG. 7 for the worker is memorized. "Operator" is memorized when the operator has the skills of an operator, and "regular operator" is memorized when the operator is the ability to perform regular operations. And if the operator is an engineer, it is better to memorize it as "mechanical engineer" and to memorize it to its special field in detail. Assignment 2 5 7 mentioned above, the assignment that memorizes the skills of the operator. The assignment 2 5 7 described above corresponds to the assignment 2 4 2 shown in FIG. 7. Specifically, homework 2 5 7 is divided into "work class" and "work content". Whether or not the operator can perform the operation is represented by, for example, 0, △, and X. 〇 indicates that the operator can perform the operation, △ indicates that the operator has difficulty but cannot perform the operation, and X indicates that the operator cannot perform the operation. In addition, in operation 242, not only the operator The specialized work itself can also remember the work that can actually be performed. For example, if the operator is classified as a mechanical engineer, although the corresponding mechanical system obstacle is 0, but as an engineer can perform normal operations, the normal operation is also ◦. In addition, even if the operator is an electrical engineer, it may be possible to perform a non-exclusive mechanical obstacle response operation. In this case, not only the corresponding operation of the electrical system obstacle is 0, but also the corresponding operation of the mechanical system obstacle may be zero. -41-(38) 200411512 (obstacle information database) _obstruction information (abnormal information) database 2 60, which is the fault code information database 2 6 2 represented by the error code of the semiconductor manufacturing device 1 40, and the memory The inspection result information database 2 64 containing the obstacle information represented by the semiconductor device is shown in FIG. 9. The error code information database 262 is shown in FIG. 9. Memorize the error code information associated with the skill operation. For example $ [AABB01 ”, taking the semiconductor manufacturing device 140 as an example, the plasma generated in the processing chamber is used to etch and the high-frequency reflected wave in the processing chamber exceeds the upper limit. The error target part is set in the plasma etching apparatus. High-frequency generation (Macher) and so on. Therefore, workers who have the ability to perform this error are classified as electrical engineers. In contrast to this, CCDD0 1 ”means that the cooling water flow rate of the pump is reduced. The error target is the pump unit. Therefore, operators with the ability to handle the corresponding tasks are classified into the mechanical department inspection result information database 2 64, as shown in Fig. 10. The inspection when an abnormality occurs in a semiconductor manufacturing device 140 such as a plasma etching device, etc. As a result, the results are classified with operators who have abnormal skills represented by the results. For example, the semiconductor manufacturing apparatus 1 40 etc. undergo various inspections through an inspection apparatus. These inspections have: the results of inspections that memorize errors that hinder information, and assign the classification of semiconductors and the error codes to them.] The error code "is an error in applying a high-frequency plasma etching device. This time, the wrong device or integrator ( Corresponding to the operation technique, the error code is "Error. It is enough for the engineer to perform the error at this time. As shown, the semiconductor manufactured by the memory can be related to the inspection result of the wafer produced -42- (39) 200411512 Obstacles are mainly handled by process engineers. If such an obstacle information database 260 is used, the best operator classification for the corresponding obstacles can be determined according to the type of obstacle. (Operator management Device processing)

Next, a specific example of a new job allocation process performed by the operator management device 200 will be described with reference to FIGS. 11 to 14. The processing in this embodiment can be implemented by a program recorded on a recording medium such as a typical hard disk device.

The new job allocation process in this embodiment is based on the operator's current job to determine whether to continue the current job or to perform a new job (judgment means) based on the current job of the operator when a new job occurs, and according to the preface As a result of the judgment by the judgment means, a job execution instruction (instruction means) is issued to the worker. The content of new work and the skills of the operator, the priority of the current work and the new work will be considered successively, and the best operator will be selected and given instructions. The new job allocation process, specifically, as shown in FIG. 11, first determines whether a new job has occurred in step S 1 10. For example, in addition to the error information in the semiconductor manufacturing apparatus 1 40, there is also a report (alarm) information to determine and specify a new operation. For example, when an obstacle occurs in the semiconductor manufacturing apparatus 140, the operator management apparatus 200 receives an alarm from the semiconductor manufacturing apparatus 140 and simultaneously receives error information including an error code. If the error code information database 262 'in the obstacle information database 260 is used, then according to the error code of the above error information -43- (40) 200411512, it is possible to specify which obstacle the new operation is for the electrical system obstacle corresponding operation, Corresponding to mechanical obstacles). If the inspection result from the semiconductor manufacturing equipment [40] is received and the inspection result is abnormal ', if the obstacle information database 260 inspection result information database 2 6 4 is used, it may be specified as a process obstacle countermeasure, and Further details of this obstacle can also be obtained. Also, when the batch (10t) of the semiconductor manufacturing apparatus 140 is ended, a notification of the end of the batch is issued. This makes it possible to determine whether the new operation is F 0 U P or the like, and to perform regular operations such as preparation operations for the next batch. When a notification is received from the semiconductor manufacturing apparatus 14.0, a new job can be specified as a regular job. Next, in step S 120, an operation capable of performing the new operation is extracted (an example of an operator extraction means). For example, the operator skill database 240 is searched for the operator classification most suitable for the new operation, and the operator skill information database 250 extracts the work having the operator classification. In addition, even if the operator is not the operator who is most suitable for the classification of the new operation, the operator who has 0 and △ in the operation field of the operator skill information database 250 can perform the new operation. Therefore, these are also the targets of extraction. In addition, the column 257 of the operation of the operator's skill information database 270 is, for example, an electrical engineer must be in the corresponding operation of the electrical system obstacle, so that the special operation classified by the operator must be 0. In addition, if the operator is not specialized, it may be marked as 0, and even if it is not professional, it is not impossible to be performed and may be marked with △. Therefore, when the job is set, when the job is due, when the job is moved, the net operator ’s information is based on the operator ’s job 257. Even if the job is done, no -44- (41) (41) 200411512 is classified according to the operator, and It is based on the operator ’s skill information database 2 ’s 5 ’s 2’7 ’s in the field. As long as the operators are 0 and △, they can be extracted. Next, in step S 1 3 0, priority is given to the operators (priority ordering means) ). Priority is given from the best operator according to the job skills and the skills of the operator. For example, the priority of the operator who hits 0 in the job field of the operator skill information database 2 50 is high. This is because The operation is to assign priority to a specific operator. In addition, the details of the process of giving priority to the operator will be described later. Next, in step S 1 40, the operator who performs the operation is determined. The operator's decision, For example, starting from a worker with a high priority, it is performed according to the priority of the worker's current work and new work. In addition, detailed processing for determining the worker will be described later. In step S 1 50, an instruction (instruction means) for performing a new operation is issued to the operator determined in step S 1 40. At this time, for example, it can also be issued by a portable information terminal held by the operator Instruction 0 to perform a new job. Then, in step S 1 60, it is determined whether the worker has a current job. Because the worker in step S 1 40 determines that the current job is detected during processing (step S 3 20 shown in FIG. 13). ), So use this result to make a judgment. In this way, when the operator instructing a new job has a current job, an alternative operator must be selected and issued an instruction regarding the current job. If it is judged in step S 1 60 If the operator has a current job, the current job is set as a new job in step S 1 70 and the process returns to step S 1 2 0 and a substitute for the job is determined. If it is determined in step S 1 60 that the operator is not present At the time of the assignment, the process ends at -45- (42) 200411512. Here, the steps described above are described with the subroutine of Fig. 12! Priority assignment processing of the operator (an example of priority assignment by the operator. Step S2 I 0 Medium was identified as The operator's skill t of the assignment: Enter the search key 'in the column 257 of the assignment in the database 250 to make the priority of such an operator higher. In step S220, the operator of the new assignment is classified as second The operators whose operator classification is consistent with the operator classification are ranked highest. In this way, the operations of the operator's skill information database 2 5 0 and the operators consistent with the operator classification of the new operation will be ranked. For example If the job with the new job's work skills is classified as an electrical engineer, the extracted operator is an engineer, and the priority of the electrical engineer is still high. In S 1 40, when determining the operator, it is possible to determine from the most appropriate task whether it is suitable for the new task. With this, the most professional operators can be found early. Next, an example of the determination process in step S 1 will be described with reference to a subroutine of FIG. 13. First, as shown in step S 3 10], the priority order of the operator obtained in S 1 40 is assumed to be k = 1, and the higher one performs the operator decision processing in order. Next, at the step, an example of a specific means by which the worker is currently working (current work) is detected. The detection of the operator's current operation is performed in which area the operator is located. The authors in the 5 1 3 0) job are based on the author as the first order. Then in the search key, the operator with the priority order field of 0% is the operator with the highest priority, so that the mechanics are included, and the stepper sequentially judges the steps suitable for the new work in 50 ^ and the priority order is S. 3 2 0 The detection (now the operation is based on, for example, -46- (43) (43) 200411512) The operation detection processing of the operator is performed as a subroutine shown in Figure 14 (now the specific method of operation Example). This can detect the work to a certain degree (job classification). Specifically, it is detected that the worker is located in a dust-free environment based on the sensor information from the operator detection sensor 130. Device in the room area 1 1 0 Which of the areas described above is the room area 1 1 2 etc. For example, the setting area of the operator detection sensor 1 3 0 that detects the frequency of the operator is regarded as the operator Area. If the frequency of the operator is detected by the operator detection sensor 1 30 in the device room area 112 of the clean room area, it is determined that the operator is located in the device room area 1 1 2 ; If it is set by the operator in the outdoor area of the device 1 1 4 Detected by the sensor 130, it is determined that the operator is located at 114 ° in the outdoor area of the device. Next, in step S42 0, device information such as access information to the semiconductor manufacturing device 140 is detected. By this, more detailed information can be obtained. The operation is detected by the device. The device information accessed from the semiconductor manufacturing device 1 40 and the control unit 1 6 and 1 18 is received by the operator management device 200. The ID from the access information is used. The operator and the password are used to identify the operator and determine what the operator is doing. In addition, device information such as notification (alarm) information of the semiconductor manufacturing device 140 is also received by the operator management device 200. Information from this report The operation can also be detected. Then in step S4 30, the current operation of the operator is specified by the above-mentioned area information and the above-mentioned device information according to the operation-specific information of the operation-specific information database 220 shown in FIG. When it is determined that the area information is the device room area 112 in the clean room area 110 of the operator, and the information is reported by -47- (44) (44) 200411512, and the access is blocked, it will be It is determined that the obstacle corresponding operation is being performed in the operation content of the operation. Next, it is determined whether the operator has a current operation in step S 3 30 shown in FIG. 13. If there is a specific operation in step S 3 2 0, it is determined that there is an operation. If there is no current job in step S 3 2 0, it is judged that there is no current job. When it is judged in step S 3 3 0 that there is no current job, step S 4 0 0 will determine the worker to perform a new job. Operator (operator-specific hand

In contrast, if it is determined in step S 3 3 0 that there is a current job, step S 3 4 0 obtains the priority of the current job according to the job priority information of the job priority information database 2 3 0, and in step S Get the priority of the new job in 3 50. Next, it is determined in step S360 whether the priority (U1) of the current job is higher than or equal to the current priority (U2). In step S 3 50, if the priority of the current job is higher or the same as the current priority, the priority of step S 3 70 is increased (k = k + 1). Next, in step S380, it is determined whether or not processing has been performed for all jobs _ that have been given priority. For example, if the number of workers who have been given priority has been drawn as N, it is determined whether the priority has become k = N + l. When it is determined in step S3 8 0 that all users who have not been assigned priority are not being processed, for example, if it is determined that the priority order has not changed to k = N + 1, then return to step S 3 20 to the next priority order. The operator performs processing. If it is determined in the above step S 3 50 that the current priority of the worker is lower than the current priority, then in step S400, the worker is determined to perform a new job -48- (45) (45) 200411512 The operator of the job. The operator thus determined is given an instruction to perform a new operation by step S 1 50 shown in FIG. 11. In this way, the priority of the detected current job and the new job are compared, and if the priority of the new job is high, an instruction is given to the operator. With this, even if a new job occurs, it can be determined whether the operator is allowed to perform a new job according to the priority of the current job, so the higher priority job, that is, the more important job can be processed as soon as possible. In this way, the optimization of job allocation can be achieved. If it is determined in step S380 above that all the workers who have been given priority have been processed, for example, if the priority has been set to k = N + 1, then error processing is performed in step S390. The error processing may be, for example, displaying a message that "the operator should not be found" on the display section 204. In this case, the operator may also be notified of this message. According to the processing described above, the higher the priority processing, the greater the chances of finding the operator. Therefore, there is a high possibility that the processing where the operator cannot be found is the processing with a lower priority. Therefore, for example, the above processing can be performed again by shifting the time. In addition, in the error processing of 'Step S 390, you can also search for the operator classification of the operator who has the skills required for the operation from the operations where the operator cannot be found based on the operation skill information of the operation skill information database 240, and The above-mentioned homework, operator classification, time and date, etc. are memorized in a log file (10g file). For example, when the operation where the operator cannot be found is a corresponding operation of a mechanical obstacle, because the operator of the operator with the skills required for the operation can be classified and searched as a mechanical engineer, the mechanical obstacle is memorized in the log file- 49-(46) (46) 200411512 Obstructed corresponding operations, engineers in the mechanical department, etc. In this way, you can understand the possibility of a shortage of mechanical engineers in the plant. In this way, the above log file can be used as the judgment material for judging whether it is necessary to increase or decrease the operators in the factory. For example, when error processing frequently occurs, the number of workers is insufficient, and it can be estimated which worker is classified as insufficient. In addition, redundant operators can be reduced by reducing the number of operators to the extent that they will not cause erroneous processing. As a result, the number of operators classified by the number of operators can be arranged in the factory, so that not only the efficiency of each operator can be improved, but also the efficiency of the number of operators can be achieved. According to this processing, for example, if a new operation is a mechanical obstacle-related operation, and an operator who can perform the new operation is an electrical engineer A, a mechanical engineer B, and an operator C, The priority order of these operators is the order of the mechanical engineer B, the electrical engineer A, and the operator C, and they are processed in this order. At this time, if B does not have a current job, the operator of the new job is determined to be B. Even if there is a current operation in the B group, for example, when the current operation is a normal operation operation, if the work priority information database 230 shown in FIG. 6 is used, the mechanical system obstacle of the new operation of the B group corresponds to the operation. The priority is higher than the normal operation of the current operation, so at this time, it is also determined that B is the operator of the new operation. In this case, the normal operation of B's current operation will be re-processed as a new operation. At this time, the operator's priority will be given in the order of operator C, engineer A in electrical department, and engineer B in mechanical department -50- (47) (47) 200411512. At this time, if the operator C is not currently working, it is determined that C is the operator of the new work. And even when c's has a current job, 'this current job is, for example, a regular job, if the job priority information database 2 3 0 shown in FIG. 6 is not given, then the normal operation of the new job of C's has priority. The degree of priority is higher than the regular operation of the current operation, so C will be determined as the operator of the new operation at this time. In addition, when the current operation of C is performed in a normal operation in another area, according to the operation priority information database 2 3 0 shown in FIG. 6, the current operation and the new operation have no priority in terms of priority. Let C's continue with his current job. If the electrical engineer A does not work now, he decides that A is the new operator. (Second Embodiment) Next, a second embodiment of the operator management device when the present invention is applied to a semiconductor manufacturing plant will be described with reference to the drawings. In the "second embodiment", since the configurations shown in Figs. 1 to 10 are the same, detailed descriptions thereof are omitted. The same parts as those in the first embodiment are given the same reference numerals, and detailed descriptions thereof are omitted. Herein, FIG. 15 and FIG. 16 are used to describe other specific examples of the new job allocation process performed by the operator management device 200 in the second embodiment. In addition, the processing in this embodiment can be implemented by a program recorded on a recording medium such as a typical hard disk device. The new job allocation process in the second embodiment differs from the situation shown in Fig. 11 in the first embodiment, -51-(48) (48) 200411512, in that one job can be redistributed, and if there is a new job If it occurs, for all the jobs including the new job and the current jobs of all the operators, the priority of each job, such as job skills, operator skills, etc., will be taken into consideration, so that the most suitable operator can perform the job. Specifically, as shown in FIG. 15, it is first determined at step s 5 1 0 whether a new job has occurred. The step S 3 1 0 is the same as the step S 3 1 0 described above, for example, based on error information and notification information when a failure occurs in the semiconductor manufacturing device 14 0. Then, the current operation of all operators is detected in step S 520. The detection process of the operator's current operation is, for example, the child routine shown in FIG. 14 repeated for each operator until all the operators have completed. In step S 530, redistribution is performed on all jobs including new jobs and current jobs (job redistribution means). In this way, when a new job occurs, the current job of all the workers is detected, and the whole job including the new job and the current job is redistributed, so it is more appropriate to allocate the whole job containing the new job. Operator. In this way, the efficiency of operation redistribution can be achieved and the operation efficiency can be improved. The redistribution process of the job will be described in detail later. Next, in step S540, each worker is instructed to instruct the worker to perform the assigned work. For example, the portable information terminal held by the operator may be instructed to perform a new operation, for example. Next, it is determined in step S 5 50 whether there is an unassigned job remaining. If it is determined in step S 5 50 that there is an unassigned job remaining, in step s 5 60, the operator who can cope with the job is notified of "there is an unassigned job, please respond", and then the process ends. If it is determined in step S 5 50 that there is no unallocated job remaining -52- (49) (49) 200411512, the process is directly terminated. Here, an example of the job redistribution processing (job redistribution means) in step S 530 will be described with reference to the subroutine shown in FIG. 16. First, all operations including the new operation and the current operation in step S 6 10 are sorted in order from the highest priority according to the operation priority information of the operation priority information database 230. The priority of the work at this time is assumed to be W. Next, in step S620, starting from the priority order W = 1, starting with the job with the highest priority, the most suitable operator is determined by the following processing. Then, the workers who can perform the operation are extracted at step S630. Next, the operator is given priority in step S640. This priority ordering process is performed by, for example, a subroutine shown in Fig. 12. Next, the worker is determined in step S650. This operator decides the processing, for example, by a subroutine shown in FIG. 13. Next, in step S 660, the priority W of the job is increased (W = W +]), and it is determined in step S670 whether all the jobs that should be processed have been processed. In this way, in principle, all operations must be determined by the operator. However, there may be cases where operators cannot be found depending on the writing industry. At this time, the unassigned work is notified to the worker who may perform the work by steps S 5 50 and 5 60 shown in FIG. 15. According to this processing, for example, if a new job occurs, the current job of all the workers will be detected, and all jobs including the new job will be given a priority according to the job priority information database 230. For example, the priority order for all obstacles, and the normal operation tasks, the operator will be determined from the mechanical obstacle countermeasures. -53- (50) (50) 200411512 Regarding the mechanical obstacle corresponding to the highest priority operation, if it is extracted as the operator who performs the operation, the electrical engineer A, mechanical engineer B, and operator c , The priority order of these operators will be mechanical engineer B, electrical engineer A, and operator C, and they will be processed in this order. At this time, if B does not have the current operation, the operator of the corresponding operation of the mechanical obstacle corresponding operation determines the dimension; B's. Next, the operator who determines the normal operation is determined. At this time, the priority of the operator will be the operator C, the electrical engineer A, and the mechanical engineer B, and follow this order. At this time, if the operator c is not currently working, the operator of the new work is determined to be C. In this way, when a new job occurs, the redistribution of the entire job including the new job is performed, and at this time, the operator is determined by the order of the higher priority of the job, so the higher priority job, that is, the important job The sooner it can be processed. In addition, even in the case of redistributing a full job including a new job, the priority of the detected current job and the new job can be compared. If the priority of the new job is high, an instruction order is issued to the operator. It performs a new job. This allows important tasks with high priority to be selected early for the most suitable operator. (Third Embodiment) Next, a third embodiment of the operator management device when the present invention is applied to a semiconductor manufacturing plant will be described with reference to the drawings. In the third embodiment, since the configurations of FIGS. 1 to 10 are the same, detailed descriptions thereof are omitted. The same parts as those in the first embodiment are given the same reference numerals, and detailed descriptions thereof are omitted. In addition, the processing in this embodiment can be implemented by a program recorded in a recording medium such as a typical hard disk device, such as 54- (51) (51) 200411512. Herein, FIG. 16 is used to describe the generation process of the operation database, which is an example of the operation information storage means performed by the operator management device 200 in the third embodiment. The operation database is used to generate the operation report of each operator described later. Therefore, the homework database stores work performed by each operator and at a predetermined time. Therefore, the generation process of the operation database is performed every predetermined time according to the time recorded in the operation daily report. For example, if an operation daily report is generated every 1 hour, the generation processing of the above-mentioned operation database is executed every 1 hour; if an operation daily report is generated every 30 minutes, the generation processing of the above-mentioned operation database is executed every 30 minutes . The process of generating the work database is as follows: First, the current work (current work) of all the workers is detected in step S 7 10. The detection processing of each operator's current operation is, for example, the child routine shown in Fig. 14 for each operator repeatedly until all the operators have completed. In this way, as long as the current operation of the operator is detected and recorded in 100 million yuan every predetermined time, an operation database for each operator can be generated. The operation database may also include various databases 2 1 0 as shown in FIG. 3. Next, referring to Fig. 18, a description will be given of a work report generation process as an example of a work report generation means performed by the worker management device 200. The job report generation process is a process that automatically generates a job daily report for each operator. First, in step S810, the operator is specified 'to identify the operator who is to produce a job daily report. Here, the operator can also allow input of -55- (52) (52) 200411512 on the operation screen to generate an operation daily report for a specific operator. In addition, it is also possible to automatically identify each operator and generate an operation daily report for all the operators. Then, in step S 8 20, an operator database is generated according to the processing shown in FIG. 17 to generate the operator. Information on the daily report. The daily report data is generated by extracting the operator's work during that day. Then, the operation daily report is printed in step S830. For example, a printer connected to the operator management device 200 prints out the work daily report and ends the process. An example of the daily work report generated in this manner is shown in FIG. 19. The daily work report is an example in which the predetermined time is set to perform the work database generation processing shown in FIG. 17 every hour to detect the current work situation of the operator. In addition, the operation daily report can be used when, for example, another company dispatches an operator to a factory to determine the cost according to the operation. When the unit price of the writing industry is stored in the operator skill information database 250, the unit price of each operation can be searched and printed, and the fee can be requested based on the total amount. In addition, if the data of each month is taken from the operation database, a monthly job report can be generated and printed. As described above, according to the present embodiment, work reports such as a work daily report and a work monthly report can be easily generated. In addition, because the operator's work can be automatically detected and the work information is used as the basis of the work report, it can save the operator from entering procedures from a portable information terminal, etc., and improve work efficiency. . In addition, since it is not necessary to entrust the operator to report by himself, an operation report can be frequently and accurately generated. -56- (53) (53) 200411512 According to the present invention, it is possible to easily identify the work currently being performed by the operator, so even when a new work occurs, for example, it is possible to successively determine the priority of the current work and the new work. Degree, select the most suitable operator for the job. In this way, the operator can be appropriately arranged in an appropriate place, and the operation efficiency of each operator can be improved. In addition, in the above-mentioned embodiment, although the worker detection sensor 130 shown in FIG. 1 is, for example, a receiver 1 34, which is installed in each area 110, 120, for example, a communication cable is used. It is connected to the operator management device 2000, but it is not necessarily limited to this, and it can be connected by a network instead of a communication cable. The receiver 1 34 shown in FIG. 2 may also be a transceiver having a transceiver function, and the transmitter 1 3 8 may also be a transceiver having a transceiver function. At this time, various sensors such as an odor sensor can also be installed in the portable information terminal, and the abnormality can be judged based on the detection of these sensors. Specifically, as shown in FIG. 20, for example, a device room area 丨] 2 is provided with a receiver 3 2 0 having a network connection function such as a routing function and a network connection function. The receiver 3 2 0 with a network connection function is connected to the operator management device 200 through the network 3 0. The operator management device 200 is connected to the network 300 through a network connection device 3 4 0 having a network connection function such as a routing function. The operator carries a transmitter 380 as shown in Fig. 2 or a portable information terminal 3 60 having a receiver function. In addition, such a portable information terminal 360 can be, for example, a POA (Personal Digital Assistant), a notebook computer, a computer with a pen input (such as a tablet computer), and the like. The portable information terminal 3 60 is equipped with an odor sensor, a high-frequency sensor, a low-frequency sensor, and the like for detecting abnormalities and detecting -57- (54) (54) 200411512 In addition to the various sensors 362, a control section 3 64, a modulation and demodulation section 3 66, and a communication interface 3 6 8 are provided. The modulation and demodulation section 3 66 is configured to modulate data sent through the communication interface 3 6 8 into a wireless signal, or demodulate signals received through the communication interface 3 6 8 into data. Network 3 00 can be a public line network such as the Internet, or a closed line network such as WAN (Wide Area Network), LAN (Local Area Network), IP-VPN (Internet Protocol-Virtual Private Network). In addition, the connection medium can be an optical fiber cable used in FDD 1 (Fiber Optic Data Transfer Interface), a coaxial cable or a twisted pair cable used in Ethernet, or wireless such as IEEE 8 02'llb. , Regardless of wired and wireless, even satellite networks can be used. It is also possible to make the receiver 3 2 0 with a network connection function described above to have a wireless routing function, for example, and to make the communication interface 3 6 8 of the portable information terminal 3 6 0 a wireless network card. It is constituted by the wireless network between the receiver 320 and the portable information terminal 360 with a network connection function. The various sensors 362 of the portable information terminal 3 60 can also detect, for example, frequencies and periods that cannot be perceived by humans. In addition, when various kinds of gastric odor sensors 3 62 are provided, for example, odor components can be detected by detecting odor components attached to the surface. The odor sensor can also be constituted by a gas detector, for example, and can be used to detect gases harmful to the human body such as integrated carbon, chlorine and other halogen gases. In addition, for example, the friction and viscosity of the oil can be detected from the oil vapor of the exhaust pump exhausted from the processing chamber of the semiconductor manufacturing device. -58- (55) (55) 200411512

Specifically, various sensors 3, 6 and 2 include oscilloscopes, spectral analyzers, fast Fourier transform spectrum analyzers (FFTs), vibration analyzers, infrared sensors, and semiconductor sensors. Sensors, light sensors, etc., portable type "3 6 0 can also be equipped with a variety of sensors 3 6 2 switch (not shown, m, a), the operator can choose the desired sensing by the switch To make _. In addition, from the input and sub-segments provided by the portable information terminal 360, the data (external environment information) input by the operator can be used as the sensor. ^ The external environment information is measured by the operator using a measuring device, for example ^ Input various data such as the data displayed on the operation panel to make sighs as sensing data. The input means are keyboard input, touch panel input, etc., the known _ input means is sufficient. The control unit 3 64 of the portable information terminal 360, for example, performs semiconductor manufacturing devices based on the detection signals from various sensors 3 62, etc., and judges abnormality. For example, if a sound or an odor is detected, it is determined to be abnormal, or the valve 値 that is $ is abnormal is stored in a memory section (not shown). If a sound or odor that exceeds the valve is detected, it is determined Is abnormal. By this means, as shown in _9, an abnormality can be determined before an error occurs. Then, if it is determined that an abnormality has occurred, the portable information terminal 36 will send the data from the appropriate sensor among the various sensors 3 62 to the operator management device 200 through the network 300. . In the operator management device 20 (), based on the sensor information received from the portable information terminal 3 60, for example, step S 1 1 0 shown in FIG. 2 and step S 5 I shown in FIG. 5 are performed. 〇 Judgment whether a new operation has occurred. -59- (56) 200411512 Specifically, as shown in FIG. 9, for example, the symptoms before the error occurred are stored in the various databases 2 1 0 in the case information database (not shown), according to Symptoms memorized beforehand by the wrong information to comprehensively specify the work, and judge that there is a freshman. At this time, the operator management device 2000 accesses the device 40 judged to be a different conductor, reports it by an alarm such as a notification means, and blinks the light by a light means or the like. The specific examples memorized in the error pre-information database are as follows. In the pre-information database, for example, the error on the vacuum side is: 'the heat leakage rate increases (symptom 1), and the base pressure rises (sign, the atmospheric side error prior information may They are abnormal sounds (symptom 3), vibration signs 4). An increase in the leakage rate (symptom i) is, for example, a sign of deterioration of the O-ring provided in the processing chamber of a semi-finished device, resulting in atmospheric inflow. The increase of the base pressure (symptom 2) is, for example, the fatigue of a vacuum pump to be evacuated or the suction of a vacuum caused by a foreign object end machine. The abnormal sound (symptom 3) is, for example, an increase in symptoms when the vacuum pump is degraded and degraded, resulting in poor balance of the semiconductor manufacturing device (symptom 4) is, for example, foreign matter is accumulated, the vacuum pump is degraded and degraded and the semiconductor manufacturing device is out of balance Symptoms 1 and 2 can be determined based on, for example, external environment information of the portable information terminal input by the operator. Symptoms 3 and 4 can be judged based on various sensor data from 3 62. In this way, the symptoms are memorized in the pre-error information database. According to the external environment of the portable information terminal 36, which is input by the operator, it is possible to set the normal or half of the operation in the error database. Error information can be a sign 2) increase (conductor processing room can not be equipped with bearings in the room. Vibration on bearings. Symptom 3 60 sensors, such as information, -60- (57) (57) 200411512 judge only signs 1, When there is no sign of 3'4, because the possibility of normal vacuum pumping is high, and the possibility of leakage of the seal (leakage in the processing room) is high, the maintenance work can be judged based on the occurrence of the leakage of the seal. New work. Therefore, as shown in Figure 11 and Figure 15, a specific operator is instructed to perform the new work. Specifically, the operator management device 200 is sent to the operator through the network 300. The portable information terminal 3 60 sends instructions. In addition, the sensor data detected and input by the portable information terminal 3 600 shown in FIG. 20 can also be sent to the operator management device 2 0 0 'at this opportunity or When the area information is detected in step s 4 10 shown in FIG. 14, a letter is sent to the operator management device 200 together with the identification information of the operator. Then, the operator management device 200 determines whether it is abnormal. , And judged that there is a new work In addition, the transceiver functions of the receiver 3 2 0 and the portable information terminal 3 60 described above with a network connection function are not limited to the functions of wireless transceivers, and the use of infrared transceivers, etc. It can be used for all functions of the telephone. Even GPS (Global Positioning System) can be set in the portable information terminal 3 60 to detect the position of the operator based on GPS. The present invention is an ideal embodiment, but the present invention is not limited to the example in question. Of course, those skilled in the art may have more variations or modifications within the scope described in the scope of patent application, and these also belong to the technical scope of the present invention. For example, the present invention can be applied to an operator management system for operator management of an owned enterprise in a semiconductor manufacturing plant, or it can be different from a semiconductor that has a semiconductor -61-(58) 200411512

Operator management systems applicable to other companies in a manufacturing company that manage operators when dispatched to the factory. In particular, when an employee of a company that manufactures or sells a semiconductor manufacturing device is dispatched as an operator to a company that purchases or uses the semiconductor manufacturing device to perform maintenance or semiconductor manufacturing operations on the semiconductor manufacturing device, the same applies. Operator system. By this, the operating efficiency of each dispatched operator can be increased to the maximum limit, and the classification of the operator and the number of operators can be determined according to the characteristics of the dispatched factory. In this way, for a company that manufactures or sells semiconductor manufacturing equipment, the dispatch operator who purchases or uses the semiconductor manufacturing equipment can converge to the minimum necessary. On the other hand, for customers who purchase or use semiconductor manufacturing equipment, personnel expenses paid to operators dispatched from companies that manufacture or sell semiconductor manufacturing equipment can be kept to the minimum necessary.

Industrial Applicability The present invention is applicable to an operator management system, an operator management device, and an operator management method. [Brief description of the drawings] [Fig. 1] A block diagram of the overall configuration of the operator management system according to the first embodiment of the present invention. [Fig. 2] An explanatory view of the function of the equipment room of the clean room in the same embodiment. -62- (59) (59) 200411512 [Fig. 3] A block diagram showing the structure of the operator management device according to the embodiment. [Figure 4] A block diagram of an example of various databases shown in Figure 3. [Fig. 5] An example of a work-specific database discussed in the same embodiment. [Fig. 6] An example of an operation priority database discussed in the same embodiment. [Fig. 7] An example of an operational skill database discussed in the same embodiment. [Fig. 8] An example of the skill database of the operator discussed in the same embodiment. [Fig. 9] An example of the error code information database discussed in the same embodiment. [Fig. 10] An example of the inspection result information database discussed in the same embodiment. Main routine flow chart. [Fig. 12] A flowchart of a subroutine for assigning priority to a worker according to the same embodiment. [Fig. 13] A flow chart of the operator's decision to process a subnormal equation in the same manner as described in the embodiment. [Fig. 1 4] A flowchart of the subroutine of the operation detection process of the operator discussed in the same embodiment. [Fig. 15] A flowchart of a main routine of a new job allocation process according to the second embodiment of the present invention. [Fig. 16] A flowchart of a subroutine of redistribution processing for all operations in the same embodiment. [Fig. 17] A flowchart of the operation database generation place according to the third embodiment of the present invention. -63- (60) 200411512. [Fig. 18] A flowchart of a work daily report generation process according to the embodiment. [Figure I?] An example of an operation daily report generated in the same embodiment. [Fig. 20] A block diagram of a modification of the operator management system. [Comparison table of main components] 100 Semiconductor manufacturing plant 110 Μ j \ \\ Dust room area 112 Device room area 114 Device outdoor area 116 Control unit 118 Outdoor control unit 120 and ✓ 1 \\ Dust outdoor area 122, Central monitoring room Ipp area 124 Clean room area 126 Storage area 128 Office area 129 Lounge area 130 Operator detection sensor 132 Device room 134 Receiver 136 Operator 138 Transmitter 140 Semiconductor manufacturing equipment

-64- (61) Operator management device Control section Display section Input section Input / output section Various databases Operation-specific information database

Area information Device information Operation content Operation priority information database Priority Operation classification Operation skill information database Operation

Operator classification operation classification operation content operator skill information database name ID password operator classification -65- (62) 200411512 257 assignment 2 60 obstacle information database 262 error code information database 264 inspection result information database 300 network 320 Receiver with network connection function 340 Network connection device 360 Portable information terminal 362 Various sensors 364 Control unit 366 Tuning Mita delta cycle 368 Communication interface -66-

Claims (1)

(1) (1) 200411512 Patent application scope 1. An operator management system, which is characterized by: a work field divided into a plurality of work areas according to the work content; and each work area of the previous work field and each work area Operation-specific information storage means for storing the operation-specific information associated with the content of the operation performed; and the operator detection means set in each operation area of the preamble; and based on the output of the preamble operator detection means, the specific preamble operator is located at Which work area's operator's location-specific means; and the work-specific information based on the previous work-specific information memorization means, then the operator's work area specified by §5 operator's location-specific means, specifies that the operator is currently in progress The current operation specific means of the operation, and the current operation specified by the previous current specific operation method, to determine whether to make the operator continue the current operation or to make a new operation; and Judgment result of judgment means It refers to the practice of not issuing work means not the means. 2. The operator management system described in item 1 of the scope of patent application, in which the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters held by each operator; The transmitter is set to send electromagnetic waves of different frequencies to each operator; -67- (2) (2) 200411512 The pre-specified operator position specific means is to receive the electromagnetic waves of the operator's frequency regarded as the detection target of the operating area. The preamble operator detection means is found, and the operation area where the operator detection means is set is specified as the operation area where the operator exists. 3. The operator management system as described in item 1 of the scope of patent application, wherein the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters held by each operator; the preamble transmitter It is set to send electromagnetic waves containing identification information that identifies the operator according to each operator. The pre-position operator specific means is to obtain the identification information from the pre-detection operator detection means and will be received as the operation area. The pre-operator detection means for identifying the identification information of the operator of the detection target is found, and the operation area where the operator detection means is set is specified as the operation area in which the operator exists. 4. The operator management system described in item 1 of the scope of patent application, which includes a means for obtaining operation information for obtaining the operator's operation information from an operating device installed in the pre-operation area; the pre-existing current specific means, in addition to obtaining the pre-record The operation area information specific to the operation area where the operator is located, and also obtains the operation information transmitted from the operation device where the operator is working from the pre-recorded operation information acquisition means, and identifies the operator based on these area information and operation information. Now working. -68- (3) (3) 200411512 5. An operator management system, which is characterized by: a work field divided into a plurality of work areas according to the work content; and each work area of the pre-work area and the work area Operation specific information memorizing means for giving specific information related to the operation to be memorized; and operator detection means provided in each operation area of the preamble; and which predecessor operator is located based on the output of the predecessor operator detection means Means for specifying the position of the operator in the work area; and work-specific information based on the means for storing the specific information of the previous work; Specific means for current operations; and operator skill information memorization means for memorizing the skill information of related operators to the operations performed by each operator; and operation priority information memory for memorizing priority information of operations Means; and new operations that detect new operations If the new task is detected by the pre-record new operation detection method, the operator extraction method of the operator who can perform the pre-record new operation is extracted based on the pre-operator skill information memorization means of the operator's skill information; and The previous work specific means specifies the current work of the operator extracted by the previous work extraction means, and according to the work priority information of the previous work priority information storage means, the superiority of the current work is -69- (4) 200411512 first Obtain and compare the order of priority with the previous assignment of the new job, and assign the priority of the previous assignment to the current job that is higher than the previous assignment to the operator-specific processing of the operator who registered the new assignment. " For the operators specified by the specific means of the previous operator, issue instructions to ask them to perform the new tasks of the previous operator. 6. If the operator management system for item 5 of the scope of patent application, the pre-existing operator skill information memorization means is to classify the operator into memory for each operator type; and set up: each operation and the ability to perform the operation The skill operator classifies the skill information memory means for memorizing the related skill information; and obtains the operator class obtained by the former skill information memory means extracted by the former operator extraction means, and according to the former note The operation skill information of the operation skill memorization method is used to obtain the operator classification of the new operation, and set the priority order of the same operator to the high priority, and give priority to the operator. The prescriptive operator specific means means that among the operators extracted by the operator's extraction means, from the operator who has the higher priority to the operator given by the preface priority ordering means, the operator specific processing is performed sequentially. 7. If the operator management system described in item 5 of the scope of patent application, the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters sent by each operator; The ability to take the points is given in advance. -70- (5) (5) 200411512 The preamble transmitter is set to send each operator electromagnetic waves of different frequencies; the preamble operator location specific means is to receive The preamble operator detection method of the operator's frequency electromagnetic wave regarded as the detection object of the operation area is found, and the operation area where the operator detection method is set is specified as the operation area where the operator exists. 8. The operator management system as described in item 5 of the scope of patent application, wherein the preamble operator detection means is a receiver set to receive electromagnetic waves from transmitters held by each operator; the preamble transmitter It is set to send electromagnetic waves containing identification information that identifies the operator according to each operator. The pre-position operator specific means is to obtain the identification information from the pre-detection operator detection means and will be received as the operation area. The pre-operator detection means for identifying the identification information of the operator of the detection target is found, and the operation area where the operator detection means is set is specified as the operation area in which the operator exists. 9 · The operator management system described in item 5 of the scope of patent application, which includes a means for obtaining operation information for obtaining the operator's operation information from an operating device installed in the pre-operation area; the pre-existing current specific means, except for obtaining the pre-record The work area information specific to the work area where the operator is located, and the work information transmitted from the work device where the operator is working is also obtained from the pre-recorded work information acquisition means, and according to These area information and operation information are specific to the operator's current operation. 10. An operator management system, comprising: a work field divided into a plurality of work areas according to the work content; and specific work-related information given to each work area of the previous work field and the work content performed by each work area Memorized operation-specific information memorization means; and operator detection means provided in each operation area of the preamble; and specific operator position specific means of which operation area the preamble operator is located in, based on the output of the preamble operator detection means; and According to the work-specific information of the previous-work-specific information storage means, the work area of the operator specified by the previous-worker position-specific means, and the current work-specific means of the work that the operator is currently performing; and the priority of the work Information-memory-priority information-memory methods; and new-work detection methods that detect the occurrence of new operations; and if a new operation is detected by a previously recorded new operation detection method, the previous-record current operation-specific method is used to identify all operators Current assignments for these After all tasks including new tasks, the task priority information of the previously recorded task priority information storage means gives priority to the tasks, and the task redistribution method for all task assignments is performed again from the high priority task; and the method of redistributing previous tasks The assigned means of instruction to all operators. -72- (7) (7) 200411512 1 1 · If the operator management system described in item 10 of the scope of patent application, the pre-assignment of means of reassignment is identified as a new job from the job with the highest priority of the job; and Settings: operator skill information memorization means that memorizes each operator's previous work and the skills information associated with the work performed by each operator; and the operator's skill information memorization means based on the previous information Operator extraction methods for operators who perform new assignments; and "Previous operation specific means to specify the current operations of operators extracted by the previous operator extraction means, and to prioritize operations based on the prior operation priority information memory means Information to obtain and compare the priority order of the previous job and the priority order of the new job, and to prioritize the new job that has a higher priority than the current job of the predecessor. Operator-specific means 〇12. Such as the tenth item in the scope of patent application Operator management system, in which the preamble operator detection means is set up to receive electromagnetic waves from the transmitters held by each operator; the preamble sender is set to each operator to send different Electromagnetic wave of frequency; the specific means of the preamble operator position is to find the -73- (8) (8) 200411512 of the preamble operator detection means that received the electromagnetic wave of the operator's frequency as the detection object of the work area, and The work area where the worker detection means is set is specifically the work area in which the worker exists. 13. The operator management system as described in Item 10 of the scope of patent application, wherein the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters held by each operator; The receiver is set to send electromagnetic waves containing identification information that identifies the operator according to each operator. The pre-position operator specific means is to obtain the identification information from the pre-detection operator detection means, and will receive the information as The preamble operator detection means of the identification information of the operator of the operation area detection object is found, and the operation area where the operator detection means is set is specified as the operation area in which the operator exists. 14 · The operator management system described in item 10 of the scope of patent application, which includes means for obtaining operation information for obtaining operator's operation information from an operating device provided in the operation area of the preamble; the preexisting current specific means are in addition to Obtain work area information specified in the work area where the operator is located, and also obtain work information transmitted from the work device in which the operator is working from the work information acquisition means, and use the area information and work information to specify the work area. Operator's current job. 15 · —A worker management system, which is characterized by having: a work field divided into a plurality of work areas according to the content of the work; and -74- (9) (9) 200411512 each work area of the previous work field and each work area Operation specific information memorizing means for giving specific information related to the operation to be memorized; and operator detection means provided in each operation area of the preamble; and which predecessor operator is located based on the output of the predecessor operator detection means Means for specifying the position of the operator in the work area; and work-specific information based on the means for storing the specific information of the previous work; Current operation specific means; and every time a predetermined time is reached, the current operation specific means specifies the current operation of the full operator, and the current operation is memorized by the operation information memorization means of each operator separately; and the operation according to the operation information memory means Information to generate Job report work report of the work carried out by the content of a given time generating means. 16. The operator management system as described in item 15 of the scope of the patent application, wherein the pre-job information storage means means that for each job, the unit price of the job at the time of each job is also memorized; and the pre-job report generation means is Generate an operation report containing the operation unit price of the operation and the total amount of the operation unit price. 17 · The operator management system as described in Item 10 of the scope of patent application, where the pre-operation site is a semiconductor manufacturing plant. -75- (10) (10) 200411512 1 8 · If the operator management system described in item 7 of the scope of patent application, the former operator is owned by an enterprise that is different from the company that owns the former operating field, that is, the semiconductor manufacturing plant. Dispatched operator. 1 9 · A worker management device belongs to a worker management device that manages workers who work in a work field divided into a plurality of work areas according to the content of the work. The worker management device is characterized in that: each work area of the preceding work field and each Work-specific information memorization means that memorizes related work-specific information in the work area performed by the work area; and according to the output of the operator detection means provided in each work area of the preamble, the operator in which work area the specific preamble worker is located Location-specific means; and operation-specific information based on pre-job-specific information-memory means, the operation area of the operator specified by the pre-existing operator's position-specific means, and current operation-specific means specifying the operation that the operator is currently performing; And according to the current work specified by the predecessor current work specific means, to determine whether to make the operator continue the current work or to make a new operation; and according to the result of the predetermined judgment means, determine the work Issuer The finger does not refer to the means. 2 0.—A worker management device is a worker management device that belongs to a worker who manages work in a work field divided into a plurality of work areas according to the work content, and is characterized by: -76- (11) (11) 200411512 operation-specific information storage means for assigning the operation-specific information of each operation area of the pre-operation field and the operation content performed by each operation area to the related operation-specific information; and according to the output of the operator detection means provided in each pre-operation area, The operator's location-specific means of which work area a specific pre-worker is located in; and the work-specific information of the pre-worker-specific information storage means, and the work area of the operator specified by the pre-worker's location-specific means, to identify the operator Specific means of current work for current work; and means for memorizing operator skill information to memorize the skill information of related operators to the work performed by each operator; and prioritized information of work Priority information memorization means of memory operation; and detection A new operation detection method for detecting the occurrence of a new operation; and if a new operation is detected by the pre-recorded new operation detection method, the operator who can perform the pre-recorded new operation is extracted according to the skill information of the pre-recorded operator's skill information memory means The operator's extraction means; and "the previous operation specific means to specify the current operation of the operator extracted by the previous operator extraction means, and based on the operation priority information of the previous operation priority information storage means, the previous operation The priority order is obtained and compared with the priority order of the new job in the previous record, and the operator who has the higher priority order of the new job in the previous record than the current job is specified as the former-77- (12) (12) 200411512 Operator-specific processing ", operator-specific means; and instructional means for instructing operators identified by pre-existing operator-specific methods to perform pre-existing new operations. 2 1. —A worker management device is a worker management device that manages workers who work in a work area divided into a plurality of work areas according to the content of the work, and is characterized in that: each work area of the preceding work area and the The content of the work performed in each work area is given to the specific information of the related work, and the work-specific information memorizing means is recorded; and according to the output of the operator detection means provided in each work area of the preamble, the specific preamble operator is located in which work area. Operator position specific means; and operation specific information based on the previous operation specific information storage means, the operation area of the operator specified by the previous operator position specific means, and the current operation specific of the operation that the operator is currently performing Means; and a work priority information storage means that memorizes priority information of a job; and a new job detection means that detects the occurrence of a new job; and if a new job is detected by the previous new job detection means, the current job is previously recorded Specific means to specify the current operations of all operators For these current jobs, for all jobs that already contain new jobs, the job priority information previously recorded in the job priority information memory means gives priority to jobs, starting from jobs with high priority -78- (13) (13) 200411512 Means of job redistribution for all-job assignments; and means of instructions for all jobs assigned by the previous job redistribution means to all operators. 22. The operator management device as described in item 21 of the scope of patent application, wherein the pre-job redistribution means is recognized as a new job from the job with the highest priority of the job; and it is set: the pre-job operators and the respective jobs Operator skill information memorizing means which gives the relevant operator skill information to memorize; and operator skill information 'extraction based on the previous operator skill information memorizing means' extraction of the operator who can perform new assignment Means; and "the previous work specific means to specify the current work of the operator extracted by the previous operator extraction means, and according to the work priority information of the previous work priority information memory means, the priority order of the current work and the previous record Obtain and compare the priority of the new job, and compare the predecessor _ The priority of the new job is higher than the predecessor's current job. The operator is specific to the predecessor of the new job's operator-specific processing. Operator management equipment described in the scope of patent application No. 21 Among them, the preamble operator detection means is a receiver set to receive electromagnetic waves from a transmitter held by each operator; the preamble transmitter is set to each operator to send electricity of a different frequency -79 -(14) (14) 200411512 Magnetic wave; The specific means for preamble operator position is to find the preamble operator detection means that has received electromagnetic waves of the frequency of the operator as the detection object of the work area, and to detect the operator The set work area is specifically the work area in which the operator exists. 24. The operator management device as described in item 21 of the scope of patent application, wherein the preamble operator detection means is a receiver set to receive electromagnetic waves from the transmitters held by each operator; The machine is set to send electromagnetic waves containing the identification information that identifies the operator according to each operator. The specific means of preposition operator position is to obtain the identification information from the detection means of the preposition operator, and it will be received as the operation. The preamble operator detection means of the identification information of the operator of the area detection object is found, and the operation area where the operator detection means is set is specified as the operation area in which the operator exists. 25. If the operator management device described in item 21 of the scope of patent application is provided with operation information acquisition means for acquiring operation information of the operator from the operation device installed in the operation area of the preamble; the preexisting current specific means are in addition to Obtain work area information specified in the work area where the operator is located, and also obtain work information from the work device where the operator is working from the work information acquisition means, and specify the area information based on these area information and work information. Operator -80- (15) (15) 200411512's current job. 2 6. A worker management device is a worker management device that manages workers who work in a work field that is divided into a plurality of work areas according to the content of the work. It is characterized by: setting each work area of the preceding work field and the Job-specific information storage means that memorizes the work-specific information associated with the work performed in each work area; and the work in which work area the specific pre-worker is located based on the output of the operator detection means provided in each work area Operator-specific means; and operation-specific information based on the previous-work-specific information-memory means, the work area of the operator specified by the previous-worker-specific position-specific means, and the current-work-specific means that specify the work that the operator is currently performing ; And every time the specified time, the current operation of the current operation specific means to specify the full operation of the current operator, and the current operation according to the operation of all the operators to memorize · § industry information memory means; and operation information according to the operation information memory means To produce the desired job Means of generating the work report of the work report of the work performed by the user at each set time. 2 7.—A worker management method, which belongs to a worker management method for managing workers who work in a work field that is divided into a plurality of work areas according to the content of the work, and is characterized by having the following operations: -81-(16) (16) 200411512, which specifies the operator's location and the specific project in which work area the predecessor is located; and according to the work area of the predecessor work area and the work performed in each work area Content-specific job-specific information is memorized. Job-specific information is stored in the job-specific information. The job-specific information is specified by the previous operator ’s location and specified by the project. Work-specific projects; and the means of judging whether to make the operator continue the current work or make new operations based on the current work specified by the pre-existing current work-specific project; and the judgment results according to the pre-judgment methods , Means to issue a job execution instruction to the operator Show project. 2 8. —A worker management method, which belongs to a worker management method for managing workers who work in a work field divided into a plurality of work areas according to the content of the work, and is characterized by having the following operations: The output of the operator detection means, the operator's position and the specific project in which operation area the predecessor operator is located; and the memorization based on the specific operation information of the predecessor operation field and the operation content performed by each operation area to the associated operation specific information. The operation-specific information in the operation-specific information memory means, the operation area of the operator specified by the specific project of the previous operator position, the current operation-specific project of the operation that the operator is currently performing; and the detection of the new operation. New work detection project that occurred; and -82- (17) 200411512 If a new work is detected by the previous new work detection means, the previous operator and the work that can be performed by each operator are assigned to the related operator according to Skills for memorizing information skills of operators ， Extract the operator who can perform the pre-recorded new operation, and perform the “Previous current operation specific project to specify the current operation of the operator extracted from the pre-existing operator's extraction process, and then assign it according to the priority information of the operation. Memorized job priority information The memorization of the job priority information, obtains and compares the prior order of the previous job and the prior order of the new job, and prioritizes the new job that has a higher priority than the present job. The operator-specific project of the new operator of the operator "and the operator-specific project of the specific project of the previous operator, and the instructed project that instructs them to carry out the new task of the previous project. 29. A method of operator management, which belongs to a method of operator management for managing operators who work in a work field that is divided into a plurality of operation areas according to the operation capacity, and is characterized by: Loss of measurement methods, specific location of the operator in which work area the preamble operator is located, and a specific process; and a work setting based on memorizing each work area of the predecessor work area and the content of the work performed by each work area to the associated work specific information. The specific information of the work in the information memory means that the position of the operator specified in the project is determined by the pre-recorded operator's position, and the level of the operator's skill in the process is specified. (18) (18) 200411512 Current operation-specific projects in ongoing operations; and new operation detection projects that detect the occurrence of new operations; and if a new operation is detected by the previous new operation detection means, the previous operation is recorded now Job-specific projects to specify the current jobs of all operators, For all operations including new operations, assign priority to the operations based on the operation priority information of the operation priority information memorizing means that memorizes the priority information of the operations, and re-allocate the entire operation from the high priority operation; and Instruct the project assigned by the previous assignment reallocation means to all operators. 30. —A worker management method, which belongs to a worker management method for managing workers who work in a work field that is divided into a plurality of work areas according to the work content, and is characterized by having the following operations: The output of the operator detection means, the operator's position and the specific project in which operation area the predecessor operator is located; and the memorization based on the specific operation information of the predecessor operation field and the operation content performed by each operation area to the associated operation specific information The operation-specific information in the operation-specific information storage means is the operation area of the operator specified by the predecessor operator ’s location-specific project, and the current operation-specific project of the operation that the operator is currently performing; and each time the predetermined time arrives, Remember the current work of a specific project and the current work of a specific full operator, and save the current operation as a work information memory project for all operators; and -84- (19) (19) 200411512 Operation information to generate The work report of the work report of the work performed at the given time generates the work. m -85-