TW200411168A - Probe detection device - Google Patents

Abstract

There is provided a probe detection device, in which light emitted from fiber is adjusted to project on the front position of the suspension arm of the probe, so as to increase the sensitivity of light detection. The probe detection device includes a fixing seat having a first position and a second position; a fiber connector arranged on the fixing seat for emitting light; a probe base sliding arranged between the first position and second position of the first fixing seat, wherein the probe base has a through hole and the fiber connector passes through the through hole; and a probe arranged on the probe base via the suspension arm.

Description

200411168 V. Description of the invention (1) The technical field of the invention The present invention relates to a probe detection device, in particular to a movable probe base for adjusting the position of light emitted by an optical fiber to hit the front end of a cantilever of a probe , .. to enhance the sensitivity of the photodetector. Prior art Currently, the probe base structure of a commercial scanning probe microscope is conventionally limited by a single mechanical positioning center due to the limitation of the structure and the positioning method. ’Therefore, among the different scanning methods provided by conventional commercial scanning probe microscopes, there is often only one cat scanning method to obtain the strongest light interference signal change and better surface feature detection image results. As shown in FIG. 1, the current conventional scanning probe microscope interferometer architecture, consists essentially of the laser beam source 1, the light detector 2 and the probe holder 3; wherein, i laser beam incident end face of the optical fiber; reflected light Γ2 Γι reflected light and the fiber end faces, respectively, and the light reflected by the back surface of the cantilever reflected back to the optical fiber; fiber strength of the interference signal and the probe clearance L, the photodetector I. The interference signal can be analyzed by the simplified two-beam interference mode, and the interference signal intensity " I " is obtained, as shown in formula (1) / = A + + 2 ^ / ¾ cosΔ〆 --------- ------------------ (1) 'A 4 moiyL! Λ' where I !, 12 are reflected light " " and reflected light, r2 " signal strength; Nair is the refractive index of air, and the wavelength of the laser light. Figure 2 is a schematic diagram of the interference signal intensity change. It shows that the probe is in the same

200411168 V. Description of the invention (2) When the light spot I is closer to the front end of the probe cantilever, the change area D1 of the gap between the optical fiber and the probe is larger, so the intensity of the interference signal ^ is more obvious, and the light spot Π The farther the probe tip is, the smaller the change area D2 of the gap between the optical fiber and the probe is, so the intensity change of the interference signal is less obvious. It is known from equation (1) and Fig. 2 that the intensity change of the interference signal caused by the deformation of the cantilever of the probe is not only related to the wavelength of the laser light, but the position of the laser light point on the cantilever of the probe is also an important factor. Will have an important place. Fig. 3 shows the structure of a conventional probe base, which is a fixed type. No matter whether the probe base 3 or the 疋 optical fiber connector 4 cannot move relative to each other. Due to different scanning methods, scanning probes with different lengths are required. For example, the length of the probe in the contact mode is 450 / zm and the length of the probe in the vibration mode (Tap ping m〇 (ie) is 2). 2 5 β m 〇 At present, in order to ensure that scanning probes of different lengths can generate interference signals during the design of the probe base, the shortest probe length is used as the design reference, and the circular positioning hole and the circular optical fiber are used. The connector, the probe and the optical device are positioned so traditionally, the probe base is reflected back to the optical fiber by the mirror. The image is from the same position as the two arms. Therefore, if you use the contact mode to scan the 'production oblique' : Split &, the position of the reflected light h that is reflected back to the fiber is not located at the other end of the figure, but is located at the center of the probe cantilever., Fiber: The center position of the probe is not the best mirror reflection Signal changes are not optimized. Long probes are accompanied by interference in the S probe holder.

200411168 V. Description of the invention (3)-*-^-Summary of the invention In view of this, the object of the present invention is to provide a probe detection device that can adjust the position of the light emitted by the optical fiber to hit the front end of the probe cantilever. In order to improve the sensitivity of light detection, it includes: a fixed base having a first position and a second position; an optical fiber connector arranged on the fixed base to emit light; a probe base Between the first position and the second position of the fixed base in a slidable manner, wherein the probe base has a through hole through which the optical fiber connector passes through the through hole; a probe is provided in a cantilever manner On the above probe base❶ According to the present invention, the probe base to which the probe is connected is slid between two positions of the fixed base, and the length of the probe can be used to match the light emitted by the optical fiber connector to the position of the probe tip of the boom, increasing the strength of the interference signal of the light changes, the image of the probe scanning to improve resolution. In order to make the above and other objects, features, and advantages of the present invention obvious and easy to understand, a preferred embodiment is given below in conjunction with the accompanying drawings, and the detailed description is as follows: Implementation Embodiment First Embodiment ψ Please refer to Section 4 The figure is a probe detection and cross-sectional view of the first embodiment of the present invention, including: a fixed base 10, having a first position A and a first, position B '; an optical fiber connector 20, which is arranged on the fixed base 10. To emit light, a probe base 30 is slidably arranged on the fixed base 10

200411168

Between the first position A and the second position B, a through-hole 31 is provided, and the optical fiber connector 20 passes through three through-hole factories; a base 30 has an arm type and is disposed on the probe base 30. t32 'shows a short non-connected to the probe base 3 as shown in Fig. 4. . Among them, the cross-section of the through hole 31 has a long T mounting clearance 40, which can be used for the optical fiber connector 2 2 when the probe base 3G slides.

Hinder. Because ... the contact probe needles that are commonly used are 450 and 225 length probes, for example, the difference between the two degrees is 22 5 / zm, so the movable range of the probe base 30 is at least 225 / ζιη, Then, the through hole 31 has a clearance of at least 225 in the moving direction. In addition, in this embodiment, when a short non-contact probe 32 is used, the probe base 30 is located at the first position a, and then a fixing portion is used. , Positioning the probe base 30 to prevent the probe base 30 from sliding during operation; / Among them, the fixing portion may be the screw 33 used in this embodiment. Fig. 5 is a probe in this embodiment. A top view of the needle base. Screws 33 are provided on both sides of the probe base 30 to support the optical fiber connector 20 to help the probe base be positioned. As shown in FIG. 6, it is used in this embodiment. The top view of the short probe state 'shows the relationship between the optical fiber connector 20 and the through-hole 31. When a shorter probe 32 is used,' the probe base 30 moves to the first position a, and the clearance is generated in the left pain · Side ', therefore, the screw green 3 3 locks the probe base 3 〇 and the fiber connector 2 〇 from the left. As shown, in this embodiment, using a longer contact probe 32, the probe base 30 is located at the second position b, and a fixed

200411168

Positioning the probe base 30 to prevent the probe base 30 from sliding during operation; among them, the fixing part can be the screw 33 used in this embodiment-as shown in Fig. 8, this The top view of the embodiment shows the relationship between the optical fiber connector 20 and the through hole 31. When a longer probe 32 is used, the probe base 30 is moved to the second position B, and a clearance is generated on the right side. Therefore, the screw 33 locks the probe base 30 and the optical fiber connector 20 from the right side. , The second embodiment of the present invention a cross-sectional view of an embodiment of the second embodiment as shown in FIG. 9. Embodiment, the base of the position of the probe, is adjustable, the position is not limited to two, but may be any time to adjust the probe position, for frequent replacement of the user-types of probes' in this embodiment such probe The needle detection device is similar to the previous embodiment, and also includes a fixed base 10 having a first position A and a second position B; an optical fiber connector 20 disposed on the fixed base 10 for emitting light; a probe base 30, slidably disposed between the first fixing base 'a 1〇 of a position and the second position b, where a probe having a base 3〇 through hole 31, and the optical fiber connector 20 Through the through hole 31;-the probe 32, cantilevered on the probe base 30. The fixing part of the probe base 30 is connected with an adjusting screw 33 and a slide rail 34, which drives the probe base 30 to move the screw 33 The probe base 30 can be adjusted to an appropriate position, so that the light of the optical fiber connector 20 hits the cantilever tip of the probe 32, and the probe base is fixed by using the screw 33 and the spring 35, as shown in FIG. 10 , the present embodiment over the embodiments view. The relationship between the optical fiber connector 20 and the through hole 31 is shown. In this embodiment, the through hole 31 in a square

200411168 V. Description of the invention (6) ϊ mm is also the length of the longest probe and the shortest probe. Si shift = when the shortest probe is 32 'probe base 3. When slipping, the clearance is generated on the left. Therefore, the screw is fixed to prevent it from pushing the thrust in the opposite direction of Z. At the same time, the probe base 30 3 ί 2Ϊ is adjusted at the same time as the backlash of the screw 33. Therefore, here In the second embodiment, the screw port 33 and the spring pin base 3G can be moved on the slide rail 35. 'Applicable to two or more lengths and not limited to two positions'. Therefore, although the present invention has been limited to the present invention, any heart: two: the above disclosed embodiment, they are not used and the range, when the arts may be protected by the present invention therefore 'without departing from the spirit and scope of the present invention when attached to the movable rear-view application and alterations' the patentable scope defined Τ out their equivalents.

Page 10 200411168 Brief description of the diagram -------- Figure 1 shows the structure of a conventional probe microscope interferometer; Figure 2 shows the intensity change of the interference signal f. Figure 3 shows the conventional probe detection device. Sectional view of the structure; FIG. 4 is a cross-sectional view of the probe detection device of the first embodiment of the present invention in a short detection state; FIG. 5 is a top view of the probe base of the first embodiment of the present invention; Top view of the first embodiment of the invention when the probe detection device uses a short probe; FIG. 7 is a cross-sectional view of the first embodiment of the invention when the probe detection device uses a long probe; FIG. 8 is the first embodiment of the invention Top view of a probe detection device in an embodiment using a long probe; FIG. 9 is a cross-sectional view of a probe detection device in a second embodiment of the present invention using a shortest probe; FIG. 10 is a second view of the present invention shortest probe above the lower view of a probe state detection apparatus embodiment. Explanation of symbols 1 ~ light source; 2 ~ light detector; 3 ~ probe detection device; 4,20 ~ optical fiber connector; 10 ~ fixed base; 30 ~ probe base;

Page 11 200411168

Claims (1)

200411168 1 • A probe detection device comprising: a fixed base having a first position and a first two position; a probe base slidably disposed between the first position and the second position, wherein The probe base has a through hole;,, and an optical fiber connector, which are disposed in the fixing base and pass through the through hole of the probe base; and a probe is provided in the probe base in a cantilever manner, And the light emitted from the optical fiber connector is projected on the probe. 2. The application of the probe detecting means patentable scope of item 1, wherein the fiber optic connector through the through hole and a clearance is left. 3. The probe detection device according to item 2 of the scope of patent application, wherein the clearance is greater than or equal to the distance that the probe base moves from the first position to the second position. 4. The probe detection device according to item 1 of the scope of patent application, further comprising a fixing portion provided on the probe base for fixing the position of the probe base. 5. The probe detection apparatus according to item 4 of the patent application range, beans, the fixing part includes a screw disposed in the probe base to the base of the probe pin to the first position or the second position. The base is used for locking 6. As described in item 4 of the patent application scope, a probe detection device, wherein the fixing portion includes: a screw; provided on the probe base; a slide rail, the probe base mobile seat on the slide; and a spring 'disposed on the rail, the base is connected to the optical fiber probe 〇729-9339TlV (Nl); 07910031; ri ta.ptd page 13 200411168 6. Between patent application scope, wherein the screw is used to move the probe base from the first position to the first Between the position and the second position, the light emitted by the optical fiber connector is projected on the tip of the probe, and the spring is used to press the probe base to the first position to prevent the probe base from sliding . 0729-9339TW (Nl); 07910031; rita.ptd page 14