TW200411161A - Optical element measuring device - Google Patents

Abstract

An optical element measuring device, including a base, a turntable, an integrating sphere and a holder. In this case, a reference point is provided on the circumferential surface of the base. The turntable is pivotally mounted on the base. A fixed-position scale is provided on the circumferential surface of the turntable. The integrating sphere is outwardly extending from the turntable along the radius direction of the turntable. The holder that can chuck an optical element is pivotally mounted on the turntable. The base, the turntable and the holder have the same axis. A reference element for fixing position is provided on the holder. The invention also disclosures an optical element device includes a base, an integrating sphere and a holder.

Description

200411161 V. Description of the invention (l) (a), [Technical field to which the invention belongs] The present invention relates to a kind of measuring device for measuring the reflectivity of an optical element, a piece measuring device, especially a measuring device (two), [Previous technology] The optoelectronic industry in recent years & what & „industrial applications or one of the 3 emerging industries, both the research of Lu Tufeng and surgery have made great progress. High reflection mirrors are widely used. Most of the high reflection mirrors are made by plating on a substrate with a thin film. In the process of high reflection mirrors, an optical instrument 1§ is required to measure the The reflectivity is converted into comparable data through signal processing to control the yield of the high mirror. As shown in FIG. 1, when the reflectance of an optical element 8 is measured, it is emitted by a light source area 5. A light beam enters a measuring device 6 provided with an optical element 8. Then, the light beam reflected by the optical element 8 is incident into an integrating sphere 7 to obtain required data through signal processing. Among them, the measuring device 6 system consists of four reflective elements 61, 62, 63, and 64 are fixed on a base 65, and the relative positions of the reflective elements 6 1, 6, 2, 6, 3, and 6 4 need to be accurately aligned to ensure the measured reflection angle. Accuracy and reproducibility. Among the above-mentioned measuring devices, a measuring device can only measure the reflectivity of a fixed angle and cannot be arbitrarily adjusted as needed. That is, when measuring different reflection angles, it needs to be replaced. Another measurement device causes inconvenience in use and increases manufacturing costs. Also, 'reflective elements on the measurement device

Page 5

200411161 V. Description of the invention (2) The relative position between the two must be very accurate. If one of them is displaced, the reflectivity of the optical element cannot be accurately measured, resulting in poor reproducibility of the measurement. At the same time, the light source, measuring device, and integrating sphere must be on the same straight line, which makes the volume of the entire instrument too large, which limits the reduction of the instrument area, and thus reduces the capacity per unit area. (Three), [invention content]

Therefore, in order to solve the above-mentioned problems, an object of the present invention is to provide an optical element measuring device capable of measuring various reflection angles, breaking the device area limitation, and improving accuracy. However, the present invention provides an optical element measuring device using the principle of concentric axis rotation, which can measure the reflectance of various reflection angles of the optical element.

To achieve the above object, the present invention provides an optical element measuring device ', which includes a base, a turntable, an integrating sphere unit group, and a stand. Among them, a reference point is provided on the peripheral surface of the base; a turntable axis is provided on the base, and a positioning scale is provided on the peripheral surface of the turntable; an integrating sphere unit extends outward from the turntable in the radial direction of the turntable and extends outward. The bracket is provided on the turntable to hold an optical component. The base, the turntable and the bracket are located on the concentric shaft. The bracket is provided with a reference component for positioning the bracket. In addition, the present invention also provides an optical element measuring device, which includes a base, an integrating sphere unit, and a bracket. Among them, a positioning scale is provided on the peripheral surface of the base; the integrating sphere unit is pivotally connected to the base, and the integrating sphere unit is provided with a first reference element; the bracket system shaft is provided on the integrating sphere.

200411161

The base, the integrating sphere unit and the bracket are used on the second reference unit for positioning the bracket, and are used for holding an optical element. They are located on the concentric axis, and the bracket is provided with a test element. The reason is to use concentric axis rotation. When the conventional bracket is set to precisely adjust various components, the measurement angle of the mandrel integrating sphere is the same as the measurement principle of the invention, and the reflection angle measurement of the mandrel is different, which further saves the process element. It does not need to be located. Each unit is fixed to the same, so the measurement is the same. The results provided on the mandrel of the area measure the optical ratio, and the cost of the present invention is to reflect the angle with the reflectivity of the base unit and the bracket. Online, reducing production capacity. In addition, the accuracy of displacement is not easy, and various countermeasures of optical elements and measuring elements use the angle of the base and the product as reference coordinates, thereby 'shortening the measurement without replacing the other. Because the entire instrument is occupied by light, the present invention Medium and reduced occurrences are highly reproducible. The shooting angle is divided into single shots, that is, it can measure the time to measure the area of the source and the product. The measuring device is a good reflection element, and it can quickly measure the optical time. In the same arrangement, the ball is more divided, and the component error is further reduced. (4). [Embodiment] The following will describe an optical component measurement device according to an embodiment of the present invention with reference to related drawings. As shown in FIG. 2A and FIG. 2B, a first embodiment of the present invention provides an optical element measuring device i ′, which includes a base 丨 丨, a turntable 丨 卩, an integrating sphere unit 13 and a bracket 14. Among them, a reference point is provided on the circumferential surface of the base 丨 丨; the axis of the turntable 12 is provided on the base 丨 丨, and a positioning scale is provided on the circumferential surface 121 of the turn si 2; the integrating sphere unit 13 Tied to turn

200411161 V. Description of the invention (4) The radius of the disc 12 is extended outward from the turntable 12; the bracket i4 is set on the turntable 12 to hold an optical element 2 (shown in Fig. 3A). The base 11, the turntable 12 and the bracket 14 are located on a concentric axis. The bracket 14 is provided with a reference element 141 for positioning the bracket 14. As shown in FIG. 2A and FIG. 2B, the base 11 of this embodiment fixes the optical element measuring device 1 in a measuring slot (not shown) of the optical instrument to prevent the optical element measuring device 1 from being measured by a measuring person. Displacement occurs when the optical element 2 is replaced. Here, the characteristics of the substrate 11 include a low center of gravity, a smoothness, and a low tendency to shake. In addition, a reference point is provided on the peripheral surface 111 of the base 11 for positioning the turntable 12 and the bracket 14. Please refer to FIG. 2A and FIG. 2B. The turntable 12 is provided with a shaft on the base 11 and a positioning scale is provided on the circumferential surface 1 2 1 of the turntable 12. Please refer to FIG. 2A and FIG. 2B again. The integrating sphere unit 13 is extended in the radial direction of the turntable 12 from the turntable 12 to the outside. Here, the integrating sphere unit 1 3 includes an integrating sphere 1 3 1, an outer casing 1 3 2, and an arm portion 1 3 3. The integrating sphere 1 31 is disposed in the outer casing 132, and the outer casing 132 is connected by the arm.部 33 and fixed to the turntable 12. The integrating sphere 131 is used to collect the reflected light beam, detect its luminous flux, and then process the signal to obtain comparable data. In this embodiment, the function of the turntable 12 is to adjust the rotation angle of the integrating sphere unit 13. When the turntable 12 rotates, the integrating sphere unit 13 rotates accordingly, and adjusts the integrating sphere according to the position of the reference point of the base 11. The rotation angle of the unit 13. In addition, as shown in FIG. 2A and FIG. 2B, in this embodiment, the bracket 14 is mounted on the turntable 12 to hold an optical element 2 (shown in FIG. 3A).

200411161 V. Description of the invention (5) The base 11, the turntable 12 and the bracket 14 are located on a concentric axis, and a reference element 141 is provided on the bracket 14 for positioning the bracket 14. Here, the bracket 14 adjusts the rotation angle of the bracket 14 according to the relative position of the reference component 14 1 and the positioning scale of the turntable 12. That is, the bracket i 4 adjusts the incident angle of the incident light rays into the optical element 2 as required, thereby changing the direction of the light rays emitted from the optical element 2 so that the light rays emitted from the optical element 2 can enter the integrating sphere unit 1 3 . In addition, the optical element measuring device 1 of the present invention further includes a fine adjustment unit 15. The fine adjustment unit 15 is set in the base 11 to precisely adjust the rotation angle of the turntable 12, as shown in FIG. 2A and FIG. 2B. . In the present invention, the operation is based on the principle that the base 11, the turntable 12 and the bracket 14 are located on the same axis. When the incident angle of the light source into the optical element 2 increases by Θ degrees, its reflection angle will increase relatively by θ degrees, so the angle of the path of the light passing through the optical element 2 will increase by 2 Θ degrees; similarly, when the light source enters the optical element 2 When the incident angle of θ is reduced by θ degrees, the reflection angle thereof is relatively reduced by θ degrees, so the angle of the path of the light passing through the optical element 2 is also reduced by 2 θ degrees. Fig. 3A, Fig. 3B and Fig. 3C are a series of schematic diagrams of the specific implementation of this embodiment. When using an optical instrument (not shown) to measure the reflectance of the optical element 2 'In the beginning, the base 11 must be locked in a measuring slot (not shown) of the optical instrument, and the optical element 2 should be placed on the bracket 14, such as Figure 3A. When the reflection angle to be measured is 70 degrees, firstly, the positioning scale on the turntable 12 is 140 degrees (that is, twice the reflection angle to be measured) is aligned with the reference point (0 degree) of the base 11. The rotation angle of the integrating sphere unit 13 is adjusted, as shown in FIG. 3B. Next, align the reference element 141 of the bracket 14

200411161 V. Description of the invention (6) The positioning scale on the turntable 12 is 70 degrees (that is, the reflection angle to be measured), so as to adjust the rotation angle of the bracket 14 as shown in FIG. 3C. Finally, the light source emits a light beam in the optical element 2, and then the reflected light beam enters the integrating sphere 31, and the light flux of the reflected light is converted into data for comparison through signal processing. It should be noted that in the optical component measuring device of the present invention, the turntable 12 is rotated based on the reference point of the base 11 and the bracket 转动 is rotated based on the turntable 12 as a reference. Therefore, the turntable 12 and the bracket are rotated. 14 can be positioned based on the reference point of the base 11. Those who are familiar with this technology should understand that the integrating sphere 131 of the optical element measuring device 1 shown in FIG. 3, FIG. 3B, and FIG. 3C is fixed on the turntable 12 and the bracket 1 and 4 are equipped with the shaft on the turntable 1 2 so that the integrating sphere 131 and the bracket 14 can be positioned based on the reference point of the base 11; conversely, the bracket can be fixed on the turntable and the integrating sphere axis can be set on the turntable, which can also make the integrating sphere. And the bracket is positioned based on the reference point of the base. Next, as shown in FIG. 4, the second embodiment of the present invention also provides an optical element measuring device 3, which includes a base 31, an integrating sphere unit 32, and a bracket 33. Among them, a positioning scale is provided on the circumferential surface 311 of the base 31; the integrating sphere unit 32 is pivotally connected to the base 31, and the integrating sphere unit 32 is provided with a first reference element 324; the bracket 33 is provided on the shaft The base 31 is used for holding an optical element 4 (shown in FIG. 5A). Here, the base 31, the integrating sphere unit 32, and the bracket 33 are located on a concentric axis. The bracket 33 is provided with a second reference element 331 for positioning the bracket 33. Please refer to FIG. 4, the integrating sphere unit 32 includes an integrating sphere 321 and an outer

200411161 V. Description of the invention (7) The housing 322, the one arm portion 323 and the first reference element 324. Among them, the integrating sphere 321 is disposed in the outer casing 322, and the outer casing 322 is pivotally connected to the base 31 through the arm portion 323, and the arm portion 323 is provided with the first reference element 324, which is based on the base 3 1 is set to face the integrating sphere 3 21. Here, the integrating sphere unit 32 adjusts the rotation angle of the integrating sphere unit 32 with the first reference element 324 according to the positioning scale of the base 31. Please refer to FIG. 4 again, the bracket 33 is mounted on the base 31 for holding an optical element 4 (shown in FIG. 5A). Among them, the bracket 33 is provided with a second reference element 331 for positioning the bracket 33, and the bracket 33 adjusts the rotation angle of the bracket 33 with the second reference element 331 according to the positioning scale of the base 31. Similarly, in this embodiment, the base 31, the integrating sphere unit 32, and the support 33 are also located on the concentric shaft. It should be noted that in the present invention, the bearing of the bracket 33 and the pivot of the arm portion 3 2 3 are of the same mandrel structure, while the bearing of the bracket 33 is an inner shaft, and the pivot of the arm portion 323 is an outer shaft (such as (Shown in Fig. 4); In addition, those skilled in the art can also adopt a design in which the bearing of the bracket 3 3 is an outer shaft, and the locomotive of the arm portion 3 2 3 is an inner shaft. The principle on which this embodiment is based is the same as the first embodiment, but the operation is slightly different due to the adjustment of the components. 5A, 5B, and 5C are a series of schematic diagrams of the embodiment. When measuring the reflectance at a reflection angle of 70 degrees, the second reference element mi of the bracket 33 is rotated to the position of the positioning scale 20 degrees of the base 31, that is, the remaining angle of the reflection angle of 70 degrees, as shown in FIG. 5B. As shown. Next, turn the first reference element 324 of the integral east unit 32 to the positioning scale 40 degrees on the base 31.

200411161 Fifth, the position of invention description (8), which is twice the angle of reflection of 70 degrees, as shown in Figure 5C. Finally, the light source emits a light beam at the optical element 4 at the scale of 0 degrees, and then the reflected light beam enters the integrating sphere 321, and converts the light flux of the reflected light into comparable data through signal processing. Compared with the original mandrel rotation technology, the mandrel has no cost when the ball unit and the emissivity are angled. Furthermore, production capacity was also reduced. In addition, the accuracy of the above-mentioned instructions is not easy to be included in the coordinates of the ball unit of various angles provided by the postscript, that is, the optical element. At the same time, the 'spherical unit does not build up, and the misplacement of the measured components is equivalent to the equivalent device, which uses concentric reflectance. It is easy to adjust the various angles of the integrator with the conventional and brackets. It is possible to adjust the different reflections of the integrator to measure the different reflections. This further saves the manufacturing cost. The hair only needs to be shortened by the brackets. This example is repeated because of the nature of the application and the application of Fan Ji to measure the optical base as the angle, and to measure another amount of displacement in the invention of the light source instrument. The amount of time measurement devices, such as seat, product for reference and measurement, and integral surface measurement equipment, are high. Instead of encircling it. Must be located to increase the fixed difference of each system, the unit area of the same straight line on the concentric axis to measure the knot. Any changes or changes that have not deviated from this development shall be included

Page 12 200411161 Brief description of the drawings (five), [Simplified description of the drawings] Fig. 1 is a schematic diagram of a conventional measuring device for optical elements. 2A and 2B are perspective views of an optical element measuring device according to the first embodiment of the present invention. Fig. 3A, Fig. 3B and Fig. 3C are a series of three-dimensional schematic diagrams of the first embodiment of the present invention. Fig. 4 is a perspective view of an optical element measuring device according to a second embodiment of the present invention.

Fig. 5A, Fig. 5B and Fig. 5C are a series of three-dimensional schematic diagrams of the second embodiment of the present invention. Component symbol description: Optical element measuring device Base Circumferential surface Turntable Circumferential surface Integrating sphere unit Integrating sphere Outer housing Arm Arm Bracket Reference component Fine adjustment unit 1 11 111 12 121 13

131 132 133 14 141 15

Page 13 200411161 Brief description of drawings 2 Optical element 3 Optical element measuring device 31 Base 311 Circumferential surface 32 Integrating sphere unit 321 Integrating sphere 322 Outer housing 323 Arm 324 First reference element 33 Stand 331 Second reference element 4 Optical Element 5 Light source area 6 Measuring device 61, 62, 63, 64 Reflecting element 65 Base 7 Integrating sphere 8 Optical element

Page 14 ❿

Claims (1)

200411161 6. Scope of patent application1. An optical component measuring device includes: a base, a reference point is provided on the peripheral surface of the base; a turntable is provided with a shaft on the base, and the A positioning scale is provided on the circumferential surface; an integrating sphere unit is extended from the turntable to the outside in the radial direction of the turntable; and a bracket is provided on the turntable to hold an optical element, the base The base, the turntable and the bracket are located on a concentric shaft, and the bracket is provided with a reference element for positioning the bracket. 2 · The optical component measurement device described in item 1 of Shen Qing's patent scope, further comprising: a fine adjustment unit, which is set on the base and is used to precisely adjust the rotation angle of the turntable. 3. The optical element measuring device according to item 1 of the patent application park, wherein: the integrating sphere unit includes an integrating sphere, an outer casing, and an arm, and the integrating sphere is disposed in the outer casing, and The housing system is fixed on the turntable by the arm portion. 4. The optical element measuring device as described in item 1 of the scope of patent application, wherein the integrating sphere unit rotates when the turntable rotates, and according to the parameters of the base Page 15 200411161 6. Scope of Patent Application ^ ^ The position of the test point adjusts the rotation angle of the integrating sphere unit. 5 · The optical element measuring device according to item 1 of the scope of patent application, wherein: The bracket is adjusted according to the relative position of the reference element and the positioning scale of the turntable. 6 · The optical element measuring device according to item 1 of the scope of patent application, wherein: ", when measuring, first adjust the" turn angle "of the integrating sphere unit with the turntable according to the reference point of the base and then follow The positioning scale of the turntable adjusts the rotation angle of the bracket with the reference element of the bracket. 7 · An optical element measuring device, comprising: a base, a positioning scale is provided on a circumferential surface of the base; an integrating sphere unit is pivotally connected to the base, and the integrating sphere unit is provided There is a first reference element; and a bracket is provided on the base for holding an optical element. The base, the integrating sphere unit and the bracket are located on a concentric shaft, and the bracket is provided with a A second reference element for positioning the bracket. 8. The optical element measuring device according to item 7 of the scope of patent application, wherein: the integrating sphere unit includes an integrating sphere, an outer shell and an arm, and the product Page 16 200411161 6. Scope of patent application The ball is arranged in the casing, the casing system is pivotally connected to the base by the arm portion, and the first reference element is disposed on the arm portion. 9. The optical element measuring device according to item 8 of the scope of the patent application, wherein: the first reference element and the base ball are located on opposite sides of the base, respectively. I 〇 The optical element measuring device as described in item 7 of the scope of patent application, wherein the integrating sphere unit adjusts the rotation angle of the integrating sphere unit with the first reference element according to the positioning scale of the base. II. The optical element measuring device according to item 7 of the scope of patent application, wherein: the bracket is adjusted with the second reference element according to the positioning scale of the base and the rotation angle of the bracket. Page 17