200410883 玖、發明說明： 【發明所屬之技術領域】 本發明係關於在半導體製造線上的複數個處理步 以半導體晶圓的批量單位進行搬送的系統，尤其是 用複雜及多叉道的搬送通路有效地進行半導體晶圓 系統之控制裝置。 【先前技術】 在半導體裝置等的製造工廠中，對於半導體晶圓 淨、乾燥、蝕刻等的各處理步驟，係以批量為單位 各自分開的處理裝置來進行。在對於該批量進行著 理的處理裝置，作為保管場所併設有暫時保管欲搬 步驟的處理裝置的批量及從前步驟搬送來的批量用 櫃（儲存庫）。然後，各儲存庫分別具有固有的櫃子 用的進出入口 、吊車，藉由控制吊車而在櫃子與進 間移動批量。 又，各儲存庫係藉由軌道而形成連結，藉由在執 動著積載批量的無人搬送車（運載車輛），將半導體 批量搬送至下一處理步驟的指定的處理裝置。此種 搬送系統通常為自動化進行，以圖獲生產線的工作 提升。一般在半導體晶圓的批量搬送系統中，具有 握搬送系統全體的搬送指令用控制器；及由内部網 彼此的各部的控制器。此等具有進行在儲存庫將批 或卸載於運載車輛等的管理的出庫用控制器；及控 批量並進行搬送的運載車輛在連結各儲存庫間的執 92\ 瑞薩科技\了11290-925461-0501 驟間 關於使 的搬送 進行洗 而藉由 各項處 送至後 的搬送 、搬送 出入口 道上移 晶圓的 批量的 效率的 總體掌 路連接 量積載 制積載 道上的 200410883 動作的搬送用控制器。搬送指令用控制器係對各控制器發 出批量的搬送指令。 在此種搬送系統的基礎上，運載車輛積載收納有1份搬 送量的半導體晶圓的運載器，藉由在執道上行走，而將運 載器從搬送出發地的儲存庫的出庫口搬送至搬送目的地的 儲存庫的入庫口 。通常空載的運載車輛邊以空載的姿態在 執道上巡迴或待機，邊等待來自搬送指令用控制器的搬送 指令。 曰本專利特開2 0 0 2 - 3 3 3 7 1號公報揭示有此種搬送半導 體晶圓的搬送方法。該公報所揭示的搬送方法，係為沿著 懸吊於半導體製造線之無塵室的頂棚的呈縱、橫及斜向交 叉而配置的軌道行走的搬運機器人，根據控制信號的搬送 指示，選擇上述轨道中最短或最為鄰近的軌道而自動行走 的方法。 根據該公報所揭示的搬.送方法，沿著懸吊於無塵室的頂 棚的呈縱、橫及斜向交叉而配置的軌道行走的搬運機械 臂，根據控制信號的搬送指示，選擇最短或最為鄰近的軌 道而自動行走，因此，可改善製品的搬送通路，並且提升 搬送效率，尤其是可頻繁搬運複數個製品。 曰本專利特開2 0 0 2 - 1 1 0 7 6 6號公報揭示有此種搬送半導 體晶圓的搬送系統。該公報所揭示的搬送系統，係為使無 人搬送車沿著執道行走，而在搬送物的保管場所間搬送積 載於上述搬送車上的搬送物的類似構成的搬送系統，其包 含有：發出搬送物的搬送指令的搬送指令用控制器；進行 6 92\瑞薩科技\JR290-925461-0501 200410883 以接收到的搬送指令為條件發出安排車輛的要求，同時， 從搬送出發地的保管場所將搬送物搬出庫而積載於軌道上 的搬送車上的控制的出庫用控制器；及控制軌道上的搬送 車的運行，同時，接受從出庫用控制器發出的安排車輛的 要求，使軌道上的巡迴中或待命中的搬送車迎向搬送出發 地的保管場所的搬送用控制器。 根據該公報所揭示的搬送系統，因為具備發出搬送物的 搬送指令的搬送指令用控制器；以接收到的搬送指令為條 件發出安排車輛的要求的出庫用控制器；及接受安排車輛 的要求，使搬送車迎向搬送出發地的保管場所的搬送用控 制器，因此，藉由將運載車輛更為快速地安排於搬送出發 地的儲存庫而可減少等待時間，尤其是可縮短需要搬送時 搬送所要花費的時間。 然而，日本專利特開2 0 0 2 - 3 3 3 7 1號公報所揭示的搬送 方法，僅考慮搬送距離來選擇搬送路徑，而在該搬送路徑 的途中設有停止站點、移載站點等的情況，就無法正確選 擇搬送路徑。又，因為僅考慮搬送距離而未考慮搬送時間， 當即便搬送距離短但仍要選擇搬送時間長的搬送路徑時， 需要較長的搬送時間而無法有效進行半導體晶圓的搬送。 日本專利特開2 0 0 2 - 1 1 0 7 6 6號公報所揭示的搬送系統，不 過為用以控制搬送半導體晶圓的台車的呼叫的系統而已， 其無法有效地使積載著半導體晶圓的台車移動。 【發明内容】 本發明之目的在於，提供使移動在複雜且多叉道的搬送 7 92\瑞薩科技\JR290-925461-0501 200410883 通路的台車有效移動的搬送系統之控制裝置。 本發明之另一目的在於，提供使用距離及時間的所謂定 量指標而使台車有效移動的搬送系統之控制裝置。 本發明之又一目的在於，提供考慮故障路徑而使台車有 效移動的搬送系統之控制裝置。 本發明之再一目的在於，提供考慮阻塞路徑而使台車有 效移動的搬送系統之控制裝置。 本發明之再一目的在於，提供考慮表示作業順序的優先 度而使台車有效移動的搬送系統之控制裝置。 本發明之控制裝置，係於含有複數個分叉點、連接分叉 點彼此的搬送通路、設於分叉點間的站點及移動在從出發 站點至到達站點的搬送通路上的台車的搬送系統中，其控 制複數輛台車的移動。該控制裝置包括：記憶分叉點與站 點的位置關係的第1記憶部；基於位置關係算出從出發站 點至抵達站點的移動台車的搬送通路的第1算出模組；製 成算出的搬送通路的表示搬送狀態的資訊的製成模組；記 憶藉由製成模組所製成的表示複數輛台車的搬送狀態的資 訊的第2記憶部；在台車到達所算出的含於搬送通路内的 分叉點時，基於記憶於第2記憶部的資訊，算出從到達之 分叉點至抵達站點的台車的搬送通路的第2算出模組；及 製成藉由第2算出模組所算出的搬送通路的表示搬送狀態 的資訊，以記憶於第2記憶部的方式，控制製成模組及第 2記憶部的控制模組。 第1算出模組係基於記憶於第1記憶部的分叉點及站點 8 92\瑞薩科技 VFR290-925461 -0501 200410883 的位置關係，算出從出發站點至抵達站點的移動台車 送通路。製成模組係製成藉由第1算出模組所算出的 通路的表示搬送狀態的資訊（例如，台車的阻塞資訊） 2算出模組係基於記憶於第2記憶部的複數輛台車的 搬送狀態的資訊，在台車到達所算出的含於搬送通路 分叉點時，算出從到達之分叉點至抵達站點的台車的 通路。藉此，在從出發站點出發後而到達分叉站點時 度執行搬送路徑的再設定。為此，可反應該再設定時 送通路的阻塞資訊，而重新設定再度搬送路徑。其結 可有效使具有複雜且多叉道的搬送通路的搬送系統的 台車移動。 本發明之上述及其之目的、特徵、態樣及優點，藉 所附圖式相關連予以理解的有關本發明的詳細說明， 一目暸然。 【實施方式】 以下，參照圖式來說明本發明之實施形態。以下之 中，對於相同的零件則賦予相同的元件符號。此等的 及功能也相同。故，並不重複此等的詳細說明。 參照圖1 *來說明本貫施形態之搬送糸統之糸統構， 圖。具有複雜的搬送通路的自動搬送設備9為具有天 行走型的台車7的搬送設備。該自動搬送設備9係連 搬送設備控制裝置1 1，又，連接於屬上位電腦的搬送 指示裝置1 0。搬送設備控制裝置1 1係基於從搬送指 示裝置1 0接收到的資訊，來控制該自動搬送設備9。 92\ 瑞薩科技\了幻90-925461 -0501 的搬 搬送 。第 表示 内的 搬送 ，再 之搬 果， 多數 由與 應可 說明 名稱 化板 接於 指令 令指 又， 9 200410883 自動搬送設備9係為具有地板面行走型的台車的搬送設 備。 自動搬送設備9如圖1之俯視圖所示，其台車執道鐵軌 2係敷設於縱、橫及斜向。台車軌道鐵執2具有複數個的 分叉點3，藉由該分叉點3而將台車執道鐵執2分叉。在 分叉點3與分叉點3或分叉點3與台車停止點5之間，設 有儲存庫 1A〜1Z、 1AA、 1AB、 1AC。 參照圖2，詳細說明圖1所示一點虛線内的構成。如圖 2所示，該自動搬送設備9係在分叉點3與分叉點3之間 配置有批量收納用的儲存庫1。在配置有批量收納用儲存 庫1的部位，在台車軌道鐵執2上的2個部位設有儲存庫 前分叉點4。與連接分叉點3彼此的台車軌道鐵執2平行， 敷設連接儲存庫前移載點6，同時連接儲存庫前分叉點4 彼此的台車軌道鐵軌2。在連接儲存庫前分叉點4彼此的 台車軌道鐵軌2上，在對應該批量收納用儲存庫1的部位 設有儲存庫前移載點6。另外，如圖2所示，在連接分叉 點3彼此的台車軌道鐵軌2上，設有暫時使台車7停止的 台車停止點5。台車7係從如此之儲存庫1A〜1Z、1AA、1AB、 1 A C中的任一個，向著另一個的批量收納用儲存庫，使台 車7移動。該台車上積載著1份搬送量的晶圓。 參照圖3，來說明圖1所示自動搬送設備9的儲存庫名、 移載站點、儲存庫前分叉站點及儲存庫前合流站點。如圖 3所示，對各批量收納用儲存庫命名為S T K * * * ( *氺* =0 0 1〜0 2 9 )的儲存庫名。另外，移載站點則命名為S T 0 * 10 92\瑞薩科技\了11290-925461-0501 200410883 氺（氺*=01〜29)。另外，儲存庫前分叉站點及儲存庫前合 流站點則命名為S T 2氺*。如此命名完成後，如圖3所示， 即可不致重複來命名自動搬送設備9的移載站點、儲存 庫、儲存庫前分叉站點及儲存庫前合流站點。 參照圖4，顯示圖1所示自動搬送設備9的分叉及停止 站點S T 3氺*與停止站點S T 4 * *。如圖4所示，分叉及停 止站點係設於搬送通路的交叉的位置上。另外，停止站點 S T 4氺氺係設於分叉及停止站點S T 3 * *與其他的分叉及 停止站點S T 3氺氺的中間。 如上所述，如利用圖1〜圖4所說明之，本實施形態之 自動搬送設備9具有複數個站點、複數個分叉點及複數個 移載點。從搬送指令指示裝置1 0接收到的含有搬送出發地 儲存庫、搬送目的地儲存庫、批量批號、優先度的訊息的 搬送設備控制裝置1 1，係從搬送出發地儲存庫的移載站點 與搬送目的地儲存庫的移載站點開始進行搬送路徑的檢 索。又，後述中將詳述該搬送路徑的檢索。 圖5為顯示儲存庫機器的構成的立體圖。在批量收納用 儲存庫1，介由儲存庫吊車1 4，使用可從移載點1 3移載向 台車的移載裝料器8而將每一批量的晶圓移載於台車7 内。另外，也可從台車7將每一批量的晶圓移載於移載點 1 3。由儲存庫前分叉點4而從台車軌道鐵執2分叉的從台 車軌道鐵軌2，停車於儲存庫前移載點6，藉由移載裝料器 8的對台車的移載而按每一批量將晶圓收納於批量收納用 儲存庫1。 11 92\瑞薩科技 UR290-925461 -0501 200410883 圖1所示之搬送設備控制裝置1 1，具有與自動搬送設備 9的各設備通信用的介面部、基於從介面部輸入的資訊來 進行台車的移動控制的控制部、以及記憶由各種資料表格 及控制部所執行的程式的記憶部。該搬送設備控制裝置1 1 如可由一般的電腦系統來實現。更為詳細而言，該電腦系 統係由具備從各種的記錄媒體讀入或寫入資料和程式的驅 動裝置的電腦、顯示器等的輸出裝置及鍵盤和滑鼠等的輸 入裝置所構成。此種電腦除上述的記錄媒體的驅動裝置 外，還包括相互以匯流排連接的中央處理器（C P U ·· C e n t r a 1 P r o c e s s i n g U n i t (控制部））及記憶體和固定硬碟（記憶 部）。藉由中央處理器執行下載於記憶體的由複數個模塊構 成的程式，以實現控制搬送設備的功能。 參照圖6，來說明記憶於搬送設備控制裝置1 1之記憶部 的搬送要求表格。如圖6所示，搬送要求表格係按辨識搬 送要求用的每一編號，來記憶對應該要求的台車編號、搬 送出發地儲存庫名（From)與搬送目的地儲存庫名（To)、現 在的位置與現在的狀態以及優先度。優先度為「Q」較「S」 顯示高優先度。在狀態上具有「搬送中」、「等待安排車輛」、 「移載中」及「移動中」。移載中具有「在搬送出發地儲存 庫的移載」及「在搬送目的地儲存庫的移載」。 參照圖7，來說明記憶於搬送設備控制裝置1 1之記憶部 的台車資料表格。如圖7所示，台車資料表格係按辨識台 車用的每一編號，來記憶台車的狀態、現在設定於該台車 的搬送出發地站點與搬送目的地站點、現在的分叉點、現 12 92\瑞薩科技\JR290-925461-0501 200410883 在的目的地點、現在的位置、狀態以及優先度。台車的狀 態具有「正常」、「故障」、「空載台車」的3種類。 參照圖8，來說明記憶於搬送設備控制裝置1 1之記憶部 的搬送路徑表格。如圖8所示，該搬送路徑表格係於搬送 出發地站點與搬送目的地站點的每一組合，來記憶中轉的 站點名。在該中轉的站點具有中轉站（1 )〜中轉站（1 1 )。在 各個的搬送出發地站點與搬送目的地站點的每一組合，記 憶著距離、距離優先順位、站點數、站點優先順位、搬送 時間及動作次數。例如，在從S T 0 0 1向著S T 0 0 2移動的搬 送路徑上，設定有作為中轉站（1)的ST 201、作為中轉站（2) 的ST301及作為中轉站（3)的ST203。另外，在從ST001向 著ST003移動的搬送路徑上，具有經由ST201、ST301、 ST203、ST204、ST302 及 ST205 的路徑；經由 ST2(H、ST3(H、 ST203、 ST002、 ST204、 ST302 及 ST205 的路徑；以及經由 ST2(H、 ST3(H、 ST4(H、 ST306、 ST209、 ST005、 ST210、 ST302 及S T 2 0 5的路徑的3個路徑。另外，對應於各個路徑，按 通過的站點數小的順序，來設定站點數優先順位。 參照圖9，來說明記憶於搬送設備控制裝置1 1之記憶部 的搬送距離表格。如圖9所示，該搬送距離表格係於屬開 始點的站點與屬結束點的站點的每一組合，來記憶距離、 時間通過台數及通過禁止旗標。時間通過台數係當成為所 預先規定的臨限值以上的台數時，被判斷為該通路受到阻 塞。在通過禁止旗標被設定（令設定為「1」、重設為「0」） 時，則表示在該搬送通路發生故障及維修等而無法通過。 13 92\瑞薩科技\JR290-925461-0501 200410883 參照圖1 0，來說明記憶於搬送設備控制裝置1 1之記憶 部的搬送路徑選擇規則。如圖1 0所示，該搬送路徑選擇規 則係記憶著使搬送時間優先的規則（1 )、使搬送距離優先的 規則（2 )及使經由的站點數優先的規則（3 )。例如，搬送路 徑選擇規則之規則（1 )係使搬送時間優先，而不優先搬送距 離及站點數。 參照圖1 1，來說明記憶於搬送設備控制裝置1 1之記憶 部的空載台車要求區域設定表格。如圖11所示，空載台車 要求區域設定表格係在各站點的每一站’記憶者顯不要求 停在哪一站點的空載台車用的優先順位。例如，如圖1 1 所示，在站點S Τ 0 0 1的情況，係將停在站點S Τ 2 0 0的空載 台車作為優先（1 )，而將停在站點ST 2 0 1的空載台車作為優 先（2 )，一直到優先（5 )來進行設定。也就是說，在站點 ST 0 0 1要求空載台車時，以較為有利的順序來記憶優先（1 ) 〜優先（5 )的站點名。 參照圖1 2，來說明記憶於搬送設備控制裝置1 1之記憶 部的空載台車迴繞路徑設定表格。如圖1 2所示，該空載台 車迴繞路徑設定表格係設定使空載台車以哪一種路徑進行 迴繞用的表格。例如，在台車編號為「1」的台車成為空載 台車的情況，設定為迴繞ST 3 0 0、ST301、ST 3 0 2及ST303 的方式的迴繞路徑。例如，也可以多數空載台車圍繞著搬 送要求的頻率高的站點的周圍的方式來設定該空載台車迴 繞路徑設定表格。 參照圖1 3及圖1 4，由搬送設備控制裝置1 1之控制部所 14 92\瑞薩科技 \JR290-925461-0501 200410883 執行的程式，其關係到實載台車搬送處理，而具有如下的 控制構造。 在步驟（以下簡稱步驟為S) 1 0 0，搬送設備控制裝置1 1 接收來自屬於上位電腦的搬送指令指示裝置1 0。此時，搬 送設備控制裝置1 1接收F r 〇 m點、T 〇點、批量編號及優先 度的指令内容。在S 1 0 2，搬送設備控制裝置1 1基於所接 收的含於搬送指令内的優先度來判斷優先度是否高。當優 先度高時（S 1 0 2中為Y E S )，則處理移向S 1 0 4。若非如此的 話（S 1 0 2中為N 0 )，則處理移向S 1 0 6。在S 1 0 4，搬送設備 控制裝置1 1將搬送要求表格（參照圖6 )的要求表值中的優 先度登錄為「Q」。 在S 1 0 6，搬送設備控制裝置1 1登錄搬送要求表格（參照 圖8 )的最初的F r 〇 m點與最初的T 〇點。此時，登錄從屬於 上位電腦的搬送指令指示裝置1 0接收的F r 〇 m點與T 〇點。 在S 1 0 8，搬送設備控制裝置1 1開始進行搬送路徑的選 擇。在S 1 1 0，搬送設備控制裝置1 1登錄搬送要求表格（參 照圖8)的現在的From點與下一 To點。在SI 1 2，搬送設備 控制裝置1 1確認搬送路徑選擇規則（參照圖1 0 )。此時， 優先確認搬送時間、搬送距離及站點數中任一者。而在 S 1 1 4，搬送設備控制裝置1 1參照搬送路徑表格（參照圖 8 )，並根據搬送路徑選擇規則（參照圖1 0 )，從現在的F r 〇 m 點與下一 T 〇點來決定中轉點。在S 1 1 6，搬送設備控制裝 置1 1參照搬送距離表格（參照圖9 )，檢知阻塞狀況。此時， 當搬送距離表格（參照圖9 )的時間通過台數為所預先規定 15 92\瑞薩科技\JR290-925461-0501 200410883 的台數以上時，檢測為有阻塞。當檢測為有阻塞時（S 1 1 6 中為Y E S )，則處理移向S 1 1 8。若非如此的話（S 1 1 6中為 N 0 )，則處理移向圖1 4之S 1 2 2。 在S 1 1 8，搬送設備控制裝置1 1判斷阻塞點是否對應於 選擇路徑。當阻塞點對應於選擇路徑時（S 1 1 8中為Y E S )， 則處理移向S 1 2 0。若非如此的話（S 1 1 8中為N 0 )，則處理 移向S 1 2 2。 在S 1 2 0，搬送設備控制裝置1 1參照搬送路徑表格（參照 圖8 )，並根據搬送路徑選擇規則（參照圖1 0 )，從現在的 F r 〇 m點與下一 T 〇點來決定中轉點。此後，處理移向圖1 4 之 S1 28。 參照圖1 4，在S1 2 2，搬送設備控制裝置1 1參照搬送距 離表格（參照圖9 )，檢測故障狀況。此時，檢知設定為圖9 所示的通過禁止旗標的（1 )的搬送路徑發生故障。當檢測為 有故障狀況時（S 1 2 2中為Y E S )，則處理移向S 1 2 4。若非如 此的話（S 1 2 2中為N 0 )，則處理移向S 1 2 8。 在S 1 2 4，搬送設備控制裝置1 1判斷通過禁止點是否對 應於選擇路徑。當通過禁止點對應於選擇路徑時（S 1 2 4中 為Y E S )，則處理移向S 1 2 6。若非如此的話（S 1 2 4中為N 0 )， 則處理移向S 1 2 8。在S 1 2 6，搬送設備控制裝置1 1參照搬 送路徑表格（參照圖8 )，並根據搬送路徑選擇規則（參照圖 1 0 )，從現在的F r 〇 m點與下一 T 〇點來決定中轉點。在 S 1 2 8，搬送設備控制裝置1 1係於搬送路徑表格（參照圖8 ) 的從現在點至最終點的各中轉路徑上加上1。在S1 3 0，搬 16 92\瑞薩科技 VTR290-925461 -0501 200410883 送設備控制裝置1 1於台車7執行動作指示。 在S 1 3 2，搬送設備控制裝置1 1，判斷是否接收到來自 台車7的到達分叉點的訊息。當接收到來自台車7的到達 分叉點的訊息時（S 1 3 2中為Y E S )，則處理移向S 1 3 4。若非 如此的話（S 1 3 2中為N 0 )，則處理移向S 1 3 2，等待來自台 車7的到達分叉點的訊息。 在S 1 3 4，搬送設備控制裝置1 1，判斷接收到來自台車 的分叉點是否最終點。當為最終點時（S 1 3 4中為Y E S )，則 處理移向S 1 3 6。若非如此的話（S 1 3 4中為N 0 )，則處理移 向圖1 3之S 1 0 8，在進入1個點的狀態再度開始搬送路徑 的選擇。 在S 1 3 6，搬送設備控制裝置1 1開放台車。在S 1 3 8，搬 送設備控制裝置1 1作為空載台車使其開始回送。此時，以 記憶於圖1 2所示之空載台車迴繞路徑設定表格的站點順 序執行空載台車的回送。 參照圖1 5，由搬送設備控制裝置1 1執行的空載台車回 送處理，具有如下的控制構造。又，在圖15及圖16所示 的流程中，對於與前述圖1 3及圖1 4所示的流程相同的處 理則賦予相同的步驟編號。而關於此等的處理也相同。故， 在此並不重複此等的詳細說明。 在S 2 0 0，搬送設備控制裝置1 1參照空載台車迴繞路徑 設定表格（參照圖1 2 )，依空載台車行走路徑執行空載台車 的回送。此後，S108〜S132的處理，係執行與前述實載台 車搬送處理相同的處理，避免阻塞點及故障點，依搬送路 17 92\瑞薩科技\JR290-925461 -0501 200410883 徑選擇規則（參照圖1 ο)來選擇搬送路徑。 參照圖1 6，在S 2 0 2，搬送設備控制裝置1 1當接收到來 自空載台車的到達分叉點的訊息時，判斷是否有對該台車 的預約。在有預約的情況（S 2 0 2中為Y E S )，則處理移向 S 2 0 4。若非如此的話（S 2 0 2中為N 0 )，則處理移向圖1 5之 S1 08 ° 在S 2 0 4，搬送設備控制裝置1 1，指示將台車移動至預 約的F r 〇 m站點。也就是說，因為有晶圓的搬送預約，即依 該預約指示移動至屬移載晶圓用的站點的From站點。 在S 2 0 6，搬送設備控制裝置1 1，作為搬送台車開始該 台車的移動。 參照圖1 7，由搬送設備控制裝置1 1執行的台車預約處 理，具有以下的控制構造。 在S 3 0 0，搬送設備控制裝置1 1，接收來自屬於上位電 腦的搬送指令指示裝置1 0的搬送指令。此時，接收F r 〇 m 點、To點、批量編號及優先度的搬送指令。 在S 3 0 2，搬送設備控制裝置1 1確認接收的搬送指令中 的From點的From儲存庫。在S304，搬送設備控制裝置11 參照搬送要求表格（參照圖6 )，判斷為搬送中的台車，且 其最終點是否存在為From站點的台車。若存在如此的台車 (S 3 0 4中為YES)，則處理移向S 3 0 6。若非如此的話（S3 04 中為N 0 )，則處理移向S 3 0 8。在S 3 0 6，搬送設備控制裝置 1 1等待抵達台車而執行預約。其後結束處理。 在S 3 0 8，搬送設備控制裝置1 1參照空載台車要求區域 18 92\瑞薩科技 UR290-925461 -0501 200410883 設定表格（參照圖1 1 )，判斷在接近F r 〇 m站點的站點是否 存在台車。若在如此的站點存在台車（S 3 0 8中為Y E S )，則 處理移向S 3 1 4。若非如此的話（S 3 0 8中為N 0 )，則處理移 向 S3 1 0。 在S 3 1 0，搬送設備控制裝置1 1參照搬送要求表格（參照 圖6)，判斷為搬送中的台車，且其最終點是否存在為From 站點的台車。當存在如此的台車時（S 3 1 0中為Y E S )，則處 理移向S 3 1 2。若非如此的話（S 3 1 0中為N 0 )，則處理移向 S 3 0 8 ° 在S 3 1 2，搬送設備控制裝置1 1等待抵達台車而執行預 約處理。其後結束處理。 在S 3 1 4，搬送設備控制裝置1 1執行預約處理。進行預 約台車的回送處理。 又，除圖1 3〜圖1 7所示流程的處理外，搬送設備控制 裝置1 1還基於介由介面而接收到來自自動搬送設備9的資 訊，執行插入處理。該插入處理當在搬送通路上的任一通 路發生故障時，設定搬送距離表格（參照圖9 )的通過禁止 旗標（將「0」設定為「1」）。另外，當接收到表示故障恢 復的資訊時，則重設搬送距離表格（參照圖9 )的通過禁止 旗標（將「1」重設為「0」）。 基於如上的構造及流程，說明本實施形態之搬送系統的 動作。搬送設備控制裝置1 1接收來自屬於其上位電腦的搬 送指令指示裝置1 0的搬送指示（S 1 0 0 )。此時，接收含有屬 搬送出發地儲存庫的F r 〇 m點、屬搬送目的地儲存庫的T 〇 19 92\瑞薩科技 \JR290-925461 -0501 200410883 點、批量編號及優先度的訊息。基於所接收的指令内容， 從搬送出發地儲存庫（例如：S Τ Κ 0 0 1 ) 1 A的移載站點（例 如：S T 0 0 1 )與搬送目的地儲存庫（例如：S T K 0 0 2 ) 1 B的移載 站點（例如：S T 0 0 2 )開始搬送路徑的檢索（S 1 0 8 )。確認搬送 路徑選擇規則（參照圖1 0 )( S 1 1 2 )，根據按優先度順序排列 替換的搬送要求表格，來按該搬送要求的編號順序檢索搬 送路徑。若根據優先順序而輪到搬送順序的話，則根據圖 1 7所示台車預約處理進行台車的準備。在該搬送中的搬送 目的地站點與自己要求的搬送出發地站點一致的情況 (S304中為YES)，因為無進行台車的預約與準備的必要， 而等待抵達台車執行預約（S 3 0 6 )。在其他之搬送中的搬送 站點與自己要求的搬送出發地站點不一致的情況（S 3 0 4中 為N 0 )，則有台車預約的必要。參照空載台車要求區域設 定表格（參照圖1 1 )，判斷在接近F r 〇 m站點的站點是否存 在於台車資料表格（參照圖7 )的空台車的下一站點 (S 3 0 8 )。若存在的情況（S 3 0 8中為Y E S )，則進行預約處理 而使預約台車回送處理（S 3 1 4 )。當執行有該S 3 1 4的處理 時，則執行圖1 5及圖1 6所示空載台車回送處理。 為移動至搬送目的地站點（例如：S T 0 0 1 )，檢索從自己 的站點至搬送目的地站點的搬送路徑。此時，檢索記載於 搬送路徑表格（參照圖8 )的F r 〇 m - Τ 〇，並根據搬送路徑選擇 規則（參照圖1 0 )，來決定搬送路徑。並根據決定的搬送路 徑而於搬送距離表格（參照圖9 )的使用路徑加上1。在此， 視所計之數如1 0以上的路徑為阻塞中或阻塞，而進行不同 20 92\瑞薩科技 VFR290-925461 -05 01 200410883 的路徑的檢索（S118中為YES、而進入S120)。另外 在搬送途中搬送台車發生故障等路徑被封鎖的情況 距離表格（參照圖9 ))的旗標，在通過禁止點對應於 則的情況選擇不同的路徑（S 1 2 4中為Y E S，而進入 在執行搬送而到達下一分叉點時，進行再次的路 索。這對應於從圖13及圖14、圖15及圖16的S1 S 1 0 8的循環路。在進行再次的路徑檢索時，從搬送 格（參照圖9 )的使用路徑減去1。也就是說，因為有 變的情況，而成為從迄今為止設定的路徑的搬送距 (參照圖9 )的使用路徑減去1。當藉由在每次到達如 一分叉點時反覆執行進行再度路徑檢索的作業而到 點時（S 1 3 4中為Y E S )，即於搬送路徑表格（參照圖 送路徑動作次數上加上1，同時，對於搬送時間寫 作次數X搬送時間+搬送時間）+ (動作次數+1 ) }。此 動作時間代入某一固定週期如1 9次或9 9次，於乘 次數的搬送時間代入此等的1 9次或9 9次的平均搬 間，而於加上此等的搬送時間代入2 0次或1 0 0次的 間。也就是說，藉由演算最近的2 0次或1 0 0次的搬 的平均值，可更為正確地反應實時變動的搬送路徑 時間。 如上所述，根據本實施形態之搬送系統，可有效 設於具有複雜組入的搬送路徑的製造線的搬送系統 輛台車。也就是說，在設定搬送路徑的情況，考慮 離、搬送時間、故障狀況、阻塞狀況來選擇搬送路 92\ 瑞薩科技\了11290-925461-0501 ，參照 (搬送 選擇規 S126)° 徑檢 3 4返回 距離表 路徑改 離表格 此之下 達最終 8 )的搬 入{(動 時，於 上動作 送時 搬送時 送時間 的搬送 控制敷 的複數 搬送距 徑，可 21 200410883 以加上搬送等待時間與搬送時間的時間成為最短的方式而 有效設定搬送路徑。尤其是，習知一旦從搬送出發地站點 出發的台車，由此時所定的通路而進行至屬最終目的地的 搬送出發地站點的搬送，當在搬送的途中的時點前面行走 中的台車發生故障等而停止的情況，在該故障被解除前只 能停止。另外，在該台車的前方出現阻塞的情況，在該阻 塞被解消前只能停止。然而，根據本實施形態之搬送系統， 在從搬送出發地站點出發後而到達分叉站點時，執行再度 搬送路徑的再設定。為此，反應該再設定時之搬送路徑的 故障狀況及阻塞狀況，可重新設定再度搬送路徑。其結果， 在具有複雜且多叉道的搬送通路的搬送系統中可有效移動 複數輛的台車。 以上，雖有詳細說明了本發明，但此僅為例示而已，並 未有任何限定，發明之精神與範圍僅是藉由所附的申請專 利範圍所限定。 【圖式簡單說明】 圖1為本發明之實施形態之搬送系統之系統構成圖。 圖2為將圖1之系統構成圖的局部放大的圖。 圖3為在圖1之系統構成圖記載儲存庫及移載站點名的 圖。 圖4為在圖1之系統構成圖記載分叉站點名及停止站點 名的圖。 圖5為顯示儲存庫的構成的立體圖。 圖6為表示記憶於搬送設備控制裝置之記憶部的搬送要 22 92\瑞薩科技\JR290-925461 -0501 200410883 求表格的圖。 圖7為表示記憶於搬送設備控制裝置之記憶部的台車資 料表格的圖。 圖8為表示記憶於搬送設備控制裝置之記憶部的搬送路 徑表格的圖。 圖9為表示記憶於搬送設備控制裝置之記憶部的搬送距 離表格的圖。 圖1 0為表示記憶於搬送設備控制裝置之記憶部的搬送 路徑選擇規則的圖。 圖1 1為表示記憶於搬送設備控制裝置之記憶部的空載 台車要求區域設定表格的圖。 圖1 2為表示記憶於搬送設備控制裝置之記憶部的空載 台車迴繞路徑設定表格的圖。 圖1 3及圖1 4為顯示由搬送設備控制裝置之控制部所執 行的實載台車搬送處理的控制步驟順序的流程圖。 圖1 5及圖1 6為顯示由搬送設備控制裝置之控制部所執 行的空載台車回送處理的控制步驟順序的流程圖。 圖1 7為顯示由搬送設備控制裝置之控制部所執行的台 車預約處理的控制步驟順序的流程圖。 (元件符號說明） 1 A〜1Z、1AA、1AB、1 AC 儲存庫 1 儲存庫 2 台車軌道鐵軌 3 分叉點 23 92\瑞薩科技\JR290-925461-0501 200410883 4 儲存庫前分叉點 5 台車停止點 6 儲存庫前移載點 7 台車 8 移載裝料器 9 自動搬送設 10 搬送指令指示裝置 11 搬送設備控制裝置200410883 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a system for transferring a plurality of processing steps on a semiconductor manufacturing line in batch units of semiconductor wafers, and is particularly effective with a complex and multi-lane conveying path Control device for semiconductor wafer system. [Prior Art] In manufacturing plants such as semiconductor devices, processing steps such as cleaning, drying, and etching of semiconductor wafers are performed by separate processing devices in batch units. The processing device that handles the batches is provided as a storage place, and a batch cabinet (storage) for temporarily storing the batches of processing devices to be transferred and the batches transferred from the previous steps are provided. Then, each storage room has its own cabinet entrance and exit, and a crane, and the batch is moved between the cabinet and the entrance by controlling the crane. In addition, each of the storage tanks is connected by a track, and an unmanned transfer vehicle (carrying vehicle) that is carrying a batch is transferred to transfer a semiconductor batch to a designated processing device in the next processing step. This type of transfer system is usually automated in order to improve the work of the production line. Generally, a batch transfer system of a semiconductor wafer includes a transfer command controller that holds the entire transfer system, and a controller for each unit of the intranet. These have outbound controllers that manage the batches or unloading in the storage warehouses to the delivery vehicles, etc .; and the implementation of the delivery vehicles that control the batches and transfers between the storage warehouses. 92 Renesas Technology 11290-925461 -0501 The overall palm-path connection quantity of the efficiency of the batches of the wafers which are washed by the transfer, and then transferred to and from the entrance and exit lanes, and the total amount of palms on the loading lanes are controlled by the 200410883 operation. . The controller for the transfer instruction issues a batch transfer instruction to each controller. On the basis of such a transfer system, a carrier vehicle stores a carrier containing one semiconductor wafer in a transport amount, and the carrier is transported from a warehouse exit of a transport departure place to a transport by walking on a lane. The entrance to the destination's repository. Normally, an unloaded carrier vehicle patrols or waits on the road in an unloaded attitude while waiting for a transfer instruction from the transfer instruction controller. Japanese Patent Application Laid-Open No. 2000- 3 3 3 71 discloses such a semiconductor wafer transfer method. The conveying method disclosed in this publication is a conveying robot that moves along a track that is vertically, horizontally, and diagonally intersected along the ceiling of a clean room suspended from a semiconductor manufacturing line, and is selected based on the conveying instruction of the control signal. A method for automatically walking the shortest or the nearest adjacent track among the above tracks. According to the move disclosed in the bulletin. The conveying method is based on the conveying instruction of the control signal, the conveying robotic arm that travels along the vertical, horizontal and diagonal crossings suspended from the ceiling of the clean room. Therefore, the product conveyance path can be improved and the conveyance efficiency can be improved. In particular, a plurality of products can be frequently conveyed. Japanese Patent Application Laid-Open No. 2000-2101106 discloses such a semiconductor wafer transfer system. The conveying system disclosed in this publication is a conveying system of a similar structure for conveying the conveyed objects stored on the conveyance vehicle between the storage places of the conveyed objects in order to make the unmanned conveying vehicle travel along the road. The conveying system includes: Controller for the transport instruction of the transport instruction of the transported object; perform 6 92 \ Renesas Technology \ JR290-925461-0501 200410883 to issue a request for arranging the vehicle on the condition of the received transport instruction, and from the storage place at the place of departure The outbound controller that is controlled by a transport vehicle that is transported out of the warehouse and stored on the track; and controls the operation of the transport vehicle on the track. At the same time, it accepts the request from the controller for arranging vehicles to make the The transport vehicle on tour or on standby approaches the transport controller of the storage place at the transport departure point. According to the transportation system disclosed in the bulletin, a transportation instruction controller for issuing a transportation instruction for a conveyed article is provided; a controller for an outbound warehouse that issues a request to arrange a vehicle based on the received transportation instruction; and a request to arrange a vehicle, The transportation controller that moves the transportation vehicle toward the storage place at the transportation departure point can reduce the waiting time by arranging the transportation vehicle more quickly in the storage place at the transportation departure point, especially when the transportation is required. The time it takes. However, the conveying method disclosed in Japanese Patent Laid-Open No. 2000-2-3 3 3 7 1 selects a conveying route by considering only a conveying distance, and a stop station and a conveying station are provided in the middle of the conveying path. In such cases, the transport route cannot be selected correctly. In addition, because only the transfer distance is taken into consideration, and the transfer time is not considered, when a transfer route with a long transfer time is to be selected even if the transfer distance is short, a long transfer time is required and the semiconductor wafer cannot be efficiently transferred. The conveying system disclosed in Japanese Patent Laid-Open No. 2000-2 1 10 7 6 is only a system for controlling the call of a trolley for conveying semiconductor wafers, and it cannot effectively carry semiconductor wafers on board. Trolley moves. [Summary of the Invention] The object of the present invention is to provide a control system for a conveying system for efficiently moving a trolley in a complex and multi-lane conveyance 7 92 \ Renesas Technology \ JR290-925461-0501 200410883 passage. Another object of the present invention is to provide a control system for a transfer system that uses a so-called quantitative index of distance and time to efficiently move a trolley. It is still another object of the present invention to provide a control system for a transfer system that efficiently moves a trolley in consideration of a failure path. It is still another object of the present invention to provide a control system for a conveyance system that efficiently moves a trolley in consideration of a blocked path. It is still another object of the present invention to provide a control system for a transport system that allows a trolley to be efficiently moved in consideration of a priority indicating a work order. The control device of the present invention is a transport path including a plurality of bifurcation points, connecting the bifurcation points to each other, a station provided between the bifurcation points, and a trolley moving on the transport path from the departure station to the arrival station. In the transportation system, it controls the movement of a plurality of trolleys. The control device includes: a first memory unit that memorizes the positional relationship between the bifurcation point and the station; a first calculation module that calculates the transport path of the mobile trolley from the departure station to the arrival station based on the positional relationship; A production module for the information indicating the transport status of the conveyance path; a second memory unit that stores the information indicating the transport status of a plurality of carts made by the production module; the calculated information included in the transport path when the cart arrives At the time of the bifurcation point inside, based on the information memorized in the second memory unit, a second calculation module for calculating the transport path from the reached bifurcation point to the trolley arriving at the station; The calculated conveying path information indicating the conveying state is controlled to be stored in the second storage unit, and the control module and the control module of the second storage unit are controlled. The first calculation module is based on the bifurcation point memorized in the first memory and the position relationship of the station 8 92 \ Renesas Technology VFR290-925461 -0501 200410883, and calculates the mobile trolley delivery path from the departure station to the arrival station. . The production module is made up of information indicating the conveyance state (for example, the blockage information of the trolley) through the path calculated by the first calculation module. 2 The calculation module is made based on the transportation of a plurality of trolleys stored in the second memory. When the trolley reaches the calculated bifurcation point included in the transport path, the state information is used to calculate the path from the bifurcation point to the trolley at the station. As a result, the transport path is reset when the bifurcation station is reached after departing from the departure station. For this reason, the congestion information of the transmission path at the time of resetting can be reflected, and the retransmission path can be reset. As a result, the trolley of the transport system having a complicated and multi-lane transport path can be effectively moved. The above description of the present invention and its objects, features, aspects, and advantages can be understood at a glance by the detailed description of the present invention which is understood by referring to the attached drawings. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following, the same component symbols are assigned to the same parts. These and functions are also the same. Therefore, these detailed descriptions are not repeated. The structure of the transport system in the present embodiment will be described with reference to FIG. 1 *. The automatic conveying equipment 9 having a complicated conveying path is a conveying equipment having a trolley 7 of a traveling type. The automatic transfer equipment 9 is connected to a transfer equipment control device 11 and a transfer instruction device 10 connected to a host computer. The transport equipment control device 11 controls the automatic transport equipment 9 based on the information received from the transport instruction device 10. 92 \ Renesas Technology \ Removal of 90-925461 -0501. The conveyance in the first indication, and most of the results, are mostly due to the name of the plate, which is connected to the order. 9 200410883 The automatic conveying device 9 is a conveying device of a trolley with a floor surface walking type. As shown in the top view of FIG. 1, the automatic conveying equipment 9 is provided with the trolley rails 2 arranged longitudinally, horizontally and diagonally. The trolley rail iron 2 has a plurality of fork points 3, and the trolley rail iron 2 is branched by the branch points 3. Between the fork point 3 and the fork point 3, or between the fork point 3 and the trolley stop point 5, there are banks 1A to 1Z, 1AA, 1AB, and 1AC. The structure within a one-dot chain line shown in FIG. 1 will be described in detail with reference to FIG. 2. As shown in FIG. 2, the automatic transfer device 9 is provided with a storage 1 for batch storage between the branch point 3 and the branch point 3. A storage front fork point 4 is provided at a portion where the storage bin 1 for bulk storage is arranged, and at two portions on the trolley rail holder 2. In parallel with the trolley rail iron 2 connecting the fork points 3 to each other, a trolley track rail 2 connecting the forklift point 4 in front of the storage and laying the forklift track 4 in front of the storage is laid. On the trolley rails 2 connecting the fork points 4 in front of the storages, a storage front transfer point 6 is provided at a position corresponding to the storage 1 for bulk storage. As shown in Fig. 2, a trolley stop point 5 for temporarily stopping the trolley 7 is provided on the trolley rail 2 that connects the bifurcation points 3 to each other. The dolly 7 moves the dolly 7 from any one of the storages 1A to 1Z, 1AA, 1AB, and 1 AC to the other batch storage repository. One wafer is transferred on this trolley. Referring to FIG. 3, the storage name, transfer site, front fork site, and front merge site of the automatic transfer device 9 shown in FIG. 1 will be described. As shown in FIG. 3, each batch storage library is named a storage name of STK * * * (* 氺 * = 0 0 1 to 0 2 9). In addition, the transfer site is named S T 0 * 10 92 \ Renesas Technology \ Leed 11290-925461-0501 200410883 氺 (氺 * = 01 ~ 29). In addition, the pre-repository bifurcation site and the pre-repository confluence site are named S T 2 氺 *. After the naming is completed in this way, as shown in FIG. 3, the transfer site, the storage house, the storage site before the storage site, and the storage site before the storage site of the automatic transfer device 9 can be named repeatedly. Referring to FIG. 4, the bifurcation and stop stations S T 3 氺 * and stop stations S T 4 * * of the automatic transfer device 9 shown in FIG. 1 are shown. As shown in Fig. 4, the bifurcation and stop stations are provided at positions where the conveyance paths cross. In addition, the stop station S T 4 氺 氺 is located between the branch and stop stations S T 3 * * and other fork and stop stations S T 3 氺 氺. As described above, as described with reference to Figs. 1 to 4, the automatic transfer device 9 of this embodiment has a plurality of stations, a plurality of branch points, and a plurality of transfer points. The transfer device control device 1 1 containing the information of the transfer origin storage, transfer destination storage, batch lot number, and priority received from the transfer instruction instructing device 10 is a transfer site from the transfer departure storage. The search of the transfer path is started with the transfer site of the transfer destination repository. The retrieval of the transport route will be described in detail later. FIG. 5 is a perspective view showing a configuration of a storage machine. In the batch storage warehouse 1, a wafer loader 8 is used to transfer each batch of wafers to each other using a transfer loader 8 which can be transferred from the transfer point 13 to the trolley via the warehouse crane 14. In addition, each batch of wafers may be transferred from the trolley 7 to the transfer point 1 3. From the bifurcation point 4 at the front of the warehouse, and from the trolley rail 2 at the forklift rail, the bifurcation from the trolley rail 2 is stopped at the transfer point 6 in front of the warehouse, and is pressed by the transfer of the trolley 8 The wafers are stored in the batch storage library 1 for each batch. 11 92 \ Renesas Technology UR290-925461 -0501 200410883 The conveying equipment control device 11 shown in FIG. 1 has a facing surface for communication with each device of the automatic conveying equipment 9 and performs a trolley based on information input from the facing surface. A control section for movement control, and a storage section for storing programs executed by various data tables and control sections. The conveying equipment control device 1 1 can be realized by a general computer system, for example. More specifically, the computer system is composed of an output device such as a computer having a drive device for reading and writing data and programs from various recording media, a display, and an input device such as a keyboard and a mouse. In addition to the drive device for the recording medium described above, this type of computer also includes a central processing unit (CPU ·· C entra 1 Processing Unit (control unit)), a memory and a fixed hard disk (memory unit) connected to each other by a bus. ). The central processing unit executes a program composed of a plurality of modules downloaded in the memory to realize the function of controlling the transport equipment. Referring to Fig. 6, a transfer request table stored in the storage section of the transfer device control device 11 will be described. As shown in FIG. 6, the transfer request form stores the number of the cart corresponding to the request, the name of the storage place of the transfer (From), the name of the storage place of the transfer (To), and the current number for each number used to identify the transfer request. Position and current status and priority. "Q" shows higher priority than "S". The status includes "Transferring", "Waiting for Arranged Vehicles", "Transferring" and "Moving". The transfer includes "transfer to the storage at the departure point" and "transfer to the storage at the transfer destination". Referring to Fig. 7, a trolley data table stored in the storage unit of the transporting device control device 11 will be described. As shown in Fig. 7, the trolley data table memorizes the state of the trolley according to each number used to identify the trolley, and is currently set at the transport departure station and transport destination station of the trolley, the current branch point, and the current 12 92 \ Renesas Technology \ JR290-925461-0501 200410883 The destination point, current position, status, and priority at. There are three types of trolleys: "normal", "defective", and "no-load trolley". Referring to Fig. 8, a description will be given of a transfer path table stored in the storage unit of the transfer device control device 11. As shown in FIG. 8, the transfer route table is a combination of the transfer destination station and the transfer destination station to memorize the transit station name. The transfer station includes a transfer station (1) to a transfer station (1 1). For each combination of the destination station and destination station, the distance, distance priority order, number of stations, station priority order, transfer time, and number of operations are memorized. For example, on the transport path moving from ST 0 0 1 to ST 0 0 2, ST 201 as the transfer station (1), ST301 as the transfer station (2), and ST301 as the transfer station (3) are set. ST203. In addition, the transport path moving from ST001 to ST003 has a path via ST201, ST301, ST203, ST204, ST302, and ST205; a path via ST2 (H, ST3 (H, ST203, ST002, ST204, ST302, and ST205); And 3 routes via ST2 (H, ST3 (H, ST4 (H, ST306, ST209, ST005, ST210, ST302, and ST 2 0 5). In addition, corresponding to each route, the number of passing stations is small. In order, set the priority of the number of stations. Referring to Fig. 9, the transport distance table stored in the storage section of the transport device control device 11 will be described. As shown in Fig. 9, the transport distance table is for the station belonging to the starting point. Each combination with the station that belongs to the end point memorizes the distance, the number of time passes, and the pass prohibition flag. The number of time passes is judged to be the number of units when the number exceeds the predetermined threshold. The path is blocked. When the pass prohibition flag is set (set to "1" and reset to "0"), it means that the transport path is unable to pass due to malfunction, maintenance, etc. 13 92 \ Renesas Technology \ JR290-925461-0501 200410883 Referring to FIG. 10, a description will be given of a transportation path selection rule stored in a storage unit of the transportation equipment control device 11. As shown in FIG. 10, the transportation path selection rule memorizes a rule that prioritizes the transportation time (1), The rule (2) that prioritizes the transport distance and the rule (3) that prioritizes the number of stations passed. For example, the rule (1) of the transport route selection rule prioritizes the transport time without prioritizing the transport distance and the number of stations. Referring to FIG. 11, a description is provided of the no-load trolley request area setting table stored in the memory section of the conveying device control device 11. As shown in FIG. 11, the no-load trolley request area setting table is at each station of each station ' The memorizer does not require the priority order for the no-load trolleys parked at which station. For example, as shown in FIG. 1, in the case of the station S Τ 0 0 1, the system will stop at the station S Τ 2 0 The zero-load trolleys at 0 are given priority (1), and the non-loaded trolleys stopped at station ST 2 0 are given priority (2) and set to priority (5). That is, at station ST 0 0 1 When a no-load trolley is required, come in a more favorable order Recall the priority (1) ~ priority (5) of the station name. Referring to Figure 12, the description will be given of the idle-cart trolley winding path setting table stored in the storage unit of the transporting device control device 1 1. As shown in Figure 12, the empty The table for setting the winding path of the trolley is a table for setting the route to which the unloaded trolley is to rewind. For example, when the trolley with the trolley number "1" becomes the unloaded trolley, it is set to rewind ST 3 0 0, ST301, The winding path of ST 302 and ST303. For example, the idle-cart trolley winding path setting table may be set in such a manner that a large number of idle-carriages surround the site with a high frequency of transportation requirements. Referring to FIG. 13 and FIG. 14, the program executed by the control department 14 92 \ Renesas Technology \ JR290-925461-0501 200410883 of the conveying equipment control device 11 relates to the transfer processing of the actual trolley, and has the following Control construction. In step (hereinafter referred to as step S) 1 0 0, the transporting device control device 1 1 receives a transporting instruction instructing device 10 belonging to a higher-level computer. At this time, the transport equipment control device 11 receives the command contents of F r 〇 m point, T 〇 point, batch number and priority. In S 102, the transport equipment control device 11 determines whether the priority is high based on the received priority included in the transport instruction. When the priority is high (Y E S in S 1 0), the processing moves to S 1 0 4. If this is not the case (N 0 in S 1 0 2), the process moves to S 1 0 6. In S 104, the conveyance equipment control device 11 registers the priority in the value of the request table of the conveyance request table (see Fig. 6) as "Q". In S 1 06, the conveyance facility control device 11 registers the first F r 0 m point and the first T 0 point of the conveyance request form (see FIG. 8). At this time, the F r 0 m and T 0 points received from the transfer instruction instructing device 10 of the host computer are registered. At S 108, the conveyance equipment control device 11 starts selecting the conveyance path. At S 1 10, the transport facility control device 11 registers the current From point and the next To point of the transport request form (see Fig. 8). In SI 12, the transport equipment control device 11 confirms a transport route selection rule (see FIG. 10). In this case, priority is given to any of the transfer time, transfer distance, and number of stations. In S 1 1 4, the transport equipment control device 11 refers to the transport route table (refer to FIG. 8), and according to the transport route selection rule (refer to FIG. 10), the current F r 〇m point and the next T 〇 point To decide the transit point. In S 1 1 6, the conveying equipment control device 1 1 refers to the conveying distance table (refer to FIG. 9) to detect the jam condition. At this time, when the number of passing time table of the distance table (refer to FIG. 9) is more than the predetermined number of 15 92 \ Renesas Technology \ JR290-925461-0501 200410883, it is detected that there is a blockage. When it is detected that there is a block (Y E S in S 1 1 6), the processing moves to S 1 1 8. If this is not the case (N 0 in S 1 16), the process moves to S 1 2 2 in FIG. 14. At S 1 1 8, the conveying equipment control device 11 1 determines whether the blocking point corresponds to the selected route. When the blocking point corresponds to the selected path (Y E S in S 1 1 8), the processing moves to S 1 2 0. If this is not the case (N 0 in S 1 1 8), the process moves to S 1 2 2. In S 1 2 0, the conveying equipment control device 11 refers to the conveying path table (refer to FIG. 8), and according to the conveying path selection rule (refer to FIG. 10), the current F r 〇m point and the next T 〇 Decide on a transit point. Thereafter, processing moves to S1 28 in FIG. 14. Referring to FIG. 14, at S1 22, the conveyance equipment control device 11 refers to the conveyance distance table (refer to FIG. 9) to detect a failure condition. At this time, it is detected that the transport path (1) passing the prohibition flag shown in FIG. 9 has failed. When a fault condition is detected (Y E S in S 1 2 2), the process moves to S 1 2 4. If this is not the case (N 0 in S 1 2 2), the processing moves to S 1 2 8. In S 1 2 4, the conveying equipment control device 11 determines whether or not the passing prohibited point corresponds to the selected route. When the passing prohibited point corresponds to the selected path (Y E S in S 1 2 4), the processing moves to S 1 2 6. If this is not the case (N 0 in S 1 2 4), the process moves to S 1 2 8. In S 1 2 6, the conveyance equipment control device 11 refers to the conveyance path table (refer to FIG. 8), and according to the conveyance path selection rule (refer to FIG. 10), the current F r 〇m point and the next T 〇 Decide on a transit point. In S 1 2 8, the conveyance equipment control device 11 adds 1 to each of the transit routes from the current point to the final point in the transfer path table (see FIG. 8). At S1 3 0, move 16 92 \ Renesas Technology VTR290-925461 -0501 200410883 to send the equipment control device 1 1 to execute the operation instruction on the trolley 7. At S 1 32, the transport device control device 11 determines whether or not a message from the trolley 7 to the branching point is received. When a message from the trolley 7 to the bifurcation point is received (Y E S in S 1 32), the process moves to S 1 3 4. If it is not the case (N 0 in S 1 32), the process moves to S 1 3 2 and waits for a message from the trolley 7 to the branching point. At S 1 3 4, the conveying equipment control device 11 determines whether the fork point received from the trolley is the final point. When it is the final point (Y E S in S 1 3 4), the processing moves to S 1 3 6. If this is not the case (N 0 in S 1 3 4), the process moves to S 1 0 8 in FIG. 13 and the selection of the conveying path is started again after entering a point. At S 1 3 6, the transport equipment control device 11 1 opens the trolley. At S 1 38, the conveyance equipment control device 11 acts as an unloaded trolley to start the return. At this time, the return of the no-load trolley is performed in order at the stations memorized in the no-load trolley rewinding path setting table shown in FIG. 12. Referring to FIG. 15, the return processing of the no-load trolley performed by the conveyance equipment control device 11 has the following control structure. In the processes shown in Figs. 15 and 16, the same steps as those in the processes shown in Figs. 13 and 14 are assigned the same step numbers. The same applies to these processes. Therefore, these detailed descriptions are not repeated here. In S 2 0, the conveyance equipment control device 11 refers to the unloaded trolley rewinding path setting table (refer to FIG. 12), and executes the return of the unloaded trolley according to the unloaded trolley walking path. After that, the processing from S108 to S132 is performed the same as the transportation processing of the aforementioned on-board trolleys, to avoid blocking points and failure points, according to the transportation route 17 92 \ Renesas Technology \ JR290-925461 -0501 200410883 path selection rules (refer to the figure) 1 ο) to select the transport route. Referring to Fig. 16, at S202, when the transport device control device 11 receives a message from the unloaded trolley to the bifurcation point, it determines whether there is a reservation for the trolley. When there is a reservation (Y E S in S 2 0), the processing moves to S 2 0 4. If this is not the case (N 0 in S 2 02), the processing moves to S1 08 in Fig. 15 ° At S 2 04, the transport device control device 11 is instructed to move the trolley to the reserved F r 0m station point. That is, because there is a wafer transfer reservation, that is, it is moved to the From station which is a station for transferring wafers according to the reservation instruction. At S206, the transport equipment control device 11 starts the movement of the trolley as a transport trolley. Referring to Fig. 17, the cart reservation processing performed by the transport equipment control device 11 has the following control structure. At S300, the transport equipment control device 11 receives a transport instruction from the transport instruction instructing device 10 belonging to the upper computer. At this time, the F r om point, To point, batch number, and priority transfer instruction are received. In S302, the transport equipment control device 11 checks the From repository of the From point in the received transport instruction. In S304, the transport facility control device 11 refers to the transport request form (refer to FIG. 6), and determines whether the trolley is being transported and whether its final point is a trolley at the From station. If such a cart exists (YES in S 3 04), the process moves to S 3 06. If this is not the case (N 0 in S3 04), the process moves to S 3 0 8. At S 3 06, the transport equipment control device 11 waits for the arrival of the trolley and executes the reservation. After that, the process ends. At S 3 0 8, the transport equipment control device 1 1 refers to the no-load trolley request area 18 92 \ Renesas Technology UR290-925461 -0501 200410883 setting table (refer to Figure 1 1), and judges that the station is close to the F r 0m station. Click if there is a trolley. If there is a trolley at such a station (Y E S in S 3 0), the process moves to S 3 1 4. If this is not the case (N 0 in S 3 0 8), the processing moves to S3 1 0. At S 3 10, the transport equipment control device 11 refers to the transport request form (refer to FIG. 6), and determines whether the trolley is being transported and whether its final point is a trolley at the From station. When there is such a trolley (Y E S in S 3 1 0), the processing moves to S 3 1 2. If this is not the case (N 0 in S 3 1 0), the processing moves to S 3 0 8 ° At S 3 1 2, the transport equipment control device 1 1 waits for the arrival of the trolley and executes the reservation processing. After that, the process ends. In S 3 1 4, the transport facility control device 11 executes a reservation process. Carry out the return processing of the reservation trolley. Furthermore, in addition to the processes shown in the flowcharts of FIGS. 13 to 17, the conveyance equipment control device 11 also receives the information from the automatic conveyance equipment 9 through the interface and executes the insertion processing. This insertion process sets a pass prohibition flag (set "0" to "1") in the transfer distance table (see Fig. 9) when a failure occurs on any of the transfer paths. In addition, when a message indicating the recovery of the failure is received, the pass prohibition flag of the transfer distance table (see FIG. 9) is reset ("1" is reset to "0"). The operation of the transport system of this embodiment will be described based on the above structure and flow. The transport equipment control device 11 receives a transport instruction (S 1 0 0) from the transport instruction instructing device 10 belonging to the host computer. At this time, a message including the F r 〇 m point belonging to the storage place of the transfer origin, the T 〇 19 92 belonging to the storage place of the transfer destination, the Renesas Technology \ JR290-925461 -0501 200410883 point, the batch number, and the priority is received. Based on the contents of the received instruction, the transfer site (eg STK 0 0 1) 1 A transfer site (eg ST 0 0 1) and the transfer destination repository (eg STK 0 0) 2) The transfer station of 1 B (for example: ST 0 0 2) starts the retrieval of the transport path (S 1 0 8). Confirm the transport route selection rules (refer to Figure 10) (S 1 12), and search for the transport route in the order of the number of the transport request according to the transport request tables that are replaced in order of priority. If it is the turn order according to the priority order, the cart is prepared according to the cart reservation processing shown in FIG. 17. In the case where the transfer destination station during the transfer is the same as the transfer departure station requested by the user (YES in S304), there is no need to make reservations and preparations for the trolleys, and waiting for the arrival of the trolleys to execute the reservations (S 3 0 6). If the transfer station in other transfers does not agree with the transfer destination station (N 0 in S304), it is necessary to make a reservation for the trolley. Referring to the empty-carriage request area setting table (refer to FIG. 11), it is determined whether a station close to the F r om station exists at the next station of the empty-carriage table (refer to FIG. 7) (S 30). 8 ). If there is a case (Y E S in S 3 0), a reservation process is performed to return the reserved trolley (S 3 1 4). When the processing of S 3 1 4 is executed, the loop-back processing of the no-load trolley shown in FIG. 15 and FIG. 16 is executed. To move to the transfer destination station (for example: S T 0 0 1), search the transfer route from your own station to the transfer destination station. At this time, F r 0 m-T 0 described in the conveying path table (see FIG. 8) is searched, and the conveying path is determined based on the conveying path selection rule (see FIG. 10). Based on the determined conveying path, 1 is added to the use path of the conveying distance table (see FIG. 9). Here, depending on the counted path such as 10 or more, it is blocked or blocked, and different paths are searched for 20 92 \ Renesas Technology VFR290-925461 -05 01 200410883 (YES in S118, and enter S120) . In addition, if the route is blocked during transportation, such as when the route is blocked, the distance table (refer to Figure 9), the flag is selected. If the prohibited point corresponds to the rule, select a different route (YES in S 1 2 4 and enter) When the transfer is performed and the next bifurcation point is reached, a reroute is performed. This corresponds to the loop path from S1 to S8 of FIG. 13 and FIG. 14, FIG. 15, and FIG. 16. When the route search is performed again , Subtract 1 from the use path of the transport grid (refer to Figure 9). In other words, because of some changes, it becomes 1 from the use path of the transport distance (refer to Figure 9) of the path set so far. When Each time when a bifurcation point is reached, the operation of re-retrieving the route is repeatedly performed to reach the point (YES in S 1 3 4), that is, in the transport route table (refer to the figure, the number of actions of the route is added to 1, At the same time, for the transfer time, the number of writes X transfer time + transfer time) + (number of actions + 1)}. This action time is substituted into a fixed period such as 19 or 99 times, and the transfer time of the multiplication is substituted into these 19 or 99 average moving rooms, Add these transfer times to 20 or 100 times. In other words, by calculating the average value of the most recent 20 or 100 transfers, the real time can be reflected more accurately. Variable conveyance path time. As described above, the conveyance system according to this embodiment can be effectively installed in a conveyance system cart of a manufacturing line having a conveyance path with a complicated combination. That is, when setting the conveyance path, consider Select the transport route 92 \ Renesas Technology \ 11290-925461-0501, refer to (Transfer Selection Rule S126) ° Radial inspection 3 4 Return distance table Path change the form below the table to the final 8) Carrying in {(During the movement, in the upper movement, the time of the transportation, the time of the transportation control of the transportation time, the number of transportation distances can be 21 200410883, and the transportation waiting time and the transportation time are the shortest to effectively set the transportation. In particular, it is known that once a trolley departs from the station of the departure point of transportation, the transportation to the point of departure of the station of the final destination is carried out through the route determined at that time, In the middle of the transportation, if the trolley in front of it stops and fails, it can only be stopped before the fault is resolved. In addition, if a blockage occurs in front of the trolley, it can only be stopped before the blockage is removed However, according to the transfer system of the present embodiment, when the transfer station departs from the transfer departure station and arrives at the bifurcation station, resetting of the transfer route is performed again. For this reason, the failure condition of the transfer route at the time of reset is reflected And congestion conditions, the re-transfer route can be reset. As a result, a plurality of trolleys can be efficiently moved in a transfer system having a complex and multi-lane transfer route. Although the present invention has been described in detail above, this is merely an example and is not limited in any way. The spirit and scope of the invention are limited only by the scope of the attached patent application. [Brief Description of the Drawings] FIG. 1 is a system configuration diagram of a transfer system according to an embodiment of the present invention. FIG. 2 is a partially enlarged view of the system configuration diagram of FIG. 1. FIG. Fig. 3 is a diagram showing a repository and a transfer site name in the system configuration diagram of Fig. 1. Fig. 4 is a diagram showing the names of forked sites and stop sites in the system configuration diagram of Fig. 1; FIG. 5 is a perspective view showing the structure of a storage. Fig. 6 is a diagram showing a transfer request form stored in a memory section of a transfer device control device 22 92 \ Renesas Technology \ JR290-925461 -0501 200410883. Fig. 7 is a diagram showing a trolley data table stored in a memory section of a control device of a transport facility. Fig. 8 is a diagram showing a transfer path table stored in a storage unit of a transfer device control device. Fig. 9 is a diagram showing a transfer distance table stored in a storage unit of a transfer device control device. Fig. 10 is a diagram showing a transport route selection rule stored in a storage unit of a transport equipment control device. Fig. 11 is a diagram showing a setting table of the no-load trolley request area stored in the storage section of the control device of the conveying equipment. Fig. 12 is a diagram showing a setting table for the winding path of the no-load trolley stored in the storage section of the control device of the transport equipment. Fig. 13 and Fig. 14 are flowcharts showing the sequence of control steps of the transport processing of the pallet truck executed by the control unit of the transport device control device. Fig. 15 and Fig. 16 are flowcharts showing the sequence of control steps for the return processing of the empty trolley performed by the control section of the control device of the conveying equipment. Fig. 17 is a flowchart showing the sequence of control steps for the cart reservation process executed by the control section of the control device of the transport facility. (Description of component symbols) 1 A ~ 1Z, 1AA, 1AB, 1 AC storage 1 storage 2 trolley rails 3 bifurcation point 23 92 \ Renesas Technology \ JR290-925461-0501 200410883 4 front bifurcation point of the storage 5 Trolley stop point 6 Loading point in front of the storehouse 7 Trolley 8 Transfer loader 9 Automatic transfer setting 10 Transfer instruction instruction device 11 Transfer equipment control device
13 移載點 14 儲存庫吊車 STK* * *(* * *=001〜029) 批量收納用儲存庫 ST0**(**=01〜29) 移載站點 S T 2 * * 儲存庫前分叉站點 S T 2 * * 儲存庫前合流站點 S T 3 *氺分叉及停止站點 S T 4 *氺停止站點13 Transfer point 14 Storehouse crane STK * * * (* * * = 001 ~ 029) Storehouse ST0 for bulk storage ** (** = 01 ~ 29) Transfer site ST 2 * * Fork in front of the storehouse Site ST 2 * * Confluence site ST 3 in front of the repository * 氺 Fork and stop site ST 4 * 氺 Stop site
92\ 瑞薩科技\111290-925461-0501 2492 \ Renesas Technology \ 111290-925461-0501 24