TW200407227A - The porous back-shooting inkjet print head module - Google Patents

The porous back-shooting inkjet print head module Download PDF

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TW200407227A
TW200407227A TW91133100A TW91133100A TW200407227A TW 200407227 A TW200407227 A TW 200407227A TW 91133100 A TW91133100 A TW 91133100A TW 91133100 A TW91133100 A TW 91133100A TW 200407227 A TW200407227 A TW 200407227A
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Taiwan
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ink
layer
porous
substrate
hole
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TW91133100A
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Chinese (zh)
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TWI222934B (en
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Chia-Tai Chen
Shyh-Haur Su
Chi-Ming Huang
Jinn-Cherng Yang
Chun-Jung Chen
Je Ping Hu
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Ind Tech Res Inst
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Abstract

A porous back-shooting inkjet print head module is disclosed. The ink permeates through the porous ink supply layer into the ink chamber contracted outside by inject hole, and the porous ink supply layer prevents the ink floating back. So that ink chamber is sealed very well and more pressure could be generated, and could be used for the high stickiness ink. It need not precision aim process, therefore products manufactured efficiency and decreased the cost.

Description

200407227 五、發明說明(1) 【發明所屬之技術領域】 本發明關於一種喷墨列印模組及其製造方法,特別 是關於一種具有高密閉性儲墨室的多孔背射式喷墨列印 模組及其製造方法 【先前技術】 現今對於電腦相關產品的應用已經十分普遍,特別 是喷墨式印表機的便利性更是廣受社會大眾的喜愛,一 般傳統喷墨印表機所使用的列印頭為熱氣泡式喷墨列印 頭 (thermal inkjet print head),此款喷墨列印頭的 工作原理,將控制晶片通以脈衝(pU 1 se)電壓,然後電 壓訊號行經具有高電阻特性的加熱器(h e a t e r)而產生 南熱’使得墨水(ink)形成熱氣泡(thermal bubble ),接著將此熱氣泡所產生的墨滴自喷嘴(η ο z z 1 e)射 出於紙張或其他物體之表面上而達到列印的目的,並藉 由墨水流道(i n k c h a η n e 1)將墨水由墨水g補充至儲墨 室中。 如「第1圖」所示,為習知熱氣泡式喷墨列印頭之剖 面示意圖,其中基材(substrate) 20 1上形成一熱阻障 層2 0 2 ( thermal barrier),接著於熱阻障層2 0 2上形成 一電阻加熱層2 0 3,其中熱阻障層2 0 2用以阻絕電阻加熱 層2 0 3將熱此傳遞至基材2 0 1,然後在電阻加熱層2 0 3上覆 以低電阻的導電層204( conductor),藉以傳遞電壓'訊 號,然後再製作電絕緣層2 0 5 ( insulator·)於導電層204 上,並於周圍形成一黏著層206( adhesion layer)且與200407227 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to an inkjet printing module and a method for manufacturing the same, and more particularly to a porous back-fired inkjet printing with a highly-closed ink storage chamber. Module and its manufacturing method [Prior technology] Nowadays, the application of computer related products is very common, especially the convenience of inkjet printers is widely loved by the general public. Generally used by traditional inkjet printers The print head is a thermal inkjet print head. The working principle of this inkjet print head applies a pulse (pU 1 se) voltage to the control chip, and then the voltage signal passes through the high-pressure inkjet print head. The heater has a resistance characteristic and generates south heat, which causes the ink to form a thermal bubble, and then the ink droplets generated by the thermal bubble are ejected from the nozzle (η ο zz 1 e) to the paper or other The object is printed on the surface of the object, and the ink is replenished from the ink g to the ink storage chamber through the ink flow channel (inkcha η ne 1). As shown in "Figure 1", it is a schematic cross-sectional view of a conventional thermal bubble inkjet print head, in which a substrate 20 1 is formed with a thermal barrier layer 2 0 2 (thermal barrier), and then thermally A resistive heating layer 2 0 3 is formed on the barrier layer 2 0 2, wherein the thermal barrier layer 2 2 is used to block the resistive heating layer 2 0 3 and transfer heat to the substrate 2 0 1, and then the resistive heating layer 2 0 3 is covered with a low-resistance conductive layer 204 (conductor) to transmit a voltage signal, and then an electrical insulation layer 2 5 5 (insulator ·) is formed on the conductive layer 204, and an adhesive layer 206 (adhesion) is formed around it layer) and

200407227 五、發明說明(2) 喷 孔片 209( nozzle plate)相斑人 ^ , 士墨室2 0 7 ( ink chamber),鍺屢口室2〇二圍=區域即為 流迢2 0 8 ( ink channel),可用以舖 &具有墨水 儲墨室2 0 7。當脈衝電壓訊號經由導電層^墨水匣至 ^層20j時產生高熱,進而將館存於儲i室=電阻加 產生熱氣泡2 1 1,因此瞬間壓力的 之墨水 2 0 7# . ^ 21〇 ( nozzle) ^ ^,! t 然熱氣泡211產生而將墨滴212由噴 同日守,常常因為墨水流道2 0 8的存在而導致推出的 =,且此種贺墨方式需經由精密的喷砂製程來制里的散 空的墨水槽連通墨水匣以及墨水流道2〇8 ; 衣作+—鏤 2 〇 9與其餘相關元件需藉由精密對準技術來進 孔片 貼合的動#,不僅費時而產能低落,並同時增:生位以及 j本;另外目前市面上高黏滯係數墨水的應用越來越、 多,但是傳統的結構因儲墨室的密閉性的問題,而無法 將此傳統的作法應用於黏滯係數高的墨水。 另外有凱林斯基(Karlinski)等人提出一種「多孔 性喷墨列印頭」(I n k j e ΐ p r i n t h e a d w i t h i n k supply through porous medium)美國專利第 5, 940, 099 號’主要包含有壓電材料層(piezoelectric material )、橈曲層(deflection layer)、供墨層(ink supply 1 ayer)以及玻璃毛細管,其工作原理為對壓電層施以一 電壓而產生形變,並將所儲存的墨水喷出。然而此種作 法所使用之零件皆需使用精密的加工技術、精密的對位 200407227 五、發明說明(3) 以及組裝技術,加工成本極高而良率極低,組裝時間也 長。 【發明内容】 鑑於以上習知技術的問題,本發明提供一種多孔背 射式喷墨列印模組及其製造方法,利用具有多孔性材質 的供墨板覆蓋噴孔而形成密閉性能極佳的儲墨室,而對 墨水加熱後,能夠提供以較大的壓力將儲墨室中的墨水 出。 依據本發明所揭露之一種多孔背射式喷墨列印模 組,主要包含有一基板,此基板之材質可為石夕晶片、玻 璃、金屬、陶瓷以及高分子聚合物等等,且基板包含有 喷孔。熱阻隔層建立於基板之上方,一加熱層由高電阻 特性的材質所構成,形成於熱阻隔層之表面,且位於喷 孔的附近;其中熱阻隔層用以防止加熱層所產生之熱能 傳遞至基板。一導電層與加熱層電性相接,並於導電層 上方覆以絕緣層。一電極層形成於導電層以及絕緣層之 上方,用以接收外界之脈衝電壓並傳遞至導電層,當脈 衝電壓流經導電層而導引至加熱層時,由於加熱層為高 電阻特性的材質而產生高熱;一黏著層形成於絕緣層之 上方,並與基材之噴孔連通。一供墨層為多孔性材質, 其一側覆蓋貼合於黏著層上方而另一側與墨水匣相接 觸,此時儲墨室藉由黏著層以及供墨層而形成密閉的儲 墨室,而墨水匣内之墨水經由供墨層引流至儲墨室。 本發明之多孔背射式喷墨列印模組之製造方法,其200407227 V. Description of the invention (2) Nozzle plate 209 (nozzle plate), ^, ink chamber 2 0 7 (ink chamber), germanium repeated mouth chamber 20 perimeter = area is flow 迢 2 0 8 ( ink channel), which can be used to store & When the pulse voltage signal passes the conductive layer ^ ink cartridge to ^ layer 20j, high heat is generated, and then the library is stored in the storage chamber = resistance plus generates thermal bubbles 2 1 1, so the instant pressure of the ink 2 0 7 #. ^ 21〇 (nozzle) ^ ^ ,! t However, the thermal bubble 211 is generated and the ink droplets 212 are sprayed on the same day, often due to the existence of the ink flow channel 208 =, and this method of congratulating ink requires precise spraying. The empty ink tank in the sand manufacturing process communicates with the ink tank and the ink flow path 208; clothing +-stencil 209 and other related components need to be inserted into the hole piece by the precise alignment technology # Not only is time-consuming and the production capacity is low, it is also increasing at the same time: the production position and the number of copies; In addition, the application of high viscosity coefficient inks on the market is more and more, but the traditional structure cannot be closed due to the tightness of the ink tank Apply this traditional method to inks with high viscosity coefficients. In addition, Karlinski et al. Proposed an "Inkje ΐ printhead withink supply through porous medium" U.S. Patent No. 5,940,099, which mainly includes a layer of piezoelectric material ( The piezoelectric material), the deflection layer, the ink supply 1 ayer, and the glass capillary work by applying a voltage to the piezoelectric layer to cause deformation, and ejecting the stored ink. However, the parts used in this method all need to use precise machining technology and precise alignment. 200407227 V. Description of the invention (3) and assembly technology, the processing cost is extremely high, the yield is extremely low, and the assembly time is long. [Summary of the Invention] In view of the problems of the above-mentioned conventional technology, the present invention provides a porous back-fired inkjet printing module and a method for manufacturing the same, using an ink supply plate with a porous material to cover the nozzle holes to form an excellent sealing performance. The ink storage chamber, after heating the ink, can provide the ink in the ink storage chamber with a larger pressure. A porous back-fired inkjet printing module disclosed in accordance with the present invention mainly includes a substrate. The material of the substrate may be Shi Xi wafer, glass, metal, ceramic, polymer, etc., and the substrate includes Nozzle. The thermal barrier layer is established above the substrate. A heating layer is made of a material with high resistance. It is formed on the surface of the thermal barrier layer and is located near the spray holes. The thermal barrier layer is used to prevent the heat energy generated by the heating layer from being transferred. To the substrate. A conductive layer is electrically connected to the heating layer, and an insulating layer is covered over the conductive layer. An electrode layer is formed on the conductive layer and the insulating layer to receive the external pulse voltage and transfer it to the conductive layer. When the pulse voltage flows through the conductive layer and is guided to the heating layer, the heating layer is a material with high resistance characteristics. High heat is generated; an adhesive layer is formed above the insulating layer and communicates with the spray holes of the substrate. An ink supply layer is made of porous material. One side of the ink supply layer covers and adheres to the adhesive layer and the other side contacts the ink cartridge. At this time, the ink storage chamber forms a closed ink storage chamber by the adhesive layer and the ink supply layer. The ink in the ink cartridge is drained to the ink storage chamber through the ink supply layer. The manufacturing method of the porous back-fired inkjet printing module of the present invention,

200407227 五、發明說明(4) 步驟包含有:提供一基板,此基板之材質可為石夕晶片、 玻璃、金屬、陶瓷以及高分子聚合物所構成的組合其中 之一,並於基板上表面形成一熱阻隔層;於熱阻隔層上 方形成一加熱層,此加熱層為高電阻特性的材質;於加 熱層上方部分表面形成一導電層,且此導電層與加熱層 電性相接;接著製作絕緣層於導電層上方之部分表面; 建立金屬電極層於絕緣層以及導電層之上方,並藉以接 收外界的脈衝電壓;再來以喷砂的方式於基板形成貫穿 的喷孔;然後在絕緣層之上方部分表面建立黏著層,再 來將供墨層覆蓋於於黏著層之表面,而形成具有容置空 間,並與喷孔連通且密閉的儲墨室,用以儲存供墨層供 給的墨水。不同於傳統的結構,需要精準定位噴孔以及 相關的元件,且無須墨水流道的設置,因此不僅減低製 作的成本,更大幅提升儲墨室的密閉性能,而能夠應用 於高黏滯係數的墨水液體。 由上述可知,本發明揭露一種多孔背射式喷墨列印 模組及其製造方法,係提供導電層一脈衝電壓,並藉由 加熱層對墨水加熱而產生氣泡而產生墨滴喷出,直接以 蝕刻製程於基板上開設喷孔,故不需使用喷孔片,以及 相關傳統製程所需的精密對準貼合等動作;再者無墨水 流道的設置,因此儲墨室具有極佳的密閉性而供給較大 的壓力差,而解決業界面臨無法應用高黏滯係數之墨水 液體的窘境,本發明不僅大幅降低製作成本並同時提高 產品量率以及相關產能,且提供熱氣泡式喷墨列印結構200407227 V. Description of the invention (4) The steps include: providing a substrate, and the material of the substrate may be one of a combination of Shi Xi wafer, glass, metal, ceramic and polymer, and formed on the upper surface of the substrate A thermal barrier layer; forming a heating layer above the thermal barrier layer, the heating layer is a material with high resistance characteristics; forming a conductive layer on a part of the surface above the heating layer, and the conductive layer is electrically connected to the heating layer; The insulating layer is on a part of the surface above the conductive layer; a metal electrode layer is established on the insulating layer and the conductive layer to receive the external pulse voltage; and then a through hole is formed in the substrate by sandblasting; An adhesive layer is established on the upper part of the surface, and then the ink supply layer is covered on the surface of the adhesive layer to form a closed ink storage chamber with a receiving space, which is in communication with the spray holes, and is used to store the ink supplied by the ink supply layer. . Different from the traditional structure, the nozzles and related components need to be accurately positioned, and the ink flow path is not required. Therefore, it not only reduces the production cost, but also greatly improves the sealing performance of the ink storage chamber. It can be applied to high viscosity coefficient Ink liquid. It can be known from the above that the present invention discloses a porous back-fired inkjet printing module and a method for manufacturing the same, which provides a conductive layer with a pulse voltage, and heats the ink through the heating layer to generate bubbles and eject ink droplets. The etching process is used to open nozzle holes on the substrate, so there is no need to use nozzle holes, and the precise alignment and bonding operations required by related traditional processes. Furthermore, there is no ink flow path, so the ink storage chamber has an excellent The tightness provides a large pressure difference, and solves the dilemma of the industry facing the inability to apply ink liquids with high viscosity coefficients. The invention not only greatly reduces the production cost and simultaneously increases the product rate and related productivity, and provides a thermal bubble inkjet Print structure

第9頁 200407227 五、發明說明(5) 未來發展的方向而滿足業界的需求,著實可為產業之利 用。 為使對本發明之目的、構造特徵及其功能有進一步 的暸解,茲配合圖示詳細說明如下: 【實施方式】 依據本發明所揭露的多孔背射式喷墨列印模組及其 製造方法,接收外界之脈衝電壓,並利用高密閉性的儲 墨室以及多孔性材質的供墨層,產生較大的推力而能夠 進行南黏滞係數的墨水液體的相關應用。為能詳細說明 本發明,請參考「第2圖」至「第9圖」,為本發明第一 實施例之流程示意圖。如「第2圖」所示,首先提供基板 1 0,基板1 0之材質可為矽晶片、玻璃、金屬、陶瓷以及 高分子聚合物,並於基板1 0上製作熱阻隔層2 0 ;再如 「第3圖」所示,於熱阻隔層2 0上方建立加熱層3 0,並留 置一孔位以供後續加工之用(容後詳述),且加熱層3 0 由高電阻特性的材質所組成;然後如「第4圖」所示,於 加熱層3 0之上方形成不連續之導電層4 0,且加熱層3 0電 性相接於導電層4 0 ;並且如「第5圖」所示,於導電層4 0 之上方以黃光及#刻製程建立特定外型的絕緣層5 0 ;再 參考「第6圖」,在絕緣板5 0以及導電層4 0之上方形成電 極層60,並與導電層40電性相接,而藉以接收外界之脈 衝電壓而傳遞至導電層4 0 ;再參考「第7圖」,相鄰於加 熱層3 0,於基材1 0上利用喷砂、雷射、乾蝕刻或濕式化 學蝕刻等方式,形成貫穿之噴孔7 0,並相鄰於加熱層Page 9 200407227 V. Description of the invention (5) The future development direction to meet the needs of the industry can really be used by the industry. In order to further understand the purpose, structural features, and functions of the present invention, detailed descriptions are given in conjunction with the drawings as follows: [Embodiment] The porous back-fired inkjet printing module and its manufacturing method disclosed in accordance with the present invention, Receives the external pulse voltage, and uses the high-tightness ink storage chamber and the ink supply layer of porous material to generate a large thrust to enable the application of ink liquids with a south viscosity coefficient. In order to explain the present invention in detail, please refer to "Figure 2" to "Figure 9", which are schematic flowcharts of the first embodiment of the present invention. As shown in "Figure 2", the substrate 10 is first provided, and the material of the substrate 10 can be silicon wafer, glass, metal, ceramic, and polymer, and a thermal barrier layer 20 is formed on the substrate 10; As shown in "Figure 3", a heating layer 30 is established above the thermal barrier layer 20, and a hole is reserved for subsequent processing (detailed later), and the heating layer 30 is made of a high resistance As shown in "Figure 4", a discontinuous conductive layer 40 is formed above the heating layer 30, and the heating layer 30 is electrically connected to the conductive layer 40; and as shown in "No. 5" As shown in the figure, a specific shape of the insulating layer 50 is created with yellow light and #engraving process on the conductive layer 40; refer to "Figure 6" and form over the insulating plate 50 and the conductive layer 40 The electrode layer 60 is electrically connected to the conductive layer 40, and receives the external pulse voltage to be transmitted to the conductive layer 40. Referring to "Figure 7", it is adjacent to the heating layer 30 and the substrate 10 Sand blasting, laser, dry etching or wet chemical etching are used to form the through holes 70, which are adjacent to the heating layer.

第10頁 ZUU4U/Z2/ 五、發明說明.(6) _ 30,使得喷孔70位於前述加埶 内;如「第8圖」所示,妒:、、、看3 〇所留置孔位的範圍 部分區域,並藉由點著層 >成,著層8 0於絕緣層5 0之上方 8 1 ;最後,如「第9圖」曰所^辰狀結構而形成容置空間 mater i a 1)之板體如供黑声^ ’以多孔性材質(porous 形成儲墨室91,並與喷=$ 〇、’覆蓋貼合於黏著層80而 50盘相對於噴孔70的位置带^通;也就是說,於絕緣層 的儲墨室91’其中供墨層二為與加熱層30 material)。 夕孔性的材質(porous 然而黏著層80亦可用容力 ι〇圖」所示,為本發明第二實=材”取代’如「第 孔性的材質之供墨板1 〇 〇取代汽也之不意圖’其中以多 電鑄的方式加工於L板二;::80而-體成形’並以 並與喷孔7。連通,其:y; 形成:儲墨室、 水經由供墨板1 〇 〇參人而^存二=上圖中.未不)内之墨 供墨板1 0 0整體皆為多孔性的材m .土'室101;另外不一定 10。具有多孔性材質二範;:;所”,但至少供墨板 30的區域。彳貝的耗圍必須涵蓋噴孔嫩及加熱層 在此詳細說明動作的流程, , 本發明之第一作動干咅>考弟 圖」 為 S 7lc兩r @ Α Γ 圖其中供墨層90之一側接合於 μ 90τίί) ^ 1 ▲不),此時墨水匣内之墨水1 1 0透過供墨 二 拉子於儲墨室9 1,絕緣層5 0用以隔絕墨水1 1 〇與導 電層40接觸而造成短路。 ^ 如第12圖」所示,為本發明之第二作動示意圖,Page 10 ZUU4U / Z2 / V. Description of the invention. (6) _ 30, so that the nozzle hole 70 is located in the aforementioned plus; as shown in "Figure 8", jealousy: ,,, see 3 0 Part of the area, and by the point of the layer > formation, the layer 80 is above the insulating layer 8 0; 8; finally, as shown in the "Figure 9" ^ Chen-shaped structure to form the accommodation space mater ia 1 ) For the black body ^ 'Porous material (porous to form the ink storage chamber 91, and spray = $ 〇,' cover and adhere to the adhesive layer 80 and the position of the 50 disc relative to the spray hole 70 band pass through That is, in the ink storage chamber 91 'of the insulating layer, the second ink supply layer is 30 material and the heating layer). Porous material (porous, but the adhesive layer 80 can also be shown with a capacity map), which is the second embodiment of the present invention instead of 'such as the "porous material of the ink supply board 100 instead of steam. The intention is not to 'multi-electroformed in L plate II; :: 80 and -body forming' and connected to the nozzle hole 7. It: y; Formation: ink storage chamber, water via ink supply plate 1 〇〇 人人 ^^ 2 = In the above picture, the ink supply board 100 is entirely porous material m. Soil 'chamber 101; the other is not necessarily 10. Porous material two Fan;:; "but at least the area of the ink supply plate 30. The consumption of the shellfish must cover the nozzle orifice and the heating layer. The detailed description of the action flow is here. The first action of the present invention is dry.> The tester diagram is S 7lc two r @ Α Γ where the ink supply layer 90 One side is connected to μ 90τίί) ^ 1 ▲ No), at this time, the ink 1 1 0 in the ink cartridge passes through the ink supply slider in the ink storage chamber 9 1, and the insulating layer 5 0 is used to isolate the ink 1 1 〇 from conductive The layer 40 contacts to cause a short circuit. ^ As shown in Figure 12 ", it is a schematic diagram of the second operation of the present invention,

200407227 五、發明說明(7) 其中電極層60接受外界之脈衝電壓並傳遞至導電層40, 而由於導電層4 0以不連續的方式形成於加熱層3 0之上, 因此脈衝電壓此時經由加熱層3 0而再回到導電層4 0 ;同 時脈衝電壓在經過加熱層3 0之時,因加熱層3 0為高電阻 特性的材質而產生高熱,而使得儲存於儲墨室9 1内之墨 水產生熱氣泡11 1,此時因儲墨室9 1瞬間壓力的增加而造 成墨滴11 2從喷孔7 0流出至外界。一般傳統喷墨結構所產 生熱氣泡,與墨滴流出的方向平行,如「第1圖」所示, 熱氣泡2 1 1生成的方向與墨滴2 1 2流出的方向平行,此種 喷墨結構為正射式(t 〇 p s h ο 〇 t);而本發明所產生之熱 氣泡1 1 1與墨滴1 1 2流出的方向相反,因此為背射式 · (back shoot)。依據Darcy’s Law,壓力差與流體之流 速成正比,即··200407227 V. Description of the invention (7) The electrode layer 60 receives the external pulse voltage and transmits it to the conductive layer 40. Since the conductive layer 40 is formed on the heating layer 30 in a discontinuous manner, the pulse voltage passes through The heating layer 30 is returned to the conductive layer 40. At the same time, when the pulse voltage passes through the heating layer 30, the heating layer 30 is a high-resistance material and generates high heat, so that it is stored in the ink storage chamber 91. The ink generates thermal bubbles 11 1, and at this time, due to the instantaneous pressure increase in the ink storage chamber 91, the ink droplets 11 2 flow out from the nozzle holes 70 to the outside. Generally, the thermal bubble generated by the traditional inkjet structure is parallel to the direction of the ink droplet outflow. As shown in "Figure 1", the direction of the thermal bubble 2 1 1 is parallel to the direction of the ink droplet 2 1 2 outflow. The structure is an orthographic (t 〇psh ο 〇t); and the thermal bubble 1 1 1 and the ink droplet 1 1 2 generated in the present invention flow in the opposite direction, so it is a back shoot type (back shoot). According to Darcy ’s Law, the pressure difference is directly proportional to the velocity of the fluid, ie ...

dP dXdP dX

ocV 其中P為壓力,X為流動方向,V為流速。然而本發明所使 用之多孔性的材質,其壓力差以修正後之D a r c y ’ s L a w力口 以描述,其壓力差與流速的一次方與三次方之和成正 比, 一 dX Κ μocV where P is the pressure, X is the direction of flow, and V is the flow rate. However, for the porous material used in the present invention, the pressure difference is described by the corrected D a r c y s s L a w force port. The pressure difference is proportional to the sum of the first power and the third power of the flow rate. One dX κ μ

200407227 五、發明說明(8) 其中P為壓力,X為 之密度,V為流速< 差,比傳統墨水流 除此之外,本結構 孔性材質的供墨層 匣,而提供高密閉 此可進行高黏滯係 製程於基板上製作 而節省可觀的製作 以上所述者, 並非用來限定本發 利範圍所作的均等 涵蓋。 流動方向,//為黏滯係數,P為流體 >由此可知使用本發明所產生之壓力 道所造成之壓力差要來的大的許多。 無須傳統墨水流道設置,直接經由多 供給墨水,同時防止墨水迴流至墨水 性的儲墨室並產生較大的壓力差,因 數之墨水液體的相關應用;並以蝕刻 喷孔,而無須精密貼合的製程步驟, 成本。 僅為本發明其中的較佳實施例而已, 明的實施範圍;即凡依本發明申請專 變化與修飾,皆為本發明專利範圍所200407227 V. Description of the invention (8) where P is pressure, X is density, V is flow velocity < worse than traditional ink flow, the ink supply layer box of porous material of this structure provides high-closed High viscosity systems can be produced on the substrate to save considerable production. The above-mentioned ones are not intended to limit the scope of the present invention. The flow direction, // is the viscosity coefficient, P is the fluid > From this, it can be seen that the pressure difference caused by using the pressure channel generated by the present invention is much larger. There is no need for traditional ink flow path setting, and multiple inks can be directly supplied through it. At the same time, the ink is prevented from flowing back to the ink-based ink storage chamber and a large pressure difference is caused. Related to the application of ink liquid; and the orifice is etched without precision paste Combined process steps, costs. It is only the preferred embodiments of the present invention, and the scope of implementation is clear; that is, all changes and modifications specifically applied for in accordance with the present invention are within the scope of the present patent.

第13頁 200407227Page 13 200407227

200407227 圖式簡單說明 203 電阻加熱層 204 導電層 205 電絕緣層 206 黏著層 207 儲墨室 208 墨水流道 209 喷孔片 210 噴孔 211 熱氣泡 212 墨滴200407227 Brief description of the drawing 203 Resistance heating layer 204 Conductive layer 205 Electrical insulation layer 206 Adhesive layer 207 Ink storage chamber 208 Ink flow channel 209 Nozzle piece 210 Nozzle hole 211 Thermal bubble 212 Ink drop

第15頁Page 15

Claims (1)

200407227 六、申請專利範圍 1. 一種多孔背射式喷墨列印模組 可接受外界的脈衝電壓而將該 係包含有: 側 貫穿之喷 連接於該 基板之喷 有密閉特 墨板係為 水經由該 基板,具有一 供墨板 容置空間並覆蓋於該 與該喷孔連通,且具 墨室區域上方之該供 使得該墨水匣内之墨 於該儲墨室; 係結合於一墨水匣, 墨水匣内之墨水噴出, 孔; 墨水匣,另一侧具有一 孔區域上方,而形成一 性的的儲墨室,且該儲 多孔性材質所構成,而 多孔性材質滲入而儲存 加熱層,設置於該基板之喷孔的周圍,且位於 該儲墨室内; 之該脈衝電壓而使該 能,並提供於儲存在 泡,而使該墨水受到 該墨水與該導電層接 2.如申請專利範圍第1項所述之多孔背射式喷墨列印模 組,其中該供墨板係包含有一供墨層以及一黏著層 導電層,與該加熱層電 脈衝電壓 該儲墨室 瞬間加壓 絕緣層^設置於該導電 觸。 性相接,並可接收外界 流經該加熱層產生熱 内之墨水而產生熱氣 而自該喷孔喷出;及 層之上方,係用以隔絕 相接’並 形成該容 所述之多 多孔性的 該黏者層與該供墨層 構,使該黏著層一側 3 .如申請專利範圍第1項 組’其中該供墨板為 利用該黏著層環狀的結 置空間。 孔背射式贺墨列印模 材質並於底部加工出該200407227 6. Scope of patent application 1. A porous back-fired inkjet printing module can accept external pulse voltage and the system includes: a side-through spray connected to the substrate and a closed special ink plate sprayed with water Via the substrate, there is an ink supply plate accommodating space covering the communication with the spray hole, and the supply above the ink chamber area enables the ink in the ink cartridge to be in the ink storage chamber; and is connected to an ink cartridge. The ink in the ink cartridge is ejected with holes; the ink cartridge has a hole area above the other side to form a uniform ink storage chamber, and the porous material is formed, and the porous material penetrates to store the heating layer The pulse voltage is provided around the nozzle hole of the substrate and is located in the ink storage chamber; the pulse voltage enables the energy and is provided in the storage bubble, so that the ink is subjected to the ink and the conductive layer. 2. If applied The porous back-fired inkjet printing module described in the first item of the patent scope, wherein the ink supply plate comprises an ink supply layer and an adhesive layer conductive layer, and an electrical pulse voltage of the heating layer and the ink storage chamber ^ Insulating layer disposed between the pressure on the conductive contact. It can be connected by nature, and can receive the ink that flows through the heating layer to generate heat and generate hot gas to be ejected from the nozzle; and above the layer, it is used to isolate the connection and form the multi-porosity described in the volume. The adhesive layer and the ink supply layer are structured so that one side of the adhesive layer 3. For example, in the group 1 of the scope of the patent application, wherein the ink supply plate is a ring-shaped connection space using the adhesive layer. Hole back-fired He ink printing die material and processed the bottom 第16頁 200407227 六、申請專利範圍 容置空間而一體成形。 4. 如申請專利範圍第1項所述之多孔背射式喷墨列印模 組,其中該加熱層以及該基板之間還包含有一熱阻隔 層,係用以防止該加熱層所產生之熱能散失至該基 板。 5. 如申請專利範圍第1項所述之多孔背射式喷墨列印模 組,其中該加熱層由高電阻特性的材質所組成。 6 .如申請專利範圍第1項所述之多孔背射式喷墨列印模 組,其中該基板係選自由矽晶片、玻璃、金屬、陶瓷 以及高分子聚合物所構成之組合中的其中之一。 7 ·如申請專利範圍第1項所述之多孔背射式喷墨列印模 組,其中於該絕緣層以及該電導層之上方還包含有一 電極層,係用以接收外界之該脈衝電壓並傳遞至該導 電層。 8. —種多孔背射式喷墨列印模組之製造方法,其中該多 孔背射式喷墨列印模組可結合於一墨水匣,並接受外 界的脈衝電壓而將該墨水匣内之墨水喷出,該製造方 法至少包含有下列步驟: (a) 提供一基板; (b) 於該基板上之部分區域形成一具高電阻之加熱 層; (c) 於該加熱層之上方部分區域形成一不連續之導 電層,並分別與該加熱層電性相接,使該該脈衝電壓 可透過該導電層之導引而流經該加熱層,使得該加熱Page 16 200407227 VI. Scope of patent application The space is integrated into one. 4. The porous back-fired inkjet printing module according to item 1 of the scope of patent application, wherein the heating layer and the substrate further include a thermal barrier layer to prevent the thermal energy generated by the heating layer. To the substrate. 5. The porous back-fired inkjet printing mold set according to item 1 of the scope of patent application, wherein the heating layer is composed of a material with high resistance characteristics. 6. The porous back-fired inkjet printing module according to item 1 of the scope of patent application, wherein the substrate is selected from the group consisting of a silicon wafer, glass, metal, ceramic, and a polymer. One. 7. The porous back-fired inkjet printing module according to item 1 of the scope of patent application, further comprising an electrode layer above the insulating layer and the conductive layer, which is used to receive the pulse voltage from the outside and To the conductive layer. 8. — A method for manufacturing a porous back-fired inkjet printing module, wherein the porous back-fired inkjet printing module can be combined with an ink cartridge and receives external pulse voltage to place the ink in the ink cartridge. The ink is ejected. The manufacturing method includes at least the following steps: (a) providing a substrate; (b) forming a high-resistance heating layer on a portion of the substrate; (c) a portion of the area above the heating layer A discontinuous conductive layer is formed and electrically connected to the heating layer respectively, so that the pulse voltage can flow through the heating layer through the guidance of the conductive layer, so that the heating 200407227 六、申請專利範圍 層層 緣熱 絕加 一該 成於 形鄰 方相 上並 之, 層孔 熱喷 加一 該成 及形 層上 電板 •,導基 熱該該 高於於 生 d 6 產 > /(V x(v 層 及 板 X)/ f 且 墨及 供以 一孔 成喷 形該 置蓋 位涵 的一 孔成 喷形 該間 於層 對緣 相絕 上該 層與 緣板 絕墨 該供 於該 位該 的供 室而 墨匣 儲水 該墨 於該 對於 相通 板連 墨可 供, 該成 且構 ,所 室質 墨材 儲性 之孔 層多 熱為 加係 該置 儲 該 於 存 儲 而 入 滲 質 材 性 孔 多 該 由 經 水 ^g 之 内 匣。 水室 墨墨 第 圍 範 利 專 請 中 如 加 1 中 中部第其 其底圍, ,之範法 法板利方 方墨專造 造供請製 製該申之 之於如組 組並 模 ’ 印質 列材 墨的 喷性 式孔 射多 背用 孔利 多係 之板 述墨 所供 項該 8 室 墨 儲 該 出 孔 多 之 述 所 項 係 室 0-| 儲 該 於 形1狀 成喷環 體^ 一 而rl利 模 印 著 黏 之 室 墨 儲 該 成 形 而 體 板 之 質 t項 材8 性第 孔圍 多範 一利 於專 貼請 黏申- 層如 模 印 列 墨 喷 式 射 背 孔 多 之 述 所 b驟 C步 驟的 步層。 該隔板 於阻基 中熱該 其一於 ,成遞 法形傳 方方能 造上熱 製板將 之基層 組該熱 於 含 包 更 前 之 加 該 隔 阻 以 用 係 模程 印製 ΤΝΊ tuj· 歹亥 墨钱 喷及 式光 射黃 背以 孔更 d 之 /(\ I β 所步 項h 8 中 第其 圍 , 範法 利方 專造 請製 申之 如組 型 外 的 模 印 列 墨 喷 式 射 背 孔 多 之 述 定所 項 特8^ 出第 作圍 製範 層利 緣專 絕請 該申 將如200407227 Sixth, the scope of application for patents The layer edge heat insulation should be added on the adjacent phase of the shape, the layer hole thermal spray should be added on the formation and shape of the electrical board, the heat of the base should be higher than that of the product. 6 Production > / (V x (v layer and plate X) / f and ink and a hole for spraying a hole into the cover culvert to spray the space between the opposite edges of the layer and the layer and the The edge plate is provided with ink in the supply room, and the ink cartridge stores water. The ink is available in the same way as the connected plate, and the structure is formed. The storage should be stored in the infiltration of the material holes and more should be made by the water ^ g of the inner box. The water chamber ink and ink fan Fan Li specially invited Zhongrujia 1 Central and its first bottom ring, Faban Lifang Fangmo specializes in making and applying for the application of the spray-type perforation multi-back printing inks for printed materials, such as printing and printing inks, which are provided by the Lisuo series of inks. 8 The chamber ink stores the outlets described above, and the department is 0- | The mold-printed chamber contains ink that should be formed and the quality of the body board. The 8th dimension of the hole is multi-functional. It is conducive to special stickers. Please apply-layers as described in the mold-printed inkjet-type back hole. The layer in step C. The separator is heated in the resistive base, and the heat transfer plate can be formed by transferring the heat to the base layer. The heat is added before the inclusion and the barrier is used. The printing process is printed by ΤΝΊ tuj · 歹 HAI ink money spray and yellow light on the back with holes more d / (\ I β step h 8 in the step, Fan Fa Li specially made the application, such as Out of the group, the inkjet-type ejection back hole is described in more detail. The special feature is 8 ^. 1^—1 ^ — 第18頁 200407227 六、申請專利範圍 組之製造方法,其中於該步驟(e)之前,更包含形 成一與該導電層相連接之電極層,可藉由該電極層接 收外界之該脈衝訊號並傳遞至該導電層。 1 4.如申請專利範圍第8項所述之多孔背射式喷墨列印模 組之製造方法,其中該喷孔的製作方式係選自由喷 砂、雷射、乾蝕刻以及濕式化學蝕刻所構成之組合的 其中之一。 1 5 .如申請專利範圍第8項所述之多孔背射式喷墨列印模 組之製造方法,其中該基板係選自由矽晶片、玻璃、 金屬、陶瓷以及高分子聚合物所構成之組合的其中之Page 18, 200407227 6. The manufacturing method of the patent application group, which before step (e), further comprises forming an electrode layer connected to the conductive layer, and the electrode layer can receive the pulse signal from the outside and To the conductive layer. 1 4. The method for manufacturing a porous back-fired inkjet printing module as described in item 8 of the scope of patent application, wherein the manufacturing method of the nozzle hole is selected from the group consisting of sandblasting, laser, dry etching and wet chemical etching. One of the combinations made up. 15. The method for manufacturing a porous back-fired inkjet printing module according to item 8 of the scope of the patent application, wherein the substrate is selected from the group consisting of a silicon wafer, glass, metal, ceramic, and a polymer One of
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